JPH0536662Y2 - - Google Patents

Info

Publication number
JPH0536662Y2
JPH0536662Y2 JP1805987U JP1805987U JPH0536662Y2 JP H0536662 Y2 JPH0536662 Y2 JP H0536662Y2 JP 1805987 U JP1805987 U JP 1805987U JP 1805987 U JP1805987 U JP 1805987U JP H0536662 Y2 JPH0536662 Y2 JP H0536662Y2
Authority
JP
Japan
Prior art keywords
heater
heat transfer
cooling pipe
cooling
groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1805987U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63125524U (US20080094685A1-20080424-C00004.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1805987U priority Critical patent/JPH0536662Y2/ja
Publication of JPS63125524U publication Critical patent/JPS63125524U/ja
Application granted granted Critical
Publication of JPH0536662Y2 publication Critical patent/JPH0536662Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Extrusion Moulding Of Plastics Or The Like (AREA)
JP1805987U 1987-02-10 1987-02-10 Expired - Lifetime JPH0536662Y2 (US20080094685A1-20080424-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1805987U JPH0536662Y2 (US20080094685A1-20080424-C00004.png) 1987-02-10 1987-02-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1805987U JPH0536662Y2 (US20080094685A1-20080424-C00004.png) 1987-02-10 1987-02-10

Publications (2)

Publication Number Publication Date
JPS63125524U JPS63125524U (US20080094685A1-20080424-C00004.png) 1988-08-16
JPH0536662Y2 true JPH0536662Y2 (US20080094685A1-20080424-C00004.png) 1993-09-16

Family

ID=30811391

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1805987U Expired - Lifetime JPH0536662Y2 (US20080094685A1-20080424-C00004.png) 1987-02-10 1987-02-10

Country Status (1)

Country Link
JP (1) JPH0536662Y2 (US20080094685A1-20080424-C00004.png)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4021140B2 (ja) * 1999-09-30 2007-12-12 東京エレクトロン株式会社 加熱処理装置

Also Published As

Publication number Publication date
JPS63125524U (US20080094685A1-20080424-C00004.png) 1988-08-16

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