JPH05334987A - Cooling system for use in ion accelerator - Google Patents

Abstract

PURPOSE:To provide a cooling system for use in an ion accelerator, in which a tube for supplying and recycling cooling water can readily be disposed between a casing to which a high voltage proper for a high voltage terminal is applied and a floor therebelow, i.e., the ground level, and can easily be replaced. CONSTITUTION:A cooling water circulating tube 22 prewound at equal pitch around a cylindrical body 18 and made of polyurethane is fitted in advance between the upper end portion of a high voltage terminal 42 and a ground shield plate 21 of the ground level and is then attached to the high voltage terminal 42 and the ground shield plate 21, the cylindrical body 18 comprising an insulating material having its lower end portion fixed. One end of an ongoing pipe l2a from a pure water manufacturing device 12 is connected to the ongoing tube 22a of the cooling water circulating tube 22 and one end of a recycling pipe l2b connected to the pure water manufacturing device 12 is connected to the lower end of a recycling tube 22b.

Description

Detailed Description of the Invention

[0001]

FIELD OF THE INVENTION The present invention relates to a cooling system in an ion accelerator.

[0002]

2. Description of the Related Art FIGS. 4 and 5 show an ion accelerator of a conventional example. In these figures, a high voltage terminal 42 is provided in a ground shield box 41 at a predetermined level higher than a ground level. It is supported by an insulating support column 46 provided at the ground level by four insulating supports 45. An intermediate terminal 47 is wound around these insulating columns 45 by equally dividing the distance from the high-voltage terminal 42 to the ground level.
2 and the intermediate terminal 47 or the insulating support plate 46
A resistor 48 is connected between and.

A power supply device 50 is disposed beside the high voltage terminal 42, and the upper end portion of the power supply device 50 is connected to the high voltage terminal 42 by a power cable shield pipe 57. Power supply device 5 of this conventional example
Reference numeral 0 is a so-called insulating transformer, a commercial power source is connected to the primary side, the secondary side extends upward, and the upper end of the secondary side covers the corona shield 56.

Further, a stack for high-voltage power supply (cock-croft-Walton high-voltage power supply) 51 is arranged on the side of the power supply device 50, and the output terminal of the oscillator 52 connects the cable at the lower end thereof. Connected through. The Cock-Croft-Walton high-voltage power supply device 51 is configured in a known manner, has a structure in which diodes, capacitors, etc. are coupled in stages, and constitutes a voltage doubler circuit. The voltage is boosted, and a maximum voltage of 400 KV is obtained in this conventional example, and a corona shield 54 is coated on the upper end portion, which is connected to the high voltage terminal 42 by a contact rod 55.

An ion source 43 and a mass separation magnet 44 having a known structure are arranged in the high voltage terminal 42, and an accelerating tube 60 is provided on one side wall of the high voltage terminal 42.
Are connected, and one end of this is connected to the same level as the ground shield box 41.

The conventional ion accelerator is constructed as described above. After extracting ions from the plasma generated by the ion source 43 at several tens of KV, the mass separation magnet 44 selects desired ions. , Is introduced into the acceleration tube 60. In this conventional example, the ion is the high voltage terminal 4
A voltage of more than 400 KV is applied to 2 and is accelerated to the ground level in the accelerating tube 60 in order to obtain the energy of the product of the voltage applied to the high voltage terminal 42 and the valence of the ions.

The ion accelerator of the conventional example is constructed and operates as described above. However, the normal ion source 43 requires energy for plasma generation, and the mass separation magnet 44 also has a magnetic flux. Since a current is passed through the coil for generating, heat is also generated in this.

In order to remove the heat generated in the high voltage terminal 42, a cooling system as shown in FIG. 3 is used. It should be noted that in FIG. 3, of the portions shown in FIGS. 4 and 5, only the portion related to the cooling system is shown, and the related portion is shown in a more detailed shape.

That is, in FIG. 3, the high voltage terminal 42 is supported on the floor 11 by the insulating columns 45 as described above, but in reality, as shown in FIG. The high voltage terminal 42 is connected to the output terminal of the high voltage generator 51 to the terminal 9a. A pure water producing device 12 is arranged outside the shield box 41, which produces pure water and returns the cooling water which has returned from the high voltage terminal 42 and has undergone heat exchange, as will be described later. It shall be equipped with a device for cooling to a predetermined low temperature.

An opening 1 is provided in the lower part of the shield box 41.
9 is formed, and a supply pipe 112a of cooling water supplied from the pure water producing device 12 is connected to this.
Further, a return pipe 112b for flowing cooling water that is returned by heat exchange from the high voltage terminal 42 is provided in the opening 19
It is connected to the pure water producing apparatus 12 via. The outward supply pipe 112a and the return return pipe 112b are flexible, so to speak, tubes, but these are integral winding parts 13a, 13 as shown in the insulating column 45.
It is wound as b, and its upper end portion is connected to the cooling water distributor 6. From this distributor 6, a forward pipe 7a is connected to the ion source 43, and is wound around it even if it is not explicitly shown, and becomes a return pipe 7b, which is connected to the distributor 6 and is then returned. Pipe 13b
Is connected to.

From the distributor 6, a cooling water outgoing pipe 8a is further connected, which is arranged so as to wind the mass separation magnet 44, and serves as a return pipe 8b.
It is connected to the distributor 6. The cooling water returned to the distributor 6 and heat-exchanged with the heat generated by the ion source 43 and the mass separation magnet 44 is returned to the pure water producing device 12 through the return pipe 13b.

As described above, the high voltage terminal 42
The heat generated inside, especially the ion source 43 and the mass separation magnet 44
The cooling water is deprived of the heat generated from the cooling water and returned to the pure water producing apparatus 12, where it is cooled to a predetermined temperature and is again returned to the forward pipe 1.
The ion source 43 and the mass separation magnet 44 are cooled as described above after passing through the insulating column 45 through 3a, but such a cooling system has the following defects.

That is, a high voltage of, for example, 400 KV is applied to the high voltage terminal 42, and the height of the insulating support column 45 is determined in order to maintain the distance between the high voltage terminal 42 and the floor 11. It is 400KV
In this case, the height of the insulating support column 45 is about 1 m, and the cooling water circulation tube 13 composed of the outward pipe 13a and the return pipe 13b extends between the floor 11 and the high-voltage terminal 42 at this height. If so, some holding means is required to hold the upright posture. For this reason, it is wound around the insulating column 45 as described above, which also increases the length of the cooling water circulation tube 13 extending from the high voltage terminal 42 to the floor 11. Therefore, the terminal 42 with a high voltage of 400 KV
Therefore, a sufficient creeping distance can be secured to maintain the insulation with respect to the floor 11. Further, as shown in the figure, the unevenness of the unevenness of the insulating support column 45 is actually large, and therefore the length of the cooling water circulation tube 13 can be further increased, so that the creeping distance can be made longer and the withstand voltage can be increased. It can be higher.

However, the pure water supplied from the pure water producing apparatus 12 is passed through the inside of the cooling water circulation tube 13 made of an insulating material. However, although pure water has a resistance of several tens MΩ / cm, If it is not wound evenly in the height direction, the electric field will be distorted, and it will be easy to induce discharge. In order to deal with this, as a material of the tube wound around the insulating support column 45, a flexible tube having no bend or habit is required.
It is very difficult to wind 5 on an equal pitch. In addition, a tube with no habit and a material with high electrical insulation has a large wall thickness of this tube,
It has high elasticity, and when such a tube is wound around the insulating support column 45, it tries to return to its original shape due to its restoring force, so it is difficult to maintain a stable desired winding state. ..

Further, when the cooling water circulation tube 13 used between the high voltage terminal 42 to which 400 KV is applied and the floor 11 is used for a long time, dust is easily attached to the outer surface of this tube, and the inside is corroded. However, since the deterioration of the material and the quality of the material occur, it has to be replaced regularly.
Since the insulating struts 45 are fixed to the high voltage terminal 42 and the floor 11 at the upper end and the lower end thereof respectively, in order to replace the cooling water circulation tube 13, these insulating struts 45 are connected to the high voltage terminal 42 and the floor 11. Must be removed from floor 11. In order to avoid this, the cooling water circulation tube 1 wound around the insulating column 45
You have to unwind 3, but this requires a lot of work.

[0016]

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and it is an object of the present invention to provide a cooling system for an ion accelerating device, which reliably prevents corona and discharge and is extremely easy to replace. To aim.

[0017]

The above object is to arrange a casing containing at least an ion source and a mass separation magnet at a predetermined height above the floor of ground potential, and to provide the casing with a predetermined voltage by a high-voltage power supply device. The high voltage of
A cylindrical body made of an insulating material in a cooling system in an ion accelerator in which electric power is supplied to the ion source and the mass separation magnet by a power supply device and the ion source and the mass separation magnet are cooled by cooling water. Attaching the upper and lower ends to the casing and the floor having the ground potential, the cooling water circulation tube made of an insulating material is spirally wound with an inner diameter substantially equal to the outer diameter of the cylindrical body at an equal pitch, and the cylindrical body is provided. To supply the cooling water from the outside to the outward tube of the cooling water circulation tube,
A cooling system in an ion accelerator, wherein the ion source and the mass separation magnet are cooled, and the heat-exchanged cooling water is returned to the outside through a return tube of the cooling water circulation tube. It

[0018]

[Operation] A cylindrical body made of an insulating material is fixed to the high voltage terminal and the floor at its upper and lower ends, and a cooling water circulating tube made of an insulating material spirally wound at an equal pitch is fitted to the cylindrical body. ing. Since this inner diameter is almost equal to the outer diameter of the cylindrical body, they are fitted in a state of close contact, and in some cases, they can be elastically deformed in the radially outward direction to be mounted, so that the high voltage terminal and the floor can be attached. No matter how large the distance between them is, they can be fitted into the cylindrical body while maintaining a predetermined equal pitch. Therefore, the cooling water can be circulated through the cooling water circulation tube, and the ion source and the mass separation magnet in the high voltage terminal can be circulated. Although pure water has an extremely large resistance value, pure water is a conductor, so it is possible to divide the high-voltage terminal and the floor to an equipotential, thus causing corona or discharge. There is no. In addition, since a cylindrical body made of an insulating material was provided separately from the insulating stanchions, the insulating stanchions can be left as they are (these are generally very difficult to remove) if they are removable from the high-voltage terminal and the floor. When the cooling water circulation tube is replaced, it can be easily replaced by removing it and fitting a new spirally wound cooling water circulation tube from the upper end and the lower end.

Furthermore, since the cooling water circulation tubes wound at equal pitches are used, it is not necessary to wind the insulating columns at equal pitches as in the conventional case, and it is very possible to wind them at equal pitches. It was difficult, but by simply fitting the cooling water circulation tube spirally wound at an equal pitch with an equal inner diameter into the cylindrical body, or by inserting the cylindrical body into the cooling water circulation tube, It can be easily assembled, and if it is fixed to the high voltage terminal and the floor at its upper and lower ends, it can be easily arranged between the high voltage terminal and the floor.

[0020]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT An ion accelerator according to an embodiment of the present invention will be described below with reference to the drawings. The parts corresponding to those of the conventional example are designated by the same reference numerals, and detailed description thereof will be omitted.

FIG. 1 shows an ion accelerator according to a first embodiment of the present invention. In this embodiment, too, a pure water producing device 12 is arranged outside the ground shield box 20 and is derived therefrom. The outgoing pipe 12a for the cooling water extends to the left in the figure below the space below the ground shield plate 21 arranged at the bottom of the ground shield box 20. The ground shield plate 21 is supported by the frame 16, and the above-mentioned insulating support 45 is fixed on the ground shield plate 21, and the upper end portion thereof is fixed to the bottom wall portion of the high voltage terminal 42 as in the conventional case. Has been done.

In the high voltage terminal 42, an ion source 43 and a mass separation magnet 44 are arranged as in the conventional case, and a distributor 25 is arranged on the bottom wall portion. The connectors 26a and 26b are fixed to this, and one of the outgoing water tubes 22a of the cooling water circulation tubes 22 is attached to the former.
Is attached to the latter, and to the latter is attached the upper end of the return path tube 22b (the other side of the cooling water circulation tube 22) for the cooling water that has undergone heat exchange.

An end portion of the outgoing pipe 12a for cooling water connected to the pure water producing apparatus 12 is fixed to a connector 29b fixed to the bottom surface of the ground shield plate 21. The lower end of the outward tube 22a is fixed. Further, the lower end of the return tube 22b is fixed to the connector 29a, one end of the return pipe 12b is fixed to the connector 29a, and the other end is connected to the pure water producing apparatus 12.

A mounting plate 2 is provided on the bottom of the high voltage terminal 42.
The upper end of the cylindrical body 18 made of an insulating material is fixed via the connector 4, and the lower end is attached to the ground shield plate 21 and the mounting plate 23.
Is fixed through. The cooling water circulation tube 22 including the above-described cooling water outward tube 22a and return tube 22b is fixed to the high voltage terminal 42 and the shield plate 21 via the mounting plates 23 and 24. Wind it up. Cooling water circulation tube 2 of this embodiment
2 is made of polyurethane, and is already wound at a predetermined pitch in the axial direction and with an inner diameter substantially equal to the outer diameter of the cylindrical body 18, which is wound on the cylindrical body 18 from the upper end or the lower end. After being wound in this manner, the upper ends thereof are attached to the connectors 26a and 26b, and the lower ends thereof are fixed to the connectors 29a and 29b. Thus, the high voltage terminal 42 can be easily assembled.

The distributor 25 has a structure similar to that of the distributor 6 of the conventional example.
Is wound around the ion source 43 (not shown), and the return pipe 27b is fixed to the distributor 25.
Further, the other output port of the distributor 25 is a forward pipe 28.
a is fixed, and this is wound around the mass separation magnet 44 without being explicitly shown, and the return pipe 28b is integrally fixed to the distributor 25 to the distributor 25. Note that 23a,
The plate 24a has fixing plates 23, 24 fixed to the high-voltage terminal 42 and the shield plate 21 by means of countersunk screws. However, since they do not project upward from the plate 23 and downward from the plate 24, they are flush with each other, so that the corona Is being prevented.

The ion accelerating apparatus according to the first embodiment of the present invention is constructed as described above. Next, its operation will be described.

Predetermined ions separated from the ion group extracted by the mass separation magnet 44 from the ion source 43 by the extraction electrode (not shown) are the energy applied by the voltage applied to the high voltage terminal 42 in the acceleration tube 5 by the charge of the ions. It is the same as the operation of the conventional example that it is obtained and is led out from the shield box 20. Pure water production device 12
Pure water cooled to a predetermined temperature from the
It is supplied to the connector 29b side through a, and the forward passage tube 2 of the cooling water circulation tube 22 is further supplied.
2a, through its wound passage, to both connectors 26a, from which it is fed to the distributor 25. One of the output ports is connected to the outward pipe 27a, the cooling water passes through this, and the ion source 43 is wound around and guided to the return pipe 27b. Heat is exchanged, passes through the distributor 25, and then returns to the pure water producing apparatus 12 through the connector 26b and the return tube 22b. Here, heat exchange and ion exchange are performed to cool to a predetermined temperature, the resistance value is returned to a predetermined resistance value, and the pipe 12a is supplied again. Further, from the other output port of the distributor 25, the cooling water passes through the outward pipe 28a, winds around the mass separation magnet 44, exchanges heat with this, and then returns to the distributor 25 through the return pipe 28b. Be done. From here, it is returned to the pure water producing apparatus 12 through the connector 26b and the return tube 22b, the connector 29a and the return pipe 12b.

As described above, the heat generated in the ion source 43 and the mass separation magnet 44 is taken away. However, even though not shown, it is provided in the high-voltage terminal 42 and requested by a power supply device (not shown). The respective pipes 27a, 28a and the return pipe 27b shown in FIG.
It is assumed that pipes such as 28b are connected, and these are also cooled and returned to the pure water producing apparatus 12. In this case, the distributor 25 is naturally formed with the number of outlet ports and inlet ports corresponding thereto, and the connectors 26a and 26b also circulate the cooling water corresponding to the number of these devices. The forward pipes and the return pipes of the cooling tubes are connected, that is, assuming that the number of devices is n, 2n cooling water circulation tubes are connected, and these are connected to the pure water producing device 12. In addition,
Since the connectors 29a and 29b are attached to the ground shield plate 21, the connectors 29a and 29b are at the ground level, and the pure water passing through the cooling water circulation tube 22 connected thereto is also made of metal at the lower end. Connectors 26a, 26, which are in contact with each other inside and are attached to the bottom wall of the high-voltage terminal 42 at their upper ends.
Since it is connected to the inner peripheral wall of b, the ground level of pure water and the level of high voltage at the upper end thereof are determined. However, the cooling is performed around the cylindrical body made of an insulating material at an equal pitch. Since it passes through the water circulation tube 22, it means that the high-voltage terminal 42, the floor, and the ground shield tube 21 are divided at an equal potential, and there is no possibility of inducing corona or discharge as in the conventional example.

FIG. 2 shows an ion accelerator according to a second embodiment of the present invention. In the figure, parts corresponding to those of the first embodiment are designated by the same reference numerals, and detailed description thereof will be omitted. ..

That is, although not shown in the present embodiment, the ion source 43 and the mass separation magnet 4 are used as in the first embodiment.
4 are provided, and cooling water is supplied to these from the distributor 25 to cool them. In the present embodiment, the gas box 32 provided with the gas cylinders 33a and 33b is provided.
Is fixed to the base plate 34, which is an insulator 35a,
It is supported by the bottom wall portion of the high voltage terminal 42 by 35b. An upper end of a pipe 38 made of an insulating material projects from the bottom wall of the gas box 32, and this extends through an opening formed in the bottom wall of the high voltage terminal 42 and extends downward. This lower end is fixed to the ground shield plate 31 via a mounting plate 65. A pipe 63 made of a metal, which is arranged in a space formed below the ground shield plate 31, is fixed to the ground shield plate 31. The pipe 63 passes through an opening 30a formed below the shield box 30 and passes through the ground shield. It extends out of the box 30,
It is fixed to the blower 39. Also this blower 39
An exhaust pipe 40 is attached to the gas discharge port of this, and this is connected to the outside through an opening 61a formed at the lower end of a wall 61 of a room that houses the entire ion accelerator including the shield box 30. It is extended.

Similar to the first embodiment, in the insulating pipe 38, the forward pipe and the backward pipe of the cooling water circulation pipe connected to the pure water device 12 are arranged in the space below the ground shield plate 31, although not shown. This shield plate 3
It is connected to the connectors 66a and 66b fixed to 1, and extends upwardly, and is wound in a spiral shape at an equal pitch.
A lower end portion of a cooling water circulation tube 37 made of polyurethane is attached, which is fitted to the above-mentioned insulating pipe 38, and an upper end portion thereof is connected to the connector 36. A forward pipe and a backward pipe of cooling water are connected to a distributor provided behind the gas box 32.

In this embodiment, the gas cylinders 33a, 3
3b is generally filled with a toxic gas, and in the unlikely event that the gas leaks into the gas box 32, this leaks to the outside,
Insulation pipe 38 to avoid adversely affecting the human body
Although the upper end portion of the blower protrudes, the gas leaked by the blower 39 is immediately sucked into the pipe 38 and further passes through the metal pipe 63 to the outlet of the blower 39 to the outside of the room. Exhausted.

In this embodiment, as a pipe made of an insulating material for fitting the cooling water circulation tube according to the present invention, the insulating pipe 38 for guiding the gas led out in the gas box 32 to the outside as described above. Therefore, the effect of the present invention can be obtained without increasing the number of parts of the ion accelerator using such an apparatus and without increasing the area occupied by the apparatus.

Although the respective embodiments of the present invention have been described above, the present invention is not limited to these, and various modifications can be made based on the technical idea of the present invention.

For example, in the above-described second embodiment, the cooling water circulation tube 3 according to the present invention is provided in the insulating pipe 38 arranged for guiding the gas discharged into the gas box 32 to the outside.
7 is fitted, but instead of this, the cooling water circulation tube according to the present invention is wound in parallel with the spiral tube for supplying compressed air to the compressed air working cylinder of each valve used in the high voltage terminal 42. You may make it wear.

[0036]

As described above, according to the cooling system in the ion accelerator of the present invention, the mounting work of the cooling water circulation tube and the replacement work thereof are very simple, and the pitch of commercially available spiral tubes is various. The cooling system can be obtained only by preparing an insulating pipe having an outer diameter equal to this inner diameter, and the pure water flowing in such a tube can be used as an evenly divided resistor. Since it works, the electric field from the ground level of this cooling water circulation tube to the high voltage terminal can be divided evenly. Therefore, corona and discharge can be prevented in advance.

[Brief description of drawings]

FIG. 1 is a partially cutaway side view of an ion accelerator according to a first embodiment of the present invention.

FIG. 2 is a partially cutaway side view of the second embodiment.

FIG. 3 is a partially cutaway side view of a main part of a conventional ion accelerator.

FIG. 4 is a side sectional view of the conventional example.

FIG. 5 is a plan view of the same section.

[Explanation of symbols]

 12 Pure Water Producing Device 12a Outgoing Pipe 12b Returning Pipe 18 Cylindrical Body 22 Cooling Water Circulating Tube 22a Outgoing Tube 22b Returning Tube 25 Distributor 26a Connector 26b Connector 29a Connector 29b Connector 36 Connector 37 Cooling Water Circulating Tube 38 Insulation Pipe 66a connector 66b connector

Claims (1)

[Claims] 1. A casing containing at least an ion source and a mass separation magnet is arranged at a predetermined height above a floor of ground potential, and a predetermined high voltage is applied to the casing by a high voltage power supply device to supply electric power. In the cooling system in the ion accelerator in which the ion source and the mass separation magnet are supplied with electric power by the device and the ion source and the mass separation magnet are cooled by cooling water, the upper and lower sides of the cylindrical body made of an insulating material The ends are attached to the casing and the ground potential floor, and a cooling water circulation tube made of an insulating material is spirally wound with an inner diameter substantially equal to the outer diameter of the cylindrical body at equal pitches, and fitted into the cylindrical body. Cooling water is supplied from the outside to the outward tube of the cooling water circulation tube to cool the ion source and the mass separation magnet to perform heat exchange. A cooling system in an ion accelerator, wherein the cooling water is returned to the outside through the return tube of the cooling water circulation tube.