JPH0536469A - Infrared heater - Google Patents
Infrared heaterInfo
- Publication number
- JPH0536469A JPH0536469A JP19146791A JP19146791A JPH0536469A JP H0536469 A JPH0536469 A JP H0536469A JP 19146791 A JP19146791 A JP 19146791A JP 19146791 A JP19146791 A JP 19146791A JP H0536469 A JPH0536469 A JP H0536469A
- Authority
- JP
- Japan
- Prior art keywords
- outer cylinder
- heating element
- heat
- infrared heater
- airtight container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、電熱発熱体を耐熱性の
気密容器で覆って構成した赤外線ヒ−タに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an infrared heater having an electric heating element covered with a heat-resistant airtight container.
【０００２】[0002]
【従来の技術】例えば、食品の乾燥や工業用各種部品の
乾燥に赤外線ヒ−タが使用されている。このような分野
で使用される赤外線ヒ−タとして、電熱発熱体を耐熱性
の気密容器で覆ったヒ−タが用いられている。2. Description of the Related Art For example, infrared heaters are used for drying food and various industrial parts. As an infrared heater used in such a field, a heater in which an electric heating element is covered with a heat-resistant airtight container is used.
【０００３】上記気密容器は、赤外線透過性アルミナセ
ラミックスなどよりなる円筒形外筒の両端開口部を、こ
の外筒と同材質または熱膨張率が近似する材料からなる
閉塞体、例えばアルミナまたはニオビウムやタンタルの
閉塞デイスクで気密に閉塞してある。これら閉塞デイス
クを上記アルミナセラミックスよりなる円筒形外筒の両
端に気密に接合する場合、例えばＡｌ2 Ｏ3 、ＣａＯ、
ＭｇＯを主成分とする接着剤、つまり半田ガラスにより
接合してある。The airtight container has a cylindrical outer cylinder made of infrared ray transmissive alumina ceramics and the like having both end openings formed of the same material as the outer cylinder or a material having a thermal expansion coefficient similar to that of the outer cylinder, such as alumina or niobium. Tantalum obstruction It is airtightly obstructed with a disk. When these closed disks are hermetically bonded to both ends of the cylindrical outer cylinder made of alumina ceramics, for example, Al 2 O 3 , CaO,
It is bonded by an adhesive containing MgO as a main component, that is, solder glass.
【０００４】そして、これら閉塞体の中央部には導電性
材料、例えばニオビウムやタンタルチューブからなる排
気管兼用の給電端子が貫通され気密に接合されている。
この場合も、閉塞デイスクとニオビウムやタンタルチュ
ーブからなる給電端子とは、上記と同様の半田ガラスに
より接合してある。A power supply terminal made of a conductive material such as niobium or a tantalum tube also serving as an exhaust pipe is penetrated and airtightly joined to the central portion of these block members.
Also in this case, the closed disk and the power supply terminal made of niobium or tantalum tube are joined by the same solder glass as described above.
【０００５】このような気密容器内に収容される発熱体
は、ボロンナイトライドなどのような絶縁性セラミック
スからなる円筒形の基体表面に、例えばグラファイトな
どのようなカ−ボン系の導電性被膜を帯形にして所定パ
ターンで形成して構成されており、この導電発熱膜の端
部はリード線を通じて上記給電端子に電気的に接続され
ている。なお、気密容器内は、真空または不活性ガス雰
囲気とされている。The heating element housed in such an airtight container is a carbon-based conductive coating such as graphite on the surface of a cylindrical substrate made of insulating ceramics such as boron nitride. Is formed in a predetermined pattern in the shape of a strip, and the end portion of this conductive heating film is electrically connected to the power supply terminal through a lead wire. The airtight container is in a vacuum or an inert gas atmosphere.
【０００６】このような構成の赤外線ヒ−タは、気密容
器の両端から突出している給電端子に通電すると、リー
ド線を介して内部の発熱体、すなわち絶縁性円筒基体の
表面に形成された導電発熱膜に電流が流れ、この導電発
熱膜が発熱する。この導電発熱膜から放射された赤外線
は気密容器を透過して外部に放出される。When the infrared heater having such a structure is energized to the power supply terminals projecting from both ends of the airtight container, the conductive material formed on the surface of the internal heating element, that is, the insulating cylindrical substrate through the lead wire. An electric current flows through the heat generating film, and the conductive heat generating film generates heat. The infrared rays radiated from the conductive heating film pass through the airtight container and are emitted to the outside.
【０００７】[0007]
【発明が解決しようとする課題】しかしながら、上記の
構造の場合、円筒形外筒の両端部は、内部に収容した発
熱体から多量の熱が到達する領域となっており、高温に
晒される場所となっている。このため、上記閉塞デイス
クがアルミナなどのセラミックスにより形成されたディ
スクの場合は熱歪を生じて破損する場合があり、ニオビ
ウムやタンタルなどの金属で形成されている場合は外気
の酸素と反応して腐蝕を生じる場合がある。また、同様
にニオビウムやタンタルのチューブからなる給電端子も
加熱されて、外気の酸素と反応して腐蝕を生じる場合が
ある。However, in the case of the above-mentioned structure, both ends of the cylindrical outer cylinder are areas where a large amount of heat reaches from the heating element housed inside, and are exposed to a high temperature. Has become. Therefore, when the closed disk is a disk formed of ceramics such as alumina, it may be damaged due to thermal strain, and when it is formed of metal such as niobium or tantalum, it may react with oxygen in the outside air. May cause corrosion. Similarly, the power supply terminal made of a tube of niobium or tantalum may be heated and react with oxygen in the outside air to cause corrosion.
【０００８】さらには、この給電端子と、導電発熱膜に
接続されたリード線との接合部も高温に加熱され、かし
め接合されている場合はかしめが緩んで通電不良を招く
ことがある。さらには、閉塞デイスクや給電端子を気密
に接合するための半田ガラスが熱劣化し、接合部の気密
性が損なわれ場合もある。このような破損や腐蝕または
気密漏れは、早期に寿命を喪失する不具合がある。Further, the joint between the power supply terminal and the lead wire connected to the conductive heating film is also heated to a high temperature, and if caulking is performed, the caulking may be loosened, leading to poor conduction. Furthermore, the solder glass for airtightly bonding the closed disk and the power supply terminal may be thermally deteriorated, and the airtightness of the bonding portion may be impaired. Such damage, corrosion, or airtight leak has a drawback that the life is prematurely lost.
【０００９】本発明はこのような事情にもとづきなされ
たもので、その目的とするところは、気密容器に収容さ
れた発熱体から外筒端部に向かう熱を遮断し、外筒端部
の各種部材が加熱により劣化するのを防止して、長寿命
となる赤外線ヒ−タを提供しようとするものである。The present invention has been made in view of the above circumstances. An object of the present invention is to cut off heat directed from a heating element housed in an airtight container to an end of an outer cylinder so that various kinds of ends of the outer cylinder are blocked. It is intended to provide an infrared heater having a long life by preventing the members from being deteriorated by heating.
【００１０】[0010]
【課題を解決するための手段】本発明は上記目的を達成
するため、赤外線透過性のセラミックスからなる外筒の
端部を接着剤を介して閉塞体により気密に閉塞してなる
気密容器内に電熱発熱体を収容した赤外線ヒ−タにおい
て、上記電熱発熱体と閉塞体との間に熱遮蔽体を設けた
ことを特徴とする。In order to achieve the above-mentioned object, the present invention provides an airtight container in which an end of an outer cylinder made of infrared permeable ceramics is airtightly closed by a closing member via an adhesive. An infrared heater containing an electric heating element is characterized in that a heat shield is provided between the electric heating element and the closing member.
【００１１】[0011]
【作用】本発明によれば、熱遮蔽体が発熱体から外筒端
部に向かう熱を遮断し、外筒端部の閉塞体や給電端子お
よび接着剤などが加熱により劣化するのを防止する。According to the present invention, the heat shield blocks the heat directed from the heating element to the end of the outer cylinder, and prevents the closing body of the outer cylinder end, the power supply terminal and the adhesive from being deteriorated by heating. .
【００１２】[0012]
【実施例】以下本発明について、図面に示す一実施例に
もとづき説明する。図において１は気密容器、１０はこ
れに収容された電熱発熱体である。DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below based on an embodiment shown in the drawings. In the figure, 1 is an airtight container, and 10 is an electrothermal heating element housed therein.
【００１３】密封容器１は、円筒形外筒２と、この外筒
２の両端を閉塞する閉塞体３、３とで気密空間をつくる
ように構成されており、円筒形外筒２は、例えば外径２
８mm、内径２６mm、管長３００mmの赤外線透過性アルミ
ナセラミックスチュ−ブで形成されており、上記発熱体
１０から放射された赤外線を透過する。The hermetically sealed container 1 is constructed so that an airtight space is formed by a cylindrical outer cylinder 2 and closing bodies 3 for closing both ends of the outer cylinder 2, and the cylindrical outer cylinder 2 is, for example, Outer diameter 2
It is made of an infrared ray transmissive alumina ceramic tube having a diameter of 8 mm, an inner diameter of 26 mm, and a tube length of 300 mm, and transmits infrared rays emitted from the heating element 10.
【００１４】閉塞体３は、上記外筒２と同材質のアルミ
ナセラミックス、または外筒２と熱膨張率が近似する材
料、例えばニオビウムやタンタルなどの金属からなるデ
ィスクにより形成されており、本実施例ではアルミナ製
の閉塞ディスクが用いられている。これら閉塞ディスク
３、３は外筒２の両端開口部に対して、例えばＡｌ2Ｏ
3 、ＣａＯ、ＭｇＯを主成分とする接着剤、つまり半田
ガラス４により気密に接合されている。なお、半田ガラ
ス４は、予めリング形に形成され、外筒２の両端開口部
と閉塞ディスク３、３との間で挟んでおいて、真空中１
５３０℃で約１０分間加熱して溶融させ、これにより外
筒２の両端開口部に閉塞ディスク３、３を接合する。The closing body 3 is formed of an alumina ceramic of the same material as the outer cylinder 2 or a disk made of a material having a coefficient of thermal expansion similar to that of the outer cylinder 2, for example, a metal such as niobium or tantalum. Alumina closure discs are used in the examples. These closing discs 3 and 3 are attached to the opening portions at both ends of the outer cylinder 2 by, for example, Al 2 O.
3 , which is airtightly bonded by an adhesive containing CaO, MgO as a main component, that is, the solder glass 4. The solder glass 4 is formed in a ring shape in advance, and is sandwiched between the opening portions at both ends of the outer tube 2 and the closing disks 3 and 3, and the solder glass 4 is placed in vacuum 1
It is heated at 530 ° C. for about 10 minutes to be melted, and thereby the closing disks 3 and 3 are bonded to the openings at both ends of the outer cylinder 2.
【００１５】上記閉塞ディスク３、３の中央部には貫通
孔が形成されており、これら貫通孔には排気管兼用の給
電端子５、５が挿通されている。この給電端子５は耐熱
性導電金属、例えばニオビウムやタンタルのチューブか
らなり、閉塞ディスク３に対して上記と同様の半田ガラ
ス６により気密に接合されている。Through holes are formed in the central portions of the closing disks 3 and 3, and power supply terminals 5 and 5 also serving as exhaust pipes are inserted through these through holes. The power supply terminal 5 is made of a tube made of a heat-resistant conductive metal such as niobium or tantalum, and is airtightly joined to the closing disk 3 by the same solder glass 6 as described above.
【００１６】なお、上記排気管兼用の給電端子５、５は
気密容器１内を排気し、所定の真空度または不活性ガス
雰囲気にした後、油圧式カッターにより切断され、封止
されている。本実施例では、密封容器１４内部が、例え
ば１０-5Torr程度の高真空に保たれている。このような
気密容器１に収容された電熱発熱体１０は以下のように
構成されている。The power supply terminals 5 and 5, which also serve as the exhaust pipes, are evacuated from the airtight container 1 to a predetermined degree of vacuum or an inert gas atmosphere, and then cut and sealed by a hydraulic cutter. In the present embodiment, the inside of the hermetically sealed container 14 is kept in a high vacuum of, for example, about 10 −5 Torr. The electrothermal heating element 10 housed in such an airtight container 1 is configured as follows.
【００１７】１１は円筒形に形成された絶縁性の基体で
あり、たとえばボロンナイトライドなどのような絶縁性
セラミックスにより形成されており、この円筒形基体１
１は気相成長法により製造されている。この基体１１
は、例えば内径１１mm、外径１２mm、長さ２００mmの円
筒形になっている。Reference numeral 11 denotes an insulating substrate formed in a cylindrical shape, which is made of insulating ceramics such as boron nitride.
1 is manufactured by the vapor phase growth method. This base 11
Has a cylindrical shape with an inner diameter of 11 mm, an outer diameter of 12 mm and a length of 200 mm, for example.
【００１８】この円筒形基体１１の表面には、グラファ
イトなどのようなカ−ボン系材料からなる帯形の導電発
熱膜１２が設けられている。本実施例の場合、円筒形基
体１１の表面に所定のピッチで導電発熱膜１２を螺旋形
に巻装してあり、この導電発熱膜１２は気相成長法によ
り、幅６mm、ピッチ１mm、厚さ８０ミクロン、常温での
抵抗値が約１０オームの導電発熱膜１２とされている。On the surface of the cylindrical substrate 11, a belt-shaped conductive heating film 12 made of a carbon material such as graphite is provided. In the case of the present embodiment, the conductive heating film 12 is spirally wound around the surface of the cylindrical substrate 11 at a predetermined pitch, and the conductive heating film 12 is formed by the vapor phase growth method to have a width of 6 mm, a pitch of 1 mm and a thickness. The conductive heating film 12 has a thickness of 80 microns and a resistance value at room temperature of about 10 ohms.
【００１９】上記円筒形基体１１の両端には、幅７mm、
厚さ０、３mm程度のタンタルからなる接続バンド１３、
１３がビス止めにより固定されており、これら接続バン
ド１３、１３は上記導電発熱膜１２の両端に電気的に接
続されている。At both ends of the cylindrical substrate 11, a width of 7 mm,
Connection band 13 made of tantalum with a thickness of 0, 3 mm,
13 is fixed by screws, and the connection bands 13 and 13 are electrically connected to both ends of the conductive heating film 12.
【００２０】そして、円筒形基体１１の両端には、この
円筒形基体１１の外径よりも大きな外径を有し、しかし
前記気密容器１の外筒２の内径よりも若干小さな径を有
する円板形の熱遮蔽体１４、１４が取着されており、こ
れら熱遮蔽体１４、１４により気密容器１を軸方向に区
画している。これら熱遮蔽円板１４、１４は、耐熱性金
属、例えばタンタルからなり、上記接続バンド１３、１
３にスポット溶接されており、円筒形基体１１の開口端
に当接されてこの開口部を閉塞している。At both ends of the cylindrical base 11, a circle having an outer diameter larger than the outer diameter of the cylindrical base 11, but a diameter slightly smaller than the inner diameter of the outer cylinder 2 of the airtight container 1. Plate-shaped heat shields 14, 14 are attached, and these heat shields 14, 14 partition the airtight container 1 in the axial direction. These heat shield disks 14 and 14 are made of a heat resistant metal such as tantalum, and are connected to the connection bands 13 and 1 described above.
3 is spot-welded, and is abutted against the open end of the cylindrical substrate 11 to close this open portion.
【００２１】なお、熱遮蔽円板１４の径ｄは、気密容器
１の外筒２の断面の５０％以上を遮蔽する径を有してお
り、本実施例では、外径２２mmのタンタル板を取着して
ある。The diameter d of the heat-shielding disc 14 is such that 50% or more of the cross section of the outer cylinder 2 of the airtight container 1 is shielded. In this embodiment, a tantalum plate having an outer diameter of 22 mm is used. It is attached.
【００２２】上記接続バンド１３、１３にはそれぞれタ
ンタルからなるリード線１５、１５が接続されており、
これらリード線１５、１５は前記給電端子５、５の内端
部に挿入され、この給電端子５、５の内端部をかしめる
ことにより給電端子５、５に接合されている。Lead wires 15, 15 made of tantalum are connected to the connection bands 13, 13, respectively.
These lead wires 15 and 15 are inserted into the inner ends of the power supply terminals 5 and 5, and are joined to the power supply terminals 5 and 5 by caulking the inner ends of the power supply terminals 5 and 5.
【００２３】本実施例の場合、少なくとも一方のリード
線１５は分断されており、これら分断したリード線間
に、スプリング１６を掛け渡してある。このスプリング
１６は、気密容器１と通電発熱体１０との間に発生する
熱膨張差を吸収するものである。In the case of this embodiment, at least one of the lead wires 15 is divided, and a spring 16 is bridged between the divided lead wires. The spring 16 absorbs a difference in thermal expansion generated between the airtight container 1 and the electric heating element 10.
【００２４】このような構成の赤外線ヒ−タにおいて
は、給電端子５、５を電源に接続すると、リード線１
５、１５および接続バンド１３、１３を介して発熱体１
０の導電発熱膜１２に電流が流れ、この導電発熱膜１２
が発熱する。この場合、導電発熱膜１２は円筒形基体１
１の外表面に螺旋状をなした帯状に形成され、軸方向に
所定ピッチを有して配置されているので、円筒形基体１
１の軸方向および周方向に均等に赤外線を放出すること
ができる。このようにした発熱体１０から放射された赤
外線は密封容器１を透過して外部に放出される。In the infrared heater having such a structure, when the power supply terminals 5 and 5 are connected to the power source, the lead wire 1
Heating element 1 via 5, 15 and connecting bands 13, 13
A current flows through the conductive heating film 12 of 0, and this conductive heating film 12
Heats up. In this case, the conductive heating film 12 is the cylindrical substrate 1
1 is formed in a spiral band shape on the outer surface of 1 and is arranged with a predetermined pitch in the axial direction.
Infrared rays can be evenly emitted in the axial direction and the circumferential direction of 1. Infrared rays emitted from the heating element 10 thus configured pass through the sealed container 1 and are emitted to the outside.
【００２５】このような実施例においては、発熱体１０
の端部、つまり円筒形基体１１の端部に熱遮蔽円板１
４、１４を取着したので、円筒形基体１１の表面に形成
された導電発熱膜１２から放射される熱がこれら熱遮蔽
円板１４、１４により遮断される。すなわち、発熱体１
０から放出される輻射熱が熱遮蔽円板１４、１４により
遮られて気密容器１の端部に達するのが大幅に低減され
る。In such an embodiment, the heating element 10
Of the heat-shielding disc 1 at the end of the cylindrical substrate 11, that is, the end of the cylindrical substrate 11.
Since the Nos. 4 and 14 are attached, the heat radiating disks 14 and 14 block the heat radiated from the conductive heating film 12 formed on the surface of the cylindrical substrate 11. That is, the heating element 1
The radiant heat emitted from 0 is greatly reduced by being shielded by the heat shield disks 14 and 14 and reaching the end of the airtight container 1.
【００２６】このため、閉塞デイスク３がアルミナセラ
ミックスにより形成されたディスクの場合は熱歪を生じ
なくなり破損が防止される。また、閉塞デイスク３がニ
オビウムやタンタルなどの金属で形成されている場合は
外気の酸素と反応して腐蝕を生じることがなくなる。ま
た、同様にニオビウムやタンタルのチューブからなる給
電端子５、５も加熱されなるなり、外気の酸素と反応し
て腐蝕を生じるのが防止される。Therefore, when the closing disk 3 is a disk formed of alumina ceramics, thermal strain does not occur and damage is prevented. Further, when the closed disk 3 is made of a metal such as niobium or tantalum, it does not react with oxygen in the outside air to cause corrosion. Similarly, the power supply terminals 5 and 5 made of niobium or tantalum tubes are also not heated and are prevented from reacting with oxygen in the outside air to cause corrosion.
【００２７】さらには、この給電端子５、５と、リード
線１５、１５との接合部も高温に加熱されなくなるの
で、かしめ接合されている場合でかしめが緩むことがな
くなり、通電不良を招くことが防止される。さらには、
閉塞デイスク３や給電端子５を気密に接合するための半
田ガラス４、６が熱劣化するのも防止され、これら接着
部の気密性が保たれる。このようなことから、ヒータの
寿命が長くなる。Further, since the joints between the power supply terminals 5 and 5 and the lead wires 15 and 15 are also not heated to a high temperature, the caulking will not loosen when caulking, which may result in poor electrical conduction. Is prevented. Moreover,
The solder glasses 4 and 6 for airtightly joining the closed disk 3 and the power supply terminal 5 are also prevented from being thermally deteriorated, and the airtightness of these bonded portions is maintained. Because of this, the life of the heater is extended.
【００２８】なお、本実施例では、少なくとも一方のリ
ード線１５を分断してここにスプリング１６を掛け渡し
てあるから、このスプリング１６が、気密容器１と通電
発熱体１０との間に発生する熱膨張差を吸収し、よって
熱膨脹差による破損を防止することができる。In this embodiment, at least one of the lead wires 15 is divided and the spring 16 is stretched over the lead wire 15. Therefore, the spring 16 is generated between the airtight container 1 and the electric heating element 10. The difference in thermal expansion can be absorbed, and thus damage due to the difference in thermal expansion can be prevented.
【００２９】なお、熱遮蔽円板１４は外径ｄが気密容器
１の外筒２の内面に密着していると、気密容器１を軸方
向に区画して熱遮断効果は大きいが、密着していると熱
膨脹差により外筒２を破損するので、若干の隙間を設け
ておく必要がある。しかしこの場合は熱遮蔽円板１４の
外径ｄを気密容器１の内径Ｄに対し、気密容器１の閉塞
率が断面積比で５０％以上となるように設定しないと、
熱遮蔽円板１４を設ける効果がないことを確認してい
る。つまり、熱遮蔽円板１４は気密容器１の内部空間の
５０％以上の断面積を遮断する必要がある。図２は、熱
遮蔽円板１４により遮断される気密容器１の内部空間の
閉塞率と、遮蔽デイスク３および給電端子５の温度との
関係を測定した特性図である。If the outer diameter d of the heat shield disk 14 is in close contact with the inner surface of the outer cylinder 2 of the airtight container 1, the airtight container 1 is partitioned in the axial direction, and the heat shield effect is great, but the heat shield disk 14 is in close contact. If so, the outer cylinder 2 is damaged due to the difference in thermal expansion, so it is necessary to provide a slight gap. However, in this case, the outer diameter d of the heat shield disk 14 should be set so that the blockage rate of the airtight container 1 is 50% or more in terms of cross-sectional area ratio with respect to the inner diameter D of the airtight container 1.
It has been confirmed that the effect of providing the heat shield disk 14 is not effective. That is, the heat-shielding disk 14 needs to block 50% or more of the cross-sectional area of the internal space of the airtight container 1. FIG. 2 is a characteristic diagram in which the relationship between the blocking rate of the internal space of the airtight container 1 blocked by the heat shield disk 14 and the temperatures of the shield disk 3 and the power supply terminal 5 is measured.
【００３０】すなわち、熱遮蔽円板１４による気密容器
１の閉塞率が５０％未満の場合は、遮蔽デイスク３およ
び給電端子５ともに温度が２００℃以上に達し、連続使
用時間が長くなるに応じてこれらの温度が次第に上昇す
る。このため、連続使用時間１００時間で１０％のヒー
タに異常が発生した。That is, when the sealing rate of the airtight container 1 by the heat shield disk 14 is less than 50%, the temperature of both the shield disk 3 and the power supply terminal 5 reaches 200 ° C. or higher, and the continuous use time becomes longer. These temperatures gradually increase. For this reason, 10% of the heaters failed after 100 hours of continuous use.
【００３１】これに対し、閉塞率が５０％以上の場合
は、遮蔽デイスク３および給電端子５の温度がともに２
００℃以下に押さえられ、連続使用時間が１０００時間
経過しても不具合の発生が認められないことを確認して
いる。なお、本発明は上記実施例に制約されない。すな
わち、既に述べたが、閉塞デイスク３はアルミナセラミ
ックスにより形成されることに限らず、ニオビウムやタ
ンタルなどの金属で形成してもよい。また、給電端子５
は排気管を兼ねることには限らず、リード線１５を直接
外部に導出してもよい。On the other hand, when the blocking rate is 50% or more, the temperatures of the shielding disk 3 and the power supply terminal 5 are both 2.
It has been confirmed that the occurrence of defects is not recognized even if the temperature is kept below 00 ° C and the continuous use time is 1000 hours. The present invention is not limited to the above embodiment. That is, as described above, the closed disk 3 is not limited to being formed of alumina ceramics, but may be formed of a metal such as niobium or tantalum. In addition, the power supply terminal 5
Is not limited to double as the exhaust pipe, and the lead wire 15 may be directly led to the outside.
【００３２】そしてまた、通電発熱体１０は、円筒形基
体１１の表面に帯形の導電発熱膜１２を螺旋形に形成し
たものに限らず、例えば導電発熱膜１２を蛇行形に配線
してもよい。Further, the energization heating element 10 is not limited to the one in which the belt-shaped conductive heating film 12 is formed in a spiral shape on the surface of the cylindrical substrate 11, and the conductive heating film 12 may be wired in a meandering shape, for example. Good.
【００３３】そして、密封容器１の内部は真空雰囲気に
保つようにしたが、これに代わって、密封容器１の内部
をアルゴン、キセノン、クリプトン、ネオンおよび窒素
などの不活性ガスの雰囲気に保ってもよい。The inside of the sealed container 1 is kept in a vacuum atmosphere. Instead of this, the inside of the sealed container 1 is kept in an atmosphere of an inert gas such as argon, xenon, krypton, neon and nitrogen. Good.
【００３４】[0034]
【発明の効果】以上説明したように本発明によれば、電
熱発熱体と閉塞体との間に熱遮蔽体を設けたので、発熱
体から外筒端部に向かう熱が遮断され、外筒端部の閉塞
体や給電端子および接着剤などの加熱による劣化が防止
される。このためヒータの寿命が長くなる。As described above, according to the present invention, since the heat shield is provided between the electric heating element and the closing element, the heat from the heating element to the end of the outer tube is blocked, and the outer tube is closed. Deterioration due to heating of the closing body at the end, the power supply terminal, the adhesive, etc. is prevented. Therefore, the life of the heater is extended.
【図１】本発明の一実施例を示し、（Ａ）図はヒ−タの
側面図、（Ｂ）は（Ａ）図中ｂ−ｂ線の断面図。FIG. 1 shows an embodiment of the present invention, in which (A) is a side view of a heater and (B) is a sectional view taken along line bb in (A).
【図２】熱遮蔽円板により遮断される気密容器の閉塞率
と、遮蔽デイスクおよび給電端子の温度との関係を示す
特性図。FIG. 2 is a characteristic diagram showing the relationship between the blocking rate of an airtight container that is blocked by a heat-shielding disc and the temperatures of a shielding disk and a power supply terminal.
１…気密容器、２…円筒形外筒、３…閉塞ディスク、
４、６…半田ガラス、５…給電端子、１０…通電発熱
体、１１…円筒形基体、１２…導電発熱膜、１４…熱遮
蔽円板、１６…スプリング。1 ... Airtight container, 2 ... Cylindrical outer cylinder, 3 ... Closure disk,
4, 6 ... Solder glass, 5 ... Power supply terminal, 10 ... Electric heating element, 11 ... Cylindrical substrate, 12 ... Conductive heating film, 14 ... Heat shielding disk, 16 ... Spring.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 蛭田 寿男 東京都港区三田一丁目４番28号 東芝ライ テツク株式会社内 ─────────────────────────────────────────────────── ─── Continued front page (72) Inventor Toshio Hikita 1-chome Mita 4-28, Minato-ku, Tokyo Toshiba Rye Inside TEC Co., Ltd.
Claims (3)
筒の端部を接着剤を介して閉塞体により気密に閉塞して
なる気密容器内に、電熱発熱体を収容した赤外線ヒ−タ
において、 上記電熱発熱体と閉塞体との間に熱遮蔽体を設けたこと
を特徴とする赤外線ヒ−タ。1. An infrared heater in which an electric heating element is housed in an airtight container formed by hermetically closing an end of an outer cylinder made of infrared permeable ceramics with an adhesive through an adhesive. An infrared heater having a heat shield provided between an electric heating element and a closing body.
帯形の導電発熱膜を所定のパタ−ンをなして形成したこ
とを特徴とする請求項１に記載の赤外線ヒ−タ。2. The infrared heater according to claim 1, wherein the electrothermal heating element is formed by forming a belt-shaped conductive heating film on the surface of an insulating substrate in a predetermined pattern.
％以上を遮蔽することを特徴とする請求項１または２に
記載の赤外線ヒ−タ。3. The closing member has a cross-sectional area of 50 of the outer cylinder.
% Or more is shielded, The infrared heater of Claim 1 or 2 characterized by the above-mentioned.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19146791A JPH0536469A (en) | 1991-07-31 | 1991-07-31 | Infrared heater |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19146791A JPH0536469A (en) | 1991-07-31 | 1991-07-31 | Infrared heater |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0536469A true JPH0536469A (en) | 1993-02-12 |
Family
ID=16275142
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19146791A Pending JPH0536469A (en) | 1991-07-31 | 1991-07-31 | Infrared heater |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0536469A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002110326A (en) * | 2000-05-22 | 2002-04-12 | Heraeus Noblelight Gmbh | Radiation device, its using method and method of surface treatment |
| JP2011253691A (en) * | 2010-06-02 | 2011-12-15 | Sukegawa Electric Co Ltd | Lead wire connection terminal of sheath heater |
| CN102593421A (en) * | 2011-01-13 | 2012-07-18 | 东京毅力科创株式会社 | Electrode production apparatus and electrode production method |
| CN102592834A (en) * | 2011-01-13 | 2012-07-18 | 东京毅力科创株式会社 | Electrode manufacturing apparatus, electrode manufacturing method and computer storage medium |
-
1991
- 1991-07-31 JP JP19146791A patent/JPH0536469A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002110326A (en) * | 2000-05-22 | 2002-04-12 | Heraeus Noblelight Gmbh | Radiation device, its using method and method of surface treatment |
| JP2011253691A (en) * | 2010-06-02 | 2011-12-15 | Sukegawa Electric Co Ltd | Lead wire connection terminal of sheath heater |
| CN102593421A (en) * | 2011-01-13 | 2012-07-18 | 东京毅力科创株式会社 | Electrode production apparatus and electrode production method |
| CN102592834A (en) * | 2011-01-13 | 2012-07-18 | 东京毅力科创株式会社 | Electrode manufacturing apparatus, electrode manufacturing method and computer storage medium |
| JP2012146848A (en) * | 2011-01-13 | 2012-08-02 | Tokyo Electron Ltd | Electrode manufacturing device, electrode manufacturing method, program, and computer storage medium |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6868230B2 (en) | Vacuum insulated quartz tube heater assembly | |
| CA1225115A (en) | Quartz infra-red lamps | |
| US6654549B1 (en) | Infrared light bulb, heating device, production method for infrared light bulb | |
| US9536728B2 (en) | Lamp for rapid thermal processing chamber | |
| US5382805A (en) | Double wall infrared emitter | |
| JPH0982457A (en) | Electrode structure and current-carrying heating type heater | |
| JPH1092385A (en) | Bulb | |
| JPH0536469A (en) | Infrared heater | |
| US4080510A (en) | Silicon carbide heater | |
| US4758759A (en) | Lamp with light-source capsule support members having equal thermal conductivity | |
| JP2604944B2 (en) | Semiconductor wafer heating equipment | |
| JP2006294337A (en) | Far-infrared heater | |
| US5128106A (en) | Lamp with an oxygen detector | |
| EP0042151B1 (en) | High-pressure sodium lamp | |
| US4653060A (en) | Gas laser tube and method for manufacturing the same | |
| KR20030042615A (en) | Molding heater used for heating wafer and fabrication method thereof | |
| JPH03280382A (en) | Infrared heater | |
| EP0041408B1 (en) | A discharge lamp | |
| JPH0684586A (en) | Infrared heater | |
| US3249789A (en) | Electric incandescent projection lamp | |
| JPH07318435A (en) | Manufacture of glass sealing type thermistor element | |
| JPH05275774A (en) | Ion laser tube | |
| JP3075651B2 (en) | Ceramic glow plug | |
| JP3366542B2 (en) | Gate valve | |
| US2740370A (en) | Electrical device with temperature indicator |