JPH05343943A - Piezoelectric component and manufacture thereof - Google Patents

Abstract

PURPOSE:To ensure a vibration space and to facilitate forming of a lead electrode. CONSTITUTION:A 1st layer 11 is made of an insulation material, has a recessed part 111 open at one side and conductor layers 112, 113 are adhered on ad end face around the recessed part 111. A 2nd layer 12 is made of an insulation material and laminated on the end face of the 1st layer 11 so that the conductor layers 112, 113 are exposed at an inner circumferential side 121 and an outer circumferential side 122. A piezoelectric vibrator 2 has vibration electrodes 22, 23 opposite to each other on both sides of a piezoelectric substrate 21, its thickness d2 is thinner than a thickness d1 of the 2nd layer and they are mounted on an exposed part of the conductor layers 112, 113 placed at the inner circumferential side of the 2nd layer 12 and the vibration electrodes 22, 23 are in continuity with the conductor layers 112, 113.

Description

Detailed Description of the Invention

[0001]

The present invention relates to a ceramic filter,
Regarding a piezoelectric component used for a ceramic resonator, a trap element, a discriminator, or the like, a piezoelectric component capable of reliably securing a vibration space, facilitating formation of an extraction electrode, and improving mass productivity, and a manufacturing method thereof. Pertain.

[0002]

2. Description of the Related Art In this type of piezoelectric component, it is necessary to secure a vibrating space so as to support a piezoelectric vibrator in which vibrating electrodes are formed on both sides of the piezoelectric component so that a vibration failure does not occur. Various techniques have been proposed as means for achieving this. As one of them, there is a technique of providing a stepped step on the inner wall of the case and mounting a piezoelectric vibrator on the stepped portion to secure a vibrating space.
No. 9-67026 and the like.

[0003]

However, the above-mentioned conventional piezoelectric component has the following problems. (A) The lead electrode from the inside to the outside of the case is formed by plating the step portion. For this reason, the plating operation becomes complicated and mass productivity deteriorates. The case (B) requires a step, which complicates the mold and is not easy to manufacture.

Therefore, an object of the present invention is to solve the above-mentioned conventional problems, ensure a vibration space, facilitate the formation of the extraction electrode, and improve the mass productivity, and a method of manufacturing the same. Is to provide.

[0005]

In order to solve the above problems, the present invention is a piezoelectric component including an outer package and a piezoelectric vibrator, the outer package including at least two layers, The first layer is made of an insulating material, has a concave portion that opens at least on one surface side in the thickness direction, a conductor layer is attached to an end surface around the concave portion, and the second layer is an insulating material. The piezoelectric vibrator is laminated on the end surface of the first layer so that the conductor layers are exposed on the inner and outer peripheral sides, and the piezoelectric vibrator is provided on both surfaces of a piezoelectric substrate, and vibrating electrodes facing each other. And having a thickness smaller than that of the second layer and mounted on an exposed portion of the conductor layer located on an inner peripheral side of the second layer, and the vibrating electrode is electrically connected to the conductor layer. There is.

In order to obtain the above-mentioned piezoelectric component, the method for manufacturing a piezoelectric component according to the present invention includes a laminating step, a firing step and an assembling step, the laminating step comprising the step of forming the first layer on the first layer. A step of stacking two layers to form a laminated body, the firing step is a step of firing the laminated body, and the assembling step is a step of assembling a piezoelectric vibrator to the fired laminated body. Is.

[0007]

The outer package includes at least two layers,
The first layer has a concave portion that is open on at least one surface side in the thickness direction, the conductor layer is attached to the end surface around the concave portion, and the second layer is laminated on the end surface of the first layer. Has been done,
Since the thickness of the piezoelectric vibrator is smaller than the thickness of the second layer, the vibration space due to the recess is formed on one side of the piezoelectric vibrator, and the thickness of the second layer and the piezoelectric vibrator on the other side. A vibration space is formed due to the difference of

The first layer is made of an insulating material, and the conductor layer is attached on the end face around the recess, and the second layer is
The piezoelectric vibrator is formed of an insulating material and is laminated on the end surface of the first layer so that the conductor layer is exposed on the inner peripheral side. The piezoelectric vibrator has vibration electrodes facing each other on both surfaces of the piezoelectric substrate. Since it is mounted on the exposed portion of the conductor layer located on the inner peripheral side of the layer, the conductor layer and the vibrating electrode can be easily connected.

Since the second layer is laminated on the end face of the first layer so that the conductor layer is exposed on the outer peripheral side, it is necessary to form the lead electrode by plating the step portion as in the conventional case. Therefore, mass productivity is improved. Moreover, since the conductor layer is exposed to the outside of the second layer, the conductor layer and the terminal electrode provided on the outer surface of the outer package can be easily connected.

In order to obtain the above-mentioned piezoelectric component, the method for manufacturing a piezoelectric component according to the present invention includes a laminating process, a baking process and an assembling process. In the laminating step, the second layer is laminated on the first layer to form a laminated body. In the firing step, the laminated body is fired. In the assembling step, the piezoelectric vibrator is attached to the fired laminated body. As a result, the vibration space can be reliably ensured, the extraction electrode can be easily formed, and the piezoelectric component can be manufactured with high mass productivity.

[0011]

1 is a sectional view of an embodiment of a piezoelectric component according to the present invention. In the figure, 1 is an exterior body, and 2 is a piezoelectric vibrator.

The outer package 1 includes at least two layers. The first layer 11 is made of an insulating material, has a recess 111 that opens at least on one side in the thickness direction, and conductor layers 112 and 113 are attached to the end faces around the recess 111. The recess 111 constitutes a part of the internal space 3. The second layer 12 is made of an insulating material and has an inner peripheral side 1
21 and the outer peripheral side 122 are laminated on the end surface of the first layer 11 so that the conductor layers 112 and 113 are exposed. Second
The inner peripheral side 121 of the layer 12 constitutes another portion of the internal space 3. As the insulating material for the first layer 11 and the second layer 12, a material such as a dielectric material, alumina, or a ferroelectric material is used. 14 is a 4th layer and 15 is a 5th layer.
The first layer 11 and the second layer 12 include the fourth layer 14 and the fifth layer.
It is enclosed by a layer 15 of.

The piezoelectric vibrator 2 has vibrating electrodes 22 and 23 facing each other on both sides of a piezoelectric substrate 21, and has a thickness d2 smaller than the thickness d1 of the second layer. Vibrating electrode 22,
The facing part of 23 constitutes a vibrating part. Piezoelectric vibrator 2
Are mounted on the exposed portions of the conductor layers 112 and 113 located on the inner peripheral side 121 of the second layer 12 such that the vibrating portion is located inside the internal space 3. The vibrating electrodes 22 and 23 are
The conductive adhesives 43 and 44 are electrically connected to the conductor layers 112 and 113.

As described above, the outer package 1 includes at least two layers, and the first layer 11 has the recess 111 that is open at least on one side in the thickness direction.
1, the conductor layers 112 and 113 are attached to the end faces of the first layer 11, the second layer 12 is laminated on the end faces of the first layer 11, and the piezoelectric vibrator 2 has the thickness d2 of the second. Since the thickness is smaller than the thickness d1 of the second layer, the vibration space 3 formed by the recess 111 is formed on one side of the piezoelectric vibrator 2, and the thickness d1 of the second layer and the thickness d2 of the piezoelectric vibrator are formed on the other side. The vibration space 3 is formed by the difference of.

The first layer 11 is made of an insulating material, the conductor layers 112 and 113 are attached to the end faces around the recess 111, and the second layer 12 is made of an insulating material and has an inner circumference. The piezoelectric vibrator 2 is laminated on the end surface of the first layer 11 so that the conductor layers 112 and 113 are exposed at the side 121, and the piezoelectric vibrator 2 has vibrating electrodes 22 and 23 facing each other on both surfaces of the piezoelectric substrate 21. The conductor layer 1 located on the inner peripheral side 121 of the second layer 12
Since it is mounted on the exposed portions of the electrodes 12, 113, the conductor layers 112, 113 and the vibrating electrodes 22, 23 can be easily connected.

The second layer 12 is a conductor layer 1 on the outer peripheral side 121.
Since the layers 12 and 113 are laminated on the end surface of the first layer 11 so as to be exposed, it is not necessary to form a lead electrode by plating the step portion as in the conventional case, and the mass productivity is improved. Moreover, since the conductor layers 112 and 113 are exposed to the outside of the second layer 12, the conductor layers 112 and 113 can be easily connected to the terminal electrodes 41 and 42 provided on the outer surface of the outer package 1.

Further, in the embodiment, the piezoelectric vibrator 2 is
It has an electrode 24, 25. The lead electrode 24 is electrically connected to the vibrating electrode 22, is provided from one surface side to the other surface side of the piezoelectric substrate 21, and is electrically connected to the conductor layer 112. The lead electrode 25 is electrically connected to the vibrating electrode 23, is provided from one surface side to the other surface side of the piezoelectric substrate 21, and is electrically connected to the conductor layer 113. A gap G1 is provided between the lead electrode 24 and the vibrating electrode 23, and a gap G2 is provided between the lead electrode 25 and the vibrating electrode 22. Since the lead electrodes 24 and 25 are provided on both surfaces of the piezoelectric substrate 21, the vibrating electrodes 22 and 23 can be easily connected to the conductor layers 112 and 113 and can be surely conducted.

Further, in the embodiment, terminal electrodes 41 and 42 are included. The terminal electrodes 41 and 42 are attached to the outer surface of the outer package 1 and are electrically connected to the conductor layers 112 and 113. As a result, a piezoelectric component suitable for surface mounting can be obtained.

FIG. 2 is a sectional view showing another embodiment of the piezoelectric component according to the present invention. In the figure, the same reference numerals as those in FIG. 1 denote the same components.

The outer package 1 includes a third layer 13.
The third layer 13 is made of an insulating material, has a recess 131, and has conductor layers 132, 133 on the lower surface around the recess 131.
Is attached. The recess 131 constitutes the other part of the internal space 3. The third layer 13 is laminated on the second layer 12 such that the conductor layers 132 and 133 are exposed on the inner peripheral side 121 and the outer peripheral side 122 of the second layer 12.
The thickness d1 of the second layer 12 is set to be substantially the same as the thickness of the piezoelectric vibrator 2. Reference numerals 26 and 27 are dummy electrodes.
The dummy electrodes 26 and 27 are provided for equalizing the thickness of the piezoelectric vibrator 2 at both ends. Thereby, the conductor layer 112,
Since 113 and the conductor layers 132 and 133 are provided on the respective surfaces of the piezoelectric vibrator 2, the vibrating electrodes 22 and 23 can be formed without forming lead electrodes on both surfaces of the piezoelectric vibrator 2.
And the terminal electrodes 41 and 42 can be easily conducted.

3 to 7 are views showing a manufacturing process of the piezoelectric component shown in FIG. 3 is a stacking process diagram, FIG. 4 is a firing process, FIG. 5 is a terminal electrode firing process, FIG. 6 is a piezoelectric vibrator assembly process, and FIG. 7 is a sealing process. As shown in FIG. 3, the first layer 11 is made of an insulating sheet and has a through hole formed by punching. Conductor layer 11
2, 113 are formed on the upper surface by printing. The through hole becomes the recess 111. The second layer 12 is made of an insulating sheet and has a through hole 123 formed by punching. The through hole 123 constitutes the inner diameter side 121. The fourth layer 14 is an insulating sheet. The fourth layer 14, the first layer 11 and the second layer 12 are sequentially laminated to form a laminated body as shown in FIG.

Next, in the firing step, the laminate shown in FIG. 4 is fired. After that, the laminate is cut. The laminate may be cut before firing and fired after that.

Next, as shown in FIG. 5, in the terminal electrode baking step, an electrode material is applied to the outer surface of the laminate by screen printing or the like and baked to form the terminal electrodes 41 and 42. Electrode materials include base metal materials such as copper, silver, palladium,
Platinum, gold or alloys thereof are suitable.

Next, as shown in FIG. 6, in the assembly process,
The piezoelectric vibrator 2 is attached to the fired laminated body. The piezoelectric vibrator 2 includes a conductive adhesive material 43, a conductive adhesive material 43,
It is fixed by 44.

Next, as shown in FIG. 7, in the sealing step,
The fifth layer 15 is covered on the laminate to form the outer package 1 in a hermetically sealed structure.

As a result, the vibration space of the piezoelectric vibrator is surely secured, the extraction electrode is easily formed, and the piezoelectric component can be manufactured with high mass productivity.

8 to 12 are views showing a manufacturing process of the piezoelectric component shown in FIG. FIG. 8 is a stacking process diagram, FIG. 9 is a firing process, FIG. 10 is a terminal electrode firing process, FIG. 11 is a piezoelectric vibrator assembly process, and FIG. 12 is a sealing process. In the figure, the same reference numerals as those in FIGS. 3 to 7 denote the same components. As shown in FIG. 8, the first layer 11 is
It is composed of an insulating sheet, and is recessed by pressing or the like.
11 is formed. Conductor layers 112 and 113 are formed on the upper surface by printing. The second layer 12 is an insulating sheet.
And a through hole is formed by punching. The through hole constitutes the inner diameter side 121. The second layer 12 is laminated on the first layer 11 to form a laminated body as shown in FIG.

The firing step, the terminal electrode firing step, the assembly step and the sealing step are the same as in the method of manufacturing the piezoelectric component shown in FIG. The third layer 13 is manufactured by a method similar to that of the first layer 11. The first layer 11 and the third layer 13 are conductor layers 1
12, 113 and the conductor layers 132, 133 are piezoelectric vibrators 2.
Are assembled so as to face each other.

In the laminating step, the laminated body may be obtained as a printing step such as screen printing.

Further, in the stacking process shown in FIGS. 3 and 8, the plurality of concave portions 11 in which the first layers 11 are arranged at intervals.
1 and the second layer 12 has a plurality of through holes 123 arranged at intervals, and the recess 111 and the through holes 123.
Are stacked, and the second layer 12 is laminated on the first layer 11. Thereby, a plurality of piezoelectric components can be manufactured simultaneously.

FIG. 13 is a sectional view showing still another embodiment of the piezoelectric component according to the present invention. In the figure, FIG. 1 and FIG.
The same reference numerals as in FIG. In this embodiment, the terminal electrode 45 is provided on the outer surface of the first layer 11,
Together with the conductor layers 112 and 113, capacitors C1 and C2 using the first layer 11 as a dielectric material are formed. Conductor layer 1
The capacitor C1 is formed between the conductor layer 113 and the terminal electrode 43, and the capacitor C1 is formed between the conductor layer 113 and the terminal electrode 43.
2 is formed, and a piezoelectric component having an equivalent circuit as shown in FIG. 14 is obtained.

[0032]

As described above, according to the present invention, the following effects can be obtained. (A) The outer package includes at least two layers, and the first layer has a concave portion that opens at least on one surface side in the thickness direction, and the conductor layer is attached to the end surface around the concave portion. , The second layer is laminated on the end face of the first layer,
Since the piezoelectric vibrator has a thickness smaller than that of the second layer, it is possible to provide a piezoelectric component capable of reliably ensuring the vibration space of the piezoelectric vibrator. (B) The first layer is made of an insulating material, and the conductor layer is attached to the end surface around the recess. The second layer is made of the insulating material, and the conductor layer is exposed on the inner peripheral side. As described above, the piezoelectric vibrator is laminated on the end surface of the first layer, and the piezoelectric vibrator has vibrating electrodes facing each other on both sides of the piezoelectric substrate, and the conductor layer located on the inner peripheral side of the second layer is exposed Since it is mounted on the portion, it is possible to provide a piezoelectric component that can facilitate the connection between the conductor layer and the vibration electrode. (C) Since the second layer is laminated on the end face of the first layer so that the conductor layer is exposed on the outer peripheral side, it is not necessary to plate the stepped portion to form the extraction electrode, and mass production is possible. It is possible to provide a piezoelectric component that can improve the property. (D) Since the conductor layer is exposed to the outside of the second layer, it is possible to provide a piezoelectric component that can facilitate the connection between the conductor layer and the terminal electrode provided on the outer surface of the exterior body. (E) A method of manufacturing a piezoelectric component according to the present invention includes a laminating step,
It includes a baking process and an assembly process.
Is a step of stacking a second layer on the above layer to form a laminated body, the firing step is a step of firing the laminated body, and the assembly step is a step of assembling the piezoelectric vibrator to the fired laminated body. Since it is the attaching step, it is possible to reliably secure the vibration space, easily form the extraction electrode, and manufacture the piezoelectric component with good mass productivity.

[Brief description of drawings]

FIG. 1 is a sectional view of an embodiment of a piezoelectric component according to the present invention.

FIG. 2 is a cross-sectional view showing another embodiment of the piezoelectric component according to the present invention.

[Figure 3]

FIG. 7 is a diagram showing a manufacturing process of the piezoelectric component shown in FIG. 1.

[Figure 8]

12 is a diagram showing a manufacturing process of the piezoelectric component shown in FIG.

FIG. 13 is a sectional view showing yet another embodiment of the piezoelectric component according to the present invention.

FIG. 14 is an equivalent circuit diagram of the piezoelectric component shown in FIG.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Exterior body 11 1st layer 111 Recesses 112, 113 Conductor layer 12 2nd layer 2 Piezoelectric vibrator 22,23 Vibrating electrode 3 Vibrating space 41, 42 Terminal electrode

Claims (9)

[Claims] 1. A piezoelectric component including an exterior body and a piezoelectric vibrator, wherein the exterior body includes at least two layers, and
Layer is made of an insulating material, has a recess that opens at least on one side in the thickness direction, a conductor layer is attached to the end face around the recess, and the second layer is made of an insulating material. Are laminated on the end face of the first layer so that the conductor layers are exposed on the inner and outer peripheral sides, and the piezoelectric vibrator has vibrating electrodes facing each other on both sides of the piezoelectric substrate. The piezoelectric element is thinner than the second layer and is mounted on the exposed portion of the conductor layer located on the inner peripheral side of the second layer, and the vibrating electrode is electrically connected to the conductor layer. parts. 2. The piezoelectric vibrator has a lead electrode,
The piezoelectric component according to claim 1, wherein the lead electrode is electrically connected to the vibrating electrode, is provided from one surface side to the other surface side of the piezoelectric substrate, and is electrically connected to the conductor layer. 3. The piezoelectric component according to claim 1, further comprising a terminal electrode, wherein the terminal electrode is attached to an outer surface of the outer package and is electrically connected to the conductor layer. 4. The exterior body includes a third layer,
The third layer is made of an insulating material, has another recess, and another conductor layer is attached to the lower surface around the other recess, and the inner peripheral side of the second layer and The piezoelectric component according to claim 1, 2 or 3, which is laminated on the second layer so that the other conductor layer is exposed on the outer peripheral side. 5. A manufacturing method for manufacturing the piezoelectric component according to claim 1, comprising a laminating step, a firing step, and an assembling step, wherein the laminating step is performed on the first layer. A step of stacking the second layer on top to form a stacked body, the firing step is a step of firing the stacked body, and the assembly step is a piezoelectric vibrator on the fired laminated body. A method of manufacturing a piezoelectric component, which is a step of assembling the component. 6. The manufacturing method for manufacturing the piezoelectric component according to claim 4, comprising a laminating step, a firing step, and an assembling step, wherein the laminating step comprises forming the first layer on the first layer. Laminating two layers to form a laminated body, the firing step is a step of firing the laminated body, and the assembling step includes assembling a piezoelectric vibrator to the fired laminated body, Then, a method of manufacturing a piezoelectric component, which is a step of laminating the third layer on the laminated body. 7. The manufacturing method according to claim 5, wherein the laminating step has a plurality of recesses in which the first layer is arranged at intervals, and the second layer is provided. Piezoelectric layer including a plurality of through holes arranged at intervals, and stacking the second layer on the first layer by overlapping the recesses and the through holes. Manufacturing method of parts. 8. The manufacturing method according to claim 7, wherein the first layer and the second layer are made of an insulating sheet. 9. The manufacturing method according to claim 7, wherein the first layer and the second layer are formed in a printing process.