JPH05338182A - Production of ink jet head - Google Patents

Production of ink jet head

Info

Publication number
JPH05338182A
JPH05338182A JP17477592A JP17477592A JPH05338182A JP H05338182 A JPH05338182 A JP H05338182A JP 17477592 A JP17477592 A JP 17477592A JP 17477592 A JP17477592 A JP 17477592A JP H05338182 A JPH05338182 A JP H05338182A
Authority
JP
Japan
Prior art keywords
adhesive
ink jet
flow path
jet head
ink
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17477592A
Other languages
Japanese (ja)
Inventor
Yoshihisa Ota
善久 太田
Osamu Naruse
修 成瀬
Kozo Sudo
浩三 須藤
Kenichi Ichikawa
憲一 市川
Toshikazu Hirakawa
利和 平川
Yuichiro Ishii
雄一郎 石井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ricoh Co Ltd
Original Assignee
Ricoh Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ricoh Co Ltd filed Critical Ricoh Co Ltd
Priority to JP17477592A priority Critical patent/JPH05338182A/en
Publication of JPH05338182A publication Critical patent/JPH05338182A/en
Pending legal-status Critical Current

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  • Particle Formation And Scattering Control In Inkjet Printers (AREA)

Abstract

PURPOSE:To obtain a precise ink jet head having high reliability. CONSTITUTION:In a drawing (a), groove processing is applied to a laminated piezoelectric member 1 and a member composed of the material quality low in humidity permeability of a polymeric material is bonded as a membrane member 5. In a drawing (b), the groove part 2 of the piezoelectric member 1 is filled with a low viscosity resin as a damper 6. In a drawing (c), an adhesive 8 is applied to the forming surface of a passage plate 7 to which a groove part 9 is formed corresponding to the drive part of the piezoelectric member 1. In a drawing (d), the passage plate 7 coated with the adhesive of the drawing (c) is bonded to the piezoelectric member 1 and membrane member 5 of the drawing (a).

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【技術分野】本発明は、インクジェットヘッドの製造方
法に関し、より詳細には、多数のインク吐出用流路を高
密度に集積したマルチノズルインクジェットヘッドの製
造方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing an inkjet head, and more particularly, to a method for manufacturing a multi-nozzle inkjet head in which a large number of ink discharge channels are integrated at high density.

【0002】[0002]

【従来技術】従来の記録ヘッドには、構造、加工、高速
記録化、マルチオリフィス化等のうえで種々の問題が存
在している。また、液体の流路や素子が極めて微細な構
造となっているために、接着剤の粘度や表面張力等の影
響等があり、適当量の接着剤を塗布することや、プレー
トと基板の正確な接着一体化が難しいという問題点があ
った。これらの問題点を解決するために、例えば、特
開昭55−118875号公報に「マルチノズル記録ヘ
ッドの作成方法」が提案されている。この公報のもの
は、複数の凹溝部を有する流路板と、該凹溝部を覆う覆
板部材とを接合してインクキャビティを形成するインク
ジェットヘッドにおいて、前記接合を前記流路板の凸部
に熱融着性材料を設け、その後、融着性材料を加熱する
ことにより、前記流路板と前記覆板部材を一体化するも
のである。
2. Description of the Related Art Conventional recording heads have various problems in structure, processing, high-speed recording, multi-orifice, etc. In addition, since the liquid flow paths and elements have an extremely fine structure, there are effects such as the viscosity and surface tension of the adhesive, so it is necessary to apply an appropriate amount of adhesive, There was a problem that it was difficult to bond and integrate them. In order to solve these problems, for example, Japanese Patent Application Laid-Open No. 55-118875 proposes a "method for producing a multi-nozzle recording head". This publication discloses an ink jet head in which a flow channel plate having a plurality of concave groove portions and a cover plate member that covers the concave groove portions are bonded to each other to form an ink cavity. By providing a heat-fusible material and then heating the fusible material, the flow path plate and the cover plate member are integrated.

【0003】しかしながら、複数の凹溝が形成された流
路板の凸部のみに均一の熱融着用材料を塗布するのは非
常に困難である。また融着用材料として上げられている
エチレン・酢酸ビニル共重合体、塩化ビニル・酢酸ビニ
ル共重合体、ポリビニルブチラート、ポリエチレン、ポ
リアミド等はいずれも100℃を越える高温で融着する
必要があり、高集積化した超微細加工においては、熱変
形等の不都合な点が多い。
However, it is very difficult to apply the uniform material for heat fusion only to the convex portions of the flow path plate in which the plurality of concave grooves are formed. In addition, all of the ethylene / vinyl acetate copolymers, vinyl chloride / vinyl acetate copolymers, polyvinyl butyrate, polyethylene, polyamides, etc., which have been mentioned as materials for fusing, need to be fused at a temperature higher than 100 ° C., In highly integrated ultrafine processing, there are many disadvantages such as thermal deformation.

【0004】また、特開昭58−220754号公報
に提案されている「インクジェット記録ヘッド」は、複
数の凹溝部を有する流路板と、該凹溝部を覆う覆板部材
とを接合してインクキャビティを形成するインクジェッ
トヘッドにおいて、前記覆板部材に透紫外光材料から成
る支持体の両面に感光性樹脂膜を積層した覆いを設け、
紫外線を照射して流路板を接合するものである。また、
特開昭60−183158号公報に提案されている
「インクジェット記録ヘッドの製造方法」は、複数の凹
溝部を有する流路板と、該凹溝部を覆う覆板部材とを接
合してインクキャビティを形成するインクジェットヘッ
ドにおいて、前記覆板部材を電磁波の透過する材料から
なる平板状部材に感光性樹脂膜を積層して構成し、酸素
雰囲気下に熱線以外の電磁波を照射して前記感光性樹脂
膜の表面層のみを未硬化の状態に保ちつつ硬化させ、流
路板と仮接合後、前記感光性樹脂膜を硬化させる接合方
法である。
Further, in the "ink jet recording head" proposed in Japanese Patent Laid-Open No. 58-220754, ink is formed by joining a flow path plate having a plurality of concave groove portions and a cover plate member covering the concave groove portions. In an inkjet head that forms a cavity, the cover plate member is provided with a cover in which a photosensitive resin film is laminated on both surfaces of a support made of a transparent ultraviolet light material,
It irradiates ultraviolet rays to join the flow path plates. Also,
In the "method for manufacturing an inkjet recording head" proposed in Japanese Patent Laid-Open No. 60-183158, a flow path plate having a plurality of concave groove portions and a cover plate member that covers the concave groove portions are joined to form an ink cavity. In the inkjet head to be formed, the cover plate member is formed by laminating a photosensitive resin film on a flat plate-shaped member made of a material that transmits electromagnetic waves, and the photosensitive resin film is irradiated with electromagnetic waves other than heat rays in an oxygen atmosphere. Is a bonding method in which only the surface layer is cured while being kept uncured, and the photosensitive resin film is cured after temporary bonding to the flow path plate.

【0005】しかしながら、前記のものは、複数の
凹溝が形成された流路板の凹溝を覆う覆板部材が紫外線
や電磁波を通過させる部材であることが条件として必要
である。インクキャビティの剛性を向上させ、インク吐
出特性を良好なものにするためにもインクキャビティま
わりの構成部材の限定は極力排除することが望ましい。
However, the above-mentioned requirement is that the cover plate member for covering the concave grooves of the flow path plate in which a plurality of concave grooves are formed is a member that allows passage of ultraviolet rays and electromagnetic waves. In order to improve the rigidity of the ink cavity and improve the ink ejection characteristics, it is desirable to eliminate the limitation of the constituent members around the ink cavity as much as possible.

【0006】[0006]

【目的】本発明は、上述のごとき実情に鑑みてなされた
もので、精密でありかつ信頼性の高いインクジェットヘ
ッドの製造方法を提供することを目的としてなされたも
のである。
[Purpose] The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a method of manufacturing an inkjet head which is precise and highly reliable.

【0007】[0007]

【構成】本発明は、上記目的を達成するために、複数の
凹溝部を有する流路板と、該凹溝部を覆う覆板部材とで
インクキャビティを形成しているインクジェットヘッド
において、前記流路板と前記覆板部材を接合する際、前
記流路板の凹溝加工側の全面に均一に接着剤を塗布して
接合することを特徴としたものである。以下、本発明の
実施例に基づいて説明する。
In order to achieve the above object, the present invention provides an ink jet head in which an ink cavity is formed by a flow channel plate having a plurality of concave groove portions and a cover plate member which covers the concave groove portions. When joining the plate and the cover plate member, an adhesive is uniformly applied to the entire surface of the flow path plate on the side where the groove is processed, and the plate is joined. Hereinafter, description will be given based on examples of the present invention.

【0008】図1(a)〜(d)は、本発明によるイン
クジェットヘッドの製造方法の一実施例を説明するため
の構成図で、図中、1は圧電体、2は溝部、3は電極、
4は駆動部分、5は薄膜部材、6はダンパー、7は流路
板、8は接着剤、9は凹溝部、10はインクキャビティ
である。図(a)の第1工程において、複数枚積層され
た圧電体1に、溝加工を切削により施した後、薄膜部材
5として5〜30μmの厚みをもつ高分子材料、例え
ば、ポリフェニレンサルファイド(PPS)、アラミド
フィルム、ポリ3フッ化塩化エチレンなど比較的透湿性
の低い材質のものをドライ接着法により接合する。な
お、この時、接合強度を向上させるために、圧電体1の
凸部上面にセラミックコートなどコーティングを施して
もよい。
1 (a) to 1 (d) are configuration diagrams for explaining an embodiment of a method of manufacturing an ink jet head according to the present invention, in which 1 is a piezoelectric body, 2 is a groove portion, and 3 is an electrode. ,
Reference numeral 4 is a driving portion, 5 is a thin film member, 6 is a damper, 7 is a flow path plate, 8 is an adhesive, 9 is a concave groove portion, and 10 is an ink cavity. In the first step of FIG. 1A, a plurality of laminated piezoelectric bodies 1 are subjected to groove processing by cutting, and then a thin film member 5 is made of a polymer material having a thickness of 5 to 30 μm, such as polyphenylene sulfide (PPS). ), Aramid film, poly (trifluorochloroethylene), and other materials having relatively low moisture permeability are bonded by a dry bonding method. At this time, in order to improve the bonding strength, a coating such as a ceramic coat may be applied to the upper surface of the convex portion of the piezoelectric body 1.

【0009】図(b)の第2工程において、圧電体1の
溝部2に粘度の低いエポキシ樹脂、シリコン樹脂等をダ
ンパー6として充填することにより、ヘッドの高集積化
の際、問題となる隣接流路間の相互干渉を低減する効果
を持たせることができる。なお、流路間の相互干渉が大
きいと不必要滴の噴射や駆動時の非噴射などヘッド噴射
特性に悪影響を及ぼす。
In the second step of FIG. 2B, the groove 2 of the piezoelectric body 1 is filled with a low-viscosity epoxy resin, silicone resin, or the like as the damper 6, so that a problem arises when the head is highly integrated. The effect of reducing mutual interference between the flow paths can be provided. If the mutual interference between the flow paths is large, the head ejection characteristics such as ejection of unnecessary drops and non-ejection during driving are adversely affected.

【0010】図(c)の第3工程において、複数の凹溝
部9を前記圧電体1の駆動部に対応するように切削もし
くは成形した高分子材料(例えばPPSやポリエーテル
サルホンや液晶ポリマーなど)に凹溝内部を含めて、凹
溝形成面一面に接着剤8を塗布する。このとき。流路板
7の表面に接合強度を向上させる目的で、何らかの改質
を施すことも可能である(例えば、UV照射や逆スパッ
タリングなど)。塗布する方法として、スプレー方式、
スピンコーター方式などが考えられるが、いずれの方式
も、流路板の凸部のみの塗布にくらべて非常に容易であ
る。
In the third step of FIG. 1C, a polymer material (for example, PPS, polyether sulfone, liquid crystal polymer, etc.) in which a plurality of concave groove portions 9 are cut or molded so as to correspond to the driving portion of the piezoelectric body 1 is formed. The adhesive 8 is applied to the entire groove forming surface including the inside of the groove. At this time. For the purpose of improving the bonding strength on the surface of the flow path plate 7, it is possible to perform some modification (for example, UV irradiation or reverse sputtering). As a coating method, a spray method,
Although a spin coater method or the like is conceivable, any method is much easier than applying only the convex portions of the flow path plate.

【0011】なお、ここで接合後形成されるインクキャ
ビティにも接着剤が残存するため、インクに対しての耐
液性、インクへの溶出等がない接着剤を選ぶ必要があ
る。また、インクキャビティの剛性を向上させ、インク
噴射特性を良好にするためにも接着剤は硬化後に高弾性
率を持つものが良い。前述のような特性を兼ねそなえた
接着剤としては、硬化剤として脂肪族ポリアミンを用い
たエポキシ樹脂系接着剤がある。
Since the adhesive remains in the ink cavities formed after joining here, it is necessary to select an adhesive that has no liquid resistance to the ink and no elution into the ink. Further, in order to improve the rigidity of the ink cavity and improve the ink ejection characteristics, it is preferable that the adhesive has a high elastic modulus after curing. An epoxy resin adhesive that uses an aliphatic polyamine as a curing agent is an adhesive that also has the above-mentioned characteristics.

【0012】図(d)において、第1工程に示した圧電
体1及び薄膜部材5に第3工程に示した接着剤8を塗布
した流路板7を接合する。ここで、流路板7に塗布した
接着剤8を2液性常温硬化型接着剤にすれば、常温放置
での硬化が可能である。また、ヘッド構成上、50℃〜
80℃程度の加熱が支障なく行える場合は、より接合強
度を上げ硬化時間を短縮するために50℃〜80℃の加
熱硬化を施してもよい。以上のような工程により圧電体
1、薄膜部材5、流路板7を接合すれば、流路板7は電
磁波や、紫外線等を通す必要がないため、無機添加物等
を含有することができ、材料選定の範囲が大幅に広が
り、インクキャビティを形成することができる。
In FIG. 2D, the flow path plate 7 coated with the adhesive 8 shown in the third step is joined to the piezoelectric body 1 and the thin film member 5 shown in the first step. Here, if the adhesive 8 applied to the flow path plate 7 is a two-component room temperature curing type adhesive, it can be cured at room temperature. Also, due to the head configuration,
When heating at about 80 ° C. can be performed without any trouble, heat curing at 50 ° C. to 80 ° C. may be performed in order to further increase the bonding strength and shorten the curing time. If the piezoelectric body 1, the thin film member 5 and the flow path plate 7 are joined by the steps as described above, the flow path plate 7 does not need to pass electromagnetic waves, ultraviolet rays, etc., and thus can contain an inorganic additive or the like. In addition, the range of material selection is greatly expanded, and the ink cavity can be formed.

【0013】[0013]

【効果】以上の説明から明らかなように、本発明による
と、以下のような効果がある。流路板と覆板部材の接合
方法においては、材料に特異な性質を求めず、また、高
温加熱を施す必要もないため、ヘッド特性や接合性等の
面から材料の選定を行うことができ、接合工程数も減ら
すことができる。
[Effect] As is apparent from the above description, the present invention has the following effects. In the method of joining the flow path plate and the cover plate member, it is possible to select the material from the aspects of head characteristics, bondability, etc., because neither peculiar properties of the material are required nor high temperature heating is required. Also, the number of joining steps can be reduced.

【図面の簡単な説明】[Brief description of drawings]

【図1】 本発明によるインクジェットヘッドの製造方
法の一実施例を説明するための構成図である。
FIG. 1 is a configuration diagram for explaining an embodiment of a method for manufacturing an inkjet head according to the present invention.

【符号の説明】[Explanation of symbols]

1…圧電体、2…溝部、3…電極、4…駆動部分、5…
薄膜部材、6…ダンパー、7…流路板、8…接着剤、9
…凹溝部、10…インクキャビティ。
DESCRIPTION OF SYMBOLS 1 ... Piezoelectric body, 2 ... Groove part, 3 ... Electrode, 4 ... Driving part, 5 ...
Thin film member, 6 ... Damper, 7 ... Flow path plate, 8 ... Adhesive, 9
... recessed groove part, 10 ... ink cavity.

フロントページの続き (72)発明者 市川 憲一 東京都大田区中馬込1丁目3番6号 株式 会社リコー内 (72)発明者 平川 利和 東京都大田区中馬込1丁目3番6号 株式 会社リコー内 (72)発明者 石井 雄一郎 東京都大田区中馬込1丁目3番6号 株式 会社リコー内Front Page Continuation (72) Inventor Kenichi Ichikawa 1-3-6 Nakamagome, Ota-ku, Tokyo Inside Ricoh Company (72) Inventor Toshikazu Hirakawa 1-3-6 Nakamagome, Ota-ku, Tokyo Inside Ricoh Company (72) Inventor Yuichiro Ishii 1-3-6 Nakamagome, Ota-ku, Tokyo Within Ricoh Co., Ltd.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 複数の凹溝部を有する流路板と、該凹溝
部を覆う覆板部材とでインクキャビティを形成している
インクジェットヘッドにおいて、前記流路板と前記覆板
部材を接合する際、前記流路板の凹溝加工側の全面に均
一に接着剤を塗布して接合することを特徴とするインク
ジェットヘッドの製造方法。
1. An ink jet head in which an ink cavity is formed by a flow channel plate having a plurality of recessed groove portions and a cover plate member that covers the recessed groove portions, when the flow channel plate and the cover plate member are joined together. A method for manufacturing an ink jet head, characterized in that an adhesive is uniformly applied to the entire surface of the flow path plate on the side where the groove is processed to bond the adhesive.
JP17477592A 1992-06-09 1992-06-09 Production of ink jet head Pending JPH05338182A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17477592A JPH05338182A (en) 1992-06-09 1992-06-09 Production of ink jet head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17477592A JPH05338182A (en) 1992-06-09 1992-06-09 Production of ink jet head

Publications (1)

Publication Number Publication Date
JPH05338182A true JPH05338182A (en) 1993-12-21

Family

ID=15984455

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17477592A Pending JPH05338182A (en) 1992-06-09 1992-06-09 Production of ink jet head

Country Status (1)

Country Link
JP (1) JPH05338182A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007307774A (en) * 2006-05-17 2007-11-29 Ricoh Co Ltd Liquid delivering head, liquid delivering apparatus, and image forming apparatus
JP2010125749A (en) * 2008-11-28 2010-06-10 Seiko Instruments Inc Thermal head, thermal printer, and method of manufacturing the thermal head

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007307774A (en) * 2006-05-17 2007-11-29 Ricoh Co Ltd Liquid delivering head, liquid delivering apparatus, and image forming apparatus
JP2010125749A (en) * 2008-11-28 2010-06-10 Seiko Instruments Inc Thermal head, thermal printer, and method of manufacturing the thermal head

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