JPH0528773A - Ferroelectric memory - Google Patents

Ferroelectric memory

Info

Publication number
JPH0528773A
JPH0528773A JP3186195A JP18619591A JPH0528773A JP H0528773 A JPH0528773 A JP H0528773A JP 3186195 A JP3186195 A JP 3186195A JP 18619591 A JP18619591 A JP 18619591A JP H0528773 A JPH0528773 A JP H0528773A
Authority
JP
Japan
Prior art keywords
electrode
electrodes
ferroelectric
specified
ferroelectric memory
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3186195A
Other languages
Japanese (ja)
Other versions
JP2854165B2 (en
Inventor
Akira Kanzawa
公 神澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rohm Co Ltd
Original Assignee
Rohm Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rohm Co Ltd filed Critical Rohm Co Ltd
Priority to JP3186195A priority Critical patent/JP2854165B2/en
Priority to US07/876,186 priority patent/US5291436A/en
Publication of JPH0528773A publication Critical patent/JPH0528773A/en
Application granted granted Critical
Publication of JP2854165B2 publication Critical patent/JP2854165B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C11/00Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/56Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using storage elements with more than two stable states represented by steps, e.g. of voltage, current, phase, frequency
    • G11C11/5657Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using storage elements with more than two stable states represented by steps, e.g. of voltage, current, phase, frequency using ferroelectric storage elements

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Dram (AREA)

Abstract

PURPOSE:To increase the information quantity per unit cell by providing electrodes on a front side and a rear of a ferroelectric substance, applying a pulse electric field on a specified electrode and generating more than three values of polarization inversion state. CONSTITUTION:A ferroelectric capacitor 3 has a large surface of electrode 6 on the surface of one ferroelectric substance and two pieces of a small surface area of electrodes 7, 8 adjacent to the rear side and the electrodes 7, 8 are connected to reference potential lines 4, 5. The lines 4, 5 hold the voltage pulse applied on them and the electrode 6 is connected to a bit line 1 via the source and the drain of a field-effect transistor FET 9. In the ferroelectric memory, one of the adjacent plural electrodes 7, 8 is specified and a pulse field applied between the electrode 6. Thus more than 3 places of polarization inversion state are obtained and the information quantity per unit of the capacitor 3 can be increased without increasing the cell area.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、強誘電コンデンサを用
いた強誘電体メモリに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a ferroelectric memory using a ferroelectric capacitor.

【0002】[0002]

【従来の技術】近時、強誘電コンデンサをメモリに用い
て2値の電荷量を保持させるものが用いられてきた。
2. Description of the Related Art Recently, a ferroelectric capacitor has been used as a memory for holding a binary charge amount.

【0003】[0003]

【発明が解決しようとする課題】しかし乍ら、この種従
来の強誘電体メモリは、1個の強誘電コンデンサに2値
の電荷量を保持できるもので、複数値の電荷量を保持さ
せるためにはその数に応じた複数個の強誘電コンデンサ
を必要とするものであった。
However, in this type of conventional ferroelectric memory, one ferroelectric capacitor can hold a binary charge amount. Was required to have a plurality of ferroelectric capacitors corresponding to the number.

【0004】[0004]

【課題を解決するための手段】本発明は、1個の強誘電
体の表面に少なくとも1個の電極を設ける一方、該強誘
電体の裏面に夫々2個以上の電極を設け、該電極の中か
ら表面と裏面で夫々1つづつの電極を選択的に選んで強
誘電体メモリとして用いることにより、選択的に選んだ
数だけの電荷量を保持することができるようにしたもの
である。
According to the present invention, at least one electrode is provided on the surface of one ferroelectric substance, and two or more electrodes are provided on the back face of the ferroelectric substance. By selectively selecting one electrode for each of the front surface and the back surface from the inside and using it as a ferroelectric memory, it is possible to hold the amount of electric charges of the selectively selected number.

【0005】たとえば、本発明の強誘電体メモリとし
て、1個の強誘電体の表面に1個の電極Aと裏面に2個
の電極B,Cを互いに隣接して設け、前記電極の中から
表面と裏面に夫々1個づつの電極を選択して、AB;A
C;ABCの中から1つづつを特定できるようにする
と、電極の位置AB,AC,ABCに応じて3値の異な
る電荷量を得ることができるようにしたものである。な
お、1個の強誘電体は2個の強誘電体を並列に配置して
みかけ上1個の強誘電体を構成するようにしてもよい。
For example, as the ferroelectric memory of the present invention, one electrode A is provided on the front surface of one ferroelectric material and two electrodes B and C are provided on the back surface thereof so as to be adjacent to each other. Select one electrode on the front and one on the back, and select AB; A
C; By specifying each one from ABC, it is possible to obtain three different charge amounts in accordance with the positions AB, AC and ABC of the electrodes. It should be noted that one ferroelectric substance may be arranged by arranging two ferroelectric substances in parallel so as to apparently form one ferroelectric substance.

【0006】[0006]

【作用】したがって、前記の如き構成よりなる本発明の
強誘電体メモリによって、1個の強誘電コンデンサで複
数個の電荷量を保持させることができるために、簡単な
構造で複数値をメモリできる強誘電体メモリをメモリ素
子として提供できるものである。
Therefore, according to the ferroelectric memory of the present invention having the above-mentioned structure, one ferroelectric capacitor can hold a plurality of electric charges, so that a plurality of values can be stored with a simple structure. The ferroelectric memory can be provided as a memory device.

【0007】したがって、単位セル当りの情報量を3値
以上に増加させることができるものである。たとえば、
単位セル当りの情報量が2値から3値以上になり、セル
面積を変えることなく、単位面積当りの情報量を飛躍的
に増大することが可能となるものである。
Therefore, the amount of information per unit cell can be increased to three or more. For example,
The amount of information per unit cell is increased from two values to three or more, and the amount of information per unit area can be dramatically increased without changing the cell area.

【0008】[0008]

【実施例】以下、本発明を図面に示す一実施例について
説明する。図1は、本発明の強誘電体メモリの一実施例
を示す回路図、図2は図1の回路図の電界一分極の特性
図である。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention shown in the drawings will be described below. FIG. 1 is a circuit diagram showing an embodiment of the ferroelectric memory of the present invention, and FIG. 2 is a characteristic diagram of electric field polarization in the circuit diagram of FIG.

【0009】図1に示す強誘電コンデンサ(3)は、1
個の強誘電体の表面に大面積の電極(6)を備える一
方、裏面に隣接する2個の小面積の電極(7),(8)
を有しており、裏面の電極(7),(8)を夫々基準電
位ライン(4),(5)に接合しておく。基準電位ライ
ン(4),(5)は通常の基準電位であり、好ましくは
接地されているが、ライン(4),(5)はそれに印加
されるゼロではない電圧パルスを保有することができ
る。コンデンサ(3)の表面の電極(6)は電界効果ト
ランジスタ(FET)(9)のソース、ドレインを経て
ビットライン(1)に結合させる。
The ferroelectric capacitor (3) shown in FIG.
A large area electrode (6) is provided on the front surface of each ferroelectric, while two small area electrodes (7), (8) adjacent to the back surface are provided.
And the electrodes (7) and (8) on the back surface are bonded to the reference potential lines (4) and (5), respectively. The reference potential lines (4), (5) are normal reference potentials and are preferably grounded, but the lines (4), (5) can carry non-zero voltage pulses applied to them. . The electrode (6) on the surface of the capacitor (3) is coupled to the bit line (1) via the source and drain of the field effect transistor (FET) (9).

【0010】図1のFET(9)はNチャンネルデバイ
スであり、従ってFET(9)のドレイン電極Dをビッ
トライン(1)に結合させるのに対し、FET(9)の
ソース電極Sはコンデンサ(3)の表面電極(6)に結
合させる。ゲート電極Gは別個に制御されるワードライ
ンWL(2)に結合させる。なお本発明には必ずしもN
チャンネルFETを用いる必要はなく、他のスイッチン
グデバイスを用いることもできる。
The FET (9) of FIG. 1 is an N-channel device, thus coupling the drain electrode D of the FET (9) to the bit line (1), while the source electrode S of the FET (9) is a capacitor ( It is bonded to the surface electrode (6) of 3). The gate electrode G is coupled to the separately controlled word line WL (2). The present invention does not necessarily include N
It is not necessary to use channel FETs, and other switching devices can be used.

【0011】図1の強誘電体メモリ3で、電極6,7を
用いた場合の電界一分極特性は、図2ではBDでCを通
る曲線となり、電極6,8を用いた場合は、図2のDB
でEを通る曲線となり、電極6,7,8を用いた場合
は、図2のFHでG,Iを通る曲線となる。
In the ferroelectric memory 3 of FIG. 1, the electric field one polarization characteristic when the electrodes 6 and 7 are used is a curve passing through C at BD in FIG. 2, and when the electrodes 6 and 8 are used, DB of 2
2 is a curve that passes through E, and when electrodes 6, 7, and 8 are used, a curve that passes through G and I at FH in FIG.

【0012】したがって、FET9をON,OFFして
電極の組6,7;6,8;6,7,8;のいづれか1つ
を選択的に特定するようにすると、C;E;G,I:の
3値以上の電荷量を得ることができる。
Therefore, if the FET 9 is turned on and off to selectively specify any one of the electrode sets 6, 7; 6, 8; 6, 7, 8; C; E; G, I It is possible to obtain a charge amount of three values or more.

【0013】上記実施例に詳記した如く、本発明の強誘
電体メモリにおいては、隣接する複数個の電極を設けた
1個の強誘電体の各電極に対し、適切なるパルス電界を
与えることにより、1つの強誘電体に対して2値以上の
分極反転状態を生じせしめ、これにより、1セル当りの
記憶容量を増加せしめる事ができるようになる。
As described in detail in the above embodiment, in the ferroelectric memory of the present invention, an appropriate pulsed electric field is applied to each electrode of one ferroelectric having a plurality of adjacent electrodes. As a result, a polarization inversion state of two or more values can be generated in one ferroelectric substance, and thereby the storage capacity per cell can be increased.

【0014】[0014]

【発明の効果】上記の如く、本発明は隣接する複数の電
極を有する強誘電体コンデンサと該コンデンサの各電極
にスイッチングTrを接合し、該Trのスイッチングで強
誘電体の各電極を選択して、選択した各電極に適切なる
パルス電界を印加する事により3ケ以上の分極反転状態
を得ることができるようにしたものであり、強誘電体コ
ンデンサの単位セル当りの情報量が、セル面積を増加す
ることなく、2値から3値以上になり、一定のセル面積
で単位面積当りの情報量を飛躍的に増大することが可能
となるものである。
As described above, according to the present invention, a ferroelectric capacitor having a plurality of adjacent electrodes and a switching Tr are connected to each electrode of the capacitor, and each electrode of the ferroelectric is selected by switching the Tr. By applying an appropriate pulsed electric field to each selected electrode, three or more polarization inversion states can be obtained, and the amount of information per unit cell of the ferroelectric capacitor is the cell area. It is possible to dramatically increase the amount of information per unit area from a binary value to a ternary value or more without increasing.

【図面の簡単な説明】[Brief description of drawings]

【図1】 本発明の強誘電体メモリの一実施例を示す電
気回路図である。
FIG. 1 is an electric circuit diagram showing an embodiment of a ferroelectric memory of the present invention.

【図2】 図1の電気回路図の電界・分極の特性図であ
る。
FIG. 2 is a characteristic diagram of electric field / polarization of the electric circuit diagram of FIG.

【符号の説明】[Explanation of symbols]

1 ビットライン 2 ワードライン 3 強誘電体 4 DL1(ドライブライン) 5 DL2(ドライブライン) 6 表面部電極 7 裏面部電極 8 裏面部電極 9 FET 1 bit line 2 word lines 3 Ferroelectric 4 DL1 (drive line) 5 DL2 (drive line) 6 Surface electrode 7 Backside electrode 8 Backside electrode 9 FET

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 1個の強誘電体の表面に少なくとも1個
以上の電極を設ける一方、裏面に少なくとも2個以上の
電極を設け、かつ該電極の内から表面と裏面で1つづつ
の電極を選択的に特定し、該特定した電極にパルス電界
を印加して、3値以上の分極反転状態を生ぜしめるよう
にしたことを特徴とする強誘電体メモリ。
1. A ferroelectric material is provided with at least one or more electrodes on the front surface, and at least two or more electrodes are provided on the back surface, and one electrode is provided on each of the front surface and the back surface from among the electrodes. A ferroelectric memory characterized in that it is selectively specified and a pulsed electric field is applied to the specified electrode so as to generate a polarization inversion state of three or more values.
【請求項2】 1個の強誘電体の表面に1個の大面積の
電極を設ける一方、裏面に2個の小面積の電極を隣接し
て設け、かつ該電極の内から表面と裏面で1つづつの電
極を選択的に特定する回路と、該特定した一対の電極に
パルス電界を印加する回路を備え、特定回路の選択で3
値の分極反転状態を生ぜしめるようにしたことを特徴と
する強誘電体メモリ。
2. One large-area electrode is provided on the front surface of one ferroelectric substance, while two small-area electrodes are provided adjacently on the rear surface, and the front surface and the back surface are provided from inside the electrode. A circuit for selectively specifying each electrode and a circuit for applying a pulsed electric field to the specified pair of electrodes are provided.
A ferroelectric memory characterized in that a polarization inversion state of a value is generated.
JP3186195A 1991-07-25 1991-07-25 Ferroelectric memory Expired - Fee Related JP2854165B2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP3186195A JP2854165B2 (en) 1991-07-25 1991-07-25 Ferroelectric memory
US07/876,186 US5291436A (en) 1991-07-25 1992-04-30 Ferroelectric memory with multiple-value storage states

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3186195A JP2854165B2 (en) 1991-07-25 1991-07-25 Ferroelectric memory

Publications (2)

Publication Number Publication Date
JPH0528773A true JPH0528773A (en) 1993-02-05
JP2854165B2 JP2854165B2 (en) 1999-02-03

Family

ID=16184050

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3186195A Expired - Fee Related JP2854165B2 (en) 1991-07-25 1991-07-25 Ferroelectric memory

Country Status (1)

Country Link
JP (1) JP2854165B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6178107B1 (en) 1998-10-28 2001-01-23 Hyundai Electronics Industries Co., Ltd. Ferroelectric random access memory device capable of reducing operation frequency of reference cell
JP2003503857A (en) * 1999-06-25 2003-01-28 インフィニオン テクノロジーズ ノース アメリカ コーポレイション Multi-bit trench capacitors
KR100893798B1 (en) * 2001-10-31 2009-04-20 소니 가부시끼 가이샤 Digital to analog converter including a ferroelectric non-volatile semiconductor memory, and method for converting digital data to analog data

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6178107B1 (en) 1998-10-28 2001-01-23 Hyundai Electronics Industries Co., Ltd. Ferroelectric random access memory device capable of reducing operation frequency of reference cell
JP2003503857A (en) * 1999-06-25 2003-01-28 インフィニオン テクノロジーズ ノース アメリカ コーポレイション Multi-bit trench capacitors
KR100893798B1 (en) * 2001-10-31 2009-04-20 소니 가부시끼 가이샤 Digital to analog converter including a ferroelectric non-volatile semiconductor memory, and method for converting digital data to analog data

Also Published As

Publication number Publication date
JP2854165B2 (en) 1999-02-03

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