JPH05305069A - Light scanning device - Google Patents

Light scanning device

Info

Publication number
JPH05305069A
JPH05305069A JP4139921A JP13992192A JPH05305069A JP H05305069 A JPH05305069 A JP H05305069A JP 4139921 A JP4139921 A JP 4139921A JP 13992192 A JP13992192 A JP 13992192A JP H05305069 A JPH05305069 A JP H05305069A
Authority
JP
Japan
Prior art keywords
optical fiber
optical fibers
optical
group
ring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4139921A
Other languages
Japanese (ja)
Inventor
Yasunobu Ito
康展 伊藤
Hideo Eda
英雄 江田
Michinosuke Takada
通之助 高田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP4139921A priority Critical patent/JPH05305069A/en
Publication of JPH05305069A publication Critical patent/JPH05305069A/en
Pending legal-status Critical Current

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  • Mechanical Optical Scanning Systems (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Measurement Of The Respiration, Hearing Ability, Form, And Blood Characteristics Of Living Organisms (AREA)

Abstract

PURPOSE:To shorten the measuring time and miniaturize the whole device by arranging a group of optical fibers arranged around a specimen and a group of optical fibers including optical fibers guided to a light source and a detector into a ring shape at one end respectively, optically connecting end faces, and rotating a ring to change the connection relation. CONSTITUTION:A group of optical fibers 10 are fixed to a ring 12 formed to surround the periphery of a specimen 2 at one end, the optical fibers 10 are fixed to a ring 14 at the other end, and the optical fibers 10 are exposed on the end face of the ring 14 and arranged at a uniform interval. A group of optical fibers 16 are fixed to a ring 18 at one end, and the optical fibers 16 are exposed on the end face of the ring 18 and arranged at a uniform interval. When the rings 14, 18 are faced to each other, end faces of the optical fibers 10, 16 are faced to each other one to one, an optical fiber 16a is extended to a light source section, and optical fibers 16b are guided to a light detector. When the ring 18 is rotated, the measurement light flux is moved around the specimen 2 in sequence, and the information in the specimen 2 can be obtained.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は可視又は近赤外光を生体
などの被検体に照射し、その透過光や反射光(散乱光を
含む)を検出して被検体内の情報を非破壊的に得る光走
査装置に関するものである。
The present invention irradiates a subject such as a living body with visible or near-infrared light and detects transmitted light or reflected light (including scattered light) to nondestructive information in the subject. The present invention relates to an optical scanning device that can be obtained.

【0002】[0002]

【従来の技術】被検体に測定光束を照射し、その透過光
や反射光から被検体内の情報を得るためには、測定光束
を被検体の周囲から順次照射し、各照射位置についての
情報を得る必要がある。その方法の1つは、被検体の一
方向から測定光束を扇形に走査して照射し、その測定光
束の位置を被検体の周囲で移動させていく方法である。
他の方法は、測定光束を被検体を含む範囲で平行移動さ
せ、その光束を被検体の周囲で移動させていく方法であ
る。
2. Description of the Related Art In order to obtain information on the inside of a subject by irradiating a subject with a measurement light beam and transmitting or reflecting the light beam, the measurement light beam is sequentially emitted from around the subject, and information about each irradiation position is obtained. Need to get One of the methods is a method in which a measurement light beam is fan-shaped scanned and irradiated from one direction of the subject, and the position of the measurement light beam is moved around the subject.
Another method is a method in which the measurement light flux is translated in a range including the subject, and the light flux is moved around the subject.

【0003】さらに他の光走査方法として、図5に示さ
れるように被検体2の周囲に一群の光ファイバの各一端
をリング状に配置し、光ファイバ群4のうちの1本の光
ファイバ4aを光源からの測定光束を導く送光用光ファ
イバとし、他の光ファイバ4bは被検体2からの光をそ
れぞれの検出器へ導く受光用光ファイバとして、光ファ
イバ4aからの測定光束による被検体2の透過光や反射
光を受光用光ファイバ4bで受光し、かつ光ファイバ群
4を被検体2の周囲で回転させる方式が考えられてい
る。光ファイバ群4を回転させるために回転機構をもつ
ガントリーが設けられている。
As another optical scanning method, as shown in FIG. 5, one end of a group of optical fibers is arranged in a ring shape around the subject 2 and one optical fiber of the optical fiber group 4 is arranged. 4a is a light-transmitting optical fiber that guides the measurement light beam from the light source, and another optical fiber 4b is a light-receiving optical fiber that guides the light from the subject 2 to the respective detectors. A method is considered in which transmitted light or reflected light of the sample 2 is received by the light receiving optical fiber 4b and the optical fiber group 4 is rotated around the sample 2. A gantry having a rotation mechanism for rotating the optical fiber group 4 is provided.

【0004】[0004]

【発明が解決しようとする課題】本発明は図5のように
1つの光ファイバから測定光束を被検体に照射し、被検
体の周囲に配置された他の光ファイバで受光して各検出
器へ導く方式に関するものである。図5のように光ファ
イバ群を被検体の周囲で回転させる方式では、回転機構
によりガントリーが大型になるとともに、光ファイバ群
を回転させる時間が長くなって測定時間が長くなる欠点
を有する。そこで、本発明は被検体の周囲に配置された
光ファイバ群は被検体の周囲では固定とし、なおかつ光
照射位置を被検体の周囲に変化させ得るようにして測定
時間を短縮するとともに、装置全体を小型化することを
目的とするものである。
As shown in FIG. 5, the present invention irradiates a measurement light beam from one optical fiber to a subject, receives the light with another optical fiber arranged around the subject, and detects each detector. It is about the method to lead to. The method of rotating the optical fiber group around the subject as shown in FIG. 5 has the drawbacks that the gantry becomes large due to the rotation mechanism, and the time for rotating the optical fiber group becomes long and the measurement time becomes long. Therefore, in the present invention, the optical fiber group disposed around the subject is fixed around the subject, and the light irradiation position can be changed to the periphery of the subject to shorten the measurement time and reduce the entire device. The purpose is to downsize.

【0005】[0005]

【課題を解決するための手段】本発明は、複数の光ファ
イバの各一端が被検体の周囲に一列に固定されて配置さ
れ、光ファイバの各他端がリング状に配列された第1の
光ファイバ群と、第1の光ファイバ群と同数の光ファイ
バを有し、光ファイバ各一端が第1の光ファイバ群の光
ファイバの各他端と対向してリング状に配列され、光フ
ァイバの他端の1本が光源からの光を導き、残りの光フ
ァイバの他端がそれぞれの検出器に導かれている第2の
光ファイバ群と、リング状に配列されて対向する第1と
第2の光ファイバ群の前記端部のうちの少なくとも一方
を他方に対して回転させる回転機構とを備えている。
According to the present invention, one end of each of a plurality of optical fibers is fixedly arranged around a subject, and the other ends of the optical fibers are arranged in a ring shape. An optical fiber group and the same number of optical fibers as the first optical fiber group are provided, and one end of each of the optical fibers is arranged in a ring shape so as to face each other end of the optical fibers of the first optical fiber group. One of the other ends of the second optical fiber guides the light from the light source, and the other end of the remaining optical fibers is guided to the respective detectors by the second optical fiber group and the first optical fiber group arranged in a ring shape and facing each other. And a rotation mechanism for rotating at least one of the ends of the second optical fiber group with respect to the other.

【0006】本発明はまた、複数の光ファイバの各一端
が被検体の周囲に一列に固定されて配置され、光ファイ
バの各他端が一列に配置された光ファイバ群と、前記各
他端ごとに光ファイバの端部に対向して配置された光検
出器の一群と、前記光ファイバの各他端とそれぞれに対
応する前記光検出器との間に光ファイバの他端配列に沿
って測定光束を照射する光学系と、前記光ファイバの各
他端とそれぞれに対応する前記光検出器との間で前記測
定光束の光路にあっては前記光束を反射して対応する光
ファイバに導く方向を有し、その測定光束の光路に挿入
可能に設けられた反射鏡群とを備えている。
In the present invention, one end of each of the plurality of optical fibers is fixedly arranged around the subject, and the other end of each of the optical fibers is arranged in one line. A group of photodetectors arranged facing the end of each optical fiber, and between the photodetectors corresponding to the other ends of the optical fibers, respectively, along the arrangement of the other ends of the optical fibers. In the optical path of the measurement light beam between the optical system for irradiating the measurement light beam and each of the other ends of the optical fiber and the corresponding photodetector, the light beam is reflected and guided to the corresponding optical fiber. And a group of reflecting mirrors that are provided so as to be inserted into the optical path of the measurement light beam.

【0007】[0007]

【実施例】図1は第1の実施例を表わす。一群の光ファ
イバ10の各一端は被検体2の周囲を取り巻く形状に形
成されたリング12により、各光ファイバ10の端面が
被検体2の方向を向くように固定されている。リング1
2は光走査装置本体に固定されており、被検体2も静止
した状態で測定される。各光ファイバ10の他端はリン
グ14に固定され、各光ファイバ10の他端の端面はリ
ング14の端面に露出し、リング14の端面に沿って等
間隔に配置されている。
DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 shows a first embodiment. Each end of the group of optical fibers 10 is fixed by a ring 12 formed in a shape surrounding the subject 2 so that the end surface of each optical fiber 10 faces the subject 2. Ring 1
2 is fixed to the main body of the optical scanning device, and the subject 2 is also measured in a stationary state. The other end of each optical fiber 10 is fixed to the ring 14, and the end surface of the other end of each optical fiber 10 is exposed at the end surface of the ring 14 and arranged at equal intervals along the end surface of the ring 14.

【0008】光ファイバ10の一群と同数の光ファイバ
をもつ一群の光ファイバ16の各光ファイバの一端はリ
ング14と同じ大きさをもつリング18に固定され、各
光ファイバ16の一端の端面はリング18の端面に露出
し、リング18の端面に沿って等間隔に配置されてい
る。リング14と18を対向させたとき各光ファイバ1
0の端面と各光ファイバ16の端面とが1体1に対応し
て対向する。一群の光ファイバ16のうちの1本の光フ
ァイバ16aは光源部に延び、光源からの光を導く送光
用光ファイバであり、残りの光ファイバ16bはそれぞ
れの他端が光電子増倍管などの各光検出器へ導かれる受
光用光ファイバである。
One end of each optical fiber of the group of optical fibers 16 having the same number of optical fibers as the group of optical fibers 10 is fixed to a ring 18 having the same size as the ring 14, and an end face of one end of each optical fiber 16 is fixed. It is exposed at the end surface of the ring 18 and is arranged at equal intervals along the end surface of the ring 18. Each optical fiber 1 when the rings 14 and 18 are opposed to each other
The end face of 0 and the end face of each optical fiber 16 face each other corresponding to one body 1. One optical fiber 16a of the group of optical fibers 16 is a light-transmitting optical fiber that extends to the light source unit and guides light from the light source, and the remaining optical fibers 16b each have a photomultiplier tube at the other end. Is a light-receiving optical fiber guided to each photodetector.

【0009】リング14は固定されている。リング18
は図2に示されるように、回転軸20によってリング1
4と対向しながら回転するように支持されている。回転
軸20はギヤ22と24を介してパルスモータ26によ
り、リング14と18で光ファイバの端面どうしが対向
する関係を保ちながら回転させられる。
The ring 14 is fixed. Ring 18
As shown in FIG. 2, the ring 1 is rotated by the rotary shaft 20.
It is supported so as to rotate while facing the No. 4. The rotating shaft 20 is rotated by the pulse motor 26 via the gears 22 and 24 while maintaining the relationship that the end faces of the optical fibers face each other by the rings 14 and 18.

【0010】この実施例ではリング14と18での光フ
ァイバ端面の対向により、送光用光ファイバ16aと対
向した1本の光ファイバ10の一端から被検体2に測定
光束が照射され、リング12に配列された残りの光ファ
イバ端面でその測定光束の透過光や反射光が受光され、
再びリング14と18での光ファイバ端面どうしの結合
を経て各光検出器へ導かれて検出される。リング18を
送光用光ファイバ16aの端面がリング14に配列され
た光ファイバ10の端面と順次結合するように回転させ
ながら透過光や反射光を受光していくことによって、被
検体2の周囲に順次測定光束を移動させながら被検体内
部の情報を得ることができる。リング18の回転は被検
体のまわりで光ファイバ群を回転させるのに比べると機
構が小型になり、かつ短時間で回転させることができる
ので測定時間が短縮される。
In this embodiment, the end faces of the optical fibers at the rings 14 and 18 are opposed to each other, so that the measurement light beam is irradiated to the object 2 from one end of one optical fiber 10 opposed to the optical fiber 16a for transmitting light, and the ring 12 is irradiated. The transmitted light and reflected light of the measurement light beam are received by the remaining optical fiber end faces arranged in
The light is again guided to each photodetector through the coupling between the end faces of the optical fibers in the rings 14 and 18, and is detected. By rotating the ring 18 so that the end face of the optical fiber 16a for transmitting light is sequentially coupled to the end face of the optical fiber 10 arranged in the ring 14, the transmitted light and the reflected light are received, whereby the periphery of the subject 2 is examined. It is possible to obtain information on the inside of the subject while sequentially moving the measurement light flux. The rotation of the ring 18 has a smaller mechanism than that of rotating the optical fiber group around the subject, and can rotate in a short time, so that the measurement time is shortened.

【0011】図1の実施例において、リング14と18
のファイバ端面の対向は、リング14と18の端面で対
向するものに限らず、一方のリングを他方のリングの外
側に嵌め込まれるように大きさを異ならせ、小さい方の
リングの外側面と大きい方のリングの内側面にそれぞれ
の光ファイバ群の端面を露出させて光ファイバ端面間を
光学的に結合するようにしてもよい。また、リング14
と18のどちらを回転可能にしてもよく、また両方のリ
ング14,18を回転可能にすることによって各リング
14,18の回転範囲が180度ですむようにしてもよ
い。
In the embodiment of FIG. 1, rings 14 and 18
The end faces of the fiber are not limited to those facing each other at the end faces of the rings 14 and 18, but one ring is made different in size so as to be fitted to the outside of the other ring, and is larger than the outer face of the smaller ring. The end faces of the respective optical fiber groups may be exposed on the inner side face of the other ring to optically couple the end faces of the optical fibers. Also, the ring 14
And 18 may be rotatable, or both rings 14 and 18 may be rotatable so that the rotation range of each ring 14 and 18 may be 180 degrees.

【0012】図3は第2の実施例を表わす。被検体2の
まわりに一群の光ファイバ群の各光ファイバ30の一端
が配列され、その一端の配列は被検体2に対して固定さ
れている。各光ファイバ30の他端は一列に配列されて
いる。各光ファイバ30の他端に対向して光電子増倍管
32が配列されており、各光ファイバ30からの光がそ
れぞれの光電子増倍管32に導かれて検出される。各光
ファイバ30と光電子増倍管32の間には、光学系によ
り光ファイバ30の他端の配列方向に入射する測定光束
34を反射して光ファイバに導く一群の反射鏡36が配
置されている。各反射鏡36は、図4に示されるように
ソレノイド38に支持され、測定光束34の光路に挿入
可能になっている。反射鏡36は1つだけが測定光束3
4の光路に挿入され、残りの反射鏡36は測定光束34
の光路から外れた位置に位置決めされる。
FIG. 3 shows a second embodiment. One end of each optical fiber 30 of the group of optical fibers is arranged around the subject 2, and the arrangement of the one end is fixed to the subject 2. The other end of each optical fiber 30 is arranged in a line. Photomultiplier tubes 32 are arranged opposite to the other end of each optical fiber 30, and the light from each optical fiber 30 is guided to each photomultiplier tube 32 and detected. Between each optical fiber 30 and the photomultiplier tube 32, a group of reflecting mirrors 36 for guiding the measurement light beam 34 incident on the other end of the optical fiber 30 in the arrangement direction by the optical system to the optical fiber is arranged. There is. Each reflecting mirror 36 is supported by a solenoid 38 as shown in FIG. 4, and can be inserted into the optical path of the measurement light beam 34. Only one reflecting mirror 36 is the measuring light flux 3
No. 4, which is inserted in the optical path of No.
Is positioned out of the optical path of.

【0013】図3の実施例では、測定光束34の光路に
挿入された反射鏡36によって測定光束34がその反射
鏡36に対応した光ファイバ30に導かれ、その光ファ
イバ30が送光用光ファイバとなってその一端から被検
体22に測定光束34が照射される。残りの光ファイバ
30が受光用光ファイバとなり、受光用光ファイバの他
端からの光がそれぞれの光電子増倍管32に導かれて検
出される。反射鏡36を測定光束34の光路に挿入する
位置を順次切り換えていくことによって、測定光束34
が被検体22の周囲を順次移動しながら測定がなされ
る。図3の実施例では、被検体2のまわりに配置される
光ファイバ群を被検体の大きさ及び分解能に合わせて複
数種類作成しておき、反射鏡36と光電子増倍管32は
光ファイバ群のうちの光ファイバの数が最も多いものに
合わせて用意しておき、被検体2に応じて光ファイバ群
30を交換可能にすることができる。
In the embodiment shown in FIG. 3, the measuring light beam 34 is guided to the optical fiber 30 corresponding to the reflecting mirror 36 by the reflecting mirror 36 inserted in the optical path of the measuring light beam 34, and the optical fiber 30 transmits the light for transmitting light. The measurement light flux 34 is applied to the subject 22 from one end of the fiber. The remaining optical fiber 30 becomes a light-receiving optical fiber, and the light from the other end of the light-receiving optical fiber is guided to each photomultiplier tube 32 and detected. By sequentially switching the position where the reflecting mirror 36 is inserted in the optical path of the measurement light beam 34, the measurement light beam 34
Is measured while sequentially moving around the subject 22. In the embodiment of FIG. 3, a plurality of types of optical fiber groups arranged around the subject 2 are prepared according to the size and resolution of the subject, and the reflecting mirror 36 and the photomultiplier tube 32 are the optical fiber groups. The optical fiber group 30 can be exchanged according to the subject 2 in advance by preparing the optical fiber group having the largest number of optical fibers.

【0014】[0014]

【発明の効果】本発明では一端が被検体の周囲に配列さ
れる一群の光ファイバの他端と、光源に延びる光ファイ
バ及び検出器に導かれる光ファイバを含む一群の光ファ
イバの一端とを、それぞれリング状に配列して端面どう
しを対向させて光学的に結合させ、そのリングの少なく
とも一方を回転させて両光ファイバ群の結合関係を変え
るようにし、又は反射鏡を選択的に光路に挿入すること
によって一端が被検体の周囲に配列される一群の光ファ
イバの1つを選択的に送光用光ファイバとすることによ
って、被検体のまわりで光ファイバ群を回転させる必要
をなくし、被検体を回転させる必要もなくしたので、光
走査装置が小型になる。また、測定光束を被検体の周囲
に移動させるために、光ファイバ群の間の結合部を回転
させるか、光路に挿入する反射鏡を変更するだけですむ
ので、光ファイバ群の端面を被検体のまわりで回転させ
るのに比べると測定光束の移動が短時間ですみ、測定時
間を短縮することができる。
According to the present invention, one end of a group of optical fibers whose one end is arranged around a subject and one end of a group of optical fibers including an optical fiber extending to a light source and an optical fiber guided to a detector are provided. , Arranged in a ring shape so that the end faces face each other and are optically coupled, and at least one of the rings is rotated to change the coupling relationship of both optical fiber groups, or the reflecting mirror is selectively placed in the optical path. By selectively using one of the group of optical fibers, one end of which is arranged around the subject by insertion, as an optical fiber for light transmission, there is no need to rotate the group of optical fibers around the subject, Since it is not necessary to rotate the subject, the size of the optical scanning device can be reduced. Moreover, in order to move the measurement light beam around the subject, it is only necessary to rotate the coupling part between the optical fiber groups or change the reflecting mirror inserted in the optical path. Compared with rotating around, the movement of the measuring light flux is shorter and the measuring time can be shortened.

【図面の簡単な説明】[Brief description of drawings]

【図1】第1の実施例を示す斜視図である。FIG. 1 is a perspective view showing a first embodiment.

【図2】図1の実施例における光ファイバ群の結合部分
を示す概略側面図である。
FIG. 2 is a schematic side view showing a coupling portion of an optical fiber group in the embodiment of FIG.

【図3】第2の実施例を示す概略正面図である。FIG. 3 is a schematic front view showing a second embodiment.

【図4】図3の実施例における反射鏡の移動機構を示す
側面図である。
4 is a side view showing a moving mechanism of a reflecting mirror in the embodiment of FIG.

【図5】検討中の光走査装置を概略的に示す正面図であ
る。
FIG. 5 is a front view schematically showing the optical scanning device under consideration.

【符号の説明】 2 被検体 10,16,30 光ファイバ 12 被検体のまわりのリング 14,18 光ファイバ群を結合するリング 16a 送光用光ファイバ 16b 受光用光ファイバ 20 回転軸 26 ステッピングモータ 32 光電子増倍管 34 測定光束 36 反射鏡 38 ソレノイド[Explanation of reference numerals] 2 object 10, 16, 30 optical fiber 12 ring around the object 14, 18 ring for coupling optical fiber groups 16a optical fiber for light transmission 16b optical fiber for light reception 20 rotating shaft 26 stepping motor 32 Photomultiplier tube 34 Measurement luminous flux 36 Reflector 38 Solenoid

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 複数の光ファイバの各一端が被検体の周
囲に一列に固定されて配置され、光ファイバの各他端が
リング状に配列された第1の光ファイバ群と、第1の光
ファイバ群と同数の光ファイバを有し、光ファイバ各一
端が第1の光ファイバ群の光ファイバの各他端と対向し
てリング状に配列され、光ファイバの他端の1本が光源
からの光を導き、残りの光ファイバの他端がそれぞれの
検出器に導かれている第2の光ファイバ群と、リング状
に配列されて対向する第1と第2の光ファイバ群の前記
端部のうちの少なくとも一方を他方に対して回転させる
回転機構とを備えたことを特徴とする光走査装置。
1. A first optical fiber group in which one end of each of a plurality of optical fibers is fixedly arranged around a subject and one end of each of the optical fibers is arranged in a ring shape, and a first optical fiber group. It has the same number of optical fibers as the optical fiber group, one end of each of the optical fibers is arranged in a ring shape so as to face each other end of the optical fibers of the first optical fiber group, and one of the other ends of the optical fibers is a light source. Of the first and second optical fiber groups that are arranged in a ring shape and face each other, and a second optical fiber group that guides the light from the other optical fiber and the other end of the remaining optical fiber is guided to each detector. An optical scanning device comprising: a rotating mechanism that rotates at least one of the end portions with respect to the other.
【請求項2】 複数の光ファイバの各一端が被検体の周
囲に一列に固定されて配置され、光ファイバの各他端が
一列に配置された光ファイバ群と、前記各他端ごとに光
ファイバの端部に対向して配置された光検出器の一群
と、前記光ファイバの各他端とそれぞれに対応する前記
光検出器との間に光ファイバの他端配列に沿って測定光
束を照射する光学系と、前記光ファイバの各他端とそれ
ぞれに対応する前記光検出器との間で前記測定光束の光
路にあっては前記光束を反射して対応する光ファイバに
導く方向を有し、その測定光束の光路に挿入可能に設け
られた反射鏡群とを備え、反射鏡を1つずつ順次前記測
定光束の光路に挿入することを特徴とする光走査装置。
2. An optical fiber group in which one end of each of the plurality of optical fibers is fixedly arranged around the subject and one end of each of the optical fibers is arranged in one line, and an optical fiber is provided for each of the other ends. A group of photodetectors arranged facing the end of the fiber, and a measuring light flux along the other end array of the optical fibers between the photodetectors corresponding to the other ends of the optical fibers, respectively. In the optical path of the measurement light beam between the irradiation optical system and each of the other ends of the optical fiber and the photodetector corresponding thereto, there is a direction in which the light beam is reflected and guided to the corresponding optical fiber. An optical scanning device comprising: a group of reflecting mirrors that can be inserted into the optical path of the measurement light beam, and one reflecting mirror is sequentially inserted into the optical path of the measurement light beam.
JP4139921A 1992-04-30 1992-04-30 Light scanning device Pending JPH05305069A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4139921A JPH05305069A (en) 1992-04-30 1992-04-30 Light scanning device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4139921A JPH05305069A (en) 1992-04-30 1992-04-30 Light scanning device

Publications (1)

Publication Number Publication Date
JPH05305069A true JPH05305069A (en) 1993-11-19

Family

ID=15256760

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4139921A Pending JPH05305069A (en) 1992-04-30 1992-04-30 Light scanning device

Country Status (1)

Country Link
JP (1) JPH05305069A (en)

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