JPH0539557Y2 - - Google Patents

Description

[Detailed explanation of the invention] (a) Industrial application field The present invention is a sample stand that supports a sample in a desired posture in an analysis device for X-ray photoelectron spectroscopy (ESCA) or Auger electron spectroscopy (AES). Regarding equipment.

(b) Prior art and its problems In an analysis apparatus such as an ESCA, a sample is supported at a desired tilted position around a turntable in a vacuum chamber via a sample stage device.

As shown in FIG. 3, a conventional sample stage device of this type includes a setting base ₁₀ that is fitted into a setting hole Ta on the periphery of the turntable T, and a set unit erected integrally on this base ₁₀ . It consisted of a supporting column ₂₀ , which had been erected, and a stand main body ₃₀ for fixing the sample provided on the supporting column ₂₀ , and the stand main body ₃₀ was fixed to the supporting column ₂₀ at a constant inclination.

Therefore, when performing measurements using this sample stage device ₄₀ while changing the tilted posture of the sample S with respect to the excitation source such as X-rays, the sample stage device ₄₀ is removed from the vacuum chamber each time the measurement is performed. Therefore, it was necessary to replace the sample stage device 40 with another sample stage device ₄₀ whose inclination angle of the stage body ₃₀ was different, which was troublesome.

For this purpose, there is a sample stage device ₅₀ with a manipulator as schematically shown in FIG. In this sample stage device ₅₀ , the stage main body ₆₀ is approximately hemispherical,
By rotating the gears 9 ₀ , 10 ₀ that mesh with the gears 7 ₀ , 8 ₀ formed around the base body 5
₀ can be tilted in either direction and can be operated from outside the vacuum chamber.

However, in this sample stage device ₅₀ , the structure of the stage body ₆₀ is complicated and large, so the stage body 60 has a complicated and large structure.
Other devices such as an excitation source cannot be placed near _zero . For example, in a conical X-ray gun as an excitation source, the sample S
An annular magnesium block B is placed near the periphery of
It is necessary to arrange a filament F that emits thermoelectrons with respect to this magnesium block B, but if the main body of the stand is large, this main body of the stand will get in the way, and the magnesium block will not be placed near the periphery of the sample S. B cannot be placed, making it impossible to use a conical X-ray gun.

The present invention was developed in view of these circumstances, and it is possible to change the tilted posture of the sample by operating from outside the vacuum chamber, and also has other equipment such as an excitation source near the sample. The purpose of the present invention is to provide a sample stage device on which a sample table can be placed.

(c) Means for solving the problem In order to achieve the above object, the present invention provides a sample stage device in which a stage main body is provided at the upper end of a support that has a setting base at the lower end. The main body is pivotably mounted so that it can be tilted freely, and a rotating body is provided inside the support column so as to be rotatable about the vertical axis.A rotation passive part exposed on the lower surface side of the base is provided at the lower part of this rotating body, and A threaded portion was formed in the upper part, and an elevating member was screwed into the threaded portion so as to be movable up and down, and the elevating member was connected to the inclined free end portion of the base body.

(D) Effect In the above configuration, when the rotating body is rotated by a rotating operation tool similar to the sample stage rotation rod conventionally provided in the vacuum chamber, the lifting member that is threaded thereon moves up and down within the column. As the lifting member moves up and down,
The tilted free end of the stand body is pulled down or pushed up, and the tilted posture of the stand body and the sample on it changes.

(E) Embodiments The present invention will be described in detail below based on embodiments shown in the drawings.

FIG. 1 is a longitudinal sectional side view of a sample stage device according to an embodiment of the present invention, and FIG. 2 is a front view thereof.

The sample stage device of this example is a turntable T.
It comprises a base 1 for setting which is fitted and set into a set hole Ta on the periphery, a support 2 erected integrally on this base 1, and a stand main body 3 provided at the upper end of this support 2. .

The setting base 1 has an inverted truncated cone shape, and its lower surface is exposed to the lower surface of the turntable T through the setting hole Ta. This base 1
A hole 1a into which a pin P for fixing the base 1 is inserted from the turntable T side is formed in the inverted conical circumferential surface of the turntable T.

The support column 2 is made of a cylindrical body, and its hollow part penetrates vertically and expands to a large diameter on the lower surface side of the base 1.
At the top of this support 2, a pair of left and right side walls 2a, 2
a are integrally connected, and the table main body 3 is pivotally mounted between the left and right side walls 2a, 2a by a horizontal support shaft 4 so as to be freely tiltable.

Further, a rotating body 5 is fitted into the hollow interior of the support column 2 in a state where it is immobile in the vertical axis direction and can only rotate around the vertical axis. A downwardly open recess 5a is formed in this rotating body 5, and the opening edge of this recess 5a is as follows.
It is exposed on the bottom side of the base 1. An engagement recess 5b with which the pin Da of the rotary operating tool D engages is formed as a rotation passive part on the exposed lower surface of the rotating body.

On the other hand, a female threaded portion 5c is formed in the upper part of the rotating body 5. A threaded rod-shaped elevating member 6 is screwed into this female threaded portion 5c so as to be able to be threaded up and down. 6a is a male threaded portion of the elevating member 6. The upper end of the elevating member 6 and the inclined free end of the platform body 3 are connected by a link 7, and the link 7 prevents the elevating member 6 from rotating. 8
9 is a pivot pin of the link 7 on the elevating member 6 side, and 9 is a pivot pin of the link 7 on the stand main body 3 side. A wire spring 10 is connected between the inclined free end of the stand main body 3 and the inner surface of the column 2.
is interposed, and the wire spring 10 applies upward elastic force to the inclined free end portion of the table main body 3.

Next, the operation of this embodiment will be explained.

First, insert the base 1 into the turntable T set hole.
The entire sample stage device is set at a predetermined location on the turntable T by fitting it into the turntable T.
Further, a sample is pasted on the upper surface of the stand main body 3.
When the entire sample stage device is set, the lower surface of the rotating body 5 is exposed to the lower surface of the turntable T.

Here, when changing the tilted posture of the table main body 3 and the sample, the rotation operating tool D is applied to the lower surface of the rotating body 5 from the lower surface side of the turntable T. This rotation operating tool D is of the same type as the one conventionally prepared in a vacuum chamber for rotating this type of sample stage device, and has a central protrusion Db that can fit into the recess 5a of the rotating body 5 at the tip, A pin Da that engages with the engagement recess 5b of the rotating body 5 is provided.

The center protrusion Db of the rotary operating tool D is placed in the recess 5a of the rotating body 5, and the pin Da of the rotating operating tool D is inserted into the rotating body 5.
When the rotary operation tool D is rotated while being fitted into the engagement recess 5b, the rotating body 5 rotates integrally in the same direction. An elevating member 6 is screwed into the upper end of the rotary body 5. Since the elevating member 6 is prevented from rotating by a link 7, the rotation of the elevating member 6 is caused by the action of the screw as the rotary body 5 rotates. move upward or downward. When the elevating member 6 moves upward,
One end of the stand main body 3 is pushed up via the link 7, so that the stand main body 3 assumes an inclined position downward to the right in FIG. When the elevating member 6 moves downward, one end of the stand main body 3 is pulled down via the link 7, and the stand main body 3 assumes an inclined position downward to the left in FIG.

In this manner, by rotating the rotating body 5 using the rotating operating tool D, the tilted postures of the table main body 3 and the sample are changed.

In the illustrated embodiment, the rotating body 5 is formed with a female threaded portion 5c, and the lifting member 6 is formed with a male threaded portion 6a. A female thread may be formed on the
It is sufficient that they are screwed together so that the elevating member 6 moves up and down as the rotating body 5 rotates.

(f) Effects As described above, according to the present invention, the tilted posture of the table main body can be changed by operation using the same type of rotary operation tool that has conventionally been installed inside the vacuum chamber, and operation from outside the vacuum chamber is possible. The tilt angle of the sample can be adjusted with .

Furthermore, the mechanism for tilting the table body is housed inside the support and setting base, making the entire device about the same size as a conventional fixed sample table device, so it can be used in locations with limited space. Other equipment, such as a conical X-ray gun, can be placed near the periphery of the sample.

[Brief explanation of the drawing]

1 and 2 relate to an embodiment of the present invention, with FIG. 1 being a longitudinal sectional side view and FIG. 2 being a front view. 3 and 4 are side views of the conventional example. DESCRIPTION OF SYMBOLS 1... Base for setting, 2... Support, 3... Stand main body, 5... Rotating body, 5b... Engagement recessed part (rotation passive part), 5c... Female threaded part, 6... Lifting member, 6
a...Male thread part, 7...Link.

Claims (1)

[Claims for Utility Model Registration] A sample stage device having a stand main body at the upper end of a support having a setting base at the lower end, wherein the stand main body is pivotally attached to the support so as to be tiltable, and a rotating body is installed inside the support. The rotating body is provided with a rotary passive part exposed on the lower surface of the base at the bottom of the rotating body, and a threaded part is formed at the top of the rotating body, and the elevating member is attached to this threaded part so that it can be moved up and down. A sample stage device characterized in that the lifting member is movably screwed together and connected to the inclined free end of the stage main body.