JPH0531824B2 - - Google Patents
Info
- Publication number
- JPH0531824B2 JPH0531824B2 JP23576285A JP23576285A JPH0531824B2 JP H0531824 B2 JPH0531824 B2 JP H0531824B2 JP 23576285 A JP23576285 A JP 23576285A JP 23576285 A JP23576285 A JP 23576285A JP H0531824 B2 JPH0531824 B2 JP H0531824B2
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- concentration
- substrate
- active layer
- distribution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 50
- 239000004065 semiconductor Substances 0.000 claims description 40
- 230000005355 Hall effect Effects 0.000 claims description 15
- 238000005468 ion implantation Methods 0.000 claims description 13
- 239000012535 impurity Substances 0.000 description 23
- 150000002500 ions Chemical class 0.000 description 23
- 230000004913 activation Effects 0.000 description 16
- 238000009826 distribution Methods 0.000 description 14
- 238000005259 measurement Methods 0.000 description 10
- 238000000034 method Methods 0.000 description 8
- 238000002513 implantation Methods 0.000 description 7
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 6
- 239000000969 carrier Substances 0.000 description 5
- 239000013078 crystal Substances 0.000 description 5
- 238000011156 evaluation Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000009827 uniform distribution Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000009828 non-uniform distribution Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23576285A JPS6294950A (ja) | 1985-10-21 | 1985-10-21 | 半導体基板の評価用素子 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23576285A JPS6294950A (ja) | 1985-10-21 | 1985-10-21 | 半導体基板の評価用素子 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6294950A JPS6294950A (ja) | 1987-05-01 |
| JPH0531824B2 true JPH0531824B2 (enExample) | 1993-05-13 |
Family
ID=16990857
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP23576285A Granted JPS6294950A (ja) | 1985-10-21 | 1985-10-21 | 半導体基板の評価用素子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6294950A (enExample) |
-
1985
- 1985-10-21 JP JP23576285A patent/JPS6294950A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6294950A (ja) | 1987-05-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |