JPH05317632A - Gas adsorptive separator and method therefor - Google Patents

Gas adsorptive separator and method therefor

Info

Publication number
JPH05317632A
JPH05317632A JP4129014A JP12901492A JPH05317632A JP H05317632 A JPH05317632 A JP H05317632A JP 4129014 A JP4129014 A JP 4129014A JP 12901492 A JP12901492 A JP 12901492A JP H05317632 A JPH05317632 A JP H05317632A
Authority
JP
Japan
Prior art keywords
gas
adsorption
desorption
adsorbent
filling tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4129014A
Other languages
Japanese (ja)
Inventor
Yasuhiro Tomizuka
靖弘 富塚
Masakazu Hanawa
雅一 塙
Yoshihiro Saito
義博 斎藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Petrochemicals Engineering Co Ltd
Original Assignee
Mitsubishi Petrochemicals Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Petrochemicals Engineering Co Ltd filed Critical Mitsubishi Petrochemicals Engineering Co Ltd
Priority to JP4129014A priority Critical patent/JPH05317632A/en
Publication of JPH05317632A publication Critical patent/JPH05317632A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To provide a device and method for separating mixed gas by adsorption with high purity and high recovery. CONSTITUTION:In a gas adsorptive separator provided with an adsorbent packed tank 1, plural gas dispersion plates 2 arranged in the same direction inside the packed tank 1, a raw gas supply pipe 3 installed outside the packed tank 1, a product gas outflow pipe 4 and a desorbed gas discharge pipe 5, the desorbed gas discharge pipe 5 is arranged substantially in the same direction as the installing one of the gas dispersion plate 2. The operation is done so that the gas flow direction in the adsorption process may intersect perpendicular to that in the desorption one. As a result, the mixed gas uniformly comes into contact with an adsorbent in the adsorption process and the desorption and regeneration are made with extreme smoothness and in a short time at which the flow process of the adsorption and desorption of adsorbed gas is not resisted or disturbed by the dispersion plates.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は気体を吸着分離する方
法、およびそのための装置に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for adsorbing and separating a gas and an apparatus therefor.

【0002】[0002]

【従来の技術および課題】二種以上のガス成分を含有す
る混合ガスを吸着剤により分離する方法として、従来か
ら、PSA法(Pressure Swing Adsorption)、TSA
法(Thermal SwingAdsorption)、PTSA法(Pressure
and Thermal Swing Adsorption)等が知られている。
例えばPSA法は、吸着剤と特定のガスとの吸着平衡ま
たは吸着速度の差を利用してガスを分離する技術として
知られており、空気分離、水素精製、一酸化炭素、二酸
化炭素の回収等への適用が盛んに行われている。
2. Description of the Related Art As a method for separating a mixed gas containing two or more gas components with an adsorbent, there have been conventionally used PSA (Pressure Swing Adsorption), TSA and TSA.
Method (Thermal Swing Adsorption), PTSA method (Pressure
and Thermal Swing Adsorption) are known.
For example, the PSA method is known as a technology for separating a gas by utilizing the adsorption equilibrium or a difference in the adsorption rate between an adsorbent and a specific gas, such as air separation, hydrogen purification, carbon monoxide and carbon dioxide recovery. Is being actively applied to.

【0003】従来、PSA法においては、既に工業化さ
れている各種ガス分離プロセスに用いられているような
縦型円筒状の吸着塔が使用されている。該吸着塔は図4
に示すように、吸着工程では塔底から原料ガス(混合ガ
ス)がフィードされ、上部から製品ガスが取出され、再
生時に脱着ガスが塔底から排出される方法が一般的であ
る。従って、吸着塔の構造としては、塔底に原料ガスの
供給および脱着ガスの排出を行うための開口(管)が設
置され、塔頂には製品ガス流出口が設けられ、さらに、
原料ガスがより均一に分散され、吸着剤との接触を良好
にするために、吸着塔内部の下方にはジャマ板が設けら
れ、その上部に、原料ガスの分散のための空間を介して
吸着剤支持板が設置されている。
Conventionally, in the PSA method, a vertical cylindrical adsorption tower, which is used in various gas separation processes which have already been industrialized, is used. The adsorption tower is shown in FIG.
In the adsorption step, a raw material gas (mixed gas) is fed from the bottom of the tower, a product gas is taken out from the top of the tower, and a desorption gas is discharged from the bottom of the tower during regeneration. Therefore, as the structure of the adsorption tower, the opening (tube) for supplying the source gas and discharging the desorption gas is installed at the bottom of the tower, and the product gas outlet is provided at the top of the tower.
In order to disperse the raw material gas more evenly and to make good contact with the adsorbent, a baffle plate is provided below the inside of the adsorption tower, and the upper part of the plate is adsorbed through the space for dispersing the raw material gas. An agent support plate is installed.

【0004】このような構造の吸着装置では、下記のよ
うな問題がある。 (1)吸着時には、ガスと吸着剤との接触効率を向上さ
せて吸着され易くするために、ガスの線速度をある程度
以上にする必要があること等から、吸着塔の縦横比は一
般に2〜5倍程度であり、特に、吸着速度が遅いガスの
処理には、より長い吸着塔にしなければならなかった。
従って、このような吸着塔では、特に吸着塔上部にある
吸着剤が部分的に機能しない(原料ガスと均一に接触し
ない)ことがあり、また脱着時に吸着塔の底部から脱着
ガスを排出させる際、塔の上部と下部での圧力差が生
じ、塔の上部程脱着が難しくなる。 (2)供給ガスの均一分散のために使用されるガス分散
板及び吸着支持板は、再生時のガス脱着操作の際には抵
抗となるので、吸着されたガスをほぼ完全に脱着するに
は、能力の大きな真空ポンプを用いて吸引しなけばなら
ず、その設備費および使用動力費が大となり経済的でな
い。 (3)特に、吸着剤に吸着されるガス成分が大量に含有
されている原料ガスを処理する場合には、脱着工程に長
い時間を要することとなり、吸着工程の所要時間とのア
ンバランスが生ずる。そのため、吸着塔の数を増加しな
ければならない。 (4)ガス拡散のために吸着塔下部に設けられた空間が
デッドスペースとなり、そこに存在する原料ガスが再生
時に脱着ガスに混入して、脱着ガスの純度を低下させる
原因となる。
The adsorption device having such a structure has the following problems. (1) At the time of adsorption, since the linear velocity of the gas needs to be above a certain level in order to improve the contact efficiency between the gas and the adsorbent and facilitate the adsorption, the aspect ratio of the adsorption tower is generally 2 to. It was about 5 times, and in particular, for treating a gas having a slow adsorption rate, a longer adsorption tower had to be used.
Therefore, in such an adsorption tower, especially the adsorbent at the upper part of the adsorption tower may not partially function (do not make uniform contact with the raw material gas), and when desorbing the desorbed gas from the bottom of the adsorption tower during desorption. As a result, a pressure difference occurs between the upper part and the lower part of the tower, and desorption becomes more difficult in the upper part of the tower. (2) Since the gas dispersion plate and the adsorption support plate used for the uniform distribution of the supply gas become a resistance during the gas desorption operation during regeneration, it is necessary to desorb the adsorbed gas almost completely. However, a vacuum pump with a large capacity must be used for suction, and the equipment cost and power consumption cost are large, which is not economical. (3) In particular, when processing a raw material gas containing a large amount of gas components adsorbed by the adsorbent, the desorption process requires a long time, which causes an imbalance with the time required for the adsorption process. .. Therefore, the number of adsorption towers must be increased. (4) Due to the gas diffusion, the space provided under the adsorption tower becomes a dead space, and the raw material gas existing there is mixed with the desorption gas during regeneration, which causes the purity of the desorption gas to decrease.

【0005】[0005]

【課題を解決するための手段】本発明者らは、上記のよ
うな問題を解決すべく鋭意検討を行った結果、脱着−再
生工程の際に、吸着槽内のガス分散板等がガス流の抵抗
とならないように、吸着時のガスの流れ方向と脱着時の
ガスの流れ方向とを直交(クロス)させることが好まし
いことを見いだし、本発明を完成するに至った。
Means for Solving the Problems As a result of intensive studies to solve the above problems, the present inventors found that a gas dispersion plate or the like in an adsorption tank is a gas flow during the desorption-regeneration process. It was found that it is preferable that the gas flow direction at the time of adsorption and the gas flow direction at the time of desorption be orthogonal (cross) so as not to cause the resistance of No. 2, and the present invention has been completed.

【0006】即ち、本発明は、吸着剤充填槽、該充填槽
の内部に同一方向に配置された複数のガス分散板、該充
填槽の外部に設置された原料ガス供給管、製品ガス流出
管、及び脱着ガス排出管を備えてなるガス吸着分離装置
であって、前記脱着ガス排出管が前記ガス分散板の配置
方向と実質的に同一方向に設置されていることを特徴と
するガス吸着分離装置、および、吸着剤充填槽、該充填
槽の内部に同一方向に配置された複数のガス分散板、該
充填槽の外部に設置された原料ガス供給管、製品ガス流
出管、および脱着ガス排出管を備えてなるガス吸着分離
装置によりガスを分離する方法において、吸着工程にお
けるガスの流れ方向と、脱着工程におけるガスの流れ方
向が直交するように操作することを特徴とするガスの分
離方法である。
That is, according to the present invention, an adsorbent filling tank, a plurality of gas dispersion plates arranged in the same direction inside the filling tank, a raw material gas supply pipe installed outside the filling tank, and a product gas outflow pipe. And a desorption gas discharge pipe, wherein the desorption gas discharge pipe is installed in substantially the same direction as the arrangement direction of the gas dispersion plate. Device, adsorbent filling tank, a plurality of gas dispersion plates arranged in the same direction inside the filling tank, raw material gas supply pipe installed outside the filling tank, product gas outflow pipe, and desorption gas discharge In a method for separating a gas by a gas adsorption / separation device including a pipe, the gas separation method is characterized by operating so that the gas flow direction in the adsorption step and the gas flow direction in the desorption step are orthogonal to each other. is there.

【0007】以下、本発明を図面を参照して説明する。
図1は、本発明のガス吸着分離装置の一例を示す外観図
であり、図2は該装置の吸着工程時の平面断面図、図3
は該装置の脱着工程時の側面断面図が示されている。本
発明装置は、吸着剤充填槽1の左右に、原料ガス供給管
3および製品ガス流出管4が、該槽の下部に脱着ガス排
出管5、上部に吸着剤充填口6が設置されている。該排
出管5には、再生工程において吸着ガスを吸着剤から充
分に脱着させるために、吸引ポンプ7が設けられてい
る。吸着剤充填槽1の内部には、図2及び図3に示すよ
うにガス分散板2の分散面が、供給管3に対して直角
に、且つ排出管5に対しては同一方向に配置されてい
る。分散板2は、原料ガスが良く分散され、ほぼ均一に
吸着剤と接触するように、複数枚が、例えば4枚が同じ
方向に配置されている。該分散板2に細孔を多数設ける
ことにより、ガスが分散板の背面部分にも行き渡り、ガ
スと吸着剤との接触が均一に行われる。槽内には吸着
剤、例えばゼオライトモレキュラーシーブ、カーボンモ
レキュラーシーブ等がデッドスペースを作ることなく充
填される。
The present invention will be described below with reference to the drawings.
FIG. 1 is an external view showing an example of the gas adsorption / separation device of the present invention, and FIG. 2 is a plan sectional view of the device during an adsorption step, and FIG.
Is a side cross-sectional view of the device during a detaching process. In the device of the present invention, a raw material gas supply pipe 3 and a product gas outflow pipe 4 are installed on the left and right of the adsorbent filling tank 1, a desorption gas discharge pipe 5 is installed in the lower portion of the tank, and an adsorbent filling port 6 is installed in the upper portion. .. The exhaust pipe 5 is provided with a suction pump 7 in order to sufficiently desorb the adsorbed gas from the adsorbent in the regeneration process. Inside the adsorbent filling tank 1, as shown in FIGS. 2 and 3, the dispersion surface of the gas dispersion plate 2 is arranged at right angles to the supply pipe 3 and in the same direction as the discharge pipe 5. ing. In the dispersion plate 2, a plurality of, for example, four, are arranged in the same direction so that the raw material gas is well dispersed and almost uniformly contacts the adsorbent. By providing a large number of pores in the dispersion plate 2, the gas reaches the back surface of the dispersion plate and the gas and the adsorbent are uniformly contacted with each other. An adsorbent such as zeolite molecular sieve or carbon molecular sieve is filled in the tank without forming a dead space.

【0008】吸着剤充填槽1の形状は、吸着及び脱着効
率の点から、円盤状、楕円状、または球状が好ましい。
ガス供給管3及び流出管4は吸着剤との接触機会を多く
するように、円盤または楕円状充填槽の長手方向(横方
向)の左右に設け、脱着ガス排出管5は縦方向に設置さ
れる。なお、縦型円筒槽を用いたいときは、該槽の中央
側部に脱着ガス排出管5が、底部にガス供給管3が、上
部に製品ガス流出管4が設置される。
The shape of the adsorbent filling tank 1 is preferably a disc, an ellipse, or a sphere from the viewpoint of adsorption and desorption efficiency.
The gas supply pipe 3 and the outflow pipe 4 are provided on the left and right in the longitudinal direction (horizontal direction) of the disk or elliptical packing tank so that the chances of contact with the adsorbent are increased, and the desorption gas exhaust pipe 5 is installed vertically. It When it is desired to use a vertical cylindrical tank, a desorption gas discharge pipe 5 is installed at the center of the tank, a gas supply pipe 3 is installed at the bottom, and a product gas outflow pipe 4 is installed at the top.

【0009】次に、本発明のガス分離装置による混合ガ
スの吸着分離について説明する。混合ガスの吸着工程に
おいては、原料ガスは供給管3から、分散板2に対して
直角方向に導入され、図2の破線矢印のような吸着剤と
充分に接触しながら流出管4の方向へと進む。その際、
原料ガス中のガス成分の一部が吸着され、吸着されない
ガス成分が流出管4から流出し、製品ガスとして回収さ
れる。脱着工程においては、供給管3及び流出管4にそ
れぞれ設けられたバルブ8及び9を閉じ、排出管5から
脱着ガスが排出される。吸着槽が加圧状態である場合は
自圧により脱着ガスが排出されるが、常圧となった以降
は吸引ポンプ7、例えば真空ポンプにより真空引きする
ことにより、吸着されているガスをほぼ完全に吸着剤か
ら脱着させることができる。本発明の装置では、分散板
2が脱着時のガスの流れに対して平行に配置されている
ので、脱着ガスは図3の破線矢印のように流れ、該分散
板はガス流の抵抗となることがない。従って、脱着ガス
の排出を極めてスムーズに、且つ短時間に行うことがで
きる。なお、必要に応じて、脱着をより完全に行うため
に、吸着槽1の上部からススギ用ガスを導入することも
できる。
Next, the adsorption separation of the mixed gas by the gas separation device of the present invention will be described. In the mixed gas adsorption step, the raw material gas is introduced from the supply pipe 3 in a direction perpendicular to the dispersion plate 2, and in the direction of the outflow pipe 4 while making sufficient contact with the adsorbent as indicated by the broken line arrow in FIG. And proceed. that time,
Part of the gas component in the raw material gas is adsorbed, and the gas component that is not adsorbed flows out from the outflow pipe 4 and is recovered as a product gas. In the desorption process, the valves 8 and 9 provided in the supply pipe 3 and the outflow pipe 4 are closed, and the desorption gas is discharged from the discharge pipe 5. When the adsorption tank is under pressure, the desorbed gas is discharged by its own pressure, but after the atmospheric pressure is reached, the adsorbed gas is almost completely removed by evacuation by the suction pump 7, for example, a vacuum pump. Can be desorbed from the adsorbent. In the device of the present invention, since the dispersion plate 2 is arranged parallel to the gas flow at the time of desorption, the desorption gas flows as shown by the broken line arrow in FIG. 3, and the dispersion plate becomes a resistance to the gas flow. Never. Therefore, the desorption gas can be discharged very smoothly in a short time. If necessary, in order to carry out desorption more completely, a gas for cedar can be introduced from the upper part of the adsorption tank 1.

【0010】上記したような操作で吸着工程と脱着工程
が繰り返されるが、工業的には通常吸着剤充填槽1を2
塔式もしくは多塔式とし、吸着工程及び脱着・再生工程
等を各槽で順次行うことにより、連続的にガス吸着分離
を実施することができる。本発明の分離装置及び方法
は、PSA法,TSA法,PTSA法その他、従来から
知られている種々の混合ガスの分離、精製に適用するこ
とができる。対象ガスとしては、例えば、窒素、酸素、
空気、一酸化炭素、改質ガス、希ガスなどである。
Although the adsorption step and the desorption step are repeated by the above-mentioned operation, industrially, the adsorbent-filled tank 1 usually has 2
By adopting a tower type or a multi-column type, the adsorption step and the desorption / regeneration step and the like are sequentially performed in each tank, whereby the gas adsorption separation can be continuously carried out. INDUSTRIAL APPLICABILITY The separation device and method of the present invention can be applied to the separation and purification of PSA method, TSA method, PTSA method and various conventionally known mixed gases. As the target gas, for example, nitrogen, oxygen,
Examples include air, carbon monoxide, reformed gas, and rare gas.

【0011】例えば、酸化エチレン製造プラントから排
出されるメタン、エチレン、アルゴンを主成分とする混
合ガスをPAS法により吸着分離する場合に用いられる
本発明の装置の一例を挙げれば、処理ガス量1Nm3/hr
とした場合、吸着剤充填槽1は直径265mm、高さ18
0mm程度のサイズが適当である。充填槽1の横手方向左
右には、6/4mmφの原料ガス供給管3及び製品ガス流出
管4を設け、充填槽1の底部に10/8mmφの脱着ガス排出
管5を設ける。充填槽1内に、該供給管3と直角方向で
且つ同一方向に配置されるガス分散板2としては、3mm
φの細孔を10個程度有する、80mm×120mmの長方
形多孔板が4枚使用される。
For example, an example of the apparatus of the present invention used for adsorbing and separating a mixed gas containing methane, ethylene, and argon as the main components discharged from an ethylene oxide production plant by the PAS method is as follows. 3 / hr
, The adsorbent filling tank 1 has a diameter of 265 mm and a height of 18
A size of about 0 mm is suitable. A raw material gas supply pipe 3 of 6/4 mmφ and a product gas outflow pipe 4 are provided on the left and right of the filling tank 1 in the lateral direction, and a desorption gas discharge pipe 5 of 10/8 mmφ is provided at the bottom of the filling tank 1. 3 mm as the gas distribution plate 2 arranged in the filling tank 1 in a direction perpendicular to the supply pipe 3 and in the same direction.
Four 80 mm × 120 mm rectangular perforated plates having about 10 φ holes are used.

【0012】[0012]

【発明の効果】本発明のガス吸着分離装置及び方法は、
脱着工程での操作が容易で且つ効率的であるため、従来
PSA法では経済性がなく不適当と言われていた、吸着
され易いガス成分を多く含有する原料ガスの処理に非常
に効果がある。また、従来の吸着塔では吸着速度の遅い
ガスの処理では、再生が効率的、経済的に行えなかった
が、本発明の装置及び方法では、脱着性能が良好である
ため、このようなガス処理も容易に実施することができ
る。さらに、大規模PSA法において、吸着ガスの吸引
のために使用される真空ポンプのキャパシティーがネッ
クとなっていたプロセスに対しても、本発明による実用
化が可能である。
The gas adsorption separation apparatus and method of the present invention are
Since the operation in the desorption process is easy and efficient, it is very effective for treating a raw material gas containing a large amount of easily adsorbed gas components, which has been said to be uneconomical and inappropriate in the conventional PSA method. .. In addition, in the conventional adsorption tower, the regeneration of the gas having a slow adsorption rate could not be efficiently and economically performed, but the apparatus and method of the present invention have good desorption performance, and thus such gas treatment Can also be easily implemented. Further, in the large-scale PSA method, the process according to the present invention can be put to practical use even for a process in which the capacity of the vacuum pump used for sucking the adsorbed gas is a bottleneck.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明のガス吸着分離装置の一例を示す概念図
である。
FIG. 1 is a conceptual diagram showing an example of a gas adsorption separation device of the present invention.

【図2】図1の平面断面を示す概念図である。FIG. 2 is a conceptual diagram showing a plane cross section of FIG.

【図3】図1の側面断面を示す概念図である。FIG. 3 is a conceptual diagram showing a side cross-section of FIG.

【図4】従来の代表的なガス分離吸着塔を示す概念図で
ある。
FIG. 4 is a conceptual diagram showing a conventional typical gas separation / adsorption tower.

【符号の説明】[Explanation of symbols]

1 吸着剤充填槽 2 ガス分散板 3 原料ガス供給管 4 製品ガス流出管 5 脱着ガス排出管 6 吸着剤充填口 7 吸引ポンプ 1 Adsorbent filling tank 2 Gas dispersion plate 3 Raw material gas supply pipe 4 Product gas outflow pipe 5 Desorption gas discharge pipe 6 Adsorbent filling port 7 Suction pump

───────────────────────────────────────────────────── フロントページの続き (72)発明者 斎藤 義博 茨城県鹿島郡神栖町大字東和田17番地−1 三菱油化エンジニアリング株式会社鹿島 支社内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Yoshihiro Saito 17-1 Towada, Kamisu-machi, Kashima-gun, Ibaraki Prefecture -1 Mitsubishi Petrochemical Engineering Co., Ltd. Kashima Branch Office

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 吸着剤充填槽、該充填槽の内部に同一方
向に配置された複数のガス分散板、該充填槽の外部に設
置された原料ガス供給管、製品ガス流出管、及び脱着ガ
ス排出管を備えてなるガス吸着分離装置であって、前記
脱着ガス排出管が前記ガス分散板の配置方向と実質的に
同一方向に設置されていることを特徴とするガス吸着分
離装置。
1. An adsorbent filling tank, a plurality of gas dispersion plates arranged in the same direction inside the filling tank, a raw material gas supply pipe, a product gas outflow pipe, and a desorption gas installed outside the filling tank. A gas adsorption / separation device comprising an exhaust pipe, wherein the desorption gas exhaust pipe is installed in substantially the same direction as the arrangement direction of the gas dispersion plate.
【請求項2】 吸着剤充填槽の形状が円盤状、楕円状ま
たは球状である請求項1記載の装置。
2. The apparatus according to claim 1, wherein the shape of the adsorbent filling tank is disk-like, elliptical or spherical.
【請求項3】 吸着剤充填槽、該充填槽の内部に同一方
向に配置された複数のガス分散板、該充填槽の外部に設
置された原料ガス供給管、製品ガス流出管、および脱着
ガス排出管を備えてなるガス吸着分離装置によりガスを
分離する方法において、吸着工程におけるガスの流れ方
向と、脱着工程におけるガスの流れ方向が直交するよう
に操作されることを特徴とするガスの分離方法。
3. An adsorbent filling tank, a plurality of gas dispersion plates arranged in the same direction inside the filling tank, a raw material gas supply pipe installed outside the filling tank, a product gas outflow pipe, and a desorption gas. In a method for separating a gas by a gas adsorption / separation device including an exhaust pipe, the gas separation is characterized in that the gas flow direction in the adsorption step and the gas flow direction in the desorption step are operated so as to be orthogonal to each other. Method.
JP4129014A 1992-05-21 1992-05-21 Gas adsorptive separator and method therefor Pending JPH05317632A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4129014A JPH05317632A (en) 1992-05-21 1992-05-21 Gas adsorptive separator and method therefor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4129014A JPH05317632A (en) 1992-05-21 1992-05-21 Gas adsorptive separator and method therefor

Publications (1)

Publication Number Publication Date
JPH05317632A true JPH05317632A (en) 1993-12-03

Family

ID=14999033

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4129014A Pending JPH05317632A (en) 1992-05-21 1992-05-21 Gas adsorptive separator and method therefor

Country Status (1)

Country Link
JP (1) JPH05317632A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006512200A (en) * 2002-12-26 2006-04-13 大陽日酸株式会社 Method and system for supplying high purity fluid
JP2016043352A (en) * 2014-08-22 2016-04-04 Jfeスチール株式会社 Adsorption tower of pressure swing adsorption type gas separation unit

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006512200A (en) * 2002-12-26 2006-04-13 大陽日酸株式会社 Method and system for supplying high purity fluid
JP2016043352A (en) * 2014-08-22 2016-04-04 Jfeスチール株式会社 Adsorption tower of pressure swing adsorption type gas separation unit

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