JPH05330069A - Production of ink jet recording head - Google Patents
Production of ink jet recording headInfo
- Publication number
- JPH05330069A JPH05330069A JP14236792A JP14236792A JPH05330069A JP H05330069 A JPH05330069 A JP H05330069A JP 14236792 A JP14236792 A JP 14236792A JP 14236792 A JP14236792 A JP 14236792A JP H05330069 A JPH05330069 A JP H05330069A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric element
- ink
- ink jet
- adhesive layer
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、ノズルからインクを用
紙上に吐出して印字を行うインクジェットプリンタにも
ちいられるインクジェットヘッドにかかわり、特に、複
数のノズルを備えたインクジェットヘッドの改良に関す
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ink jet head used in an ink jet printer for ejecting ink from a nozzle onto a sheet for printing, and more particularly to an improvement of an ink jet head having a plurality of nozzles.
【０００２】[0002]
【従来の技術】一般に、インクジェットヘッドは、先端
にノズルを形成したインク流路を振動板により被覆し、
一対の電極間に介装された結晶体からなる圧電素子をそ
れぞれのインク流路に対向するように振動板の外側に取
り付けてなり、電極間に通電する事により圧電素子にた
わみを生じさせ、このたわみによって振動板を振動して
インク流路内の容積を減少することによりノズルからイ
ンクを噴出することになっている。2. Description of the Related Art Generally, an ink jet head has a vibrating plate which covers an ink flow path having a nozzle at its tip.
A piezoelectric element made of a crystal body interposed between a pair of electrodes is attached to the outside of the diaphragm so as to face each ink flow path, and the piezoelectric element is bent by energizing between the electrodes, The flexure vibrates the vibrating plate to reduce the volume in the ink flow path, thereby ejecting ink from the nozzle.
【０００３】しかしながら、前述したインクジェットヘ
ッドにおいては、各インク流路間に別個の圧電素子を対
応させているため、マルチノズルのインクジェットヘッ
ドとなると複数の圧電素子が必要となり、コストアップ
になる。また、個々の圧電素子に振動板に取り付けなけ
ればならないため、圧電素子の位置ぎめが容易でなくイ
ンクジェットヘッドが大型化してしまうし、また、各圧
電素子の取り付け位置により各ノズルにおけるインク噴
出特性にバラツキが生じてしまう。However, in the above-mentioned ink jet head, since a separate piezoelectric element is provided between each ink flow path, a plurality of piezoelectric elements are required in the case of a multi-nozzle ink jet head, resulting in an increase in cost. In addition, since it is necessary to attach each piezoelectric element to the vibration plate, it is not easy to position the piezoelectric element and the ink jet head becomes large, and the ink ejection characteristics at each nozzle depend on the attachment position of each piezoelectric element. There will be variations.
【０００４】上記の課題を解決する方法として、実開平
２ー１２４１４６公報のように、大型の１枚の圧電素子
を振動板に接合した後、各インク流路間の圧電素子の上
面に溝を形成したものが開示されている。図１０に、上
記公報による従来例を説明する。直方形状の基板１の上
面１Ａに、複数のインク流路２が等間隔に形成されてお
り、また、各インク流路２の先端はノズル２Ａに形成さ
れている。前記基板１の上面１Ａには、基板１と同型の
平面形状とされ、各インク流路２を被覆する振動板３が
取り付けられている。さらにこの振動板３を介して各イ
ンク流路２に対向する平型の１枚の圧電素子４が取り付
けられており、この圧電素子４の下面の全面には、共通
電極５が形成される。また、前記圧電素子４の上面に
は、各インク流路２に対向するように複数の個別電極６
が相互に間隔を隔てて形成され、さらに、その個別電極
６間の圧電素子４にそれぞれ溝７を形成し、各インク流
路２に対応した圧電素子に分離している。As a method for solving the above-mentioned problems, as disclosed in Japanese Utility Model Laid-Open No. 2-124146, a large piezoelectric element is joined to a vibrating plate, and then a groove is formed on the upper surface of the piezoelectric element between each ink flow path. What is formed is disclosed. FIG. 10 illustrates a conventional example according to the above publication. A plurality of ink channels 2 are formed at equal intervals on the upper surface 1A of the rectangular substrate 1, and the tip of each ink channel 2 is formed in the nozzle 2A. On the upper surface 1A of the substrate 1, a vibration plate 3 having the same planar shape as the substrate 1 and covering each ink flow path 2 is attached. Further, one flat piezoelectric element 4 facing each ink flow path 2 via the vibrating plate 3 is attached, and a common electrode 5 is formed on the entire lower surface of the piezoelectric element 4. In addition, a plurality of individual electrodes 6 are provided on the upper surface of the piezoelectric element 4 so as to face each ink flow path 2.
Are formed so as to be spaced apart from each other, and grooves 7 are formed in the piezoelectric elements 4 between the individual electrodes 6, respectively, to separate the piezoelectric elements corresponding to the respective ink flow paths 2.
【０００５】[0005]
【発明が解決しようとする課題】しかしながら、前述し
た従来のインクジェットヘッドにおいては、マルチノズ
ルの全インク流路を被覆するために必要な大きさの圧電
素子を接着することが必要とされる。そのため、この大
判の圧電素子を接着する際、振動板との接着面積が広い
ため、接着層の厚みにバラツキが生じやすい。また、接
着層内に気泡が滞りやすい。そのため、圧電素子４のた
わみを振動板３に伝達する際、接着層による損失が大き
くなり、流路内の排除容積にバラツキが生じてしまう。
また、大判の圧電素子４を接着する際、基板１および振
動板３自体のソリをそのまま受けてしまい、上記で示し
たように、個別電極６間の圧電素子４に溝７を形成する
際溝深さの制御が難しく、各々のノズル特性および隣接
ノズル間影響にバラツキが生じやすいという課題を有し
ていた。However, in the above-mentioned conventional ink jet head, it is necessary to bond a piezoelectric element having a size required to cover all the ink flow paths of the multi-nozzle. Therefore, when the large-sized piezoelectric element is bonded, since the bonding area with the vibration plate is large, the thickness of the bonding layer tends to vary. In addition, air bubbles are likely to remain in the adhesive layer. Therefore, when the deflection of the piezoelectric element 4 is transmitted to the vibration plate 3, the loss due to the adhesive layer increases, and the excluded volume in the flow path varies.
Further, when the large-sized piezoelectric element 4 is bonded, the warp of the substrate 1 and the diaphragm 3 itself is directly received, and as described above, when the groove 7 is formed in the piezoelectric element 4 between the individual electrodes 6, the groove is formed. There is a problem in that it is difficult to control the depth, and variations occur in each nozzle characteristic and the influence between adjacent nozzles.
【０００６】本発明の目的は、これらの問題点を解決し
て、部品点数の削減、組立性の向上等のメリットを損な
うことなく、各ノズル特性およびノズル間の相互影響バ
ラツキの低減し、かつ、基板のソリに対しても、ノズル
特性がばらつかないインクジェットヘッドを実現するこ
とにある。An object of the present invention is to solve these problems and reduce the characteristics of each nozzle and the mutual influence variation between nozzles without impairing the merits such as the reduction of the number of parts and the improvement of the assemblability. The object is to realize an inkjet head in which the nozzle characteristics do not vary even when the substrate warps.
【０００７】[0007]
【課題を解決するための手段】本発明のインクジェット
ヘッドは、上記圧電素子のインク流路間に対応する部分
に、圧電素子の上面から下面の方向に、接着剤抜けの貫
通穴を設ける、また、圧電素子に端面から溝を形成して
各個別電極を完全に分離し、かつ、他方の端部で結合し
た櫛歯形状に加工を行ってから、振動板に接着すること
を特徴としている。In the ink jet head of the present invention, a through hole for removing an adhesive is provided in a portion corresponding to an ink flow path of the piezoelectric element in a direction from an upper surface to a lower surface of the piezoelectric element, The piezoelectric element is characterized in that a groove is formed from the end face to completely separate the individual electrodes, and the other end is processed into a comb-tooth shape and then bonded to the diaphragm.
【０００８】[0008]
【実施例】以下、本発明を図面に示す実施例により説明
する。図１〜３は本発明の実施例１を示すものであり、
図１にガラス、プラスチック、シリコン、感光性樹脂な
どの材質からなる基板１の上面１Ａには、複数のインク
流路２が等間隔に形成されており、そのインク流路は、
ノズル２Ａ，圧力室２Ｂ，供給路２Ｃから構成されてい
る。さらに、それぞれの供給路２Ｃは、全インク流路に
インクを供給する共通インク室２Ｄにつながっている。
前記基板１の上面１Ａには、基板１と同型の平面形状と
され、各インク流路２を被覆する振動板４が取り付けら
れおり、インク流路２は、閉溝となっている。上記、基
板１および振動板４からなるものを第１部材とする。The present invention will be described below with reference to the embodiments shown in the drawings. 1 to 3 show Example 1 of the present invention,
In FIG. 1, a plurality of ink channels 2 are formed at equal intervals on an upper surface 1A of a substrate 1 made of a material such as glass, plastic, silicon, and photosensitive resin.
It is composed of a nozzle 2A, a pressure chamber 2B, and a supply path 2C. Further, each supply path 2C is connected to a common ink chamber 2D that supplies ink to all ink flow paths.
On the upper surface 1A of the substrate 1, a vibration plate 4 having the same planar shape as that of the substrate 1 and covering each ink flow path 2 is attached, and the ink flow path 2 is a closed groove. The first member is composed of the substrate 1 and the diaphragm 4.
【０００９】次に、図２にインク噴出エネルギー発生体
である本発明の圧電素子４を第２部材として説明する。
平板の１枚の圧電素子４は、基板上の全インク流路の圧
力室を覆えるだけの面積を持ち、この圧電素子４の下面
には、共通電極５が、メッキ、蒸着などにより形成され
ている。また、前記圧電素子４の上面には、各インク流
路２の圧力室２Ｂに対応するように複数の個別電極６が
相互に間隔を隔てて形成されている。また、その個別電
極間の圧電素子部４には、圧電素子の上面から下面方向
に、複数の貫通穴８が形成されている。Next, the piezoelectric element 4 of the present invention, which is an ink jet energy generator, will be described as a second member in FIG.
One flat piezoelectric element 4 has an area enough to cover the pressure chambers of all ink flow paths on the substrate, and a common electrode 5 is formed on the lower surface of the piezoelectric element 4 by plating, vapor deposition, or the like. ing. Further, a plurality of individual electrodes 6 are formed on the upper surface of the piezoelectric element 4 so as to correspond to the pressure chambers 2B of each ink flow path 2 and are spaced from each other. In the piezoelectric element portion 4 between the individual electrodes, a plurality of through holes 8 are formed from the upper surface to the lower surface of the piezoelectric element.
【００１０】次に、図３に上記第１部材および第２部材
を接着する工程を説明する。第１部材の振動板３上に接
着剤９を均一厚みになるように塗布する。その後、第２
部材の圧電素子４を、上面に形成した個別電極６と圧力
室２Ｂの位置合わせを行い、圧電素子側から、適当な荷
重により加圧し、接着を行う。この際、図３に示すよう
に余分な接着剤や接着剤内の気泡は圧電素子側面および
前記貫通穴８より逃げ出し、個別電極６と圧力室２Ｂの
間の接着層の厚みは均一になる。Next, the step of bonding the first member and the second member will be described with reference to FIG. The adhesive 9 is applied on the vibration plate 3 of the first member so as to have a uniform thickness. Then the second
The piezoelectric element 4 of the member is aligned with the individual electrode 6 formed on the upper surface and the pressure chamber 2B, and pressure is applied from the piezoelectric element side by an appropriate load to bond them. At this time, as shown in FIG. 3, excess adhesive and bubbles in the adhesive escape from the side surface of the piezoelectric element and the through hole 8, and the thickness of the adhesive layer between the individual electrode 6 and the pressure chamber 2B becomes uniform.
【００１１】各インク流路２には、前記共通インク供給
室２Ｄからインクが供給される。また、共通電極５およ
び各個別電極６は図示しない制御手段と接続されてお
り、印字情報に応じて通電される。すると、通電された
圧電素子４に歪に生じ、この歪によりこの通電された圧
電素子の直下の振動板３が振動する。この結果、通電さ
れた圧電素子４に対向するインク流路２の容積が減少さ
れ、このインク流路２に連通しているノズル２Ａからイ
ンクが図示しない用紙にむけて噴出される。Ink is supplied to each ink flow path 2 from the common ink supply chamber 2D. The common electrode 5 and each individual electrode 6 are connected to a control means (not shown), and are energized according to the print information. Then, the energized piezoelectric element 4 is distorted, and the distortion vibrates the vibrating plate 3 immediately below the energized piezoelectric element 4. As a result, the volume of the ink flow path 2 facing the energized piezoelectric element 4 is reduced, and the ink is ejected from the nozzle 2A communicating with the ink flow path 2 toward a sheet (not shown).
【００１２】前述した実施例のインクジェットヘッドに
よれば、上記で説明したように、各個別電極６直下の接
着層厚みのバラツキを押える事ができるため、前記圧電
素子４の歪に対するインク流路の減少容積のインク流路
間のバラツキが抑えられ、用紙へ噴出するインクの重
量、噴出スピードを管理することができる。According to the ink jet head of the above-described embodiment, as described above, it is possible to suppress the variation in the thickness of the adhesive layer immediately below each individual electrode 6, and therefore the ink flow path with respect to the strain of the piezoelectric element 4 can be suppressed. Variation in the ink volume of the reduced volume is suppressed, and the weight of the ink ejected onto the paper and the ejection speed can be controlled.
【００１３】図４は、本発明の実施例２を示すものであ
る。上記実施例１における第２部材において、圧電素子
４が前記共通電極５および個別電極６にはさまれて形成
されており、個別電極間の圧電素子を、ダイシング加工
により排除し、圧電素子４を櫛歯形状に形成する。この
圧電素子４を上記実施例と同様な方法で、第１部材との
接着を行う。FIG. 4 shows a second embodiment of the present invention. In the second member of the first embodiment, the piezoelectric element 4 is formed so as to be sandwiched between the common electrode 5 and the individual electrode 6, and the piezoelectric element between the individual electrodes is removed by dicing processing to remove the piezoelectric element 4. It is formed in a comb shape. The piezoelectric element 4 is bonded to the first member in the same manner as in the above embodiment.
【００１４】上記の方法で、製造されたインクジェット
ヘッドは、実施例１同様、接着層の厚みを管理できるほ
か、各々のインク流路に対応する圧電素子を完全に分離
できるため、隣接するノズル間の圧電素子の影響を小さ
くすることが可能である。また、図５に示すように、基
板１もしくは振動板３にソリが生じている場合、従来の
圧電素子形状の接着では、圧電素子面が上記ソリに追従
できず、部分的な接着不良や応力集中が生じやすかった
が、上記、実施例２における第２部材では、基板１もし
くは振動板３のソリに対して信頼性の高い接着が可能で
ある。また、各々の圧電素子が端部で接続されているた
め、上記第１部材と第２部材の接着が１工程で済み、工
程が簡略化できるほか、各インク流路２の圧力室２Ｂに
対する圧電素子４の位置ズレ精度の向上につながる。In the ink jet head manufactured by the above method, the thickness of the adhesive layer can be controlled as in the case of the first embodiment, and the piezoelectric element corresponding to each ink flow path can be completely separated. It is possible to reduce the influence of the piezoelectric element. Further, as shown in FIG. 5, when the substrate 1 or the diaphragm 3 is warped, the piezoelectric element surface cannot follow the warp in the conventional bonding of the piezoelectric element shape, and a partial bonding failure or stress occurs. Although concentration was likely to occur, the second member in Example 2 described above enables highly reliable bonding to the warp of the substrate 1 or the diaphragm 3. Moreover, since the respective piezoelectric elements are connected at the end portions, the bonding of the first member and the second member can be completed in one step, the process can be simplified, and the piezoelectric element for the pressure chamber 2B of each ink channel 2 can be piezoelectrically bonded. This leads to an improvement in the positional deviation accuracy of the element 4.
【００１５】図６に本発明の実施例３を示す。上記第１
部材と第２部材の接着の工程において、第２部材の共通
電極５面に接着剤を塗布した後、第１部材に接着するこ
とにより、上記で示した隣接ノズル間の影響をより小さ
くすることができる。FIG. 6 shows a third embodiment of the present invention. First above
In the step of adhering the member and the second member, by applying an adhesive to the surface of the common electrode 5 of the second member and then adhering it to the first member, the influence between the adjacent nozzles described above can be further reduced. You can
【００１６】図７に本発明の実施例４を示す。第１部材
と第２部材を接着した後、第２部材の接続部４ＡのＡ−
Ａ’位置にきり込み１０を入れて、圧電素子部と分離す
る、また、その接続部４Ａに接着剤を塗布せず、きり込
み後接続部を排除することにより、上記で示した隣接ノ
ズル間の影響をより小さくすることができる。FIG. 7 shows a fourth embodiment of the present invention. After bonding the first member and the second member, A- of the connecting portion 4A of the second member
By inserting the cutout 10 at the position A ′ to separate it from the piezoelectric element part, and by not applying an adhesive to the connection part 4A thereof and eliminating the connection part after the cutout, between the adjacent nozzles shown above. The effect of can be made smaller.
【００１７】上記実施例で示した、圧電素子４は、一対
の電極間に圧電素子が挟まれた平板構造であるが、実施
例５として図８、９で示すように、平板の圧電素子を電
極５Ａ（共通電極側），６Ａ（個別電極側）を介して積
層した形状において、ｄ３１方向（図７）やｄ３３方向
（図８）の振動を用いた圧電素子に対しても有効であ
る。Although the piezoelectric element 4 shown in the above embodiment has a flat plate structure in which the piezoelectric element is sandwiched between a pair of electrodes, as shown in FIGS. 8 and 9 as a fifth embodiment, a flat piezoelectric element is used. The shape in which the electrodes 5A (common electrode side) and 6A (individual electrode side) are laminated is also effective for a piezoelectric element using vibration in the d31 direction (FIG. 7) or d33 direction (FIG. 8).
【００１８】また、実施例１および２で示した部材２の
製造方法として、平板の圧電素子を複数枚重ね合わせ
て、ワイヤーソーやドリルで、上記溝や貫通穴を形成す
ることが可能であり、量産性を向上することにも適して
いる。Further, as a method of manufacturing the member 2 shown in Examples 1 and 2, it is possible to stack a plurality of flat piezoelectric elements and form the above-mentioned groove or through hole with a wire saw or a drill. It is also suitable for improving mass productivity.
【００１９】[0019]
【発明の効果】以上に説明した本発明の効果としては次
の通り、列挙することができる。The effects of the present invention described above can be enumerated as follows.
【００２０】（１）圧電素子の接着面積が狭いため、接
着層の厚み管理が容易であり、また、接着層内の気泡が
抜けやすく、ノズル間の特性バラツキを抑えたインクジ
ェットヘッドを実現できる。(1) Since the adhesive area of the piezoelectric element is small, the thickness of the adhesive layer can be easily controlled, and bubbles in the adhesive layer can easily escape, so that an ink jet head in which the characteristic variation between nozzles is suppressed can be realized.
【００２１】（２）各ノズル流路に対応した個別電極間
が完全に分離し、かつ、端部で接続されているため、圧
電素子の振動板への接着が１工程で行う事が可能であ
り、かつ、各ノズル流路に対する位置ズレバラツキが少
ないインクジェットヘッドを実現できる。(2) Since the individual electrodes corresponding to the respective nozzle channels are completely separated and connected at the ends, the piezoelectric element can be bonded to the diaphragm in one step. In addition, it is possible to realize an ink jet head that has little positional deviation with respect to each nozzle flow path.
【図１】本発明の実施例における第１部材の構成図。FIG. 1 is a configuration diagram of a first member according to an embodiment of the present invention.
【図２】本発明の実施例１における第２部材の構成図。FIG. 2 is a configuration diagram of a second member according to the first embodiment of the present invention.
【図３】本発明の実施例１における第１部材と第２部材
の接着方法を説明した図。FIG. 3 is a diagram illustrating a method of bonding the first member and the second member according to the first embodiment of the present invention.
【図４】本発明の実施例２における第２部材の構成図。FIG. 4 is a configuration diagram of a second member according to the second embodiment of the present invention.
【図５】本発明の実施例３における第１部材と第２部材
の接着方法を説明した図。FIG. 5 is a diagram illustrating a method of bonding a first member and a second member according to a third embodiment of the present invention.
【図６】本発明の実施例４における第２部材の構成図。FIG. 6 is a configuration diagram of a second member in Embodiment 4 of the present invention.
【図７】本発明の実施例４における別の第２部材の構成
図。FIG. 7 is a configuration diagram of another second member according to the fourth embodiment of the present invention.
【図８】[Figure 8]
【図９】本発明の実施例５における第２部材の構成図。FIG. 9 is a configuration diagram of a second member in Embodiment 5 of the present invention.
【図１０】従来例を説明した図。FIG. 10 is a diagram illustrating a conventional example.
１ 基板 １Ａ 基板上面 ２ インク流路 ２Ａ ノズル ２Ｂ 圧力室 ２Ｃ 供給路 ２Ｄ 共通インク室 ３ 振動板 ４ 圧電素子 ５ 共通電極 ６ 個別電極 ７ 溝 ８ 貫通穴 ９ 接着層 １０ 切込み 1 Substrate 1A Substrate Upper Surface 2 Ink Channel 2A Nozzle 2B Pressure Chamber 2C Supply Channel 2D Common Ink Chamber 3 Vibration Plate 4 Piezoelectric Element 5 Common Electrode 6 Individual Electrode 7 Groove 8 Through Hole 9 Adhesive Layer 10 Notch
───────────────────────────────────────────────────── フロントページの続き (72)発明者 岡沢 宣昭 長野県諏訪市大和３丁目３番５号セイコー エプソン株式会社内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Nobuaki Okazawa 3-3-5 Yamato, Suwa City, Nagano Seiko Epson Corporation
Claims (1)
ように１対の電極間にはさまれた圧電素子を前記振動板
に取り付けてなるインクジェットヘッドにおいて、復数
個のインク流路に対向し、各々のインク流路間に対応す
る部分に貫通穴もしくは溝を形成した一枚の圧電素子
を、前記振動板上に同一接着層を介して設けたことを特
徴とするインクジェット記録ヘッドの製造方法。1. An ink jet head comprising a piezoelectric element, which is sandwiched between a pair of electrodes so as to face each ink flow path via a vibration plate, and is attached to the vibration plate. An ink jet recording head, characterized in that one piezoelectric element having a through hole or groove formed in a portion corresponding to each ink flow path is provided on the vibration plate via the same adhesive layer. Manufacturing method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14236792A JP3175301B2 (en) | 1992-06-03 | 1992-06-03 | Ink jet recording head and method of manufacturing ink jet recording head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14236792A JP3175301B2 (en) | 1992-06-03 | 1992-06-03 | Ink jet recording head and method of manufacturing ink jet recording head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH05330069A true JPH05330069A (en) | 1993-12-14 |
| JP3175301B2 JP3175301B2 (en) | 2001-06-11 |
Family
ID=15313740
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14236792A Expired - Lifetime JP3175301B2 (en) | 1992-06-03 | 1992-06-03 | Ink jet recording head and method of manufacturing ink jet recording head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3175301B2 (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0795406A2 (en) * | 1996-03-14 | 1997-09-17 | Lexmark International, Inc. | Ink jet Cartridge |
| WO1999004976A1 (en) * | 1997-07-25 | 1999-02-04 | Seiko Epson Corporation | Ink jet recording head and ink jet recorder |
| JPH11157069A (en) * | 1997-11-26 | 1999-06-15 | Seiko Epson Corp | Ink jet recording head |
| EP1366904A3 (en) * | 2002-05-28 | 2004-01-07 | Brother Kogyo Kabushiki Kaisha | Thin plate stacked structure and ink-jet recording head provided with the same |
| US7270404B2 (en) | 2003-09-24 | 2007-09-18 | Fujifilm Corporation | Inkjet recording head, inkjet recording apparatus and method for manufacturing inkjet recording head |
| JP2012502824A (en) * | 2008-09-18 | 2012-02-02 | フジフィルム ディマティックス， インコーポレイテッド | Bonding to a silicon substrate with grooves |
| JP2013154611A (en) * | 2012-01-31 | 2013-08-15 | Seiko Epson Corp | Liquid ejecting head and liquid ejecting apparatus |
-
1992
- 1992-06-03 JP JP14236792A patent/JP3175301B2/en not_active Expired - Lifetime
Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0795406A2 (en) * | 1996-03-14 | 1997-09-17 | Lexmark International, Inc. | Ink jet Cartridge |
| EP0795406A3 (en) * | 1996-03-14 | 1998-12-16 | Lexmark International, Inc. | Ink jet Cartridge |
| WO1999004976A1 (en) * | 1997-07-25 | 1999-02-04 | Seiko Epson Corporation | Ink jet recording head and ink jet recorder |
| US6315400B1 (en) | 1997-07-25 | 2001-11-13 | Seiko Epson Corporation | Ink jet recording head and ink jet recorder |
| JPH11157069A (en) * | 1997-11-26 | 1999-06-15 | Seiko Epson Corp | Ink jet recording head |
| US6955420B2 (en) | 2002-05-28 | 2005-10-18 | Brother Kogyo Kabushiki Kaisha | Thin plate stacked structure and ink-jet recording head provided with the same |
| EP1366904A3 (en) * | 2002-05-28 | 2004-01-07 | Brother Kogyo Kabushiki Kaisha | Thin plate stacked structure and ink-jet recording head provided with the same |
| US7311272B2 (en) | 2002-05-28 | 2007-12-25 | Brother Kogyo Kabushiki Kaisha | Thin plate stacked structure and ink-jet recording head provided with the same |
| EP2311639A1 (en) * | 2002-05-28 | 2011-04-20 | Brother Kogyo Kabushiki Kaisha | Thin plate stacked structure and ink-jet recording head provided with the same |
| US8523333B2 (en) | 2002-05-28 | 2013-09-03 | Brother Kogyo Kabushiki Kaisha | Thin plate stacked structure and ink-jet recording head provided with the same |
| US7270404B2 (en) | 2003-09-24 | 2007-09-18 | Fujifilm Corporation | Inkjet recording head, inkjet recording apparatus and method for manufacturing inkjet recording head |
| US7396113B2 (en) | 2003-09-24 | 2008-07-08 | Fujifilm Corporation | Inkjet recording head, inkjet recording apparatus and method for manufacturing inkjet recording head |
| JP2012502824A (en) * | 2008-09-18 | 2012-02-02 | フジフィルム ディマティックス， インコーポレイテッド | Bonding to a silicon substrate with grooves |
| US8853915B2 (en) | 2008-09-18 | 2014-10-07 | Fujifilm Dimatix, Inc. | Bonding on silicon substrate having a groove |
| JP2013154611A (en) * | 2012-01-31 | 2013-08-15 | Seiko Epson Corp | Liquid ejecting head and liquid ejecting apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3175301B2 (en) | 2001-06-11 |
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