JPH05323003A - Superconductive quantum interference element - Google Patents
Superconductive quantum interference elementInfo
- Publication number
- JPH05323003A JPH05323003A JP4128547A JP12854792A JPH05323003A JP H05323003 A JPH05323003 A JP H05323003A JP 4128547 A JP4128547 A JP 4128547A JP 12854792 A JP12854792 A JP 12854792A JP H05323003 A JPH05323003 A JP H05323003A
- Authority
- JP
- Japan
- Prior art keywords
- coil
- squid
- input coil
- superconducting
- resistor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Measuring Magnetic Variables (AREA)
- Measurement And Recording Of Electrical Phenomena And Electrical Characteristics Of The Living Body (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、極微小磁場の測定、特
に生体磁場測定を目的とした磁場測定装置において使用
されるＳＱＵＩＤ（超伝導量子干渉素子）に関し、その
入力コイルに並列に接続されるダンピング抵抗の形成、
配置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a SQUID (superconducting quantum interference device) used in a magnetic field measuring apparatus for measuring a very small magnetic field, particularly for measuring a biomagnetic field, which is connected in parallel to its input coil. Damping resistance,
Regarding placement.
【０００２】[0002]
【従来の技術】ＳＱＵＩＤ（超伝導量子干渉素子）は磁
場を電圧に高感度に変換するデバイスである。ＳＱＵＩ
Ｄは高感度磁気センサとして磁場計測に使用されるだけ
でなく、ディジタル回路素子としても重要な役割を果た
している。これらの理由から、ＳＱＵＩＤの応用範囲と
しては生体磁気計測をはじめ、物性実験・電気精密計測
・地球物理・基礎物理理論の検証実験などがある。従
来、ＳＱＵＩＤ（超伝導量子干渉素子）内の浮遊容量と
入力コイル系が共振を起こし、ＳＱＵＩＤの動作上問題
になっていた。これまで、図７に示す回路図の構成のよ
うに入力コイル９または検出コイル１０に並列にダンピ
ング抵抗１１及びコンデンサ１２を入れ共振を抑え、Ｓ
ＱＵＩＤの動作を安定にしていた(（ジャーナル・オブ
・ロウテンパレーチャ・フイジックス）J.Low Temp.Phy
s.68,3/4, p269 1987)。従来は抵抗を入力コイルに半田
付けで対処していた。2. Description of the Related Art The SQUID (superconducting quantum interference device) is a device for converting a magnetic field into a voltage with high sensitivity. SQUI
D is not only used as a high-sensitivity magnetic sensor for magnetic field measurement, but also plays an important role as a digital circuit element. For these reasons, the application range of SQUID includes biomagnetic measurement, physical property experiment, electrical precision measurement, geophysics, and verification experiment of basic physical theory. Conventionally, the stray capacitance in the SQUID (superconducting quantum interference device) and the input coil system resonate, causing a problem in the operation of the SQUID. So far, as in the configuration of the circuit diagram shown in FIG. 7, a damping resistor 11 and a capacitor 12 are placed in parallel with the input coil 9 or the detection coil 10 to suppress resonance, and
Stabilized the operation of QUID ((Journal of Low Temperature Physics) J. Low Temp. Phy
s.68, 3/4, p269 1987). Conventionally, the resistance was soldered to the input coil.
【０００３】[0003]
【発明が解決しようとする課題】多チャンネルからなる
磁場計測装置では、各ＳＱＵＩＤ上に抵抗を半田付けで
設置する場合、大きな面積が必要となり多数のチャンネ
ルを形成することが困難であった。また、系全体として
の熱容量も増大し、冷媒が溜りにくくなるという問題が
あった。本発明の目的は上記問題を解決するため、ＳＱ
ＵＩＤ上に薄膜プロセス技術を用いてダンピング抵抗を
ＳＱＵＩＤチップ程度の大きさにして形成することにあ
る。即ち、発明の第１の目的は薄膜プロセス技術を用い
てダンピング抵抗をＳＱＵＩＤと同じチップ上に形成、
配置し、この抵抗体のレイアウトを提供することにあ
る。また、第２の目的はダンピング抵抗の抵抗値を１０
オーム以上１ｋオーム以下の大きさで可変に設定できる
ようにすることにある。また、各ＳＱＵＩＤチップで浮
遊容量がばらつくために、ＳＱＵＩＤ内の浮遊容量とイ
ンダクタンスとの共振条件が各ＳＱＵＩＤチップで異な
るという問題が生じ、各々のＳＱＵＩＤチップで最適な
ダンピング抵抗値を設定しなければならない。そこで本
発明の第３の目的は、任意にダンピング抵抗値を選択で
きるようにすることである。In a multi-channel magnetic field measuring apparatus, when a resistor is mounted on each SQUID by soldering, a large area is required and it is difficult to form a large number of channels. In addition, there is a problem that the heat capacity of the entire system is increased and the refrigerant is less likely to accumulate. The object of the present invention is to solve the above problems by using SQ.
The purpose is to form a damping resistor on the UID by using a thin film process technology so as to have a size of a SQUID chip. That is, the first object of the invention is to form a damping resistor on the same chip as the SQUID by using the thin film process technology.
Place and provide the layout of this resistor. The second purpose is to set the resistance value of the damping resistor to 10
The purpose is to be able to variably set the size from ohm to 1 k ohm. In addition, since the stray capacitance varies among the SQUID chips, there arises a problem that the resonance conditions of the stray capacitance and the inductance in the SQUID are different in each SQUID chip, and the optimum damping resistance value must be set in each SQUID chip. I won't. Therefore, a third object of the present invention is to allow the damping resistance value to be arbitrarily selected.
【０００４】[0004]
【課題を解決するための手段】入力コイルと、この入力
コイルと磁気結合している超伝導リング、この超伝導リ
ングと磁気結合している帰還コイル、及び超伝導リング
にジョセフソン接合が構成されたＳＱＵＩＤ（超伝導量
子干渉素子）において、入力コイルの超伝導リングの外
側に配置された部分の線間に抵抗体が入力コイルと並列
に接続して形成される。入力コイルは複数本巻で構成さ
れ、入力コイルの各巻線の間に複数個の抵抗体を形成す
る。あるいは入力コイルの最も内側にある巻線と最も外
側にある巻線との間に抵抗体を設ける。また、抵抗体が
入力コイルの超伝導リングの外側に直線状に形成され、
かつ抵抗体の往路と復路の線が同じ位置に形成され、抵
抗体が入力コイルと並列に接続される。抵抗体は入力コ
イルの超伝導リングの外側にある接続端子の近傍に複数
個独立に形成され、複数個の抵抗体の端部には接続端子
が形成される。抵抗体の抵抗値は１０オーム以上かつ１
ｋオーム以下に設定され、抵抗体と直列にコンデンサが
接続される。本発明では、入力コイルに並列接続になる
ように、抵抗体を入力コイルの端子間に形成し、抵抗体
をＳＱＵＩＤチップの外部に設け、抵抗体の長さや太さ
や厚さを調整することで抵抗値を１０オーム以上１ｋオ
ーム以下に設定する。複数個の抵抗体をＳＱＵＩＤチッ
プ上に形成しその抵抗体の接続を変えることで任意の抵
抗値を選択する。A Josephson junction is formed in an input coil, a superconducting ring magnetically coupled to the input coil, a feedback coil magnetically coupled to the superconducting ring, and a superconducting ring. In the SQUID (superconducting quantum interference device), a resistor is formed in parallel with the input coil between the lines of the portion of the input coil arranged outside the superconducting ring. The input coil is composed of a plurality of windings, and a plurality of resistors are formed between the windings of the input coil. Alternatively, a resistor is provided between the innermost winding and the outermost winding of the input coil. Also, the resistor is formed linearly outside the superconducting ring of the input coil,
Moreover, the forward and return lines of the resistor are formed at the same position, and the resistor is connected in parallel with the input coil. A plurality of resistors are independently formed near the connection terminals outside the superconducting ring of the input coil, and connection terminals are formed at the ends of the plurality of resistors. The resistance value of the resistor is 10 ohms or more and 1
It is set below k ohms and a capacitor is connected in series with the resistor. In the present invention, the resistor is formed between the terminals of the input coil so as to be connected in parallel to the input coil, the resistor is provided outside the SQUID chip, and the length, thickness and thickness of the resistor are adjusted. The resistance value is set to 10 ohm or more and 1 k ohm or less. An arbitrary resistance value is selected by forming a plurality of resistors on the SQUID chip and changing the connection of the resistors.
【０００５】[0005]
【作用】薄膜プロセス技術を用いることにより、ダンピ
ング抵抗をＳＱＵＩＤチップと同程度の大きさまで小さ
くできる。また、ダンピング抵抗を入力コイルに並列に
接続するのでＳＱＵＩＤ内の共振を抑えることができ、
ＳＱＵＩＤを安定に動作できる。By using the thin film process technology, the damping resistance can be reduced to the same level as that of the SQUID chip. Moreover, since the damping resistor is connected in parallel to the input coil, resonance in the SQUID can be suppressed,
SQUID can operate stably.
【０００６】[0006]
【実施例】本発明の実施例について以下説明する。図１
に基づいて第１の実施例について説明する。ＳＱＵＩＤ
は超伝導リング４の上にｎ回巻の入力コイル１が設けら
れており、この入力コイルの外側には帰還変調コイル６
が形成されている。また、超伝導リングにはジョセフソ
ン接合５が形成されている。以下説明に用いるＳＱＵＩ
Ｄの図は全て上記の構造になっている。ＳＱＵＩＤの入
力コイル１に並列接続になるようにダンピング抵抗２
を、図１のように入力コイル１の巻線に至るまでの線間
上に形成する。このダンピング抵抗は薄膜プロセス技術
を用いて、モリブデン(Mo)または金(Au)によって形成す
る。以下述べる全ての実施例においてこの薄膜プロセス
技術を用いてダンピング抵抗を形成する。次に図２に基
づいて実施例２について説明する。ｎ回巻の入力コイル
１の＃１と＃２の間・＃２と＃３の間・・・＃（ｎ−
１）と＃ｎの間までの各巻線間に、図２のようにダンピ
ング抵抗２を（ｎ−１）個形成している。ただし、図中
では階段式にダンピング抵抗を形成しているが、この構
造に限るものではない。また、ダンピング抵抗の構成数
も（ｎ−１）個に限るものではなく、１個以上存在すれ
ばよい。次に図３に基づいて第３の実施例について説明
する。図３は、入力コイル部１の最も内側のコイル（＃
１）と最も外側のコイル（＃ｎ）との間にダンピング抵
抗２を形成したものである。これも必ずしも、＃１と＃
ｎの間にダンピング抵抗を形成するものに限るものでは
ない。このダンピング抵抗２は超伝導リング４の層と入
力コイル１の層の間の層に形成することが望ましいが、
これに限るものではない。EXAMPLES Examples of the present invention will be described below. Figure 1
The first embodiment will be described based on FIG. SQUID
Is provided with an n-turn input coil 1 on a superconducting ring 4, and a feedback modulation coil 6 is provided outside the input coil 1.
Are formed. Moreover, the Josephson junction 5 is formed in the superconducting ring. SQUI used in the following description
All the drawings in D have the above structure. Damping resistor 2 so that it is connected in parallel with SQUID input coil 1.
Is formed on the line between the windings of the input coil 1 as shown in FIG. The damping resistor is formed of molybdenum (Mo) or gold (Au) using a thin film process technology. Damping resistors are formed using this thin film process technique in all the examples described below. Second Embodiment Next, a second embodiment will be described based on FIG. Between # 1 and # 2 of n turns of input coil 1 Between # 2 and # 3 ... # (n-
(N-1) damping resistors 2 are formed between the windings between 1) and #n as shown in FIG. However, although the damping resistance is formed stepwise in the figure, it is not limited to this structure. Further, the number of damping resistors is not limited to (n-1), and one or more damping resistors may be provided. Next, a third embodiment will be described with reference to FIG. FIG. 3 shows the innermost coil (#
The damping resistor 2 is formed between 1) and the outermost coil (#n). This is also not always # 1 and #
It is not limited to the one that forms the damping resistance between n. The damping resistor 2 is preferably formed in a layer between the layer of the superconducting ring 4 and the layer of the input coil 1.
It is not limited to this.
【０００７】次に図４に基づいて第４の実施例について
説明する。ＳＱＵＩＤの入力コイル１に並列接続になる
ようにダンピング抵抗２を、図４のように入力コイル１
の外部に直線状に形成し、このダンピング抵抗２の配線
によるインダクタンスが最小になるように、リング状に
ならずつまりループを描かないように往路と復路をなる
べく同じ線上に形成し接合部３によって入力コイル１に
接続する。ただし、図４では、図面の都合上、往路と復
路が離して表記している。また、超伝導リング４や帰還
変調コイル６とダンピング抵抗２との間の浮遊容量を避
けるため、他の配線と交叉せず、他の配線から十分遠い
所にダンピング抵抗２を配置する。また、このような構
造にすることで層構造にする必要が無いため薄膜プロセ
ス技術による作成を容易にすることができる。また、こ
のようにしてダンピング抵抗２を自由に長くできるた
め、容易に抵抗値を１０オーム以上１ｋオーム以下に選
択して設定できる。次に図５に基づいて実施例５につい
て説明する。この実施例では図４の第４の実施例のダン
ピング抵抗２に直列にコンデンサ７を設ける。このコン
デンサは２枚の導体を極板にしたもので形成される。こ
のコンデンサを入れることにより、ダンピング抵抗２と
コンデンサ７とのＲＣハイパスフィルタ回路となり、ダ
ンピング抵抗から発生する熱雑音による雑音を低減でき
る。Next, a fourth embodiment will be described with reference to FIG. The damping resistor 2 is connected in parallel to the input coil 1 of the SQUID, and the input coil 1 is connected as shown in FIG.
Of the damping resistor 2 is formed in a straight line outside, and the forward path and the return path are formed on the same line as much as possible so as not to form a ring, that is, to form a loop so that the inductance due to the wiring of the damping resistor 2 is minimized. Connect to input coil 1. However, in FIG. 4, for the convenience of the drawing, the outward path and the return path are separated. Further, in order to avoid the stray capacitance between the superconducting ring 4 and the feedback modulation coil 6 and the damping resistor 2, the damping resistor 2 is arranged at a position far away from other wiring without crossing other wiring. Further, with such a structure, it is not necessary to form a layered structure, so that it is possible to facilitate the production by the thin film process technique. Further, since the damping resistance 2 can be freely lengthened in this way, the resistance value can be easily selected and set to 10 ohm or more and 1 k ohm or less. Next, a fifth embodiment will be described based on FIG. In this embodiment, a capacitor 7 is provided in series with the damping resistor 2 of the fourth embodiment shown in FIG. This capacitor is formed by using two conductors as an electrode plate. By inserting this capacitor, an RC high-pass filter circuit including the damping resistor 2 and the capacitor 7 is formed, and noise due to thermal noise generated from the damping resistor can be reduced.
【０００８】次に第６図に基づいて実施例６を説明す
る。入力コイル１に図のようにダンピング抵抗２を設け
る。この時、ダンピング抵抗の片側は共通になっており
図のようにその先には検出コイル取付け用の超伝導のボ
ンディングパットＡが形成されている。また、ダンピン
グ抵抗の他方側には超伝導ボンディングパットａ，ｂ，
ｃが形成されている。検出コイルからのボンディングと
パットＣからのボンディングをこのダンピング抵抗上の
パットａ，ｂ，ｃの何れかに接続することによって、任
意のダンピング抵抗を得ることができる。また、ダンピ
ング抵抗を取り付けたくない場合は、片側は前述したよ
うにパットＡに取付け、もう片側は検出コイルからのボ
ンディングをパットＣに直接接続するか、または、パッ
トＢを経由してパットＣに接続すればよい。また、ここ
で示したダンピング抵抗は必ずしもＳＱＵＩＤチップ上
に形成されるものでなくてもよく、例えば、ＳＱＵＩＤ
取付け用の基板上に形成することもできる。Next, a sixth embodiment will be described with reference to FIG. A damping resistor 2 is provided on the input coil 1 as shown in the figure. At this time, one side of the damping resistor is common, and a superconducting bonding pad A for attaching the detection coil is formed at the tip thereof as shown in the figure. On the other side of the damping resistor, the superconducting bonding pads a, b,
c is formed. By connecting the bonding from the detection coil and the bonding from the pad C to any one of the pads a, b and c on the damping resistance, an arbitrary damping resistance can be obtained. If you do not want to attach a damping resistor, attach one side to the pad A as described above and connect the bonding from the detection coil to the pad C directly on the other side, or to the pad C via the pad B. Just connect. Further, the damping resistor shown here does not necessarily have to be formed on the SQUID chip.
It can also be formed on a mounting substrate.
【０００９】[0009]
【発明の効果】本発明により、ＳＱＵＩＤ内にダンピン
グ抵抗及びコンデンサを薄膜プロセス技術を用いて形成
することができ、従来、ＳＱＵＩＤの不安定動作の原因
であった、入力コイル系の浮遊容量とインダクタンスと
のＬＣ共振を抑えることができ、ＳＱＵＩＤを安定に動
作することができる。According to the present invention, the damping resistor and the capacitor can be formed in the SQUID by using the thin film process technology, and the stray capacitance and the inductance of the input coil system, which has been the cause of the unstable operation of the SQUID, have been heretofore known. The LC resonance with can be suppressed, and the SQUID can operate stably.
【図１】本発明の実施例１である抵抗体の形成、配置を
示す平面図。FIG. 1 is a plan view showing formation and arrangement of a resistor that is Embodiment 1 of the present invention.
【図２】本発明の実施例２である抵抗体の形成、配置を
示す平面図。FIG. 2 is a plan view showing formation and arrangement of a resistor that is Embodiment 2 of the present invention.
【図３】本発明の実施例３である抵抗体の形成、配置を
示す平面図。FIG. 3 is a plan view showing formation and arrangement of a resistor that is Embodiment 3 of the present invention.
【図４】本発明の実施例４である抵抗体の形成、配置を
示す平面図。FIG. 4 is a plan view showing formation and arrangement of a resistor which is Embodiment 4 of the present invention.
【図５】本発明の実施例５である抵抗体の形成、配置を
示す平面図。FIG. 5 is a plan view showing formation and arrangement of a resistor that is Embodiment 5 of the present invention.
【図６】本発明の実施例６である抵抗体の形成、配置を
示す平面図。FIG. 6 is a plan view showing formation and arrangement of a resistor which is Embodiment 6 of the present invention.
【図７】ＳＱＵＩＤの動作を安定にするための従来例の
回路構成図。FIG. 7 is a circuit configuration diagram of a conventional example for stabilizing the operation of SQUID.
１、９…入力コイル、２、１１…ダンピング抵抗、３…
接合部、４…超伝導リング、５…ジョセフソン接合、６
…帰還変調コイル、７、１２…コンデンサ、８…超伝導
ボンディングパット、１０…検出コイル。1, 9 ... Input coil, 2, 11 ... Damping resistance, 3 ...
Junction part, 4 ... Superconducting ring, 5 ... Josephson junction, 6
... Feedback modulation coil, 7, 12 ... Capacitor, 8 ... Superconducting bonding pad, 10 ... Detection coil.
Claims (7)
ている超伝導リング、この超伝導リングと磁気結合して
いる帰還コイル、及び前記超伝導リングにジョセフソン
接合が構成されたＳＱＵＩＤ（超伝導量子干渉素子）に
おいて、前記入力コイルの前記超伝導リングの外側に配
置された部分の線間に抵抗体が前記入力コイルと並列に
接続して形成されたことを特徴とするＳＱＵＩＤ（超伝
導量子干渉素子）。1. An input coil, a superconducting ring magnetically coupled to the input coil, a feedback coil magnetically coupled to the superconducting ring, and a SQUID (super coil having a Josephson junction formed on the superconducting ring. SQUID (superconducting quantum interference device), wherein a resistor is formed between the lines of a portion of the input coil arranged outside the superconducting ring in parallel with the input coil. Quantum interference device).
ている超伝導リング、この超伝導リングと磁気結合して
いる帰還コイル、及び前記超伝導リングにジョセフソン
接合が構成されたＳＱＵＩＤ（超伝導量子干渉素子）に
おいて、前記入力コイルが複数本巻で構成され、前記入
力コイルの各巻線の間に複数個の抵抗体が形成されたこ
とを特徴とするＳＱＵＩＤ（超伝導量子干渉素子）。2. An input coil, a superconducting ring magnetically coupled to the input coil, a feedback coil magnetically coupled to the superconducting ring, and a SQUID (super coil having a Josephson junction formed on the superconducting ring. SQUID (superconducting quantum interference device), wherein the input coil is composed of a plurality of windings, and a plurality of resistors are formed between the windings of the input coil.
ている超伝導リング、この超伝導リングと磁気結合して
いる帰還コイル、及び前記超伝導リングにジョセフソン
接合が構成されたＳＱＵＩＤ（超伝導量子干渉素子）に
おいて、前記入力コイルが複数本巻で構成され、前記入
力コイルの最も内側にある巻線と最も外側にある巻線と
の間に抵抗体が設けられたことを特徴とするＳＱＵＩＤ
（超伝導量子干渉素子）。3. An input coil, a superconducting ring magnetically coupled to the input coil, a feedback coil magnetically coupled to the superconducting ring, and a SQUID (super coil having a Josephson junction formed on the superconducting ring. In the conduction quantum interference device), the input coil is composed of a plurality of windings, and a resistor is provided between the innermost winding and the outermost winding of the input coil. SQUID
(Superconducting quantum interference device).
ている超伝導リング、この超伝導リングと磁気結合して
いる帰還コイル、及び前記超伝導リングにジョセフソン
接合が構成されたＳＱＵＩＤ（超伝導量子干渉素子）に
おいて、抵抗体が前記入力コイルの前記超伝導リングの
外側に直線状に形成され、かつ前記抵抗体の往路と復路
の線が同じ位置に形成され、前記抵抗体が前記入力コイ
ルと並列に接続されたことを特徴とするＳＱＵＩＤ（超
伝導量子干渉素子）。4. An input coil, a superconducting ring magnetically coupled to the input coil, a feedback coil magnetically coupled to the superconducting ring, and a SQUID (super coil having a Josephson junction formed on the superconducting ring. Conductive quantum interference device), a resistor is formed linearly outside the superconducting ring of the input coil, and the forward and return lines of the resistor are formed at the same position, and the resistor is the input. An SQUID (superconducting quantum interference device), which is connected in parallel with a coil.
ている超伝導リング、この超伝導リングと磁気結合して
いる帰還コイル、及び前記超伝導リングにジョセフソン
接合が構成されたＳＱＵＩＤ（超伝導量子干渉素子）に
おいて、抵抗体が前記入力コイルの前記超伝導リングの
外側にある接続端子の近傍に複数個独立に形成され、前
記複数個の抵抗体の端部には接続端子が形成されたこと
を特徴とするＳＱＵＩＤ（超伝導量子干渉素子）。5. An input coil, a superconducting ring magnetically coupled to the input coil, a feedback coil magnetically coupled to the superconducting ring, and a SQUID (super coil having a Josephson junction formed on the superconducting ring. Conductive quantum interference device), a plurality of resistors are independently formed in the vicinity of the connection terminals outside the superconducting ring of the input coil, and connection terminals are formed at ends of the plurality of resistors. SQUID (superconducting quantum interference device) characterized by the above.
たことを特徴とする請求項１から請求項５のいずれかに
記載のＳＱＵＩＤ（超伝導量子干渉素子）。6. The SQUID (superconducting quantum interference device) according to any one of claims 1 to 5, wherein a capacitor is connected in series with the resistor.
１ｋオーム以下であることを特徴とする請求項１から請
求項５のいずれかに記載のＳＱＵＩＤ（超伝導量子干渉
素子）。7. The SQUID (superconducting quantum interference device) according to claim 1, wherein the resistance value of the resistor is not less than 10 ohm and not more than 1 k ohm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4128547A JPH05323003A (en) | 1992-05-21 | 1992-05-21 | Superconductive quantum interference element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4128547A JPH05323003A (en) | 1992-05-21 | 1992-05-21 | Superconductive quantum interference element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH05323003A true JPH05323003A (en) | 1993-12-07 |
Family
ID=14987458
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4128547A Pending JPH05323003A (en) | 1992-05-21 | 1992-05-21 | Superconductive quantum interference element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH05323003A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5854492A (en) * | 1995-11-22 | 1998-12-29 | Seiko Instruments Inc. | Superconducting quantum interference device fluxmeter and nondestructive inspection apparatus |
-
1992
- 1992-05-21 JP JP4128547A patent/JPH05323003A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5854492A (en) * | 1995-11-22 | 1998-12-29 | Seiko Instruments Inc. | Superconducting quantum interference device fluxmeter and nondestructive inspection apparatus |
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