JPH0529677A - Controlling method for drive of piezoelectric laminate - Google Patents

Controlling method for drive of piezoelectric laminate

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Publication number
JPH0529677A
JPH0529677A JP3182271A JP18227191A JPH0529677A JP H0529677 A JPH0529677 A JP H0529677A JP 3182271 A JP3182271 A JP 3182271A JP 18227191 A JP18227191 A JP 18227191A JP H0529677 A JPH0529677 A JP H0529677A
Authority
JP
Japan
Prior art keywords
temperature
piezoelectric laminate
piezoelectric
laminate
ptc element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3182271A
Other languages
Japanese (ja)
Inventor
和明 ▲高▼田
Kazuaki Takada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Motor Corp
Original Assignee
Toyota Motor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Motor Corp filed Critical Toyota Motor Corp
Priority to JP3182271A priority Critical patent/JPH0529677A/en
Publication of JPH0529677A publication Critical patent/JPH0529677A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To suppress an irregularity in a displacement of a piezoelectric laminate based on a temperature change while preventing thermal deterioration of the laminate. CONSTITUTION:A PTC element 2 is disposed substantially at a center of a piezoelectric laminate 1 in an axial direction. A detected temperature detected by the element 2 is compared with a reference temperature by a controller 8. A power source 4 for heating the PTC is connected to the element 2 based on the result to heat the laminate or to cool it by a cooler 6.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、圧電積層体の駆動制御
方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a drive control method for a piezoelectric laminate.

【0002】[0002]

【従来の技術】従来より、各種機器の可動部の駆動を行
うアクチュエータとして、電圧印加により変位する圧電
積層体が用いられている。この圧電積層体は、一般にP
ZT(PbZrO3 ・PbTiO3 )素子を複数積層し
て構成されている。ところで、圧電積層体に電圧を印加
すると、時間の経過とともに圧電積層体の自己発熱によ
り温度が上昇するが、圧電積層体はこの温度上昇によっ
て変位量が変化する性質がある。このため、圧電積層体
を変位量が微小な被制御機器の制御に用いる場合など、
圧電積層体の上記温度による変位の変化率が無視できな
くなり、対象によってはアクチュエータとしての作動が
不能となる場合がある。また、圧電積層体を自動車のエ
ンジンルーム内などの環境温度変化が大きい場所に用い
る場合も同様の不都合が生じる。
2. Description of the Related Art Conventionally, a piezoelectric laminated body which is displaced by voltage application has been used as an actuator for driving a movable part of various devices. This piezoelectric laminate is generally P
It is configured by stacking a plurality of ZT (PbZrO 3 .PbTiO 3 ) elements. By the way, when a voltage is applied to the piezoelectric laminated body, the temperature rises due to self-heating of the piezoelectric laminated body with the passage of time, but the piezoelectric laminated body has a property that the displacement amount changes due to this temperature rise. Therefore, when using the piezoelectric laminate for controlling a controlled device with a small displacement,
The rate of change in displacement of the piezoelectric laminate due to the above temperature cannot be ignored, and the operation as an actuator may not be possible depending on the object. The same inconvenience also occurs when the piezoelectric laminate is used in a place where the environmental temperature changes greatly, such as in the engine room of an automobile.

【0003】このような圧電積層体の変位が温度依存性
をもつことによる不都合を解決するものとして、特開昭
64−10309号公報には、圧電積層体の近辺に温度
センサと、この温度センサに近接しない位置にヒータと
を配設した圧電積層体の補正装置が開示されている。こ
の補正装置は、温度センサにより検出された検出温度と
圧電積層体の使用環境温度よりも十分高い温度に設定さ
れた基準温度とを比較し、検出温度が基準温度よりも低
い時のみヒータに通電して圧電積層体を加熱するもの
で、これにより圧電積層体の温度を使用環境温度より十
分に高い温度に維持して、温度変化に基づく圧電積層体
の変位量のばらつきを抑えることができる。
As a solution to the inconvenience caused by the displacement of the piezoelectric laminate having temperature dependency, Japanese Patent Laid-Open No. 64-10309 discloses a temperature sensor near the piezoelectric laminate and the temperature sensor. There is disclosed a correction device for a piezoelectric laminated body in which a heater is arranged at a position not close to the. This correction device compares the detected temperature detected by the temperature sensor with a reference temperature set to a temperature sufficiently higher than the operating environment temperature of the piezoelectric laminate, and energizes the heater only when the detected temperature is lower than the reference temperature. By heating the piezoelectric laminate, the temperature of the piezoelectric laminate can be maintained at a temperature sufficiently higher than the operating environment temperature, and the variation in displacement of the piezoelectric laminate due to temperature change can be suppressed.

【0004】また、特開昭62−10457号公報に
は、層間又は外周にPTCヒータを一体的に設けた圧電
積層体が開示されている。この圧電積層体は、駆動中に
上昇する最高温度付近のキューリー点をもつPTCヒー
タで駆動中に上昇する最高温度付近まで圧電積層体の温
度を駆動初期に上げておき、その温度を維持することに
よって駆動中における圧電積層体の変位量を一定に保つ
ようにしたものである。
Further, Japanese Patent Application Laid-Open No. 62-10457 discloses a piezoelectric laminate in which a PTC heater is integrally provided between layers or on the outer periphery. In this piezoelectric laminate, a PTC heater having a Curie point near the maximum temperature that rises during driving is used to raise the temperature of the piezoelectric laminate to the vicinity of the maximum temperature during driving and maintain that temperature. By this, the displacement amount of the piezoelectric laminate during driving is kept constant.

【0005】[0005]

【発明が解決しようとする課題】ところが、上述した従
来の温度依存性に対する解決手段は、いずれも駆動中の
最高温度付近やそれよりも十分に高い温度に圧電積層体
を加熱保持して、駆動中における圧電積層体の温度変化
をなくすことにより、圧電積層体の変位量を一定に保つ
ようにしたものである。このため、熱によりPZT素子
内の分極状態が劣化し、圧電積層体の耐久性を損なうと
いう問題がある。また、高温状態で変位を許容する組付
け上の設計値を確保する必要があり、組付けを室温で行
い使用時に高温にすることは変位のばらつきを大きくす
ることにもなる。
However, the above-mentioned conventional means for solving the temperature dependence are driven by heating and holding the piezoelectric laminate at a temperature near the maximum temperature during driving or a temperature sufficiently higher than the maximum temperature. By eliminating the temperature change of the piezoelectric laminated body inside, the displacement amount of the piezoelectric laminated body is kept constant. Therefore, there is a problem that the polarization state in the PZT element is deteriorated by heat and the durability of the piezoelectric laminate is impaired. In addition, it is necessary to secure a design value for assembly that allows the displacement in a high temperature state, and if the assembly is performed at room temperature and the temperature is high during use, the variation in displacement is also increased.

【0006】本発明は上記実情に鑑みてなされたもので
あり、圧電積層体の耐久性を損なうことなく、温度によ
る圧電積層体の変位量のばらつき極力抑えることのでき
る圧電積層体の駆動制御方法を提供することを解決すべ
き技術課題とするものである。
The present invention has been made in view of the above circumstances, and a drive control method for a piezoelectric laminate that can suppress variations in displacement of the piezoelectric laminate due to temperature without impairing the durability of the piezoelectric laminate. It is a technical issue to be solved to provide the above.

【0007】[0007]

【課題を解決するための手段】本発明の圧電積層体の駆
動制御方法は、圧電積層体の軸方向の略中央に配置され
たPTC素子で該圧電積層体の温度を検出し、該検出温
度と予め設定された基準温度とを比較した結果に基づい
て該圧電積層体を該PTC素子で加熱、又は冷却装置で
冷却することを特徴とする。
According to the drive control method of a piezoelectric laminate of the present invention, the temperature of the piezoelectric laminate is detected by a PTC element arranged substantially at the center of the piezoelectric laminate in the axial direction, and the detected temperature is detected. It is characterized in that the piezoelectric laminate is heated by the PTC element or cooled by a cooling device based on the result of comparison between the PTC element and a preset reference temperature.

【0008】本発明の駆動制御方法は、温度が上昇する
と変位量が増加する圧電積層体、及び温度が上昇すると
変位量が減少する圧電積層体のいずれにも適用すること
ができる。上記PTC素子は、圧電積層体の軸方向の略
中央に配置される。このPTC素子の配置は、周辺との
熱移動の仕方により設定することが望ましく、駆動時軸
方向の中央が最も高温となるため、センシング精度を向
上させるには該中央かやや上方に配置することが好まし
く、また加熱効率を向上させるには該中央よりやや下方
に配置することが好ましい。
The drive control method of the present invention can be applied to both a piezoelectric laminate in which the displacement increases as the temperature rises and a piezoelectric laminate in which the displacement decreases as the temperature rises. The PTC element is arranged substantially at the center of the piezoelectric laminate in the axial direction. It is desirable to set the arrangement of the PTC element depending on the way of heat transfer with the surroundings. Since the center in the axial direction at the time of driving has the highest temperature, the PTC element should be arranged slightly above the center to improve the sensing accuracy. Is preferable, and in order to improve heating efficiency, it is preferable to dispose it slightly below the center.

【0009】上記PTC素子は、キュリー温度まではN
TCサーミスタとして温度上昇とともに抵抗値は低下す
る。このPTC素子の抵抗値を測定することにより、P
TC素子の温度を計算し、圧電積層体の検出温度とする
ことができる。本発明の圧電積層体の駆動制御方法は、
例えば以下のような装置を用いて行うことができる。
The PTC element described above has an N content up to the Curie temperature.
As a TC thermistor, the resistance value decreases as the temperature rises. By measuring the resistance value of this PTC element, P
The temperature of the TC element can be calculated and used as the detected temperature of the piezoelectric laminate. The drive control method of the piezoelectric laminate of the present invention is
For example, the following device can be used.

【0010】すなわち、圧電積層体の軸方向の略中央に
配置されたPTC素子と、該PTC素子の抵抗を測定す
る抵抗測定手段と、該PTC素子に通電するPTC加熱
用電源と、該PTC素子に該抵抗測定手段又は該PTC
加熱用電源を択一的に接続する切替スイッチと、該圧電
積層体を冷却する冷却装置と、該抵抗測定手段の測定抵
抗値から該PTC素子の温度を計算して圧電積層体の検
出温度とし、該検出温度と予め設定された基準温度とを
比較した結果に基づいて該切替スイッチを切り換えると
ともに、該PTC加熱用電源又は該冷却装置に作動信号
を出力する制御部とから構成された駆動制御装置を採用
することができる。
That is, a PTC element disposed substantially at the center of the piezoelectric laminate in the axial direction, resistance measuring means for measuring the resistance of the PTC element, a PTC heating power source for energizing the PTC element, and the PTC element. To the resistance measuring means or the PTC
A changeover switch for selectively connecting a heating power source, a cooling device for cooling the piezoelectric laminate, a temperature of the PTC element calculated from a resistance value measured by the resistance measuring means, and set as a detection temperature of the piezoelectric laminate. A drive control which is configured to switch the changeover switch based on a result of comparison between the detected temperature and a preset reference temperature and to output an operation signal to the PTC heating power source or the cooling device. A device can be employed.

【0011】なお、本発明の圧電積層体の駆動制御方法
は、PTC素子で測定した圧電積層体の検出温度と基準
温度とを比較した結果に基づいて、圧電積層体を加熱又
は冷却するものであるが、加熱又は冷却する際の熱の移
動に時間がかかることを考慮して、上記検出温度に基づ
いて圧電積層体の駆動電圧を制御することが好ましい。
これは、圧電積層体の変位量と温度との関係を表すマッ
プから、検出温度における変位量を計算し、この変位量
と設定変位量との差を埋め合わせられるように駆動電圧
を設定することにより行うことができる。
The piezoelectric laminate drive control method of the present invention heats or cools the piezoelectric laminate based on the result of comparison between the detected temperature of the piezoelectric laminate measured by the PTC element and the reference temperature. However, it is preferable to control the drive voltage of the piezoelectric laminate based on the detected temperature in consideration of the fact that it takes time to transfer heat when heating or cooling.
This is because the displacement amount at the detected temperature is calculated from the map showing the relationship between the displacement amount of the piezoelectric laminate and the temperature, and the drive voltage is set so that the difference between this displacement amount and the set displacement amount can be compensated. It can be carried out.

【0012】[0012]

【作用】本発明の圧電積層体の駆動制御方法では、PT
C素子で検出した圧電積層体の検出温度が基準温度より
も低い場合はPTC素子に通電して該PTC素子で圧電
積層体を加熱し、上記検出温度が基準温度よりも高い場
合は冷却装置により圧電積層体を冷却する。このため、
圧電積層体の温度を基準温度の設定次第で任意の温度に
維持することができる。また、圧電積層体の温度測定を
圧電積層体の軸方向略中央に配置されたPTC素子で行
うため、外部環境に影響されることがなく、温度センシ
ングを正確に行うことができる。したがって、上記基準
温度の設定を例えば室温程度にしておけば、圧電積層体
が高温になることによる熱劣化を確実に防ぐことがで
き、温度変化に伴う圧電積層体の変位のばらつきを極力
抑えることが可能となる。
In the drive control method for the piezoelectric laminate of the present invention, the PT
When the detected temperature of the piezoelectric laminate detected by the C element is lower than the reference temperature, the PTC element is energized to heat the piezoelectric laminate by the PTC element, and when the detected temperature is higher than the reference temperature, the cooling device is used. Cool the piezoelectric stack. For this reason,
The temperature of the piezoelectric laminate can be maintained at an arbitrary temperature depending on the setting of the reference temperature. Further, since the temperature of the piezoelectric laminated body is measured by the PTC element arranged substantially in the center of the piezoelectric laminated body in the axial direction, the temperature sensing can be accurately performed without being affected by the external environment. Therefore, if the reference temperature is set to, for example, about room temperature, it is possible to reliably prevent thermal deterioration due to high temperature of the piezoelectric laminate, and to suppress variations in displacement of the piezoelectric laminate due to temperature changes as much as possible. Is possible.

【0013】[0013]

【実施例】以下、本発明の実施例を具体的に説明する。
図1のブロック図に示すように、本実施例の圧電積層体
の駆動制御方法に用いる駆動制御装置は、圧電積層体1
の軸方向中央に配設されたPTC素子2と、PTC素子
2の抵抗を測定する抵抗計3と、PTC素子2に通電す
るPTC加熱用電源4と、PTC素子2に抵抗計3又は
PTC加熱用電源4を択一的に接続する切替スイッチ5
と、圧電積層体1を冷却する冷却装置6と、圧電積層体
1に電圧を印加する駆動電源7と、抵抗計3の測定抵抗
値からPTC素子2の温度を計算して圧電積層体1の検
出温度とし、該検出温度と予め設定された基準温度とを
比較した結果に基づいて切替スイッチ5を切り換え、P
TC加熱用電源4又は冷却装置6に作動信号を出力する
とともに、上記検出温度に基づいて設定された駆動電圧
信号を駆動電源7に出力する制御部8とから構成されて
いる。
EXAMPLES Examples of the present invention will be specifically described below.
As shown in the block diagram of FIG. 1, the drive control device used in the drive control method of the piezoelectric laminate of the present embodiment is the piezoelectric laminate 1
PTC element 2 arranged in the axial center of the PTC element 2, a resistance meter 3 for measuring the resistance of the PTC element 2, a PTC heating power source 4 for energizing the PTC element 2, and a resistance meter 3 or PTC heating for the PTC element 2. Changeover switch 5 for selectively connecting the power supply 4 for
A cooling device 6 for cooling the piezoelectric laminate 1, a drive power source 7 for applying a voltage to the piezoelectric laminate 1, a temperature of the PTC element 2 calculated from a resistance value measured by the resistance meter 3, The detected temperature is set, and the changeover switch 5 is switched based on the result of comparison between the detected temperature and a preset reference temperature.
The controller 8 outputs an operation signal to the TC heating power source 4 or the cooling device 6 and outputs a drive voltage signal set based on the detected temperature to the drive power source 7.

【0014】圧電積層体1は、表裏両面に電極11が印
刷されたPZTよりなる圧電板12と、金属製電極板1
3とを交互に積層し、リード電極14で各圧電板12を
保持するとともに、リード電極14を各電極板13と接
合して構成されている。そして、この圧電積層体1の軸
方向の中央にPTC素子2が挟まれており、リード電極
15を通して、PTC素子2のセンシング及び及び電力
供給が行われる。なお、各電極板13に通電するリード
電極14とPTC素子2とは絶縁されており、PTC素
子2に通電するリード電極15と各電極板13とは絶縁
されている。また、本実施例で用いた圧電積層体1は温
度が上昇すると変位量が増加するものである。
The piezoelectric laminate 1 comprises a piezoelectric plate 12 made of PZT having electrodes 11 printed on both front and back surfaces, and a metal electrode plate 1.
3 and 3 are alternately laminated, each piezoelectric plate 12 is held by the lead electrode 14, and the lead electrode 14 is joined to each electrode plate 13. The PTC element 2 is sandwiched in the center of the piezoelectric laminate 1 in the axial direction, and sensing and power supply of the PTC element 2 are performed through the lead electrodes 15. The lead electrodes 14 that energize each electrode plate 13 are insulated from the PTC element 2, and the lead electrodes 15 that energize the PTC element 2 and each electrode plate 13 are insulated. Further, the piezoelectric laminate 1 used in this example has a displacement amount which increases as the temperature rises.

【0015】切替スイッチ5は制御部8と電気的に接続
され、制御部8からの信号を受けて作動する。切替スイ
ッチ5が図1のA側に接続されると、リード電極15を
介してPTC素子2と抵抗計3とが接続される。切替ス
イッチ5が図1のB側に接続されると、リード電極15
を介してPTC素子2とPTC加熱用電源4とが接続さ
れる。
The changeover switch 5 is electrically connected to the controller 8 and operates by receiving a signal from the controller 8. When the changeover switch 5 is connected to the A side in FIG. 1, the PTC element 2 and the resistance meter 3 are connected via the lead electrode 15. When the changeover switch 5 is connected to the B side in FIG. 1, the lead electrode 15
The PTC element 2 and the PTC heating power source 4 are connected via the.

【0016】冷却装置6は、圧電積層体1の外周に絶縁
コーティング層(図示せず)を介して配設された冷却管
61と、冷却管61に冷却用媒体を供給する流入路62
と、冷却管61から冷却用媒体が排出する排出路63
と、流入路62の途中に設けられたバルブ64とから構
成されている。バルブ64は制御部8に電気的に接続さ
れ、制御部8から信号を受けて開閉作動する。
The cooling device 6 includes a cooling pipe 61 arranged on the outer periphery of the piezoelectric laminate 1 via an insulating coating layer (not shown), and an inflow passage 62 for supplying a cooling medium to the cooling pipe 61.
And a discharge passage 63 through which the cooling medium is discharged from the cooling pipe 61.
And a valve 64 provided in the middle of the inflow path 62. The valve 64 is electrically connected to the control unit 8 and receives a signal from the control unit 8 to open and close.

【0017】制御部8はマイクロコンピュータで、各種
の情報がメモリされている。すなわち、PTC素子2の
温度と抵抗値との関係を表すマップや、圧電積層体1の
温度特性に合わせて設定された高温側の基準温度D及び
低温側の基準温度Cや、圧電積層体1の変位量と温度と
の関係を表すマップなどがメモリされている。本実施例
の圧電積層体の駆動制御方法は、環境温度にかかわら
ず、圧電積層体1の温度を基準温度範囲(C〜D)に維
持するとともに、圧電積層体1の変位量を設定変位量X
一定とするように駆動制御するものである。
The control unit 8 is a microcomputer in which various information is stored. That is, a map showing the relationship between the temperature of the PTC element 2 and the resistance value, the high temperature side reference temperature D and the low temperature side reference temperature C set according to the temperature characteristics of the piezoelectric laminate 1, and the piezoelectric laminate 1 A map and the like showing the relationship between the displacement amount and the temperature are stored in memory. The drive control method of the piezoelectric laminated body of the present embodiment maintains the temperature of the piezoelectric laminated body 1 within the reference temperature range (C to D) regardless of the environmental temperature, and sets the displacement amount of the piezoelectric laminated body 1 to the set displacement amount. X
The drive is controlled to be constant.

【0018】上記構成を有する駆動制御装置を用いた圧
電積層体1の駆動制御方法について、図3のフローチャ
ートを参照しつつ説明する。制御部8からの信号で切替
スイッチ5をA側に接続し、抵抗計3でPTC素子2の
抵抗を測定する。この測定抵抗値が制御部8に送られ、
PTC素子2の抵抗値と温度との関係を表すマップに従
い、PTC素子2の温度を計算し、圧電積層体1の検出
温度Tとする。この検出温度Tと予め設定された基準温
度C、Dとを比較する(STEP1)。
A drive control method of the piezoelectric laminate 1 using the drive control device having the above-mentioned structure will be described with reference to the flowchart of FIG. The changeover switch 5 is connected to the A side by a signal from the control unit 8, and the resistance of the PTC element 2 is measured by the resistance meter 3. This measured resistance value is sent to the control unit 8,
The temperature of the PTC element 2 is calculated according to a map showing the relationship between the resistance value of the PTC element 2 and the temperature, and is set as the detected temperature T of the piezoelectric laminate 1. The detected temperature T is compared with preset reference temperatures C and D (STEP 1).

【0019】STEP1で検出温度TがC≦T≦Dの場
合は、制御部8で以下のように駆動電圧を設定し、この
信号を駆動電源7に送って圧電積層体1の駆動電圧を補
正する。この駆動電圧設定は、圧電積層体1の変位量と
温度との関係を表すマップから、検出温度Tにおける変
位量xを計算し、この変位量xと設定変位量X0 との差
±Δx(Δx=x−X0 )が埋め合わせられるように行
われる(図4及び図5参照)。ここで、温度T0 の時に
圧電積層体1の変位量を設定変位量X0 とするのに必要
な駆動電圧を目標駆動電圧Y0 とする。検出温度T(T
<T0 )における変位量xが設定変位量X0 より小さい
ときは、その差−Δxの値に応じた駆動電圧y(Y0
y)が設定される。また、検出温度T(T0 <T)にお
ける変位量xが設定変位量X0 より大きいときは、その
差+Δxの値に応じた駆動電圧y(y<Y0 )が設定さ
れる。
When the detected temperature T is C ≦ T ≦ D in STEP 1, the control unit 8 sets the drive voltage as follows, and sends this signal to the drive power supply 7 to correct the drive voltage of the piezoelectric laminate 1. To do. This drive voltage setting calculates the displacement amount x at the detected temperature T from the map showing the relationship between the displacement amount of the piezoelectric laminate 1 and the temperature, and calculates the difference ± Δx (between the displacement amount x and the set displacement amount X 0. Δx = x−X 0 ) is compensated for (see FIGS. 4 and 5). Here, the drive voltage required to set the displacement amount of the piezoelectric laminate 1 at the temperature T 0 to the set displacement amount X 0 is set as the target drive voltage Y 0 . Detection temperature T (T
When the displacement amount x in <T 0 ) is smaller than the set displacement amount X 0 , the drive voltage y (Y 0 <depending on the value of the difference −Δx.
y) is set. Further, when the displacement amount x at the detected temperature T (T 0 <T) is larger than the set displacement amount X 0 , the drive voltage y (y <Y 0 ) is set according to the value of the difference + Δx.

【0020】STEP1で検出温度TがT<Cの場合
は、制御部8が切替スイッチ5をB側に切り替えるとと
もに、PTC加熱用電源4をONし、PTC素子2が通
電されて圧電積層体1を加熱する。そして、上記と同様
に制御部8で駆動電圧設定が行われ圧電積層体1の駆動
電圧を補正する。その後、再び制御部8により切替スイ
ッチ5がA側に切り替わり、上記と同様に圧電積層体1
の検出温度Tを検出し、制御部8で基準温度Cと比較す
る。ここで、検出温度Tが基準温度C以上であれば、制
御部8がPTC加熱用電源4をOFFし、上記と同様に
駆動電圧設定が行われ圧電積層体1の駆動電圧を補正す
る。一方、検出温度Tが基準温度Cより低ければ、再び
圧電積層体1を加熱する制御が行われる。
When the detected temperature T is T <C in STEP 1, the control unit 8 switches the changeover switch 5 to the B side, the PTC heating power source 4 is turned on, the PTC element 2 is energized, and the piezoelectric laminate 1 is turned on. To heat. Then, similarly to the above, the control unit 8 sets the drive voltage to correct the drive voltage of the piezoelectric laminate 1. After that, the changeover switch 5 is switched to the A side by the control unit 8 again, and the piezoelectric laminated body 1 is moved in the same manner as above.
The detected temperature T is detected, and the controller 8 compares the detected temperature T with the reference temperature C. Here, if the detected temperature T is equal to or higher than the reference temperature C, the control unit 8 turns off the PTC heating power source 4, the drive voltage is set in the same manner as above, and the drive voltage of the piezoelectric laminate 1 is corrected. On the other hand, if the detected temperature T is lower than the reference temperature C, the control of heating the piezoelectric laminate 1 again is performed.

【0021】STEP1で検出温度TがD<Tの場合
は、制御部8がバルブ62を開き、冷却装置6により圧
電積層体1を冷却する。そして、上記と同様に制御部8
で駆動電圧設定が行われ圧電積層体1の駆動電圧を補正
する。その後、上記と同様に圧電積層体1の検出温度T
を検出し、制御部8で基準温度Dと比較する。ここで、
検出温度Tが基準温度D以下であれば、制御部8がバル
ブ63を閉じ、上記と同様に駆動電圧設定が行われ圧電
積層体1の駆動電圧を補正する。一方、検出温度Tが基
準温度Dより高ければ、冷却装置6により圧電積層体1
の冷却が続けられる。
When the detected temperature T is D <T in STEP 1, the controller 8 opens the valve 62 and the cooling device 6 cools the piezoelectric laminate 1. Then, similarly to the above, the control unit 8
The drive voltage setting is performed in order to correct the drive voltage of the piezoelectric laminate 1. After that, the detected temperature T of the piezoelectric laminate 1 is determined as described above.
Is detected and the controller 8 compares it with the reference temperature D. here,
When the detected temperature T is equal to or lower than the reference temperature D, the control unit 8 closes the valve 63, the drive voltage is set in the same manner as above, and the drive voltage of the piezoelectric laminate 1 is corrected. On the other hand, if the detected temperature T is higher than the reference temperature D, the cooling device 6 causes the piezoelectric laminated body 1 to move.
Cooling continues.

【0022】このように、本実施例の圧電積層体の駆動
制御方法は、圧電積層体1の温度を基準温度範囲(C〜
D)に維持することができる。このため、圧電積層体1
の熱による劣化を確実に防ぐことができる。また、あら
ゆる温度依存性を有するPZT素子よりなる圧電積層体
1に適用可能で、素子選択の自由度と最適な設計が可能
となる。さらに、圧電積層体1を高速(数百Hz以上)
で使用することができ、圧電積層体の使用条件を広げら
れる。
As described above, according to the drive control method of the piezoelectric laminate of the present embodiment, the temperature of the piezoelectric laminate 1 is set to the reference temperature range (C to C).
D) can be maintained. Therefore, the piezoelectric laminate 1
It is possible to reliably prevent deterioration due to heat. Further, it can be applied to the piezoelectric laminated body 1 made of a PZT element having any temperature dependence, and the degree of freedom in element selection and optimum design can be realized. Furthermore, the piezoelectric laminate 1 can be driven at high speed (several hundred Hz or more).
The piezoelectric laminate can be used in a wide range of conditions.

【0023】そして、上記のように圧電積層体1の温度
を基準温度範囲に維持するとともに、圧電積層体1の駆
動電圧を検出温度Tに応じて補正することができるの
で、圧電積層体1の温度変化に伴う変位のばらつきを極
力抑えることが可能となる。
As described above, the temperature of the piezoelectric laminate 1 can be maintained within the reference temperature range, and the driving voltage of the piezoelectric laminate 1 can be corrected according to the detected temperature T. It is possible to suppress variations in displacement due to temperature changes as much as possible.

【0024】[0024]

【発明の効果】以上詳述したように本発明の圧電積層体
の駆動制御方法は、圧電積層体1の温度を基準温度範囲
に維持することができるので、圧電積層体の熱による劣
化を確実に防いで、圧電積層体の温度変化に伴う変位の
ばらつきを極力抑えることが可能となる。
As described above in detail, according to the drive control method for a piezoelectric laminated body of the present invention, the temperature of the piezoelectric laminated body 1 can be maintained within the reference temperature range, so that the deterioration of the piezoelectric laminated body due to heat is surely performed. Therefore, it is possible to suppress variations in displacement of the piezoelectric laminate due to temperature changes as much as possible.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の圧電積層体の駆動制御方法に用いる一
実施例の駆動制御装置の全体構成を示すブロック図であ
る。
FIG. 1 is a block diagram showing an overall configuration of a drive control device of an embodiment used in a drive control method for a piezoelectric laminate of the present invention.

【図2】上記駆動制御装置に用いた圧電積層体の斜視図
である。
FIG. 2 is a perspective view of a piezoelectric laminate used in the drive control device.

【図3】上記駆動制御装置を用いて駆動制御する際のフ
ローチャートである。
FIG. 3 is a flowchart when drive control is performed using the drive control device.

【図4】圧電積層体の温度と変位量の関係を表す線図で
ある。
FIG. 4 is a diagram showing a relationship between a temperature and a displacement amount of a piezoelectric laminate.

【図5】圧電積層体の設定変位量を得るために必要な駆
動電圧値を表す線図である。
FIG. 5 is a diagram showing a drive voltage value required to obtain a set displacement amount of a piezoelectric laminate.

【符号の説明】[Explanation of symbols]

1は圧電積層体、2はPTC素子、3は抵抗計、4はP
TC加熱用電源、5は切替スイッチ、6は冷却装置、7
は駆動電源、8は制御部である。
1 is a piezoelectric laminate, 2 is a PTC element, 3 is a resistance meter, 4 is P
TC heating power source, 5 changeover switch, 6 cooling device, 7
Is a drive power source, and 8 is a control unit.

Claims (1)

【特許請求の範囲】 【請求項1】圧電積層体の軸方向の略中央に配置された
PTC素子で該圧電積層体の温度を検出し、該検出温度
と予め設定された基準温度とを比較した結果に基づいて
該圧電積層体を該PTC素子で加熱、又は冷却装置で冷
却することを特徴とする圧電積層体の駆動制御方法。
Claim: What is claimed is: 1. A PTC element disposed substantially at the center of an axial direction of a piezoelectric laminate detects the temperature of the piezoelectric laminate, and compares the detected temperature with a preset reference temperature. A drive control method for a piezoelectric laminate, comprising heating the piezoelectric laminate with the PTC element or cooling it with a cooling device based on the result.
JP3182271A 1991-07-23 1991-07-23 Controlling method for drive of piezoelectric laminate Pending JPH0529677A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3182271A JPH0529677A (en) 1991-07-23 1991-07-23 Controlling method for drive of piezoelectric laminate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3182271A JPH0529677A (en) 1991-07-23 1991-07-23 Controlling method for drive of piezoelectric laminate

Publications (1)

Publication Number Publication Date
JPH0529677A true JPH0529677A (en) 1993-02-05

Family

ID=16115349

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3182271A Pending JPH0529677A (en) 1991-07-23 1991-07-23 Controlling method for drive of piezoelectric laminate

Country Status (1)

Country Link
JP (1) JPH0529677A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014504018A (en) * 2010-12-23 2014-02-13 エプコス アクチエンゲゼルシャフト Actuator and manufacturing method thereof
DE102013106186A1 (en) * 2013-06-13 2014-12-18 Epcos Ag Device having a multilayer electronic component and method of operating the device
JP2018137268A (en) * 2017-02-20 2018-08-30 三菱マテリアル株式会社 Electronic device and manufacturing method therefor

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014504018A (en) * 2010-12-23 2014-02-13 エプコス アクチエンゲゼルシャフト Actuator and manufacturing method thereof
US9252351B2 (en) 2010-12-23 2016-02-02 Epcos Ag Actuator and method for producing same
DE102013106186A1 (en) * 2013-06-13 2014-12-18 Epcos Ag Device having a multilayer electronic component and method of operating the device
JP2018137268A (en) * 2017-02-20 2018-08-30 三菱マテリアル株式会社 Electronic device and manufacturing method therefor

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