JPH05333932A - Movable object position control system - Google Patents
Movable object position control systemInfo
- Publication number
- JPH05333932A JPH05333932A JP16402892A JP16402892A JPH05333932A JP H05333932 A JPH05333932 A JP H05333932A JP 16402892 A JP16402892 A JP 16402892A JP 16402892 A JP16402892 A JP 16402892A JP H05333932 A JPH05333932 A JP H05333932A
- Authority
- JP
- Japan
- Prior art keywords
- signal
- movable body
- control system
- position control
- optical fiber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 claims abstract description 38
- 239000013307 optical fiber Substances 0.000 claims abstract description 37
- 230000005540 biological transmission Effects 0.000 claims abstract description 25
- 238000006243 chemical reaction Methods 0.000 claims description 18
- 230000008054 signal transmission Effects 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 5
- 230000001276 controlling effect Effects 0.000 description 4
- 230000001105 regulatory effect Effects 0.000 description 3
- 238000009429 electrical wiring Methods 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、ダイシング装置等の精
密切削装置に利用される可動体位置制御システムに関す
るものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a movable body position control system used in a precision cutting device such as a dicing device.
【０００２】[0002]
【従来の技術】一般に、ダイシング装置等の精密切削装
置においては、図５に示すようにウェーハを載置固定す
るチャックテーブルａをサーボモーターｂで軸回転さ
せ、その位置を制御するには例えば円板のスケールｃと
そのスケールｃの目盛りを読み取るための発光体ｄ及び
受光体ｅ（読み取り要素）とによって形成された読み取
り手段ｆ（ロータリーエンコーダー）と、この読み取り
手段ｆによる信号を電気信号に変換する信号処理手段ｇ
とを少なくとも含む発信側Ｘと、この発信側Ｘからの信
号を送信するための送信経路ｈと、この送信経路ｈによ
って送信される信号を受信し、前記スケールｃと読み取
り手段ｆとの位置関係を演算してチャックテーブルａの
駆動源たるサーボモーターｂに供給する電気エネルギー
を制御するためのモータードライバーｉを少なくとも含
む受信側Ｙと、この受信側Ｙによって制御された電気エ
ネルギーを前記サーボモーターｂまで供給するための電
力供給経路ｊとを含む位置制御システムにより遂行され
ている。尚、ｋはモータードライバーｉに接続された電
源である。2. Description of the Related Art Generally, in a precision cutting device such as a dicing device, a chuck table a for mounting and fixing a wafer as shown in FIG. A reading means f (rotary encoder) formed by a scale c of the plate and a light emitting body d and a light receiving body e (reading element) for reading the scale of the scale c, and a signal by the reading means f is converted into an electric signal. Signal processing means g
And a transmission path h for transmitting a signal from the transmission side X, a signal transmitted by the transmission path h, and a positional relationship between the scale c and the reading means f. And a receiving side Y including at least a motor driver i for controlling electric energy supplied to a servo motor b which is a driving source of the chuck table a, and electric energy controlled by the receiving side Y is supplied to the servo motor b. And a power supply path j for supplying the electric power to the position control system. Incidentally, k is a power source connected to the motor driver i.
【０００３】[0003]
【発明が解決しようとする課題】前記従来の可動体位置
制御システムによると、信号処理手段ｇの分解能が高く
なるにつれて信号の数が増えるため、その数に応じた多
数の電気配線が送信経路ｈに必要となる。従って、機械
内部が煩雑になり組み立て及びメンテナンス等の妨げと
なる。又、送信経路ｈは数本の電気配線から成る電力供
給経路ｊの発するノイズを拾い易く、このため正確な情
報がモータードライバーｉに伝わらない場合がある。According to the conventional movable body position control system described above, the number of signals increases as the resolution of the signal processing means g increases, so that a large number of electrical wirings corresponding to the number of transmission lines h. Will be needed. Therefore, the inside of the machine becomes complicated and hinders assembly and maintenance. Further, the transmission path h easily picks up noise generated by the power supply path j composed of several electric wires, and therefore accurate information may not be transmitted to the motor driver i.
【０００４】本発明は、このような従来の問題点を全て
解決するためになされ、信号処理手段の分解能が高まっ
ても送信経路ｈの配線が少なくて済み、且つその送信経
路ｈが電力供給経路ｊの発するノイズを拾わないように
した、可動体位置制御システムを提供することを課題と
したものである。The present invention has been made in order to solve all such conventional problems. Even if the resolution of the signal processing means is increased, the number of wirings of the transmission path h is reduced, and the transmission path h is the power supply path. An object of the present invention is to provide a movable body position control system in which noise generated by j is not picked up.
【０００５】[0005]
【課題を解決するための手段】この課題を解決するため
の手段として、本発明は、読み取り要素によってスケー
ルを読み取る読み取り手段と、この読み取り手段による
信号を電気信号に変換する信号処理手段とを少なくとも
含む発信側と、この発信側からの信号を送信する送信経
路と、この送信経路によって送信される信号を受信し、
前記スケールと読み取り手段との位置関係を演算して可
動体の駆動源に供給する電気エネルギーを制御するモー
タードライバーを少なくとも含む受信側と、この受信側
によって制御された電気エネルギーを前記駆動源まで供
給する電力供給経路とを含む位置制御システムにおい
て、前記発信側には電気信号を光信号に変換するＥ／Ｌ
変換手段が含まれており、前記受信側には光信号を電気
信号に変換するＬ／Ｅ変換手段が含まれており、前記送
信経路は発信側の光信号を受信側まで送信する光ファイ
バーで構成したことを要旨とするものである。更に、読
み取り手段は２以上の読み取り要素を含み、各々の読み
取り要素によって生成される信号を各々固有の光信号に
変換して１本の光ファイバーで送信すること、信号処理
手段自体の稼働を司るエネルギーを光エネルギーとし、
光ファイバーによって供給すること、その光エネルギー
を送る光ファイバーが光信号の送信経路と共通になって
いること、駆動源によって動かされる可動体にスケール
又は読み取り手段のいずれかが装着されていること、ス
ケールは円板形状を呈しており、殊に角度調整に利用さ
れること、スケールは矩形を呈しており、殊に直線移動
制御に利用されること、及びダイシング装置等の精密切
削装置に利用することを要旨とするものである。As means for solving this problem, the present invention includes at least a reading means for reading a scale by a reading element and a signal processing means for converting a signal from the reading means into an electric signal. Including a sender, a transmission path for transmitting a signal from this sender, and a signal transmitted by this transmission path,
A receiving side that includes at least a motor driver that calculates the positional relationship between the scale and the reading means to control the electric energy supplied to the driving source of the movable body, and supplies the electric energy controlled by the receiving side to the driving source. In the position control system including a power supply path, an E / L that converts an electric signal into an optical signal is provided on the transmitting side.
Converting means is included, the receiving side includes L / E converting means for converting an optical signal into an electric signal, and the transmitting path is composed of an optical fiber for transmitting the transmitting side optical signal to the receiving side. What is done is the gist. Further, the reading means includes two or more reading elements, and the signals generated by the respective reading elements are converted into unique optical signals and transmitted by one optical fiber, and energy for controlling the operation of the signal processing means itself. Is the light energy,
It is provided by an optical fiber, the optical fiber for transmitting the light energy is common to the optical signal transmission path, and either the scale or the reading means is attached to the movable body driven by the driving source. It has a disk shape, especially for angle adjustment, and the scale has a rectangular shape, especially for linear movement control, and for precision cutting equipment such as dicing equipment. It is a summary.
【０００６】[0006]
【作 用】信号処理手段からの電気信号を光信号に変換
し、その光信号を光ファイバーにより受信側に送信でき
るようにしたので、信号処理の分解能を高くしても１本
の光ファイバーで送信が可能となり、しかも光ファイバ
ーは電力供給経路から発するノイズを拾わず正確な信号
を送ることができる。[Operation] Since the electric signal from the signal processing means is converted into an optical signal and the optical signal can be transmitted to the receiving side by the optical fiber, even if the resolution of the signal processing is increased, the transmission can be performed by one optical fiber. Moreover, the optical fiber can send an accurate signal without picking up noise generated from the power supply path.
【０００７】[0007]
【実施例】以下、本発明の実施例を添付図面に基づいて
詳説する。図１において、１は可動体であるチャックテ
ーブルであり、従来と同様にサーボモーター２により回
転させられ、下部にチャックテーブル１の位置読み取り
手段であるロータリーエンコーダー３が設けられ、その
スケール円板３ａを挟むようにして読み取り要素である
発光体３ｂと受光体３ｃとが配設されている。Embodiments of the present invention will be described below in detail with reference to the accompanying drawings. In FIG. 1, 1 is a chuck table which is a movable body, is rotated by a servo motor 2 as in the conventional case, and a rotary encoder 3 which is a position reading means of the chuck table 1 is provided in the lower part thereof, and a scale disc 3a thereof. A light-emitting body 3b and a light-receiving body 3c, which are reading elements, are arranged so as to sandwich them.
【０００８】４は前記受光体３ｃに接続された信号処理
手段であり、ロータリーエンコーダー３によって生成さ
れる信号を電気信号に変換する手段を有し、更にその電
気信号を光信号に変換するためのＥ／Ｌ変換手段５を備
えている。Reference numeral 4 denotes a signal processing means connected to the light receiving body 3c, which has means for converting a signal generated by the rotary encoder 3 into an electric signal and further for converting the electric signal into an optical signal. E / L conversion means 5 is provided.
【０００９】このように形成された発信側ＡのＥ／Ｌ変
換手段５が、送信経路である１本の光ファイバー６によ
り受信側ＢのＬ／Ｅ変換手段７に接続され、受信された
光信号が電気信号に変換される。The E / L converting means 5 on the transmitting side A thus formed is connected to the L / E converting means 7 on the receiving side B by one optical fiber 6 which is a transmission path, and a received optical signal is received. Are converted into electrical signals.
【００１０】８は受信側Ｂに設けられたモータードライ
バー（制御装置）であり、前記受信側ＢのＬ／Ｅ変換手
段７に接続されると共に電源９に接続され、更に従来と
同様に複数本の電気配線からなる電力供給経路１０を介
して前記サーボモーター２に接続されている。Reference numeral 8 denotes a motor driver (control device) provided on the receiving side B, which is connected to the L / E converting means 7 on the receiving side B and also connected to a power source 9, and further has a plurality of motor drivers as in the conventional case. It is connected to the servomotor 2 through a power supply path 10 which is composed of the electric wiring.
【００１１】本発明に係る可動体位置制御システムは前
記のように構成され、チャックテーブル１の現在位置を
検出するためにロータリーエンコーダー３の発光体３ｂ
と受光体３ｃとによってチャックテーブル１（可動体）
の下部に装着されているスケール円板３ａの目盛りを読
み取り、この読み取りによって生成される信号を信号処
理手段４でデジタル電気信号に変換し、更にＥ／Ｌ変換
手段５にてそのデジタル電気信号を光信号に変換し、光
ファイバー６を介して受信側ＢのＬ／Ｅ変換手段７に送
り、このＬ／Ｅ変換手段７で光信号をデジタル電気信号
に変換し、このデジタル電気信号に基づいてモータード
ライバー８で電気エネルギーを制御し、その電気エネル
ギーを電力供給経路１０を介して前記サーボモーター２
に送り、チャックテーブル１を所定角度回転させて位置
規制することができる。尚、受光体３ｃの数を２以上と
し、分解能を高めた場合には、それぞれの電気信号を対
応する個有の光信号に変換することが重要である。これ
により、１本の光ファイバーでの送信が可能となる。The movable body position control system according to the present invention is constructed as described above, and the light emitter 3b of the rotary encoder 3 for detecting the current position of the chuck table 1 is described.
Chuck table 1 (movable body)
The scale of the scale disk 3a attached to the lower part of the table is read, the signal generated by this reading is converted into a digital electric signal by the signal processing means 4, and the digital electric signal is further converted by the E / L conversion means 5. The light signal is converted into an optical signal and sent to the L / E conversion means 7 on the receiving side B via the optical fiber 6, the L / E conversion means 7 converts the optical signal into a digital electric signal, and the motor is based on this digital electric signal. The driver 8 controls the electric energy, and the servo motor 2 controls the electric energy via the power supply path 10.
Then, the chuck table 1 can be rotated by a predetermined angle to regulate the position. In addition, when the number of the light receivers 3c is set to 2 or more and the resolution is increased, it is important to convert each electric signal into a corresponding unique optical signal. This enables transmission with one optical fiber.
【００１２】図３は、本発明に係る可動体位置制御シス
テムをダイシング装置に応用した例を示すもので、ベッ
ド１１上を送りねじ１２によりＸ軸方向（図の左右方
向）に動かされる第１の可動体１３と、この第１の可動
体１３に対して送りねじ１４によりＺ軸方向（図の上下
方向）に移動する第２の可動体１５と、前記ベッド１１
上に設けられたガイドレール１６に沿ってＹ軸方向（紙
面の垂直方向）に移動する基台１７及びその基台１７に
対してθ軸方向に軸回転する第３の可動体１８であるチ
ャックテーブルとを有し、この第３の可動体１８の上面
にはウェーハ等の被切削物１９が載置固定され、その被
切削物１９を前記第２の可動体１５の先端部に取り付け
られた回転ブレード２０でダイシングするようになって
いる。FIG. 3 shows an example in which the movable body position control system according to the present invention is applied to a dicing apparatus. The bed 11 is moved by a feed screw 12 in the X-axis direction (left-right direction in the figure). Movable body 13, a second movable body 15 that moves in the Z-axis direction (up and down direction in the figure) by a feed screw 14 with respect to the first movable body 13, and the bed 11
A base 17 that moves in the Y-axis direction (a direction perpendicular to the plane of the drawing) along a guide rail 16 provided above, and a chuck that is a third movable body 18 that rotates about the base 17 in the θ-axis direction. The table 19 has a table, and a workpiece 19 such as a wafer is placed and fixed on the upper surface of the third movable body 18, and the workpiece 19 is attached to the tip of the second movable body 15. The rotating blade 20 is used for dicing.
【００１３】この場合、前記第１の可動体１３の直線移
動制御に適するように矩形のスケール２１がベッド１１
に設けられ、読み取り手段２２が第１の可動体１３に装
着されている。図示は省略したがこの読み取り手段２２
に接続した信号処理手段による電気信号をＥ／Ｌ変換手
段で光信号に変換し、この光信号を第１の発信側Ａ1か
ら光ファイバー２３を介して第１の受信側Ｂ1 に送信
し、第１の受信側Ｂ1 のＬ／Ｅ変換手段で光信号を電気
信号に変換し、モータードライバーにより供給すべき電
気エネルギーを制御し、この電気エネルギーを電力供給
経路２４を介してサーボモーター２５に供給し、送りね
じ１２を回転させることで第１の可動体１３の位置規制
を行うことができる。In this case, the rectangular scale 21 is provided on the bed 11 so as to be suitable for the linear movement control of the first movable body 13.
The reading means 22 is attached to the first movable body 13. Although not shown, this reading means 22
The electric signal by the signal processing means connected to is converted into an optical signal by the E / L converting means, and this optical signal is transmitted from the first transmitting side A 1 to the first receiving side B 1 via the optical fiber 23, The optical signal is converted into an electric signal by the L / E conversion means of the first receiving side B 1, and the electric energy to be supplied is controlled by the motor driver, and this electric energy is supplied to the servomotor 25 via the power supply path 24. By supplying and rotating the feed screw 12, the position of the first movable body 13 can be regulated.
【００１４】第２の可動体１５も同様に直線移動制御に
適するように矩形のスケール２６が第１の可動体１３に
設けられ、読み取り手段２７が第２の可動体１５に装着
されている。図示は省略したがこの読み取り手段２７に
接続した信号処理手段による電気信号をＥ／Ｌ変換手段
で光信号に変換し、この光信号を第２の発信側Ａ2 から
光ファイバー２８を介して第２の受信側Ｂ2 に送信し、
第２の受信側Ｂ2 のＬ／Ｅ変換手段で光信号を電気信号
に変換し、モータードライバーにより供給すべき電気エ
ネルギーを制御し、この電気エネルギーを電力供給経路
２９を介してサーボモーター３０に供給し、送りねじ１
４を回転させることで第２の可動体１５の位置規制を行
うことができる。Similarly, the second movable body 15 is also provided with a rectangular scale 26 on the first movable body 13 so as to be suitable for linear movement control, and the reading means 27 is attached to the second movable body 15. Although not shown in the figure, an electric signal by the signal processing means connected to the reading means 27 is converted into an optical signal by the E / L conversion means, and this optical signal is transmitted from the second transmitting side A 2 to the second optical fiber 28 via the optical fiber 28. To receiver B 2 of
The optical signal is converted into an electric signal by the L / E conversion means of the second receiving side B 2, and the electric energy to be supplied by the motor driver is controlled, and this electric energy is supplied to the servomotor 30 via the power supply path 29. Supply and feed screw 1
By rotating 4 the position of the second movable body 15 can be regulated.
【００１５】第３の可動体１８は前記実施例と同様に角
度調節制御に適するように円板のスケールと読み取り手
段（共に図略）が設けられ、この読み取り手段に接続し
た信号処理手段による電気信号をＥ／Ｌ変換手段で光信
号に変換し、この光信号を第３の発信側Ａ3 から光ファ
イバー３１を介して第３の受信側Ｂ3 に送信し、第３の
受信側Ｂ3 のＬ／Ｅ変換手段で光信号を電気信号に変換
し、モータードライバーにより供給すべき電気エネルギ
ーを制御し、この電気エネルギーを電力供給経路３２を
介してサーボモーター（図略）に供給し、第３の可動体
１８即ちチャックテーブルをθ軸回りに回転させること
で位置規制を行うことができる。The third movable body 18 is provided with a disk scale and reading means (both not shown) so as to be suitable for angle adjustment control, as in the above-mentioned embodiment, and electricity is supplied by the signal processing means connected to this reading means. The signal is converted into an optical signal by the E / L conversion means, and this optical signal is transmitted from the third transmitting side A 3 to the third receiving side B 3 via the optical fiber 31, and the third receiving side B 3 The L / E conversion means converts the optical signal into an electric signal, the electric energy to be supplied by the motor driver is controlled, and this electric energy is supplied to the servomotor (not shown) through the power supply path 32, and the third The position can be regulated by rotating the movable body 18, that is, the chuck table around the θ axis.
【００１６】このようにして、第１の可動体１３をＸ軸
方向に動かし、第３の可動体１８をθ軸回りに回転させ
て適正位置にアライメントし、第２の可動体１５を動か
してウェーハ等の被切削物１９への切り込み量を調節し
た後、前記基台１７をガイドレール１６に沿って移動さ
せることで被切削物１９をダイシングすることができ
る。In this way, the first movable body 13 is moved in the X-axis direction, the third movable body 18 is rotated about the θ-axis to align the proper position, and the second movable body 15 is moved. After adjusting the cut amount of the wafer or the like to be cut 19, the base 17 can be moved along the guide rails 16 to dice the cut object 19.
【００１７】図４は本発明の他の実施例を示すもので、
基本的には前記実施例と同じ構成であるが、信号処理手
段の稼働を司るエネルギーを光エネルギーとし、その光
エネルギーを光ファイバーによって供給する手段を付加
した構成に特徴を有するものである。即ち、解り易くす
るため前記実施例と同じ部材は同一符号を付けて説明す
るが、発信側Ａと受信側Ｂとを接続する光ファイバー６
と受信側ＢにおけるＬ／Ｅ変換手段７との間にハーフミ
ラー３３を４５度傾けて設け、その近くに発光体３４を
配設してこの発光体３４から出た光がハーフミラー３３
で反射して光ファイバー６の端部６ａに入射するように
なし、一方光ファイバー６と発信側ＡにおけるＥ／Ｌ変
換手段５との間にもハーフミラー３５を４５度傾けて設
け、その近くに受光体３６を配設して光ファイバー６の
端部６ｂから出た光をハーフミラー３５で反射して受光
体３６に受光させるようにしたものである。尚、３７は
受光体３６に接続したコンデンサーである。FIG. 4 shows another embodiment of the present invention.
The structure is basically the same as that of the above-mentioned embodiment, but is characterized in that the energy for controlling the operation of the signal processing means is light energy and a means for supplying the light energy by an optical fiber is added. That is, in order to make it easier to understand, the same members as those in the above-mentioned embodiment will be described with the same reference numerals, but the optical fiber 6 for connecting the transmitting side A and the receiving side B will be described.
A half mirror 33 is provided between the L / E conversion means 7 on the receiving side B and the L / E conversion means 7 at an angle of 45 degrees, and a light emitting body 34 is arranged in the vicinity of the half mirror 33.
The half mirror 35 is inclined 45 degrees between the optical fiber 6 and the E / L conversion means 5 on the transmitting side A, and the light is received near the half mirror 35. The body 36 is provided so that the light emitted from the end portion 6b of the optical fiber 6 is reflected by the half mirror 35 and is received by the light receiving body 36. Incidentally, 37 is a condenser connected to the light receiving body 36.
【００１８】従って、前記発光体３４からの光を光ファ
イバー６を利用して受光体３６に送ることができ、且つ
その光エネルギーを信号処理手段４の稼働を司るための
駆動源とすることが可能となる。この場合、発信側Ａに
おけるＥ／Ｌ変換手段５から出された光信号は前記ハー
フミラー３５を通過して光ファイバー６の端部６ｂに入
り、その光ファイバー６を通って他方の端部６ａから出
ると共に、受信側Ｂにおけるハーフミラー３３を通過し
てＬ／Ｅ変換手段７に送られる。この光ファイバー６は
光エネルギーを送るための通路と光信号を送るための通
路とを兼ねており、つまり１本の光フアイバー６が共通
の通路となっている。Therefore, the light from the light emitting body 34 can be sent to the light receiving body 36 by utilizing the optical fiber 6, and the light energy can be used as a drive source for controlling the operation of the signal processing means 4. Becomes In this case, the optical signal emitted from the E / L conversion means 5 on the transmitting side A passes through the half mirror 35, enters the end 6b of the optical fiber 6, and passes through the optical fiber 6 and exits from the other end 6a. At the same time, it passes through the half mirror 33 on the receiving side B and is sent to the L / E conversion means 7. The optical fiber 6 serves both as a path for transmitting optical energy and a path for transmitting an optical signal, that is, one optical fiber 6 is a common path.
【００１９】尚、本発明の実施例において、読み取り要
素として発光体、受光体を採用しているが、スケールが
磁気スケールである場合は磁気ヘッドのような感磁体が
採用される。いずれにしても、スケールの種類に応じて
最適なものが選ばれる。In the embodiment of the present invention, a light-emitting body and a light-receiving body are used as the reading element, but when the scale is a magnetic scale, a magnetic sensitive body such as a magnetic head is used. In any case, the optimum one is selected according to the type of scale.
【００２０】[0020]
【発明の効果】以上説明したように、本発明によれば、
発光体と受光体によってスケールを読み取る読み取り手
段と、この読み取り手段による信号を電気信号に変換す
る信号処理手段とを少なくとも含む発信側と、この発信
側からの信号を送信する送信経路と、この送信経路によ
って送信される信号を受信し、前記スケールと読み取り
手段との位置関係を演算して可動体の駆動源に供給する
電気エネルギーを制御するモータードライバーを少なく
とも含む受信側と、この受信側によって制御された電気
エネルギーを前記駆動源まで供給する電力供給経路とを
含む位置制御システムにおいて、信号処理手段からの電
気信号を光信号に変換し、この光信号を光ファイバーで
送信できるようにしたので、信号処理の分解能を高くし
ても多数の電気配線をすることなく１本の光ファイバー
で送信が可能となり、機械内部の煩雑化を避けて組み立
て及びメンテナンス等の作業性を向上させることがで
き、しかも光ファイバーは電力供給経路から発するノイ
ズの影響を受けることなく正確な信号を送ることができ
る等の優れた効果を奏する。更に、光ファイバーは光信
号を送るだけでなく、信号処理手段等の駆動源となる光
エネルギーを送ることもできる。As described above, according to the present invention,
A sending side including at least a reading means for reading a scale by a light emitting body and a light receiving body, a signal processing means for converting a signal by the reading means into an electric signal, a transmission path for transmitting a signal from this sending side, and a transmission path for this transmission. A receiving side including at least a motor driver that receives a signal transmitted by a path, calculates the positional relationship between the scale and the reading means, and controls the electric energy supplied to the drive source of the movable body, and the receiving side. In the position control system including a power supply path for supplying the generated electric energy to the drive source, the electric signal from the signal processing means is converted into an optical signal, and the optical signal can be transmitted by an optical fiber. Even if the processing resolution is increased, it is possible to transmit with a single optical fiber without the need for many electrical wiring. It is possible to improve workability such as assembling and maintenance without complicating the inside of the machine, and moreover, the optical fiber can send an accurate signal without being affected by noise generated from the power supply path. Produce an effect. Furthermore, the optical fiber can send not only an optical signal but also optical energy as a driving source for the signal processing means and the like.
【図１】 本発明の実施例を示す回路ブロック図であ
る。FIG. 1 is a circuit block diagram showing an embodiment of the present invention.
【図２】 そのロータリーエンコーダー内部の説明図で
ある。FIG. 2 is an explanatory diagram of the inside of the rotary encoder.
【図３】 本発明をダイシング装置に応用した例を示す
説明図である。FIG. 3 is an explanatory diagram showing an example in which the present invention is applied to a dicing device.
【図４】 本発明の他の実施例を示す要部の回路ブロッ
ク図である。FIG. 4 is a circuit block diagram of a main part showing another embodiment of the present invention.
【図５】 従来例を示す回路ブロック図である。FIG. 5 is a circuit block diagram showing a conventional example.
１…チャックテーブル ２…サーボモーター ３…
ロータリーエンコーダー ３ａ…スケール円板 ３
ｂ…発光体 ３ｃ…受光体 ４…信号処理手段
５…Ｅ／Ｌ変換手段 ６…光ファイバー ６ａ、６
ｂ…端部 ７…Ｌ／Ｅ変換手段 ８…モータードラ
イバー ９…電源 １０…電源供給路 １１…ベ
ッド １２…送りねじ １３…第１の可動体 １
４…送りねじ １５…第２の可動体 １６…ガイド
レール １７…基台 １８…第３の可動体 １９
…被切削物 ２０…回転ブレード ２１…スケール ２２…読み取り手段 ２３…光ファイバー ２４…
送信経路 ２５…サーボモーター ２６…スケール
２７…読み取り手段 ２８…光ファイバー ２
９…送信経路 ３０…サーボモーター ３１…光フ
ァイバー ３２…送信経路 ３３…ハーフミラー
３４…発光体 ３５…ハーフミラー ３６…受光体 ３７…コンデンサー Ａ…発信側
Ａ1 …第１の発信側 Ａ2 …第２の発信側 Ａ3
…第３の発信側 Ｂ…受信側 Ｂ1 …第１の受信側
Ｂ2 …第２の受信側 Ｂ3 …第３の受信側1 ... Chuck table 2 ... Servo motor 3 ...
Rotary encoder 3a ... Scale disk 3
b ... light-emitting body 3c ... light-receiving body 4 ... signal processing means
5 ... E / L conversion means 6 ... Optical fiber 6a, 6
b ... End 7 ... L / E conversion means 8 ... Motor driver 9 ... Power supply 10 ... Power supply path 11 ... Bed 12 ... Feed screw 13 ... First movable body 1
4 ... Feed screw 15 ... 2nd movable body 16 ... Guide rail 17 ... Base 18 ... 3rd movable body 19
... Workpiece 20 ... Rotating blade 21 ... Scale 22 ... Reading means 23 ... Optical fiber 24 ...
Transmission path 25 ... Servo motor 26 ... Scale 27 ... Reading means 28 ... Optical fiber 2
9 ... Transmission path 30 ... Servo motor 31 ... Optical fiber 32 ... Transmission path 33 ... Half mirror
34 ... Light emitting body 35 ... Half mirror 36 ... Light receiving body 37 ... Condenser A ... Transmitting side
A 1 ... First calling side A 2 ... Second calling side A 3
... third calling party B ... recipient B 1 ... first recipient B 2 ... second recipient B 3 ... 3 of the receiving
Claims (8)
る読み取り手段と、この読み取り手段による信号を電気
信号に変換する信号処理手段とを少なくとも含む発信側
と、この発信側からの信号を送信する送信経路と、この
送信経路によって送信される信号を受信し、前記スケー
ルと読み取り手段との位置関係を演算して可動体の駆動
源に供給する電気エネルギーを制御するモータードライ
バーを少なくとも含む受信側と、この受信側によって制
御された電気エネルギーを前記駆動源まで供給する電力
供給経路とを含む位置制御システムにおいて、 前記発信側には電気信号を光信号に変換するＥ／Ｌ変換
手段が含まれており、前記受信側には光信号を電気信号
に変換するＬ／Ｅ変換手段が含まれており、前記送信経
路は発信側の光信号を受信側まで送信する光ファイバー
で構成したことを特徴とする可動体位置制御システム。1. A transmission side including at least a reading means for reading a scale by a reading element and a signal processing means for converting a signal by the reading means into an electric signal, and a transmission path for transmitting a signal from the transmission side. A receiving side that includes at least a motor driver that receives a signal transmitted by the transmission path, calculates the positional relationship between the scale and the reading means, and controls the electric energy supplied to the drive source of the movable body, and the receiving side. In a position control system including a power supply path for supplying electric energy controlled by the electric power source to the drive source, the transmission side includes an E / L conversion means for converting an electric signal into an optical signal, and the reception The side includes L / E conversion means for converting an optical signal into an electric signal, and the transmission path receives the optical signal from the transmitting side. Movable body position control system, characterized in that is constituted by an optical fiber to transmit to.
含み、各々の読み取り要素によって生成される信号を各
々固有の光信号に変換して１本の光ファイバーで送信す
る請求項１記載の可動体位置制御システム。2. The movable body position according to claim 1, wherein the reading means includes two or more reading elements, and a signal generated by each reading element is converted into a unique optical signal and transmitted by one optical fiber. Control system.
ーを光エネルギーとし、光ファイバーによって供給する
請求項１乃至２記載の可動体位置制御システム。3. The movable body position control system according to claim 1, wherein the energy for controlling the operation of the signal processing means itself is light energy and is supplied by an optical fiber.
信号の送信経路と共通になっている請求項３記載の可動
体位置制御システム。4. The movable body position control system according to claim 3, wherein the optical fiber for transmitting the optical energy is common to the optical signal transmission path.
ケール又は読み取り手段のいずれかが装着されている請
求項１乃至４記載の可動体位置制御システム。5. The movable body position control system according to claim 1, wherein either the scale or the reading means is attached to the movable body moved by the drive source.
角度調整に利用される請求項１乃至５記載の可動体位置
制御システム。6. The movable body position control system according to claim 1, wherein the scale has a disc shape, and is used particularly for angle adjustment.
移動制御に利用される請求項１乃至５記載の可動体位置
制御システム。7. The movable body position control system according to claim 1, wherein the scale has a rectangular shape and is particularly used for linear movement control.
される請求項６乃至７記載の可動体位置制御システム。8. The movable body position control system according to claim 6, which is used in a precision cutting device such as a dicing device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4164028A JP2736376B2 (en) | 1992-05-29 | 1992-05-29 | Moving body position control system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4164028A JP2736376B2 (en) | 1992-05-29 | 1992-05-29 | Moving body position control system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH05333932A true JPH05333932A (en) | 1993-12-17 |
| JP2736376B2 JP2736376B2 (en) | 1998-04-02 |
Family
ID=15785435
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4164028A Expired - Fee Related JP2736376B2 (en) | 1992-05-29 | 1992-05-29 | Moving body position control system |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2736376B2 (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56127599U (en) * | 1980-02-20 | 1981-09-28 | ||
| JPS6252282A (en) * | 1985-08-30 | 1987-03-06 | Koganei Seisakusho:Kk | Optically connected control device for electromagnetic valve |
| JPS6341943U (en) * | 1986-09-05 | 1988-03-19 |
-
1992
- 1992-05-29 JP JP4164028A patent/JP2736376B2/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56127599U (en) * | 1980-02-20 | 1981-09-28 | ||
| JPS6252282A (en) * | 1985-08-30 | 1987-03-06 | Koganei Seisakusho:Kk | Optically connected control device for electromagnetic valve |
| JPS6341943U (en) * | 1986-09-05 | 1988-03-19 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2736376B2 (en) | 1998-04-02 |
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