JPH0536132Y2 - - Google Patents

Description

[Detailed description of the invention] [Field of industrial application] The present invention relates to a metal seal mechanism that seals a sealing surface with a metal sealing material. This invention relates to a suitable metal seal mechanism.

[Prior Art] O-rings made of materials such as synthetic resin and synthetic rubber are used as sealing materials under normal fluid pressure. However, it cannot meet the high sealing performance that cannot be detected even by a mass spectrometer (helium leak detector).

A flat metal gasket is sometimes used for the ultra-high vacuum seal, but since flat metal gaskets cannot be reused, a reusable metal sealing material is usually used.

Conventionally, a metal seal material called Helicoflex is known, and as shown in FIG. 2 and a jacket 3 made of a thin metal plate having a C-shaped cross section and covering the outer periphery of the jacket 2.

However, in the above-mentioned known C-shaped metal sealing material, since the rigidity of the elastic material 2 is small, when performing high-precision machining on the sealing surface on the outer periphery of the jacket,
It is difficult to grip with a chuck and difficult to process, and if gripped with too much force it will deform and become unusable.

Furthermore, the sealing surface is easily scratched even if it is simply placed, making handling extremely troublesome.

On the other hand, if the material is stainless steel, the sealing surface sealed by the above-mentioned metal sealing material requires high-precision polishing, and if aluminum is made of aluminum, ion plating etc. are applied after mirror polishing. Since it is necessary to perform hardening treatment, processing of these sealing surfaces is also troublesome, and there is a problem that the overall cost is high.

[Problem to be solved by the invention] The problem to be solved by the invention is to provide a metal seal mechanism that is easy to process and handle and is inexpensive.

[Means for Solving the Problems] In order to solve the above problems, the present invention provides a metal sealing material having a metallic elastic material and a metal plate jacket covering substantially the entire outer periphery of the metallic elastic material; In a metal seal mechanism comprising a seal member having a sealing surface sealed by a metal seal material, the metal seal material is airtightly fixed to the seal member by a mounting portion provided at one end of the jacket. It is characterized by

[Operation and Effect of the Invention] The metal seal material is airtightly fixed to one of the sealing members sealed by the metal seal material by the mounting portion provided at one end of the jacket, so that the jacket and the jacket are fixed. The machining accuracy of the sealing surface between the sealing member and the sealing member can be lowered.

Therefore, the area or place for high-precision machining required for ultra-high vacuum sealing can be significantly reduced, and the metal seal mechanism can be made inexpensive.

In addition, the sealing surface of the jacket can be precisely machined after the metal sealing material is fixed to one side of the sealing member, making gripping and processing easier, and since there is no need to place the metal sealing material directly on the jacket during storage, the seal after processing can be easily machined. It is easy to handle because it does not cause scratches on the surface.

Furthermore, it is possible to prevent the metal gasket from falling off during sealing.

[Embodiment] FIGS. 1 to 3 show a first embodiment of the present invention, and a metal sealing material 10 in this metal seal mechanism includes an elastic material 11 and an elastic material 11, as shown in FIG.
A jacket 12 made of a thin metal plate is provided to cover substantially the entire outer periphery of the elastic material, and is attached to one of the sealing surfaces to be described later.

Like known elastic materials, the elastic material 11 is made of a metal wire rod having a circular cross section, such as stainless steel, wound spirally to form an endless structure. has been granted.

On the other hand, the jacket 12 includes a covering portion 12a that covers substantially the entire outer periphery of the elastic material 11, and a mounting portion 1 in which one end of the covering portion extends in the tangential direction of the elastic material 11.
2b, the tip of the covering part 12a and the mounting part 12
A space is formed between the elastic members 11, and is made of a thin metal plate that is softer than the elastic material 11, such as aluminum or nickel.

FIG. 2 shows an example in which the metal sealing material 10 is used for sealing a valve.
has orthogonal openings 22 and 23, and a pipe 24 is airtightly attached to the opening 22 by an appropriate means such as welding, and a valve body 21 and a valve body 25 that opens and closes a valve seat 24a at the tip of the pipe. The gap between the two is airtightly sealed by a bellows 26 having both ends fixed thereto. The metal seal material 10 is
It is installed at the locations indicated by A and B in the same figure.

FIG. 3A shows the state in which the metal sealing material 10 is attached to the valve seat 24a in the above A, and the metal sealing material 10 is attached by welding the mounting portion 12b with an electron beam or laser in the direction of the arrow, or by brazing. The valve seat 24a is airtightly fixed to the valve seat 24a by a screw or the like.
Therefore, the mounting portion 12a and the valve seat surface can be processed by beam welding or brazing, etc., and the area or processing area required for high-precision processing for ultra-high vacuum sealing can be greatly reduced. Seal material 10
can be made inexpensive.

Furthermore, since the sealing surface of the covering portion 12a can be processed after the metal sealing material 10 is fixed to the valve seat 24a, the metal sealing material 10 can be firmly gripped by the pipe 24, making processing easier and improving productivity. Moreover, since there is no need to place the metal seal material directly on top of other objects, the sealing surface is not damaged and is easy to handle.

Furthermore, since the metal seal material 10 is fixed to the valve seat 24a, not only can the seal material be prevented from falling off during sealing, but there is no need to provide a removal groove for removing the seal material once installed.

FIG. 3B shows a modification in which a positioning step 27 is formed on the valve seat 24a, and the mounting portion 12b of the metal sealing material 10 is attached to the valve seat 24a by an electron beam or laser in the direction of the arrow. Welded.

FIG. 4A shows the opening 23 or 24 shown in B above.
b is closed with a blind flange 30, and the mounting portion 12b of the metal sealing material 10 is closed with a blind flange 30.
0 by welding with an electron beam or laser, or by brazing or the like.

FIG. 4B shows the case where another pipe 31 is attached to the opening 23 or 24b, and the metal sealing material 1
0 is welded to the sealing surface of the valve body 21 or the pipe 24 by the attachment portion 12b. Although not shown in the drawings, it goes without saying that these flanges 30 and pipes 31 are attached to the valve body 21 and the like by appropriate means.

FIG. 5 shows a second embodiment of the present invention, in which a jacket 15 of the metal sealing material 14 is made of an elastic material 11.
A covering portion 15a covering substantially the entire outer periphery and an elastic material 11
A mounting portion 15b is formed by further bending one end of the covering portion 15a extending in the tangential direction of the pipe valve seat 24, and is welded to the pipe valve seat 24 by an electron beam or laser in the direction of the arrow, or by brazing or the like. It is fixed airtight. .

FIG. 6 shows a third embodiment of the present invention, in which a jacket 18 of the metal sealing material 17 is made of an elastic material 11.
A covering portion 18a that covers substantially the entire outer periphery, and the covering portion 1
The mounting portion 18b has one end bent in a direction perpendicular to the tangential direction of the elastic material 11, and is airtightly fixed to the pipe 24 by an electron beam or laser in the direction of the arrow, or by brazing or the like. Ru.

The other configurations and operations of the second and third embodiments are the same as those of the first embodiment, so detailed explanations will be omitted.

[Brief description of the drawings]

FIG. 1 is a vertical sectional view showing the main parts of the first embodiment of the present invention, FIG. 2 is an explanatory diagram of the sealing location in the valve,
Figures 3A and B are enlarged cross-sectional views of the sealing part of the valve seat, Figures 4A and B are enlarged cross-sectional views of the sealing part of the flange,
Figures 5 and 6 show the second and third embodiments of the present invention.
FIG. 7 is an enlarged cross-sectional view of the main part of the embodiment, and FIG. 7 is a longitudinal cross-sectional view of the main part of a known metal sealing material. 10, 14, 17...metal sealing material, 11...
...Elastic material, 12, 15, 18... Jacket, 1
2b, 15b, 18b...Mounting part.

Claims (1)

[Scope of Claim for Utility Model Registration] A metal sealing material having a metal elastic material, a metal plate jacket covering substantially the entire outer periphery of the metal elastic material, and a sealing surface sealed by the metal sealing material. 1. A metal seal mechanism comprising a sealing member, wherein the metal sealing member is airtightly fixed to the sealing member by a mounting portion provided at one end of a jacket.