JPH05325276A - Charged particle beam recorder - Google Patents

Abstract

PURPOSE:To record pits with a high precision on a rotating recording medium like a disk. CONSTITUTION:A rotating stage 2 is moved on a line L by the distance corresponding to the track position to be recorded at each time of one rotation. A receiver 11 detects the extent of movement of the rotating stage 2 by the signal from a laser length measuring instrument 10 and sends it to a comparator 12. This comparator compares it with the reference position signal from a track position signal generating circuit 14 and sends the difference, namely, a signal having information of the error corresponding to the unevenness of linear movement to a deflector 19. This deflector deflects the electron beam from an electron gun 17 in the direction of a revolving shaft O on the line L by the extent corresponding to this signal. As the result, pits are so recorded that tracks are formed at prescribed intervals.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a charged particle beam recording apparatus for recording information on a recording medium that continuously rotates while linearly moving intermittently or continuously, using a charged particle beam such as an electron beam. In particular, it relates to a charged particle beam recording apparatus having a mechanism for correcting jitter.

[0002]

2. Description of the Related Art Up to now, when recording information on a circular information recording medium such as a compact disc (CD), the recording medium is intermittently moved linearly and is continuously rotated while being rotated. I am using light like that.

Recently, there has been a demand for further increasing the recording density as compared with the past, to make the recording medium more compact and to occupy a smaller space, or to increase the recording amount. However, in the recording using light as in the past, the theoretical limit of the recording density due to the wavelength of light becomes a barrier to meet such a demand.

In the meantime, about 10 years ago, as an apparatus that meets such a demand, an apparatus was proposed which increases the recording density by recording information on a rotating disk by using an electron beam instead of light. (JP-A-58-203647). This device is a device that rotates a rotary stage on which a disc is placed at a predetermined speed and irradiates the disc with an electron beam from an electron optical lens barrel to record information on the disc. On the periphery of the rotary stage where is placed a boundary where the light reflectance is different between the inside and the outside, irradiate light on this boundary and detect the reflected light to detect the rotation blur of the rotary stage. It has a function of feeding back the detection information to the beam deflection system of the electron optical lens barrel to correct the rotational shake due to the eccentricity of the rotating shaft.

[0005]

However, in such a device, the rotation blur in the recording for each one rotation is corrected and the interval between the information (pits) recorded in the same track includes an allowable error. However, it is possible to maintain a predetermined value, but it is not possible to correct the linear movement feed unevenness that occurs due to the linear movement of the recording medium. Therefore, it is not possible to keep each track interval at a predetermined value including a tolerance. Therefore, high density recording was not possible.

The present invention has been made for the purpose of solving such a problem, and provides a novel charged particle beam recording apparatus.

[0007]

Therefore, the first aspect of the present invention is to provide charged particles on a recording medium placed on a rotating stage that continuously rotates while linearly moving intermittently or continuously. In a charged particle beam recording apparatus for irradiating a beam to record information, a reflecting mirror for measuring a linear movement amount of the rotary stage, or a unit integrated with the rotary stage, and a position opposite to the rotary stage. An optical length measuring device is provided, and a deflection system of the charged particle beam is controlled based on a measurement value of the length measuring device. The axis center of the charged particle beam, the rotation axis center of the rotary stage and the The linear movement measurement points were arranged on a straight line parallel to the linear movement direction.

The second aspect of the present invention uses a charged particle beam on a recording medium mounted on a rotary stage that is provided on a linear stage that intermittently or continuously moves linearly and that rotates continuously. In the charged particle beam recording apparatus for recording information, the rotary stage or the one integrated with the rotary stage, and a reflecting mirror for measuring the linear movement amount of the rotary stage at the position opposite to the rotary stage, and optical length measurement. Is provided, and the deflection system of the charged particle beam is controlled based on the measurement value of the length measuring device, and the axis center of the charged particle beam, the rotation axis center of the rotary stage, and the linear movement measurement point are set. Light arranged on a straight line parallel to the linear movement direction, which is on a straight line forming a right angle to the linear movement direction and which is integrated with the rotary stage, for measuring the rotational shake of the rotary stage. And the optical stage is provided on the surface of the linear stage parallel to the linear movement direction of the rotary stage and the position opposite thereto, and the rotary stage measured by the length measuring device. The deflection system in the direction perpendicular to the deflection direction of the deflection system is controlled based on the signal representing the blur in the direction perpendicular to the linear movement direction and the signal representing the measured rotational blur.

[0009]

1 and 2 are schematic views of an electron beam recording apparatus showing an embodiment of the present invention, and FIG. 2 is a view of the stage system shown in FIG. 1 viewed from the electron optical axis direction.

In the figure, reference numeral 1 denotes a circular information recording medium such as a CD, which is mounted on a rotary stage 2. The rotary stage is rotated by a motor 4 fixed on the linear stage 3 along a plane perpendicular to the rotary shaft 5. The linear stage is linearly moved in the X direction along a shaft 7 by a motor 6. Although not shown, a stage linear movement system for movement in the Y direction is also provided in practice. Incidentally, 8 is a bearing.
A reflecting mirror 9 is attached to the side surface of the rotary stage 2, and a laser length measuring device 10 is provided at a position facing the reflecting mirror. The length measuring device outputs an interference signal having information on the moving distance of the rotary stage 2 in the X direction based on the laser light to the reflecting mirror 9 and the reflected light from the reflecting mirror. The interference signal is captured by the receiver 11 and sent to the comparison circuit 12. A position signal serving as a reference is intermittently sent to the comparison circuit from a track position signal generation circuit 14 that operates based on a command from the control device 13. 15,
Reference numeral 16 is a motor drive circuit that operates based on a command from the control device 13. Reference numeral 17 in the drawing denotes an electron gun, and an electron beam from the electron gun is focused by the focusing lens 18 on the recording medium 1.
Focused in place on top. 19X and 19Y respectively,
It is a deflector that adjusts the position of the electron beam on the recording medium based on signals from the comparison circuit 27 and the comparison circuit 12 described later. 21 and 22 are directed toward the recording medium of the electron beam from the electron gun 17 based on a blanking signal from a blanking signal generating circuit 20 which creates a blanking signal based on a recording command from the control device 13. Blanking electrodes and blanking slits for turning on and off. Incidentally, a reflection point P (linear movement measurement point) of the laser light from the laser length measuring device 10 and a center O of the recording medium 1
The center Q of the (rotation axis) and the electron optical axis (recording axis of the electron beam) is on a straight line L substantially parallel to the X axis.

A laser length-measuring device 23 is mounted on the straight line M which is perpendicular to the straight line L and on the straight line stage 3. A reflecting mirror 24 is provided on the side surface of the linear stage parallel to the X axis. A laser length measuring device 25 is provided at a position facing the reflecting mirror. The interference signals from the laser length measuring devices 23 and 25 are received by the receiver 26.
And is sent to the comparison circuit 27. A reference position signal is always sent to the comparison circuit from a reference signal generation circuit 28 that operates based on a command from the control device 13.

In such a device, the control device 13 is
An electron beam from the electron gun 1 is used to generate a control command signal such that pits are recorded on each track of the recording medium 1 at a predetermined interval, and each track in which the pits are recorded is consequently formed at a predetermined interval. The motor drive circuits 15 and 16, respectively,
It is sent to the blanking signal generation circuit 20. As a result, the rotation stages 2 are continuously rotated by the motors 6 and 4 intermittently and linearly moved by a predetermined amount in the X direction for each rotation, and first on the straight line L of the recording medium 1 by the focusing lens 18. As shown in FIG. 3, the electron beam from the electron gun 1 located at the recording start point pits 101, 10 on the same track.
.. are sequentially recorded, pits 201, 202, 203, ... Are sequentially recorded on the next track, and pits 301, 302, ... Are sequentially recorded on the next track.

In such recording, the linear movement feed unevenness is corrected as follows.

The rotary stage 2 moves on the straight line L for each rotation by a distance corresponding to the position of the next track to be recorded. At this time, the receiver 11 detects the amount of movement of the rotary stage 2 based on the signal from the laser length measuring device 10 and sends it to the comparator 12. The comparison circuit compares the reference position signal from the track position signal generation circuit 14 with the difference, that is,
Since the signal having the error information corresponding to the linear movement feed unevenness is sent to the deflector 19, the deflector corresponds to the signal,
The electron beam from the electron gun 17 is deflected on the straight line L in the direction of the rotation axis O. As a result, pits are recorded so that the respective tracks have a predetermined interval.

The shake in the direction parallel to the Y axis of the rotary stage and the shake of the rotary shaft are corrected as follows.

The output of the laser length-measuring device 23, that is, a signal having information corresponding to the rotation axis deviation of the rotary stage 2 with respect to the linear stage 3 in the Y direction, and the laser length-measuring device 2
The output of No. 5, that is, the signal having information corresponding to the blurring of the linear stage 3 in the Y-axis direction is detected by the receiver 26. The comparison circuit 27 compares the detected signal with the reference signal from the reference signal generation circuit 28, and the difference, that is, the information obtained by combining the total blur in the Y direction with respect to the electron optical system of the rotary stage 2. Deflection signal 1 with
9Y, the deflector deflects the electron beam from the electron gun 17 on the straight line M by the amount corresponding to the signal. As a result, the pits are recorded on each track so that the pits have predetermined intervals. At this time, the conventional method for blurring the rotary shaft may be used.

Needless to say, the present invention is not limited to the above-mentioned embodiment, and there are various modifications.

For example, although an electron beam is used in the above embodiment, an ion beam may be used instead. Further, in the above-mentioned embodiment, the reflecting mirror 9 is attached to the side surface of the rotary stage 2 to detect the linear movement feed unevenness and the like.
A reflecting mirror may be attached to the rotating shaft 5 so as to detect linear movement feed unevenness and the like. As another example of providing such a reflecting mirror, for example, a metal forming a mirror surface may be attached in a film shape on the side surface of the rotary stage 2 or the rotary shaft. Further, in the above-described embodiment, an example of recording information on a recording medium configured to intermittently move linearly is shown. However, when information is recorded spirally on a recording medium configured to continuously linearly move. The present invention can also be applied to.

[0019]

According to the present invention, the axis center of the charged particle beam, the rotation axis center of the rotary stage, and the linear movement measurement point are arranged on a straight line parallel to the linear movement direction and integrated with the rotary stage or the rotary stage. The object and its opposing position are provided with a reflecting mirror and an optical length measuring device for measuring the linear movement amount of the rotary stage respectively, and the deflection system of the charged particle beam is controlled based on the measurement value of the length measuring device. Since it is configured to do so, it is possible to correct the linear movement feed unevenness, and as a result, it is possible to maintain each track interval at a predetermined value including an allowable error. Therefore, highly accurate recording can be performed.

Further, according to the present invention, an optical means for measuring the rotational shake of the rotary stage is provided in an integrated unit with the rotary stage, and a surface parallel to the linear movement direction of the linear stage and A reflecting mirror and an optical length measuring device are provided at the opposite positions, respectively, and a shake in a direction perpendicular to the linear movement direction of the rotary stage measured by the length measuring device and a measured rotary shake are measured in the deflection direction of the deflection system. Since it is configured to control and compensate for the deflection system in the direction perpendicular to, the shake in the direction parallel to the linear movement direction of the rotary stage and the rotary shaft shake can also be corrected, resulting in extremely high-precision recording. It will be possible.

[Brief description of drawings]

FIG. 1 is a schematic diagram of an electron beam recording apparatus showing an embodiment of the present invention.

FIG. 2 is a schematic view of an electron beam recording apparatus showing an embodiment of the present invention, and is a view of the stage system shown in FIG. 1 viewed from the electron optical axis direction.

FIG. 3 shows an example of recording information on a recording medium.

[Explanation of symbols]

 1 recording medium 2 rotary stage 3 linear stage 4,6 motor 5 rotary shaft 7 shaft 8 bearing 9,24 reflecting mirror 10,23,25 laser length measuring device 11,26 receiver 12,27 comparison circuit 13 controller 14 track position signal Generation circuit 15, 16 Motor drive circuit 17 Electron gun 18 Focusing lens 19X, 19Y Deflector 20 Blanking signal generation circuit 21 Blanking electrode 22 Blanking slit 28 Reference signal generation circuit 101, 102, 103, pit

Claims (2)

[Claims] 1. A charged particle beam recording apparatus for recording information by irradiating a recording medium mounted on a continuously rotating rotating stage with a charged particle beam while linearly moving intermittently or continuously. , The rotary stage or the one integrated with the rotary stage, and a reflecting mirror and an optical length measuring device for measuring the linear movement amount of the rotary stage, respectively, at the opposing positions thereof, and the measurement of the length measuring device. The deflection system of the charged particle beam is controlled based on the value, and the axis center of the charged particle beam, the rotation axis center of the rotary stage, and the linear movement measurement point are aligned on a straight line parallel to the linear movement direction. Placed charged particle beam recorder. 2. A charged particle beam for recording information using a charged particle beam on a recording medium, which is provided on a linear stage which moves linearly intermittently or continuously, and which is mounted on a continuously rotating rotary stage. In the recording device, the rotary stage or the one integrated with the rotary stage, and a reflecting mirror and an optical length measuring device for measuring the linear movement amount of the rotary stage, respectively, are provided at opposing positions thereof, and the length measuring device is provided. The deflection system of the charged particle beam is controlled based on the measurement value of the instrument, and the axis center of the charged particle beam, the rotation axis center of the rotary stage, and the linear movement measurement point are parallel to the linear movement direction. Optical means for measuring rotational shake of the rotary stage, which is arranged on a straight line and is integrated with the rotary stage on a straight line that is perpendicular to the linear movement direction, and , A surface of the linear stage in a direction parallel to the linear movement direction of the rotary stage and its opposing position are provided with a reflecting mirror and an optical length measuring device, respectively, and in the linear movement direction of the rotary stage measured by the length measuring device. A charged particle beam recording apparatus configured to control a deflection system in a direction perpendicular to a deflection direction of the deflection system based on a signal representing a blur in a perpendicular direction and a signal representing the measured rotational blur.