JPH05344753A - Inchworm - Google Patents

Abstract

PURPOSE:To provide an inchworm in which micro-displacement is realized with high resolution. CONSTITUTION:The inchworm comprises a telescopic body being arranged on an arbitrary surface and opposite ends to be sucked detachably on the surface, wherein the inchworm moves by alternating telescopic operation of the body and detachable suction at the opposite ends. The body is constituted of one or a plurality of series or parallel connected capacitors each having electrodes 101, 102 coupled through a resilient member, a power supply 150 for each capacitor, and a switch 140 for connecting each capacitor with the power supply 150, and the body telescopes through the use of displacement of inter-electrode distance caused by variation of electrostatic power due to charge/discharge of the capacitor.

Description

Detailed Description of the Invention

 [Object of the Invention]

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an inchworm that can be used to drive machines such as precision measuring instruments, precision processing machines, robots, automobile equipment parts, home appliances, office automation equipment, medical welfare equipment and the like.

[0002]

2. Description of the Related Art Robots, precision machines, automobile equipment parts,
BACKGROUND ART Conventionally, rotary motors, linear motors, stepping motors and the like that use magnetic force have been the mainstream for driving machines such as home appliances, office automation equipment, and medical / welfare equipment. On the other hand, although there has been a growing need for actuators with high resolution and small displacement, conventional actuators of the magnetic type or the like cannot meet such needs.

For this reason, an inchworm, which partially uses a piezoelectric element, has been developed. However, the piezoelectric element is a ceramic-based difficult-to-machine material and has a manufacturing defect. Further, since the total amount of displacement at one time is small, it is necessary to combine it with another coarse movement mechanism or provide a displacement magnifying mechanism. Further, since the piezoelectric element has a hysteresis characteristic, control is not easy.

[0004]

SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide an inchworm which has a high resolution and can be displaced minutely in order to solve the above problems. [Constitution of Invention]

[0005]

According to the present invention, there is provided a body which is arranged on an arbitrary surface and is capable of expanding and contracting, and both ends capable of adsorbing and releasing on the surface, and the expansion and contraction of the body and the adsorption and adsorption of the both ends. In an inchworm that can be moved by alternately performing detachment and separation, the body has one or more series or parallel capacitors in which electrodes are connected by an elastic body, and a power source for supplying electric charge to each capacitor. An inchworm that is configured by a switch that controls the connection between each of the capacitors and the power source, and expands and contracts by utilizing the displacement of the distance between the electrodes due to a change in electrostatic force due to charging and discharging of the capacitor.

Further, the present invention has a body which is arranged on an arbitrary surface and is expandable and contractible, and has both ends capable of adsorbing and detaching on the surface, and the expansion and contraction of the body and the adsorption and detachment of the both ends are alternated. In an inchworm that can be moved by performing the above, the body is composed of a plurality of electrodes arranged to face each other in the moving direction, a power supply for supplying electric charge to each electrode, and a switch for controlling the connection between each electrode. The inchworm is characterized in that it expands and contracts by utilizing the fact that the distance between the electrodes is displaced by receiving an attractive force or a repulsive force according to the polarity of the charge charged on each electrode and the electrostatic capacitance.

[0007]

With the above structure, an inchworm with high resolution and small displacement can be realized.

[0008]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The inchworm according to the present invention is shown in FIGS.
It is configured by combining a plurality of electrostatic actuator elements shown in FIGS. 5, 7, 11, 14 or 16. Each electrostatic actuator element forms a capacitor in which both electrodes are connected by an elastic body, and the elastic body is deformed by the change in the attractive force between the electrodes due to the transfer of electric charge, so electrostatic energy is converted into mechanical energy. It can be converted. Hereinafter, the configuration and operation of each electrostatic actuator element will be described with reference to FIGS. 1 to 18, and then the configuration and operation of the inchworm according to the embodiment of the present invention will be described with reference to FIGS. 19 to 42.

First, the structure of the electrostatic actuator element shown in FIG. 1 will be described. Opposing electrodes 101 and 102
Also, a capacitor is formed by the terminals 121 and 122 connected to these. The switch 140 is connected to the other end of the terminal 121. The switch 140 is connected to the other end of the terminal 122 via the power supply 150 or the terminal 12
2 has a function of switching to the other end. A ground 151 is connected to the terminal 122. Further, the electrodes 101 and 102 are respectively electrode supports 111 and
The electrode supports 111 and 112 are supported and fixed by 112.
Both ends of the are connected by spacers 161 and 162 made of elastic material. The surface of the electrode 102 is covered with an insulating film 132 so as not to short-circuit with the electrode 101 during deformation.

Next, the operation of this electrostatic actuator element will be described. The terminal 121 and the terminal 122 are short-circuited by the switch 140 and the electrode support 11
The initial position is 1,112. Switch 140 is power supply 1
When switched to the 50 side, electric charge is supplied to the capacitor. Here, when the applied voltage of the power source 150 is V, the area of the capacitor is S, the distance d between the electrodes, and the dielectric constant between the electrodes are ε, the two electrodes are

[0011]

[Equation 1] The inter-electrode attraction force F acts. Electrode support 111, 112
If the elastic repulsive forces received from the spacers 161 and 162 are equal, the electrode supports 111 and 112 approach each other while maintaining parallelism. On the other hand, due to this displacement, the spacers 161, 162
Is deformed, and as a reaction thereof, elastic repulsion acts.
Here, if the spacers 161 and 162 are regarded as springs having an elastic coefficient k, when both electrodes are displaced from the initial position by Δx, the elastic repulsive force k · Δx is applied to the electrode supports 111 and 11.
Work between two. As a result, the position where the attraction force between the electrodes and the elastic repulsion force balance, that is,

[0012]

[Equation 2] The electrode supports 111 and 112 are supported at the positions contracted only. Therefore, the electrostatic actuator element can be contracted by the minute amount Δx by supplying the electric charge. In addition,
The contraction amount Δx can be adjusted by the elastic coefficients of the spacers 161, 162, the applied voltage of the power source 150, the surface areas of the electrodes 101, 102, and the like.

Next, the electrostatic actuator element shown in FIG. 3 will be described. A capacitor is formed by the electrodes 201 and 202 supported by the electrode supports 211 and 212,
The point where electric charge is supplied by switching the switch 240 is shown in FIG.
It is similar to the element shown in. The spacer 260 is made of an insulating homogeneous elastic body, and is inserted between the electrodes 201 and 202.

The positions of the electrode supports 211 and 212 when no charge is supplied to the capacitors are the initial positions. Switch 24
When 0 is switched to the side of the power source 250 and electric charge is supplied, an attraction force between the electrodes acts on both the electrode supports 211 and 212 to approach them while maintaining parallelism. On the other hand, due to this displacement, the spacer 260
Is compressed and deformed, so that an elastic repulsive force acts as its reaction. As a result, the electrode supports 211 and 212 are supported at the position where the attraction force between the electrodes and the elastic repulsion force are balanced, and the element contracts.

As the elastic body, a compressive fluid, a polymer material having rubber elasticity, or the like can be used in addition to the spring. Further, if a dielectric material having a large dielectric constant is used as the spacer 260, it is possible to prevent the attraction force between the electrodes from decreasing even when the distance between the electrodes of the capacitor is large.

Next, the electrostatic actuator element shown in FIG. 5 will be described. The configuration of the capacitor and the connection status of the switch 340 and the power source 350 are the same as those of the element shown in FIG. The electrode support 311 and the electrode support 312 are connected at both ends by spacers 361 and 362. However, the spacer 362 is the spacer 36 due to the difference in wall thickness.
The elastic repulsive force is greater than 1.

As shown in FIG. 5, it is assumed that no force acts on the electrodes 301 and 302 and the electrode supports 311 and 312 are parallel to each other in a state where no charge is stored in the capacitor. Here, the switch 340 is switched to supply the electric charge to the capacitor. Then, an attractive force acts between the electrodes 301 and 302, and the element tries to contract. However, due to the difference in elastic repulsive force, the spacer 361 has a larger spacer 362.
It deforms with a larger curvature and becomes a sharp wedge shape on the spacer 361 side as shown in FIG. The difference in elastic repulsive force between the spacer 361 and the spacer 362 may not be due to the wall thickness, but may be due to, for example, a difference in material, shape, or the like. Next, the electrostatic actuator element shown in FIG. 7 will be described.

Two pairs of electrodes 401, 402 and 4 facing each other
The two capacitors formed by 03 and 404 are connected in parallel. Each electrode is supported by an electrode support 460 made of an elastic body. The terminals output from the electrodes 401 and 403 are connected to the positive electrode of the power source 450 via the switches 441 and 442, respectively. Also, the electrodes 402, 4
The terminals from 04 are both connected to the negative electrode of the power supply 450. The surfaces of the electrodes 401 and 403 are insulating films 4 respectively.
It is covered with 31, 433 so as not to short-circuit with the opposing electrode.

When the switches 441 and 442 are opened to store no charge in the capacitor, the two pairs of electrodes are supported in parallel by the electrode support 460 as shown in FIG. Next, connect only the switch 441 and connect the electrode 4
When positive charges and negative charges are supplied to 01 and 402, respectively, an attractive force acts only between the electrodes 401 and 402, so that the electrode support 460 is connected to the electrodes 401 and 402 as shown in FIG.
It is deformed into a wedge shape in which the side 402 is sharp. Next, the switch 442 is also connected to connect the electrodes 403 and 404 with positive charges,
When a negative charge is supplied, the two pairs of electrodes are attracted by the same electrostatic force, so that the electrode support 460 contracts in a flat plate shape as shown in FIG. Next, when only the switch 401 is opened and the charges of the electrodes 401 and 402 are discharged,
Since charges are accumulated only on the electrodes 403 and 404 side and an attractive force is exerted, the electrodes 401 and 402 side are expanded by the elastic force of the electrode support 460 and the electrodes 403 and 403 are expanded as shown in FIG.
It is transformed into a wedge shape with a sharp edge on the 404 side. As mentioned above,
In addition to expansion / contraction of the element, two wedge-shaped deformations can be performed by a combination of turning on / off the power switches connected to the capacitors connected in parallel in the element.
Note that, in FIG. 7, two pairs of capacitors are connected in parallel in the electrode support 460, but even when three or more pairs of capacitors are connected in parallel, they are separately connected to each capacitor. The same operation can be obtained by the switching operation of the power switch. Next, the electrostatic actuator element shown in FIG. 11 will be described.

The electrode supports 511 and 512 have an arc shape, and the electrode support 511 is made of an elastic body, and has a larger curvature than the electrode support 512. Electrode 50
1 is supported and fixed to the inner circumference of the electrode support 511, and the electrode 502 is supported and fixed to the outer circumference of the electrode support 512. The surface of the electrode 502 is covered with an insulator 532 so as not to short-circuit with the electrode 501. The electrodes 501 and 502 are arranged opposite to each other and are fixed at the central portion c. Terminals are respectively output from the electrodes 501 and 502, the electrode 501 is connected to the positive electrode of the power source 550, and the electrode 502 is connected to the switch 540. The switch 540 has a function of switching between a positive electrode and a negative electrode of the power source 550, and can supply either positive or negative electric charge to the electrode 502 by the switching operation.

In FIG. 11, the switch 540 is open and both ends a and b are separated by the elastic force of the electrode support 511. Next, when the switch 540 is switched to the negative electrode side of the power source 550, charges having different signs from each other are accumulated in the electrodes 501 and 502, so that an attractive force acts between both electrodes. Then, as shown in FIG. 12, both ends a of the electrode,
In b, the distance between the electrodes becomes short, and the curvature of the electrode support 511 becomes large. Next, when the switch 540 is switched to the positive electrode side of the power source 550, electric charges of the same sign are accumulated in the electrodes 501 and 502, so that a repulsive force acts between both electrodes. Then, as shown in FIG. 13, the distance between the electrodes expands at both ends a and b of the electrodes, and the curvature of the electrode support 511 decreases. Next, the electrostatic actuator element shown in FIG. 14 will be described.

Electrodes 601 and 602 are supported and fixed to the side surfaces in the minor axis direction of an electrode support 610 having an elliptical cross section. Both electrodes are connected to the switch 640 via a power source 650 by terminals, and when the switch 640 is turned on, positive charges and negative charges are supplied to the electrodes 601 and 602, respectively. The outside of the electrode support 610 is covered with a dielectric 660 made of an elastic body. The dielectric 660 is supported and fixed only at the central portion C of both electrodes,
In the unloaded state, apart from the point C, they are separated from the electrodes 601 and 602 by a natural shape or elastic force.

With switch 640 off, electrode 6
Since no electric charge is stored in 01 and 602, the dielectric 660 is not attracted. Therefore, as shown in FIG. 14, the dielectric 660 is apart from the bulging electrodes 601 and 602 due to its natural shape or elastic force except for the point C. Then switch 4
When 00 is turned on, positive charges and negative charges are supplied to the electrodes 601 and 602, respectively. Then, the electrode 601,
A suction force acts between 602 and the dielectric 660, and
The dielectric 660 is deformed as shown in FIG.
It is adsorbed by 2 and extends in the major axis direction e. next,
The electrostatic actuator element shown in FIG. 16 will be described.

The electrodes 701 and 703 are supported and fixed inside an electrode support 711 having a U-shaped cross section. Electrode 70
An electrode 702 is inserted between 1 and 703. Electrode 7
Reference numeral 02 denotes a piece of an electrode support 712 having a U-shaped cross section with an open mouth in the opposite direction to the electrode support 711, and both side surfaces facing the electrodes 701 and 703 are made of the insulator 7 respectively.
It is covered with 31,732. Electrodes 701,703
Are respectively connected to the negative electrode and the positive electrode of the power source 750,
Always charged with negative potential and positive potential. In addition, the electrode 702
Is connected to the switch 740, and by switching the switch 740, it can be connected to either the positive electrode or the negative electrode of the power source 750.

In FIG. 16, switch 740 is open and no charge is stored on electrode 702. Therefore, the electrode support 712 can move freely. Next, when the switch 740 is connected to the positive electrode side of the power source 750, positive charge is accumulated in the electrode 702 and
And an repulsive force between the electrode 703 and the electrode 703.
For this reason, as shown in FIG.
Move to 01 side. Next, switch 740 to power supply 750
When it is connected to the negative electrode side of, the positive charge is accumulated in the electrode 702, and the repulsive force acts on the electrode 701 and the attractive force acts on the electrode 703. Therefore, as shown in FIG. 18, the electrode support 712 moves to the electrode 703 side. Next, FIG.
The electrostatic actuator element shown in will be described.

In the figure, the six elements shown in FIG. 1 are connected in series. Electrodes 801 and 802, Electrodes 803 and 8
04, ... Form capacitors respectively. The electrode 801 is on the electrode support 811, the electrodes 802 and 803 are on the electrode support 812, and the electrodes 804 and 805 are on the electrode support 8.
13 are respectively supported and fixed. Electrode support 8
The ends of 11, 11, 12, ... Are connected by spacers 861, 862 ,. Electrodes 801, 804, 805, 808, 809 and 80C are connected to ground 851. Electrodes 802, 803
806, 807, 80A and 80B are connected to the switch 840, and can be connected to the positive electrode side of the electrode 850 by switching the switch 840.

In FIG. 19, the switch 840 is connected to the ground side and there is no potential difference between the electrodes facing each other.
Therefore, the attraction force does not work between the electrodes and the spacers 861 and 86
The electrostatic actuator element 800 is driven by the elastic force of 2 ,.
Is expanding. Next, when the switch 840 is switched to connect to the positive electrode side of the power source 850, the electrodes 802 and 80
The positive charge is supplied to 3, 806, 807, 80A, and 80B, and the attractive force acts between the electrodes of each capacitor.
The electrostatic actuator element 800 contracts as shown in FIG.

As described above, the stroke length can be increased by connecting a large number of fine elements as shown in FIG. 1 in series. It is also possible to increase the driving force by connecting a plurality of electrostatic actuator elements in parallel, and to provide an actuator having a desired stroke length and driving force by combining series connection and parallel connection. be able to. Next, an inchworm according to the first embodiment of the present invention will be described with reference to FIGS.

The inchworm 910 includes two sets of series connection element groups 911, 913, 9 extending and contracting in the normal direction of the plane 941 in the parallel planes 941, 942 facing each other.
A series connection element group 912 is formed by connecting 11 and 913 and expanding and contracting in a direction parallel to the plane. The series-connected element groups 911, 912, 913 have the same structure as the electrostatic actuator element shown in FIG. 8, and can be individually expanded / contracted by the operation of each switch. In addition,
The wiring of the power source and the like in the inchworm 910 is complicated, and is therefore omitted in FIG.

In FIG. 21, the series connection element groups 911 and 9 are connected.
12 is expanded and 913 is contracted. Therefore, the expanded series connection element group 911 is compressed into the planes 941 and 942, and the compression force causes the inchworm 910.
Is supported and fixed between the planes. Next, the series connection element group 912 is contracted as shown in FIG. 22, the series connection element group 913 is expanded as shown in FIG. 23, and the series connection element group 911 is contracted as shown in FIG. In this state, the inchworm 910 is supported and fixed between the planes only by the compressive force of the series connection element group 913. Next, when the series connection element group 912 is expanded as shown in FIG. 25, the series connection element group 911 advances to the left. Further, as shown in FIG. 26, if the series connection element group 911 is expanded again, the inchworm 910 becomes 1 of the series connection element group 912.
This means that the stroke length has moved to the left in the figure. Here, if the series connection element group 913 is contracted, the state shown in FIG.

By repeating the above series of operations, the inchworm 910 can be continuously moved to the left side. Similarly, the inchworm 910 can also be moved to the right by performing the opposite operation. The inch worm 910 is a series connection element group 911, 91.
As long as it can be supported and fixed between the two surfaces by the expansion and contraction of 3, 941 and 942 may be tubular ones or curved ones instead of parallel planes. Next, the inchworm according to the second embodiment of the present invention will be described with reference to FIGS.
2 will be described.

The inchworm 1000 is placed on the plane 1040, and the series connection element group 1001 and the supports 1011 and 1012 connected to both ends of the series connection element group 1001.
And the fixed bodies 1021 and 1022 coupled to the other ends of the supports 1011 and 1012, respectively. The series connection element group 1001 has the same configuration as the electrostatic actuator element shown in FIG. 8 and is arranged so as to expand and contract in a direction substantially parallel to the plane 1040. The supports 1011 and 1012 are made of an elastic body and have flexibility in the direction orthogonal to the expansion and contraction of the series connection element group 1001. Stator 1021, 1022
And the flat surface 1040 face each other and have a function as an electrode. When electric charges having the same sign are supplied to the stator and the plane, repulsive forces act and repel each other, so that the support body bends and the stator floats from the plane. When electric charges having different signs are supplied to the stator and the flat surface, a suction force acts and the stator is attracted to the flat surface. The surface of the flat surface 1040 is covered with an insulating film 1030 so as not to short-circuit with the stators 1021 and 1022. The wiring of the power source and the like in the inchworm 1000 is complicated and is omitted in FIG. Hereinafter, the operation of the inchworm 1000 will be described. In FIG. 27, the stator 1021 is supplied with electric charges having a different sign from the plane 1040, and the stator 1022 is supplied with electric charges having the same sign as the plane 1040.
012 is bent and the stator 1021 is attracted to the flat surface 1040, and the stator 1022 is levitated from the flat surface 1040. The series connection element group 1001 is in an expanded state. Next, as shown in FIG. 28, the series connection element group 10
Shrink 01. Next, a flat surface 104 is attached to the stator 1022.
Charges having a sign different from 0 are supplied to attract the stator 1022 to the flat surface 1040 as shown in FIG. Next, the stator 1021 is supplied with electric charges having the same sign as the plane 1040,
The stator 1021 is levitated as shown in FIG. Next, when the series connection element group 1001 is expanded, the stator 1021 advances to the left as shown in FIG. Next, when a charge having a sign different from that of the flat surface 1040 is supplied to the stator 1021, the stator 1021 is attracted to the flat surface 1040 at a position on the left side of that in FIG. 27, as shown in FIG. When the electric charge having the same sign as that of the plane 1040 is supplied to the stator 1022 again, the stator 1022 levitates from the plane 1040 and the inchworm 1000 returns to the state of FIG.

By repeating the above operation, the inchworm 1000 can be continuously moved to the left side.
Further, similarly, the inchworm 1000 can be moved to the right side by performing a completely opposite operation. In addition,
The inchworm 1000 can operate even if 1040 is a curved surface instead of a flat surface. Next, an inchworm according to the third embodiment of the present invention will be described with reference to FIGS. 33 to 36.

The inchworm 1100 is arranged between two parallel plate electrodes 1112 and 1114, and element groups 1101 and 1102 in which wedge-shaped deformable elements as shown in FIG. 7 are connected in series in the normal direction of the plate, It is composed of fixing electrodes 1111 and 1113 coupled to both ends of the element group. Element group 1
Each of the electrostatic actuator elements constituting 101 and 1102 is deformed into a wedge shape in the advancing / retreating direction of the inchworm 1100, and at the time of deformation, the capacitor groups are arranged so that the element groups 1101 and 1102 always have substantially the same curvature and opposite directions. The polarity and voltage shall be set. Fixed electrode 11
11 and 1113 are switches 1141 and 1142, respectively.
Are connected to either the positive electrode of the power supply 1150 or the ground 1151 by switching them. The two parallel plate electrodes 1112 and 1114 are both ground 11
It is connected to 51. Fixed electrodes 1111 and 1113
Are opposed to the parallel plate electrodes 1112 and 1114, respectively, and by switching the switches 1141 and 1142, the electrodes are supported and fixed if the polarities are different from those of the parallel plate electrodes facing each other, and are separated if the polarities match. The surfaces of the fixing electrodes 1111 and 1113 are insulating films 113, respectively.
Parallel plate electrodes 1112, 111 covered with 1, 1132
It is designed not to short-circuit with 4. The wiring of the power source and the like in the inchworm 1100 is complicated and therefore omitted in FIG.

The operation of the inchworm 1100 will be described below. In FIG. 33, each element of the inchworm 1100 is in a contracted state, and the fixing electrodes 1111 and 1113 are fixed.
Switch 1141 and 1142 for power supply 1
The inch worm 1100 is connected to the positive electrode of 150 and the earth 1151.
It is supported and fixed to 112. Next, the inch worm 11
The element group 11101 of No. 00 is bent in the traveling direction and the element group 1102 is bent in the opposite direction, and the switch 1142 is switched to the positive electrode side of the power source 1150. Then, as shown in FIG. 34, the fixing electrode 1113 is supported and fixed to the parallel plate 1114 on the left side of the supporting position of the fixing electrode 1111 by the displacement caused by the bending of the element group. Next, each element of the inchworm 1100 is contracted, and the switch 1141 is switched to the ground 1151. Then, as shown in FIG.
It means that the inchworm 1100 is separated from 112 and has moved to the left side by a displacement corresponding to the bending of the element group with respect to FIG. Next, the element group 1102 of the inchworm 1100.
Is bent in the traveling direction and the element group 1101 is bent in the opposite direction, and the switch 1141 is connected to the power supply 11
Switch to the positive electrode side of 50. Then, as shown in FIG. 36, the fixing electrode 1111 is supported and fixed to the plane 1112 at a position on the left side by a displacement corresponding to the bending of the element group. further,
When each element of the inchworm 1100 is contracted and the switch 1142 is switched to the ground 1151, the state shown in FIG. 33 is restored at the supporting position on the left side by the bending displacement of two times.

By repeating the above operation, the inchworm 1100 can be continuously moved to the left side.
Similarly, the inchworm 1100 can be moved to the right side by performing the opposite operation. In addition,
If the inchworm 1100 can be supported and fixed inside the surface by bending the element groups 1101 and 1102,
2, 1114 may be tubular ones instead of parallel planes, or may be spaces surrounded by curved surfaces. next,
FIG. 3 shows an inchworm according to a fourth embodiment of the present invention.
This will be described with reference to FIGS.

The surface on which the inchworm 1200 moves is formed of a surface electrode 1240 and an insulator 1230 covering the surface. Electrodes 1201 and 1203, 1204 and 120
6 and 1207 and 1209 are installed on the electrode support 1211 so as to face each other, and are connected to a power source to form a capacitor. Electrodes 1202, 120
5 and 1208 are installed on the electrode support 1212 and inserted between the electrodes 1201 and 1203, 1204 and 1206 and 1207 and 1209, respectively. Electrode 120
The surfaces of 2, 1205 and 1208 are covered with thin insulating films. The fixing electrodes 1220 are provided on the left and right of the lower end of the electrode support 1211 in parallel with the surface electrode 1240.
And 1222 are installed. In addition, the electrode support 12
A fixing electrode 1221 is installed on the lower surface of 12 in parallel with the surface electrode 1240. These fixing electrodes 122
0, 1221 and 1222 are fixed by adsorption to the surface electrode 1240 when electric charges having a different sign from the surface electrode 1240 are supplied, and repelled from the surface electrode 1240 when electric charges having the same sign are supplied. There is. These components form the inchworm 1200.

The operation of the inchworm 1200 will be described below. Here, in order to simplify the explanation, unless otherwise specified, it is assumed that the electrodes 1201, 1204 and 1207 are supplied with positive charges and the electrodes 1203, 1206 and 1209 are supplied with negative charges, and the surface electrode 1240 is It is assumed that a negative charge is supplied. In FIG. 37, the fixed electrode 1221 is supplied with a negative charge, and the fixed electrode 1221 is
Also, the electrode support 1212 is repulsively separated from the surface electrode 1240. Further, a positive charge is supplied to the fixing electrodes 1220 and 1222 and is adsorbed and fixed to the surface electrode 1240. Here, when negative charges are supplied to the electrodes 1202, 1205, and 1208, these electrodes are respectively connected to the electrode 120.
1, 1204 and 1207 are adsorbed. Next, electrode 1
202, 1205 and 1208 charge and electrode 1201,
When the charges of 1204 and 1207 are dropped to ground and a positive charge is supplied to the fixing electrode 1221, the fixing electrode 1221 and the electrode support 1212 move downward and are adsorbed and fixed to the surface electrode 1240, as shown in FIG. Next, electrode 1
202, 1205 and 1208 and electrodes 1201, 120
4 and 1207 are grounded, and the fixing electrode 122
When a negative charge is supplied to 0 and 1222, the fixing electrodes 1220 and 1222 and the electrode support 12 as shown in FIG.
11 repels and floats from the surface electrode 1240. Next, electrode 1
When a positive charge is applied to 202, 1205 and 1208,
As shown in FIG. 40, electrodes 1202, 1205 and 120
8 is adsorbed and fixed to the electrodes 1203, 1206 and 1209, respectively. Next, the electrodes 1202, 1205 and 12
08 and the electrodes 1203, 1206 and 1209 are grounded and positive charges are supplied to the fixing electrodes 1220 and 1222, as shown in FIG.
2 and the electrode support 1211 move downward to move the surface electrode 1240.
Is fixed by adsorption. Next, when the negative charges are supplied to the fixing electrode 1221 while the electrodes 1202, 1205 and 1208 and the electrodes 1203, 1206 and 1209 are grounded, as shown in FIG. 42, the fixing electrode 1221 and the electrode supporting body 1212 become surface electrodes. Levitated from 1240. next,
When negative charges are supplied to the electrodes 1202, 1205 and 1208, the electrodes 1202, 1205 and 1208 receive repulsive force from the electrodes 1203, 1206 and 1209, respectively, and are attracted to the electrodes 1201, 1204 and 1207, and the electrodes 1202, 1205 and 1208. 1208 and the electrode support 1212 move to the left and return to the state of FIG. The inchworm 1200 can be continuously moved to the left by repeating the above operation. Similarly, the inchworm 1200 can be moved to the right side by performing the opposite operation.

[0039]

As described in detail above, according to the electrostatic actuator of the present invention, the following effects can be produced, which has great industrial significance.

(1) It is possible to perform minute displacement with high resolution. Since the element can be made of any material other than the electrode depending on its use, problems such as workability, durability, and weight reduction can be easily avoided.

(2) By using a material that does not have hysteresis in the stress-strain characteristic at the time of deformation, it is possible to solve the problem of hysteresis that could not be avoided by the piezoelectric element and facilitate control. Became.

(3) Since the output characteristics can be greatly adjusted by the distance between the electrodes, it is easy to provide the displacement and force characteristics suitable for the application. Further, by combining elements having various output characteristics, it is possible to cover a wide operation range from coarse movement to fine movement with a single structure.

(4) Since the electrostatic force is used, the inchworm can be held at a predetermined position for a long time without consuming energy unless charge leakage occurs. As a result, the energy conversion efficiency when performing intermittent motion can be dramatically improved.

(5) As for the manufacturing, since the lithography of the semiconductor manufacturing technology and the technology of the thin film volume method can be used, the structure is extremely minute and precise, and the integration is possible. Due to these features, it becomes possible to develop a minute actuator that was impossible with the conventional electromagnetic motor.

[Brief description of drawings]

FIG. 1 is a diagram showing an electrostatic actuator according to an embodiment of the present invention.

FIG. 2 is a diagram showing an electrostatic actuator according to an embodiment of the present invention.

FIG. 3 is a diagram showing an electrostatic actuator according to an embodiment of the present invention.

FIG. 4 is a diagram showing an electrostatic actuator according to an embodiment of the present invention.

FIG. 5 is a diagram showing an electrostatic actuator according to an embodiment of the present invention.

FIG. 6 is a diagram showing an electrostatic actuator according to an embodiment of the present invention.

FIG. 7 is a diagram showing an electrostatic actuator according to an embodiment of the present invention.

FIG. 8 is a diagram showing an electrostatic actuator according to an embodiment of the present invention.

FIG. 9 is a diagram showing an electrostatic actuator according to an embodiment of the present invention.

FIG. 10 is a diagram showing an electrostatic actuator according to an embodiment of the present invention.

FIG. 11 is a diagram showing an electrostatic actuator according to an embodiment of the present invention.

FIG. 12 is a diagram showing an electrostatic actuator according to an embodiment of the present invention.

FIG. 13 is a diagram showing an electrostatic actuator according to an embodiment of the present invention.

FIG. 14 is a diagram showing an electrostatic actuator according to an embodiment of the present invention.

FIG. 15 is a diagram showing an electrostatic actuator according to an embodiment of the present invention.

FIG. 16 is a diagram showing an electrostatic actuator according to an embodiment of the present invention.

FIG. 17 is a diagram showing an electrostatic actuator according to an embodiment of the present invention.

FIG. 18 is a diagram showing an electrostatic actuator according to an embodiment of the present invention.

FIG. 19 is a diagram showing an electrostatic actuator according to an embodiment of the present invention.

FIG. 20 is a diagram showing an electrostatic actuator according to an embodiment of the present invention.

FIG. 21 is a diagram showing an inchworm according to an embodiment of the present invention.

FIG. 22 is a diagram showing an inchworm according to an embodiment of the present invention.

FIG. 23 is a diagram showing an inchworm according to an embodiment of the present invention.

FIG. 24 is a diagram showing an inchworm according to an embodiment of the present invention.

FIG. 25 is a diagram showing an inchworm according to an embodiment of the present invention.

FIG. 26 is a diagram showing an inchworm according to an embodiment of the present invention.

FIG. 27 is a diagram showing an inchworm according to an embodiment of the present invention.

FIG. 28 is a diagram showing an inchworm according to an embodiment of the present invention.

FIG. 29 is a diagram showing an inchworm according to an embodiment of the present invention.

FIG. 30 is a diagram showing an inchworm according to an embodiment of the present invention.

FIG. 31 is a diagram showing an inchworm according to an embodiment of the present invention.

FIG. 32 is a diagram showing an inchworm according to an embodiment of the present invention.

FIG. 33 is a diagram showing an inchworm according to an embodiment of the present invention.

FIG. 34 is a diagram showing an inchworm according to an embodiment of the present invention.

FIG. 35 is a diagram showing an inchworm according to an embodiment of the present invention.

FIG. 36 is a diagram showing an inchworm according to an embodiment of the present invention.

FIG. 37 is a diagram showing an inchworm according to an embodiment of the present invention.

FIG. 38 is a diagram showing an inchworm according to an embodiment of the present invention.

FIG. 39 is a diagram showing an inchworm according to an embodiment of the present invention.

FIG. 40 is a diagram showing an inchworm according to an embodiment of the present invention.

FIG. 41 is a diagram showing an inchworm according to an embodiment of the present invention.

FIG. 42 is a diagram showing an inchworm according to an embodiment of the present invention.

[Explanation of symbols]

101, 102 ... Electrodes, 111, 112 ... Electrode support,
121, 122 ... Terminal, 140 ... Switch, 150 ... Power supply, 161, 162 ... Spacer,

Claims (2)

[Claims] 1. A body, which is arranged on an arbitrary surface and is capable of expanding and contracting, and has both ends capable of adsorbing / removing on the surface, and by performing expansion / contraction of the body and adsorption / desorption of the both ends alternately. In the movable inchworm, the body has one or a plurality of capacitors connected in series or in parallel, whose electrodes are connected by an elastic body, a power supply for supplying electric charge to each capacitor, each capacitor and the power supply. Inch worm, which is constituted by a switch for controlling the connection of the capacitor, and expands and contracts by utilizing the displacement of the distance between the electrodes due to a change in electrostatic force due to charging and discharging of the capacitor. 2. A body, which is arranged on an arbitrary surface and has an expandable and contractible body, and both ends capable of adsorbing and detaching on the surface, and by performing expansion and contraction of the body and adsorption and detachment of the both ends alternately. In a movable inchworm, the body is composed of a plurality of electrodes arranged to face each other in the moving direction, a power source for supplying electric charges to each electrode, and a switch for controlling connection between each electrode and each electrode. An inch worm that expands and contracts by utilizing the displacement of the distance between the electrodes when receiving an attractive force or a repulsive force according to the polarity of the charged electric charge and the electrostatic capacitance.