JPH05344767A - Magnetostrictive actuator mechanism - Google Patents

Abstract

PURPOSE:To provide various mechanisms in which service life and reliability can be enhanced through simple structure by employing a magnetostrictive actuator. CONSTITUTION:An air-core coil 6 is disposed, as a magnetic field applying means, in the vicinity of a columnar or square pillar section 2 formed in the center of a fixed yoke 1. Magnetostrictive rods 4, 5 are arranged in grooves 3 made at the opposite ends of the fixed yoke 1 while a movable yokes 7 is arranged oppositely to the fixed yoke 1 and inclinations of predetermined angle are formed at the opposite ends 12, 13 of the movable yoke contacting, respectively, with the magnetostrictive rods 4, 5 at the ends thereof.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetostrictive actuator mechanism provided with a magnetic material that causes magnetostriction when an external magnetic field is applied.

[0002]

2. Description of the Related Art For actuators for generating displacement, it has been desired to develop a compact and powerful actuator that can obtain high output. In order to meet such a demand, a piezoelectric actuator is conventionally known in which a piezoelectric material is used as a displacement generating element and a control voltage is applied to the piezoelectric material to drive it. Recently, however, a magnetic body having a magnetostriction having a rigidity higher than that of the piezoelectric material, That is, a magnetostrictive actuator using a magnetic material has been attracting attention.

As the magnetostrictive material used in the magnetostrictive actuator, Ni--Al alloys and ferrite alloys have been mainly used conventionally. Furthermore, recently, there is also a report on a rare earth metal-transition metal-based giant magnetostrictive alloy that can obtain a displacement larger than that of the magnetic material by one digit or more. Also,
Magnetostrictive actuators are generally configured to include means for applying a control magnetic field to a magnetic body. As the magnetic field applying means, a magnetic circuit such as an electromagnet that can easily control the magnetic field by supplying a control current is mainly used.

At present, a wide variety of mechanisms are used in the field of mechanical engineering and the like, and the application of the above-mentioned magnetostrictive actuator is being studied as an actuator for generating displacement that constitutes those mechanisms. The various conventional mechanisms have various drawbacks such as a complicated structure and a mechanical drive portion or frictional wear portion due to their structure, which causes problems in their life and reliability. Was there. First conventional example

In a parallel movement mechanism used in a table device or the like which requires a minute displacement such as a semiconductor manufacturing apparatus or a machine tool for fine processing, conventionally, a plurality of displacement attitulators and a plurality of control devices for controlling the same are used. The parallel movement is performed by detecting the displacement of each actuator and coordinating between the control devices. Therefore, in order to eliminate the variation in displacement due to the difference in the operation of each actuator, it is necessary to control a plurality of control devices at the same time, which has the disadvantage of complicating the control mechanism, which is efficient and controllable. It has been difficult to provide a good and low cost translation mechanism. Second conventional example

FIG. 20 shows a typical structure of a conventional brake mechanism. When the coil 201 is energized,
A magnetic flux flows between the field 202, the rotor 203 and the armature 204, and the armature 2 is caused by electromagnetic force.
When 04 is attracted to the rotor 203, the braking operation is performed by utilizing the frictional force between the two. When the excitation is turned off, the magnetic flux disappears, the armature 204 is restored to its original position by the force of the leaf spring 205, and the brake is released. The rotor 203 is provided with a through hole 206 for passing a shaft and a key groove 207 for transmitting torque by a key (not shown). Also, the rotor 203 and the armature 2
An appropriate gap 208 is provided between 04.

In the braking mechanism for braking the rotating shaft or the like as described above, there is a friction surface between the rotor 203 and the armature 204, and the friction surface is worn by long-term use, so that the entire mechanism is worn. There was a case where readjustment of was necessary or operation became impossible. Further, in the above-mentioned conventional example, the shaft and the rotor 20 not shown
Torque transmission with 3 must be done by key,
There is also a problem that play occurs in the rotational direction due to the gap between the key not shown and the key groove 207. Third conventional example

In a conventional bearing mechanism such as a static pressure type air bearing which utilizes air pressure from the outside, the radial clearance between the shaft and the bearing is generally set in accordance with the load capacity of the bearing and the difficulty of machining parts. It is controlled to about 20 to 40 microns. In order to obtain this radial clearance, highly precise processing control such as dimensional accuracy, shape intersection, and surface roughness of the finished surface at the stage of processing parts is required. For this reason, in order to realize an appropriate radial gap, it depends largely on the know-how of a skilled processing engineer, which has been an obstacle to improving the processing efficiency. Further, it is difficult to set the radial clearance according to the load capacity of the bearing due to the usage environment. Fourth conventional example

Conventionally, as a liquid feed pump mechanism for transferring a liquid, for example, a piston type liquid feed pump used for injecting a liquid medicine, a roller type liquid feed pump used for an artificial heart, etc. are known. Both of the liquid feed pump mechanisms have a structure for pushing and transferring the liquid.

In the piston type liquid feed pump shown in FIG. 21, the piston 212 arranged in the cylinder 211 is reciprocated by a power source (not shown) to inject and discharge the liquid, and the piston 21
By adjusting the stroke distance of 2, the injection amount and the discharge amount are adjusted. On the other hand, FIG.
In the roller type liquid feeding pump shown in FIG. 2, the flexible tube 213 made of a polymer material is crushed by the roller 214, and the roller 214 part is rotated and moved with the rotation of the rotor 215 to push out the liquid inside, and a fixed amount of It has a structure that allows the liquid to be discharged.

In the liquid feed pump mechanism as described above, a mechanical drive part such as a drive part of the piston 212 and a rotary drive part of the rotor 215, or between the piston 212 and the cylinder 211 and between the roller 214 and the tube 213. Since there is a frictional wear portion such as the above, and a seal or the like is required to prevent the fluid from leaking to the outside, there may be a problem in the life or reliability of these. Fifth conventional example As a mechanism for adjusting the flow rate of the fluid flowing in the pipe,
Conventionally, a butterfly valve as shown in FIG.
A flow control valve and the like as shown in are known.

In the butterfly valve, a flow control plate 222 is arranged in a pipe 221 through which the fluid passes so as to prevent the flow of the fluid, a drive shaft 223 is installed on the flow control plate 222, and the drive shaft 223 is connected to the drive shaft 223. The pipe 221 is penetrated and pulled out, and the drive shaft 223 is rotationally driven by a motor, an electromagnetic solenoid, or the like (not shown) to change the angle of the flow rate control plate 222 in the pipe 221 and pass through the pipe 221. Adjust the flow rate of the fluid.

On the other hand, in the flow control valve, the stem 23
1 is rotated manually by a motor or a pneumatic actuator, and the feed screw 232 moves the stem tip 233 up and down to open and close the hole opened in the valve body 234 to adjust the flow rate.

As described above, since the flow control plate 222 of the butterfly valve and the stem 231 of the flow control valve are mechanically connected to the external rotary drive source, the pipe 221 and the valve body 2 are connected.
34 must be penetrated, and it is indispensable to seal with packing 235 or the like so as to prevent fluid from leaking to the outside, and since a drive unit, a bearing, etc. are required, the structure becomes complicated and the service life of these There was a problem in reliability. There is also a problem that the temperature and pressure of the fluid that can be used are limited by the sealing material and the like. Sixth conventional example

As shown in FIG. 25, a conventional fluid nozzle used to eject a fluid to the outside is composed of a fluid passage pipe 241 and a nozzle 242, both of which are sealed by a packing 243, It has a detachable structure with a screw (not shown). Such a fluid nozzle reduces the pressure of the fluid at the nozzle,
It has a function of increasing the flow velocity v at the nozzle outlet. For this reason, in order to change the flow velocity v, it is necessary to prepare a plurality of nozzles 242 having a flow path diameter R according to the purpose and replace them appropriately, which is inconvenient to replace and install each time. there were.

[0016]

As described above,
Various conventional mechanisms used in fields such as mechanical engineering have various drawbacks such as a complicated structure and a problem in life and reliability due to having a mechanical portion and frictional wear portion. I had. Therefore, it is an object of the present invention to eliminate the above drawbacks and provide various mechanisms as described below.

First, there is provided a parallel displacement mechanism using a magnetostrictive actuator, which has a simple structure, can perform stable and excellent controllability for minute displacement drive, and can achieve cost reduction.

Secondly, there is provided a brake mechanism having a simple structure which does not require readjustment of the entire mechanism due to abrasion of a friction surface or the like and which does not disable the operation. ..

Thirdly, with a simple structure, it is possible to relatively relax the high-precision control of the dimensional accuracy, shape tolerance, surface roughness of the finished surface, etc. at the stage of machining parts, and the radius of the shaft and the bearing. A bearing mechanism using a magnetostrictive actuator capable of changing a gap.

Fourthly, a magnetostrictive actuator is used which has a simple structure and does not require a mechanical drive unit or a component such as a sealing material and can remarkably improve the life and reliability of the entire mechanism. The liquid feed pump mechanism is provided.

Fifth, since it has a simple structure and does not require a shaft drive portion, a bearing, etc. and a seal, there is no problem of life and reliability of these, and restrictions on the temperature and pressure of usable fluid are relaxed. A flow control mechanism using a magnetostrictive actuator is provided. Sixthly, the present invention provides a fluid nozzle mechanism using a magnetostrictive actuator, which has a simple structure and can easily change the flow path diameter of the fluid nozzle.

[0022]

In order to achieve the above object, the present invention provides the following means.

As a first means for achieving the above first object, a displacement generating means made of a magnetic substance having magnetostriction, and a magnetic field applying means for applying a magnetic field to the displacement generating means,
A movable member which is in contact with the displacement generating means and is movable in the displacement direction of the displacement generating means; and a magnetic circuit constituent member which fixes the displacement generating means and constitutes a closed magnetic circuit by the magnetic field applying means together with the movable member. Provided is a magnetostrictive actuator mechanism, wherein at least one contact surface of the mutual contact surfaces of the displacement generating means and the movable member is inclined.

As a second means for achieving the first object, a displacement generating means made of a magnetic material having magnetostriction, and a magnetic field applying means for applying a magnetic field to the displacement generating means,
A movable member which is in contact with the displacement generating means and is movable in the displacement direction of the displacement generating means; a magnetic circuit constituent member which fixes the displacement generating means and constitutes a closed magnetic circuit by the magnetic field applying means together with the movable member; A magnetostrictive actuator mechanism comprising: a magnetic field bypass unit that contacts a part of the displacement generating unit and bypasses a part of a magnetic field applied to the displacement generating unit.

Third to achieve the above second and third objects
As a means, there is a through hole for passing a shaft, and the displacement generating means is made of a magnetic material having magnetostriction and is displaceable so as to adjust the gap when the shaft is fitted into the through hole, There is provided a magnetostrictive actuator mechanism characterized by comprising magnetic field applying means for applying a magnetic field to the displacement generating means.

As a fourth means for achieving the above-mentioned fourth object, a displacement generating means having a hollow structure in which a fluid can flow and made of a magnetic substance having magnetostriction and displaceable so as to transfer the fluid. And a plurality of magnetic field applying means for applying a magnetic field to the displacement generating means, the magnetostrictive actuator mechanism being provided on the outer periphery of the displacement generating means.

As a fifth means for achieving the above fifth object, a hollow member in which a fluid can flow, and a magnetostrictive member which is disposed inside the hollow member and is displaceable so as to adjust the flow rate of the fluid. A displacement generating means made of a magnetic material having
There is provided a magnetostrictive actuator mechanism characterized by comprising magnetic field applying means for applying a magnetic field to the displacement generating means.

As a sixth means for achieving the above-mentioned sixth object, a hollow member capable of flowing a fluid therein and a through hole which is connected to the tip of the hollow member and through which a fluid can flow are provided. Magnetostrictive system characterized by having a displacement generating means made of a magnetic substance having magnetostriction, which is displaceable so that the cross-sectional shape of the through hole changes, and a magnetic field applying means for applying a magnetic field to the displacement generating means. An actuator mechanism is provided.

[0029]

In the present invention, the following actions can be obtained by the above means.

First, when the displacement amount of the displacement generating means varies due to the first means, the volume of the space formed between the mutual contact surfaces of the displacement generating means and the movable member is different. Since a difference occurs in magnetic resistance, the displacement amount of the displacement generating means is corrected and the movable member can be moved in parallel. Accordingly, it is possible to provide a parallel movement mechanism capable of performing a predetermined minute displacement drive only by controlling the magnetic field applying unit for applying a magnetic field to the displacement generating unit.

Secondly, when the displacement amount of the displacement generating means is varied by the second means, the magnetic field bypass means bypasses the magnetic field of the portion having a large displacement amount of the displacement generating means to weaken the magnetic field. By reducing the displacement amount of the displacement generating means, it becomes possible to move the movable member in parallel. Accordingly, it is possible to provide a parallel movement mechanism capable of performing a predetermined minute displacement drive only by controlling the magnetic field applying unit for applying a magnetic field to the displacement generating unit.

Thirdly, by the above-mentioned third means, the gap between the displacement generating means and the shaft fitted in the through hole is made zero, and the displacement generating means itself directly grips the shaft to perform the braking operation. As a result, it is possible to make the brake mechanism free of rattling and to control the amount of displacement of the displacement generating means, so even if the gap between the shaft and the displacement generating means changes due to wear due to friction, it is easy. Therefore, it is possible to provide a brake mechanism that does not require large-scale adjustment of the entire mechanism.

Fourthly, since the gap between the displacement generating means and the shaft fitted in the through hole can be adjusted by controlling the displacement amount of the displacement generating means by the third means, the value thereof can be adjusted. Can be always set to an appropriate value, and at the same time, it is not necessary to manage the displacement generating means with high precision at the stage of processing the parts, so that it is possible to provide a bearing mechanism capable of improving the processing efficiency. ..

Fifth, the fourth means allows the displacement generating means to be displaced by sequentially exciting and de-exciting the plurality of magnetic field applying means, thereby transferring the fluid inside the displacement generating means. Therefore, it is possible to provide a liquid feed pump mechanism having a relatively simple structure that does not require a mechanical drive unit, a sealing material, or the like.

Sixth, since the flow rate of the fluid flowing in the pipe can be changed by controlling the amount of deformation of the displacement generating means by the fifth means, a shaft drive section, a seal, etc. are required. It is possible to provide a flow rate adjusting mechanism that does not.

Seventhly, by controlling the displacement amount of the displacement generating means by the sixth means, it is possible to provide a fluid nozzle mechanism capable of changing the diameter of the flow passage according to the application.

[0037]

Embodiments of the present invention will be described in detail with reference to the drawings.

Prior to the description of the embodiments, the magnetostrictive material constituting the magnetostrictive actuator used in each embodiment will be briefly described. As the magnetic material, there are conventionally known Ni-based alloys, Fe-Al-based alloys, ferrite-based materials, and the like, but from the viewpoint of achieving miniaturization and high output of the displacement generating element, rare earth metal-transition metal It is desirable to use a giant magnetostrictive alloy composed of a Laves type intermetallic compound. Such super magnetostrictive alloy, in atomic _{ratio, R (Fe 1-xy Co} x M y) z ( provided that at least one element of R in the formula selected from rare earth elements including yttrium, M is Ni, Mn , S
n, Mo, Al, and at least one element selected from B, and x, y, and z are 0 ≦ x ≦ 0.95, 0 ≦ y
Alloys having a composition satisfying ≦ 0.6 and 1.5 ≦ z ≦ 4.0) are mentioned. Specifically, Tb-Dy
Examples include Fe-based alloys and Tb-Dy.Fe-Mn-based alloys. It is also possible to use a magnetostrictive alloy having a negative magnetostriction such as SmFe ₂ or ErFe ₂ system. On the other hand, the magnetic material is
It is possible to use rods having various shapes such as a cylindrical shape, a cylindrical shape, a prismatic shape, and a laminated shape. First embodiment

FIG. 1 is a diagram showing a translation table using a magnetostrictive actuator according to the first embodiment of the present invention. In the figure, a cylindrical or prismatic central portion 2 is formed at the center of a fixed yoke 1. A metal having a high magnetic permeability such as pure iron is used for the fixed yoke 1. Also,
Magnetostrictive rods 4 and 5 made of a magnetic material having magnetostriction are disposed in the grooves 3 provided at both ends of the fixed yoke 1. One end of the magnetostrictive rods 4 and 5 and the fixed yoke 1 are It is fixed with an adhesive. The magnetostrictive rod 4 and the magnetostrictive rod 5 are made of a giant magnetostrictive alloy such as Tb _0.28 Dy _0.72 Fe.
_It consists of _1.95 .

An air-core coil 6 is arranged around the central portion 2 of the fixed yoke 1 as a magnetic field applying means for displacing the magnetostrictive rod 4 and the magnetostrictive rod 5. This air core coil 6
Has a multilayer uniform winding structure in which a predetermined gap is provided from one end to the other end of the central portion 2 of the fixed yoke 1.

A movable yoke 7 is arranged at one end of the magnetostrictive rod 4 and the magnetostrictive rod 5 opposite to the side where the fixed yoke 1 is fixedly bonded. Like the fixed yoke 1, the movable yoke 7 is made of a metal having a high magnetic permeability such as pure iron. A groove 8 is formed at the center of the movable yoke 7,
The central portion 2 of the fixed yoke 1 is fitted therein, and is semi-fixed by bolts 9. Between the central portion 2 of the fixed yoke 1 and the movable yoke 7 and between the head of the bolt 9 and the movable yoke 7, that is, inside the groove 8 of the movable yoke 7, annular elastic members 10 and 11 are interposed. There is. The movable yoke 7 is
Due to the elastic force of these elastic members 10 and 11, the magnetostrictive rod 4 is
Also, the magnetostrictive rod 5 is supported so as to be movable in the displacement direction. The elastic members 10 and 11 may be any spring members that are magnetic bodies having a higher magnetic permeability than the magnetostrictive rods 4 and 5, and may be coil springs or spring washers.

Here, by tightening the bolt 9, the movable yoke 7 is pressed against the central portion 2 of the fixed yoke 1 and, at the same time, the end portions 12 and 13 of the movable yoke 7.
The magnetostrictive rod 4 and the magnetostrictive rod 5 are pressed through the movable yoke 7 and the movable yoke 7 applies a constant load to the magnetostrictive rod 4 and the magnetostrictive rod 5. It is known that the amount of magnetostriction of the magnetostrictive material has load dependency, and that a larger amount of magnetostriction can be obtained when used in a low load state than when no load is applied, and this embodiment attempts to utilize this principle. To do. In addition, here
By the tightening amount of the bolt 9, the load applied to the magnetostrictive rod 4 and the magnetostrictive rod 5 by the movable yoke 7 can be arbitrarily set according to the strain amount of the elastic members 10 and 11.

Further, as shown in the drawing, the end portions 12 and 13 of the movable yoke which come into contact with the end portions of the magnetostrictive rod 4 and the magnetostrictive rod 5 are formed with an inclination having a predetermined angle. This inclination angle is determined by the shape and size of the movable yoke 7, the amount of parallel movement, and the like.

The fixed yoke 1, the magnetostrictive rod 4, the movable yoke 7, the elastic members 10 and 11 and the fixed yoke 1, the magnetostrictive rod 5, the movable yoke 7 and the elastic members 10 and 11 are closed magnetic circuits each having an air-core coil 6. Is composed of.

FIG. 2 is a diagram for explaining the operation of the translation table using the above-mentioned magnetostrictive actuator. When a current is applied to the air-core coil 6 and a magnetic field is generated, the magnetostrictive rod 4 and the magnetostrictive rod 5 to which the magnetic field is applied are displaced by magnetostriction. At this time, the magnetostrictive rod 4 and the magnetostrictive rod 5 are
Differences in displacement occur due to differences in materials, materials, shapes, mechanical errors, and variations in magnetic flux distribution. For example, when the displacement of the magnetostrictive rod 5 is larger than the displacement of the magnetostrictive rod 4, as shown in the figure, the space formed between the end 12 of the movable yoke 7 and the end of the magnetostrictive rod 4 is The volume becomes smaller and, conversely, the end 12 of the movable yoke 7
The volume of the space formed between and the end of the magnetostrictive rod 5 becomes large. As a result, the magnetic resistance at the contact portion between the end portion 12 of the movable yoke 7 and the magnetostrictive rod 4 decreases, so that the magnetostrictive rod 4
The amount of magnetostriction increases. On the other hand, since the magnetic resistance at the contact portion between the end portion 13 of the movable yoke 7 and the magnetostrictive rod 5 increases, the magnetostriction amount of the magnetostrictive rod 5 decreases. That is, the displacements of the magnetostrictive rod 4 and the magnetostrictive rod 5 are corrected by this, and the movable yoke 7 converges from the state before the movement to the state in which the movable yoke 7 is substantially translated. This effect is more effective as the magnetic permeability of the magnetostrictive material forming the magnetostrictive rods 4 and 5 is larger than that of air.

In the embodiment described above, the contact portions of the magnetostrictive rods 4 and 5 with the end portions 12 and 13 of the movable yoke 7 are angled toward the end portions 12 and 13 of the movable yoke 7. However, conversely, the same effect can be obtained even if the magnetostrictive rods 4 and 5 are inclined. Alternatively, the magnetostrictive rod 4,
5 and the end portions 12 and 13 of the movable yoke 7 are inclined, the same effect can be obtained. Second embodiment

FIG. 3 is a diagram showing a translation table using a magnetostrictive actuator according to the second embodiment of the present invention. In the figure, a groove 22 is formed at the center of a cylindrical fixed yoke 21.
Are formed. The fixed yoke 21 is made of a metal having a high magnetic permeability such as pure iron. A cylindrical magnetostrictive rod 23 is arranged in the groove 22, and the magnetostrictive rod 23 and the fixed yoke 2 are arranged.
1 is fixed by an adhesive. The magnetostrictive rod 23 is made of a giant magnetostrictive alloy, for example, Tb _0.28 Dy _0.72 Fe _1.95 .

An air-core coil 24 is arranged around the magnetostrictive rod 23 as a magnetic field applying means for displacing the magnetostrictive rod 23. The air-core coil 24 has a multi-layer uniform winding structure in which a predetermined gap is provided from one end to the other end of the magnetostrictive rod 23.

An annular groove 25 is formed at the outer peripheral end of the fixed yoke 21.
And a cylindrical magnetostrictive cylinder 26 is disposed in the annular groove 25. The magnetostrictive cylinder 26 and the fixed yoke 21 are fixed by an adhesive. On the other hand, a movable yoke 27 is arranged at one end of the magnetostrictive cylinder 26 opposite to the side where it is fixedly bonded to the fixed yoke 21. Similar to the fixed yoke 21, the movable yoke 27 is made of a metal having a high magnetic permeability such as pure iron. The magnetostrictive rod 23 and the fixed yoke 2
1, the magnetostrictive cylinder 26, and the movable yoke 27 form a closed magnetic circuit including the air-core coil 24.

A thread is cut on the outer peripheral side surface of the fixed yoke 21, and a magnetic field bypass cylinder 28 is screwed onto the outer peripheral surface of the fixed yoke 21. This magnetic field bypass cylinder 2
8 is movable in the direction shown by the arrow in the figure.
The magnetic field bypass cylinder 28 is made of a metal having a higher magnetic permeability than the magnetostrictive rod 23 and the magnetostrictive cylinder 26. A case 29 is arranged on the outer circumference of the magnetostrictive cylinder 26. The case 29 is made of a non-magnetic metal and has a magnetostrictive tube 26.
Be used for the protection of.

When the same magnetic material is used for the magnetostrictive rod 23 and the magnetostrictive cylinder 26, the magnetic field generated by the air-core coil 24 passes through the magnetostrictive rod 23 and the magnetostrictive cylinder 26, but the shapes of the magnetostrictive rod 23 and the magnetostrictive cylinder 26 differ. , Mechanical errors, variations in magnetic flux distribution, and the like cause a difference in displacement between the two. Therefore, the contact surface 30 between the movable yoke 27 and the magnetostrictive rod 23 or the contact surface 3 between the movable yoke 27 and the magnetostrictive tube 26.
There is a case where a gap is generated in any one of the No. 1 and the movable yoke 27 cannot be moved in parallel.

Therefore, the displacement amount of the magnetostrictive cylinder 26 is set to be larger than that of the magnetostrictive rod 23 in advance. As shown in the figure, a part of the inner circumference of the magnetic field bypass cylinder 28 is in contact with a part of the outer circumference of the magnetostrictive cylinder 26, and a part of the magnetic field generated by the air-core coil is present in the magnetic field bypass cylinder 28. Will pass through. Therefore, the magnetic field bypass cylinder 28 can weaken the magnetic field in the magnetostrictive cylinder 26, and the amount of displacement thereof can be reduced. That is, the magnetic field bypass cylinder 28
By changing the contact area between the magnetostrictive cylinder 26 and the magnetostrictive cylinder 26, the expansion and contraction of the magnetostrictive cylinder 26 can be adjusted according to the expansion and contraction of the magnetostrictive rod 23. As a result, the amount of displacement of the magnetostrictive rod 23 and the amount of displacement of the magnetostrictive cylinder 26 can be made the same, and the movable yoke 2
It is possible to move 7 in parallel. It is desirable that the magnetostrictive cylinder 26 be as thin as possible in consideration of the magnetic flux distribution, eddy current loss, and the like.

FIG. 4 is a diagram showing a translation table according to a modification of this embodiment. In the figure, the same parts as those shown in FIG. 3 are designated by the same reference numerals, and a duplicate description will be omitted.

As shown in the figure, a cylindrical or prismatic central portion 32 is formed at the center of the fixed yoke 21.
One end 33 of the central portion 32 of the fixed yoke 21 is disposed in a groove 34 provided in the central portion of the movable yoke 27, and is half-mounted by a bolt 37 via elastic members 35 and 36 having high magnetic permeability. It is fixed. By tightening the bolt 37, the movable yoke 27 is fixed.
At the same time as the central portion 32 is pressed, the magnetostrictive cylinder 26 is pressed through the contact surface 31 between the movable yoke 27 and the magnetostrictive cylinder 26. Here, by the tightening amount of the bolt 37, it is possible to arbitrarily set the acting force exerted by the movable yoke 27 on the magnetostrictive cylinder 36 in accordance with the strain amount of the elastic members 35 and 36. The fixed yoke 21, the magnetostrictive cylinder 26, the movable yoke 27, and the elastic members 35 and 36 form a closed magnetic circuit including the air-core coil 24.

In such a structure, there is a difference in the displacement at each portion of the circumference of the magnetostrictive cylinder 26 due to an error in the thickness of the magnetostrictive cylinder 26 during the cylindrical processing, variations in the magnetic resistance on the contact surface with the fixed yoke 21, and the like. It may be difficult to move the movable yoke 27 in parallel. Therefore,
By using a magnetic field bypass cylinder 38 having a special shape as shown in FIGS. 5A and 5B, the magnetic field of the portion of the magnetostrictive cylinder 26 where the displacement amount is large is bypassed, and each portion of the circumference of the magnetostrictive cylinder 26 is bypassed. To make the amount of displacement uniform. As shown in the figure, the magnetic field bypass cylinder 38 has a rotatable movable portion 38a with a part of the circumferential portion protruding, and a fixed portion that supports the movable portion 38a and is screwed to the outer peripheral portion of the fixed yoke 21. And part 38b. Here, the movable part 38
By arranging the protruding portion of a so as to contact the portion of the magnetostrictive cylinder 26 where the displacement amount is large, a part of the magnetic field of that portion is bypassed, and the displacement amount is reduced by weakening the magnetic field of that portion. You can As a result, the movable yoke 27 can be moved in parallel.

The shape of the magnetic field bypass cylinder 38 having this special shape is not limited to that shown in FIG. 5, and may be any shape as long as the above-mentioned effects can be obtained.

According to the parallel movement mechanism according to the first and second embodiments of the present invention described above, it suffices to control only the magnetic field applying means for generating the magnetic field for driving the magnetostrictive actuator. It is possible to provide a parallel movement mechanism of a structure, and it is possible to perform a minute displacement drive that is stable and has excellent controllability, and at the same time, it is possible to achieve cost reduction. Third embodiment

FIG. 6 is a diagram showing a brake mechanism using a magnetostrictive actuator, which is a third embodiment of the present invention. As shown in the drawing, this embodiment has a structure in which an air-core coil 42, which is a magnetic field generating means, is embedded in the center of a housing 41 made of a magnetic material having magnetostriction. A through hole 43 is formed at the center of the housing 41, and a rotary shaft 44 is fitted therein. A friction material 45 is attached to the inner surface of the through hole 43 in order to increase the frictional force and protect the rotary shaft 44. Further, a predetermined space 46 is provided between the rotary shaft 44 and the friction material 45.

When a current is supplied from the control circuit 47 to the air-core coil 42, a magnetic field is generated, magnetostriction occurs in the housing 41, and the housing 41 itself deforms so that the internal dimension of the through hole 43 becomes smaller. As a result, the housing 41 directly grips the rotating shaft 44, so that the braking operation is performed. When the excitation is turned off, the magnetic field disappears and the housing 41
Is restored to its original state and the brake is released.

In this way, the housing 41 itself is deformed to directly perform the braking operation, so that the brake mechanism has no play. Further, since the amount of deformation of the housing 41 can be controlled by adjusting the current supplied to the air-core coil 42 by the control circuit 47, even if the air gap 46 changes due to abrasion due to friction or the like, the adjustment can be easily performed. Therefore, it is not necessary to carry out a large readjustment of the entire mechanism.

Although the brake mechanism for braking the rotating shaft has been described as an example here, the present invention is not limited to this case, and can be applied to, for example, braking of a shaft that moves linearly. Further, the sectional shape of the shaft is not limited to the circular shape.

The following device can be constructed by using such a brake mechanism. FIG. 7 shows an example in which the present invention is applied to an automatic rotation speed adjusting device. In mountainous areas and remote islands where an external commercial power source is not available, a mechanical load is driven by obtaining power using fluid such as wind power or hydraulic power. In such an apparatus, if there is no mechanism for controlling the rotation speed, the change in the fluid speed directly changes the movement speed of the machine, and stable machine operation cannot be obtained. The present embodiment is for solving such a problem.

A rotating shaft 53 is connected to a rotating body 52 that rotates by receiving the force of a fluid 51 such as wind or water, and drives a mechanical load 54. A tacho generator 55 and the magnetostrictive brake 56 shown in the above embodiment are arranged on the rotating shaft 53.
The power generated by the tacho generator 55 is input to the magnetostrictive brake 56 as a current value via the control circuit 57.

In such a structure, due to the change in the rotation speed of the rotating shaft 53 with the change in the speed of the fluid 51,
Since the power generated by the tacho generator 55 changes and the input current to the magnetostrictive brake 56 changes accordingly,
The braking force exerted on the rotating shaft 53 by the magnetostrictive brake 56 is controlled. Here, the speed of the fluid 51 is equal to the mechanical load 5
If it is larger than the predetermined value required for the operation of No. 4, the rotating shaft 53 is braked by the magnetostrictive brake 56 and its rotating speed is maintained at an appropriate value, so that a constant rotating force is always transmitted to the mechanical load 54. As a result, stable mechanical operation can be obtained. However, when the velocity of the fluid 51 is less than the predetermined value required for the operation of the mechanical load 54, the magnetostrictive brake 56 is completely released, and the mechanical load 54 naturally does not operate. Fourth embodiment

FIG. 8 is a diagram showing a static pressure type air bearing using a magnetostrictive actuator according to a fourth embodiment of the present invention. As shown in the drawing, the present embodiment is a spindle bearing type static pressure type air bearing, in which air is supplied from the outside into a housing 61 made of a magnetic substance having magnetostriction, and a plurality of air bearings are provided on the inner peripheral surface of the housing 61. The air can be blown out from the air supply hole 62 so that the shaft 63 can be levitated in the thrust direction and the radial direction. At that time, the shaft 63 is rotated by the motor 65 via the coupling 64.

On the other hand, an air-core coil 66, which is a magnetic field applying means, is provided outside the housing 61, and a magnetic field is generated by the current supplied by the control circuit 67, and magnetostriction is generated in the housing 61. 6
The radial gap G between the inner peripheral surface of No. 1 and the shaft 63 can be changed. Further, by mounting a gap sensor 68 and feeding back a gap signal relating to the radial gap G to the control circuit 67, the current supplied to the air-core coil 66 is adjusted and the deformation of the housing 61 due to magnetostriction is controlled, whereby the radial gap is controlled. It is possible to always set G to an appropriate value.

As a result, even in the manufacture of air bearings, which conventionally required high-precision control at the part processing stage, and which depended on the know-how of a skilled processing engineer, for example, the radial gap G was set to a value larger than an appropriate value. It is possible to adjust the size when it is processed to a larger size in advance, and the processing efficiency can be improved. Further, it is possible to easily set the radial gap G according to the load capacity of the air bearing depending on the use environment.

FIG. 9 shows a modified example of the static pressure type air bearing having substantially the same structure as that shown in FIG. Here, the same parts as those shown in FIG. 8 are designated by the same reference numerals to omit redundant description.

In this modification, the shaft 63 does not rotate,
It is assumed that the shaft 63 and the air bearing move relative to each other. For example, the case where the shaft 63 reciprocates, the case where a slider or the like having the present air bearing moves linearly on the shaft 63, and the like are illustrated. The description of each part constituting the air bearing is the same as that in FIG. In this case, the cross-sectional shape of the shaft 63 is not limited to a circle, and may be another polygon such as a square. Figure 10
(A) and (b) are schematic cross-sectional views of the air bearing according to the present embodiment when the cross-sectional shape of the shaft 63 is circular and square, respectively. The arrow in the figure indicates the direction of expansion and contraction when the housing 61 is deformed by magnetostriction.

Although the air bearing mechanism utilizing the air pressure from the outside has been described in the present embodiment, the present invention is not limited to this embodiment and can be applied to other bearing mechanisms such as hydraulic pressure. is there. Fifth embodiment

FIG. 11A is a view showing a liquid feed pump mechanism using a magnetostrictive actuator, which is a fifth embodiment of the present invention. A side end portion B of a pipe 71 shown in the figure is inserted into the liquid, and a plurality of air-core coils 72, which are magnetic field applying means, are arranged on the outer periphery of the pipe 71.
The pipe 71 is made of a magnetic material having magnetostriction.

FIG. 11B shows the line A- shown in FIG.
It is what showed the A sectional drawing. The inner wall surface of the pipe 71 is
A magnetic field is applied by the air-core coil 72, and when the pipe 71 is deformed due to magnetostriction, it has a shape as shown in the figure so that the internal space of the pipe 71 can be sealed. It is needless to say that the shape of the inner wall surface is not limited to that shown in the drawing, and may be any shape as long as the above effects can be obtained.

Next, a method of transferring a liquid according to this embodiment will be described. The air-core coils 72 arranged on the outer periphery of the pipe 71 are sequentially excited from the side end surface B of the pipe 71, and all the air-core coils 72 up to the other side end C of the pipe 71 are excited. After completely eliminating the space inside, the excitation of the air-core coil 72 is sequentially released from the side end surface B. As a result, a decompressed space is created inside the pipe 71, and the liquid is sucked into the space from the side end surface B. All air core coils 7
When the excitation of No. 2 is released and the entire space inside the pipe 71 is filled with the liquid, the liquid inside the pipe 71 is pushed out from the side end C by sequentially exciting from the side end B again.
The liquid of the space volume inside the pipe 71 is transferred.

As a result, with a relatively simple structure, mechanical components such as a drive unit and a sealing material are not required, the life and reliability of the entire mechanism can be remarkably improved, and the size can be easily reduced. A liquid feed pump mechanism can be provided. Further, by changing the pattern for exciting the air-core coil 72, it becomes possible to relatively easily implement various liquid transfer controls from droplets to high-speed flow transfer. 12 and 13 show a modified example of the liquid feed pump mechanism according to the fifth embodiment.

In the modification shown in FIG. 12, a flexible polymer member having a shape such that when the pipe 73 concentrically contracts inside the pipe 73 of a hollow cylindrical structure having magnetostriction, the inside of the pipe 73 is sealed. 74 is inserted. On the outer circumference of the pipe 73, a plurality of air-core coils 75, which are magnetic field applying means, are similarly arranged.
By sequentially energizing and de-energizing the air-core coil 75, a liquid transfer function similar to that described above can be achieved.

In the modification shown in FIG. 13, a non-magnetic round bar 77 is inserted in the hollow portion of a pipe 76 having a hollow cylindrical structure having magnetostriction. Here, a space is provided between the inner wall surface of the pipe 76 and the outer wall surface of the round bar 77 such that both wall surfaces are in close contact when the pipe 76 contracts concentrically due to magnetostriction. Similarly, a plurality of air-core coils 78 for generating a magnetic field are arranged on the outer periphery of the pipe 76. By sequentially exciting and de-energizing the air-core coils 78, a liquid transfer function similar to that described above is achieved. it can. Sixth Example

FIG. 14 (a) is a diagram showing a flow rate adjusting mechanism using a magnetostrictive actuator, which is a sixth embodiment of the present invention. Pipe 81 of hollow cylindrical structure through which fluid passes
A columnar magnetic body 82 having magnetostriction is disposed inside the. Stoppers 8 are provided near both ends of the magnetic body 82.
3, 84 are arranged so that the magnetic body 82 does not move. The outer diameter of the magnetic body 82 is approximately the same as the inner diameter of the hollow pipe 81, and the gap between the inner wall surface of the pipe 81 and the outer wall surface of the magnetic body 82 is made as small as possible. In addition, the magnetic body 82 on the outer peripheral portion of the pipe 81
The yokes 85 and 86 are installed in a position adjacent to. A material having a high magnetic permeability such as pure iron is used for the yokes 85 and 86.

FIG. 14B shows the line A- shown in FIG.
FIG. As shown in the drawing, the yokes 85 and 86 are arranged so as to sandwich the pipe 81, and an iron core 87 is fixed to the other ends of both by bolts 88 and 89. An air-core coil 90, which is a magnetic field applying means, is arranged on the outer periphery of the iron core 87. As shown in FIG. 15, this air-core coil 90 is connected to a drive power supply 91, and an electric current is supplied from this drive power supply 91. Further, a control circuit 92 for controlling the current supplied to the air-core coil 90 is also provided.

In this way, the iron core 87, the yokes 85, 86
The magnetic body 82 and the magnetic body 82 form a closed magnetic circuit, and the current set in the control circuit 92 is supplied from the drive power source 91 to the air-core coil 90. As a result, the magnetic field generated by the air-core coil 90 passes through the yokes 85 and 86 and the magnetic substance 82.
Pass through. As a result, the magnetic body 82 causes magnetostriction and is deformed in the direction shown by the arrow in FIG. This allows
A space is created between the inner wall surface of the pipe 81 and the outer wall surface of the magnetic body 82, and the fluid passes through the space. By controlling the current supplied to the air-core coil 90 by the control circuit 92, the deformation amount of the magnetic body 82 can be adjusted,
The flow rate of the fluid passing through the pipe 81 can be set arbitrarily.

FIG. 16A is a diagram showing another embodiment of the flow rate adjusting mechanism using the magnetostrictive actuator according to the present invention. 16B is a cross-sectional view taken along the line AA shown in FIG. Inside the hollow cylindrical pipe 101 through which the fluid passes, a columnar magnetic body 1 having magnetostriction 1
02 is provided. One end of this magnetic body 102 is fixed to a partition wall 104 having a through hole 103 through which a fluid passes, and the other end is free. The magnetic material 102
The free end side of is shaped into a taper that becomes thinner toward the tip of the end. An air-core coil 105, which is a magnetic field applying unit, and a yoke 106 are arranged around the pipe 101, and the magnetic body 102 and the yoke 106 form a closed magnetic circuit. When a current is supplied to the air-core coil 105 from the control circuit 107, a magnetic field is generated, and when the magnetic flux passes through the magnetic body 102, the magnetic body 102 undergoes magnetostriction and the pipe 1
It is displaced in the axial direction of 01. Due to this displacement, the magnetic body 10
The through-hole 109 of the partition wall 108 provided on the free end side of 2 can be opened and closed to adjust the flow rate of the fluid passing through the pipe 101. The flow rate is adjusted by the control circuit 10
By controlling the current supplied to the air-core coil 105 by 7, the displacement amount of the magnetic body 82 is adjusted.

According to the configurations of the two embodiments as described above, since the structure is simple and the shaft driving portion, the bearing and the like and the seal are not required, the life and reliability can be greatly improved. You can It is also possible to relax restrictions on the temperature and pressure of the fluid that can be used. Seventh Example

FIG. 17A is a diagram showing a fluid nozzle mechanism using a magnetostrictive actuator according to the seventh embodiment of the present invention. 17B is a cross-sectional view taken along the line AA shown in FIG. The fluid nozzle used for ejecting the fluid to the outside is, as shown in FIG.
It is composed of a fluid flow pipe 111 and a nozzle 112 made of a magnetic substance having magnetostriction.
It is sealed by 3 and has a structure that can be attached and detached by a screw (not shown). An air-core coil 114, which is a magnetic field applying unit, is arranged on the outer periphery of the nozzle 112. When a current is supplied to the air-core coil 114 from the control circuit 115, a magnetic field is generated and the nozzle 112 undergoes magnetostriction and is deformed in the direction shown by the arrow in FIG. 17B. As a result, since the flow path diameter R of the nozzle 112 can be changed, it is possible to change the flow velocity v at the nozzle outlet with one nozzle 112. The flow velocity v is adjusted by controlling the current supplied to the air-core coil 114 by the control circuit 115 to adjust the flow passage port diameter R of the nozzle 112.

As described above, according to the fluid nozzle according to the present embodiment, it is possible to eliminate the inconvenience of work of preparing a nozzle having a flow path diameter R according to the application and replacing it each time to install it. You can Other mechanisms using the magnetostrictive actuator will be described below. Eighth Example

FIG. 18 shows a stepwise moving mechanism using a magnetostrictive actuator. As shown in the figure, in this embodiment, two chuck actuators 122 and 124 and one stepping actuator 1 are mounted on a moving shaft 121.
23 are provided. Each actuator has a magnetostrictive magnetic body 12 fitted to the moving shaft 121.
5,126,127 and the yoke 12 circumscribing it
8, 129, 130, and each yoke is provided with air-core coils 131, 132, 133 which are magnetic field applying means. Each air-core coil has a drive power supply 134, 1 respectively.
35 and 136, and current is supplied from these drive power supplies. In addition, control circuits 137, 13 for controlling the current supplied to each air-core coil
8,139 is also provided.

Next, the operation of this step moving mechanism will be described. First, the chuck control circuit 137 of the chuck actuator 122 supplies a current from the driving power supply 134 to the air-core coil 131 to generate a magnetic field. Magnetic body 1
The magnetic flux 25 causes magnetostriction when the magnetic flux passes, and the moving shaft 1
21 is deformed so as to be gripped.

Then, the step control circuit 138 of the step actuator 123 supplies a current from the driving power supply 135 to the air-core coil 132 to generate a magnetic field. Magnetic body 12
6 causes magnetostriction due to the passage of magnetic flux, and the moving shaft 12
It extends in one direction.

Further, the chuck actuator 124
The chuck control circuit 138 supplies a current from the driving power supply 136 to the air-core coil 133 to generate a magnetic field. The magnetic substance 127 causes magnetostriction due to the passage of the magnetic flux, and is deformed so as to hold the moving shaft 121.

After that, by shutting off the current supplied to the air-core coils 131 and 132, the magnetic body 125 of the chuck actuator 122 is separated from the moving shaft 121, and the magnetic body 126 of the stepping actuator 123 contracts. As a result, the chuck actuator 122 is pulled toward the chuck actuator 124 side. By repeating the above operation, it is possible to make a step motion on the moving shaft 121.

A feature of the stepping movement mechanism according to the present embodiment is that the load resistance can be greatly improved as compared with a similar mechanism using a piezoelectric actuator. Also,
According to the above-described configuration, the directions of the magnetic fields generated by the two pairs of air-core coils (131 and 132 and 132 and 133) adjacent to each other are perpendicular to each other, so that the yokes 128, 129, and 130 have high magnetic permeability. By using this material, the influence of the leakage magnetic flux on the entire mechanism can be reduced. Ninth embodiment

Next, an embodiment in which the magnetostrictive actuator is applied to a circuit breaker will be described. In a thermal / electromagnetic circuit breaker, a bimetal or electromagnet is usually used to detect the current. For example, in a thermal operation in which a current of 100% of a set value does not operate and a current of 125% operates within 2 hours, an overcurrent is detected by a bimetal. Further, for example, in an electromagnetic operation in which the current instantaneously operates at a current of 200% or more of a set value, an overcurrent is detected by an electromagnet excited by a main current. As described above, in the conventional circuit breaker, the switch operation of the circuit breaker is performed by using the two types of overcurrent detection mechanisms, which complicates the entire structure of the circuit breaker and reduces the size of the circuit breaker. On the contrary, there was a limit naturally.

On the other hand, in the circuit breaker using the magnetostrictive actuator shown in the present embodiment, by constructing the overcurrent detection mechanism by the magnetic substance having magnetostriction, one of the thermal operation and the electromagnetic operation is obtained. Can be realized by the mechanism of.

FIG. 19 shows the operating principle of the circuit breaker according to this embodiment. 19A shows the state before the breaking operation, and FIG. 19B shows the state after the breaking operation.
The magnetic body 141 having magnetostriction has a property of expanding and contracting according to its strength when an external magnetic field is applied. Therefore,
An air-core coil 142 is used as a magnetic field applying unit that applies a magnetic field to the magnetic body, and a main current is supplied to the air-core coil 142. When the main current exceeds a certain value, the magnetic body 141 that is magnetostrictive drives the trigger lever 143. Release lever 144
Is removed, the opening / closing contact portion 146 is released by the action of the actuating spring 145 to perform the shutoff operation. With such a configuration, the circuit breaker can be electromagnetically operated.

On the other hand, the magnetic substance 141 having magnetostriction has a larger coefficient of thermal expansion than that of a general material. By utilizing this characteristic, even when the magnetic body 141 is deformed by thermal expansion due to heat generated when an overcurrent flows through the air-core coil 142 for a long time, the same interruption operation as the above-described operation can be performed. With the configuration, it becomes possible to perform the thermal operation as well as the electromagnetic operation.

According to the above-mentioned structure, it is possible to provide a circuit breaker having a simple structure and capable of performing both electromagnetic operation and thermal operation with a single overcurrent detection mechanism. It is possible.

[0095]

As described above, according to the present invention,
The following effects can be obtained.

First, it is possible to provide a parallel displacement mechanism using a magnetostrictive actuator, which has a simple structure, can perform stable and excellent controllability for minute displacement drive, and can achieve cost reduction.

Secondly, there is provided a brake mechanism having a simple structure, which does not require readjustment of the entire mechanism due to abrasion of a friction surface or the like and which does not disable the operation. be able to.

Thirdly, with a simple structure, it is possible to relatively relax the high-precision control of the dimensional accuracy, shape tolerance, surface roughness of the finished surface, etc. at the stage of machining the parts, and the radius of the shaft and the bearing. A bearing mechanism using a magnetostrictive actuator that can change the gap can be provided.

Fourthly, a magnetostrictive actuator is used which has a simple structure and does not require mechanical drive parts or structural components such as a sealant and can remarkably improve the life and reliability of the entire mechanism. It is possible to provide a liquid feeding pump mechanism that has been used.

Fifth, since it has a simple structure and does not require a shaft drive portion, a bearing, etc., and a seal, there is no problem of life and reliability of these components, and restrictions on the temperature and pressure of the fluid that can be used are relaxed. A flow rate adjusting mechanism using a magnetostrictive actuator can be provided. Sixth, it is possible to provide a fluid nozzle mechanism using a magnetostrictive actuator, which has a simple structure and can easily change the flow path diameter of the fluid nozzle.

[Brief description of drawings]

FIG. 1 is a sectional view showing a translation table which is a first embodiment of the present invention.

FIG. 2 is a cross-sectional view for explaining the operation of the parallel movement table that is the first embodiment of the present invention.

FIG. 3 is a sectional view showing a translation table which is a second embodiment of the present invention.

FIG. 4 is a sectional view showing a translation table which is a modified example of the second embodiment of the present invention.

FIG. 5 is a view showing a specially shaped magnetic field bypass cylinder according to a modification of the second embodiment.

FIG. 6 is a sectional view showing a brake mechanism that is a third embodiment of the present invention.

FIG. 7 is a schematic system diagram of an apparatus to which a third embodiment of the present invention is applied.

FIG. 8 is a view showing a static pressure type air bearing which is a fourth embodiment of the present invention.

FIG. 9 is a view showing a static pressure type air bearing which is a modified example of the fourth embodiment of the present invention.

FIG. 10 is a schematic sectional view of an air bearing according to a modification of the fourth embodiment of the present invention.

FIG. 11 is a view showing a liquid feed pump mechanism that is a fifth embodiment of the present invention.

FIG. 12 is a view showing a liquid feed pump mechanism that is a modification of the fifth embodiment of the present invention.

FIG. 13 is a view showing a liquid delivery pump mechanism that is a modification of the fifth embodiment of the present invention.

FIG. 14 is a view showing a flow rate adjusting mechanism which is a sixth embodiment of the present invention.

FIG. 15 is a diagram showing a configuration of a control circuit and a driving power supply in a sixth embodiment.

FIG. 16 is a view showing another embodiment of the flow rate adjusting mechanism which is the sixth embodiment of the present invention.

FIG. 17 is a diagram showing a fluid nozzle mechanism according to a seventh embodiment of the present invention.

FIG. 18 is a diagram showing a stepwise movement mechanism using a magnetostrictive actuator.

FIG. 19 is a diagram showing a circuit breaker using a magnetostrictive actuator.

FIG. 20 is a view showing a conventional brake mechanism.

FIG. 21 is a view showing a conventional piston type liquid feed pump.

FIG. 22 is a view showing a conventional roller type liquid feed pump.

FIG. 23 is a view showing a conventional flow control valve.

FIG. 24 is a view showing a conventional flow control valve.

FIG. 25 is a view showing a conventional fluid nozzle.

[Explanation of symbols]

1, 21 Fixed yoke 2, 32 Central part of fixed yoke 3 Grooves at both ends of fixed yoke 4, 5, 23 Magnetostrictive rods 6, 24, 42, 66, 72, 75, 78, 90, 10
5,114,131,132,133,142 Air-core coil 7,27 Movable yoke 8,34 Groove in central part of movable yoke 9,37,88,89 Bolt 10,11,35,36 Elastic member 12,13 Of movable yoke End portion 22 Groove at center of fixed yoke 25 Annular groove 26 Magnetostrictive tube 28, 38 Magnetic field bypass cylinder 29 Case 30 Contact surface between movable yoke and magnetostrictive rod 31 Contact surface between movable yoke and magnetostrictive tube 33 Central portion of fixed yoke End portion 41,61 housing 43,103 through hole 44,53 rotating shaft 45 brake lining 46 void 47,57,67,92,107,115,137,1
38,139 Control circuit 51 Fluid 52 Rotating body 54 Mechanical load 55 Tacho generator 56 Magnetostrictive brake 62 Air supply hole 63 Shaft 64 Coupling 65 Motor 68 Gap sensor 71,73,76,81,101,111 Pipe 74 Polymer member 77 Round bar 82, 102, 125, 126, 127, 141 Magnetic material 83, 84 Stopper 85, 86, 106, 128, 129, 130 Yoke 87 Iron core 91, 134, 135, 136 Drive power supply 104, 108 Partition wall 109 Orifice 112 Nozzle 113 Packing 121 Moving Axis 122, 124 Chuck Actuator 123 Stepping Actuator 143 Trigger Lever 144 Tripping Lever 145 Actuating Spring 146 Opening / Closing Contact Part

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Akihiro Ishiguro 1 Komukai Toshiba-cho, Kouki-ku, Kawasaki-shi, Kanagawa Stock company Toshiba Research Institute

Claims (6)

[Claims] 1. Displacement generating means made of a magnetic substance having magnetostriction, magnetic field applying means for applying a magnetic field to the displacement generating means, and movable in the displacement direction of the displacement generating means in contact with the displacement generating means. A movable member and a magnetic circuit constituent member which fixes the displacement generating means and constitutes a closed magnetic circuit by the magnetic field applying means together with the movable member, and a mutual contact surface between the displacement generating means and the movable member. A magnetostrictive actuator mechanism, wherein at least one of the contact surfaces is inclined. 2. Displacement generating means made of a magnetic substance having magnetostriction, magnetic field applying means for applying a magnetic field to the displacement generating means, and movable in the displacement direction of the displacement generating means in contact with the displacement generating means. A movable member, a magnetic circuit constituent member which fixes the displacement generating means and constitutes a closed magnetic circuit by the magnetic field applying means together with the movable member, and a part of the displacement generating means is contacted and applied to the displacement generating means. And a magnetic field bypass means for bypassing a part of the magnetic field. 3. A displacement generating means having a magnetostrictive magnetic body, which has a through hole for passing a shaft, and is displaceable so as to adjust the clearance when the shaft is fitted in the through hole. And a magnetic field applying means for applying a magnetic field to the displacement generating means. 4. A displacement generating means made of a magnetic substance having a magnetostriction, which has a hollow structure capable of allowing a fluid to flow inside, and is displaceable so as to transfer the fluid, and a plurality of displacement generating means on the outer periphery of the displacement generating means. A magnetostrictive actuator mechanism, comprising: a magnetic field applying means for applying a magnetic field to the displacement generating means. 5. A hollow member inside which a fluid can flow, and a displacement generating means disposed inside the hollow member and made of a magnetic substance having magnetostriction and displaceable so as to adjust the flow rate of the fluid. A magnetostrictive actuator mechanism comprising: a magnetic field applying means for applying a magnetic field to the displacement generating means. 6. A hollow member which allows a fluid to flow inside, and a through hole which is connected to the tip of the hollow member and through which a fluid can flow, and which is displaced so that the cross-sectional shape of the through hole changes. A magnetostrictive actuator mechanism comprising a possible displacement generating means made of a magnetic material having magnetostriction and a magnetic field applying means for applying a magnetic field to the displacement generating means.