JPH05285837A - Powder beam processing device and powder beam processing method - Google Patents

Abstract

PURPOSE:To prevent adhesion of powder to each other by vibrating injected powder beams. CONSTITUTION:High pressure fluid is injected against a solid gas two-phase mixture flow conveying pipe 2 through a fluid feed pipe 5 and powder is fed through a particulate feed pipe 7 to the solid gas two-phase mixture flow conveying pipe 2. High pressure fluid and powder are mixed together in the solid gas two-phase mixture flow conveying pipe 2 to produce a solid gas two- phase mixture flow, which is conveyed to a first nozzle 9 and accelerated by the first nozzle 9 and delivered as an acceleration flow to a second nozzle 13. The acceleration flow forms a parallel flow by means of the nozzle part 14a of the second nozzle and through excitation of the exciting part 16 of the second nozzle 13, powder passing through the nozzle part 14a is excited and injected as powder beams to a work. Thus, the powder beams are uniformized without being coagulated and adhered to each other and microprocessing of the work is practicable.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a powder beam processing apparatus and a powder beam processing method for processing a workpiece by ejecting a powder beam obtained by mixing high-pressure fluid with powder onto a surface to be processed.

[0002]

2. Description of the Related Art Conventionally, there is, for example, a sandblasting apparatus as a powder beam processing apparatus for mixing powder in a high-pressure fluid and jetting the powder onto a surface to be processed to process the object. This sandblasting device, as shown in FIG.
A negative pressure chamber 102 that communicates with the ejection nozzle 101 is formed, and a compressed air supply pipe 103 is formed in the negative pressure chamber 102.
Communicate with each other via the suction nozzle 104. The suction nozzle 104 is directed toward the ejection nozzle 101,
The compressed air ejected from the compressed air supply pipe 103 through the suction nozzle 104 into the negative pressure chamber 102 is
It is jetted out from 1. In this way, the suction nozzle 10
Since the compressed air ejected from the No. 4 into the negative pressure chamber 102 is directly ejected from the ejection nozzle 101 to the outside, the negative pressure chamber 102
Is made negative.

An abrasive grain supply pipe 105 is provided in the negative pressure chamber 102.
Are in communication with each other, and the abrasive grain supply pipe 105 connects the abrasive grains to the negative pressure chamber 1
Supply to 02. As described above, since the negative pressure chamber 102 is made negative, the abrasive grains are supplied from the abrasive grain supply pipe 105 into the negative pressure chamber 102. The abrasive grains supplied into the negative pressure chamber 102 are
It is mixed with the compressed air in the negative pressure chamber 102 and is jetted from the jet nozzle 101 to the workpiece as a solid-gas two-phase mixed flow.

Conventionally, the abrasive grains are 15 to 100 μm.
A particle size of about m was used. This is because when the abrasive grains having a particle size of several micrometers or less are used, the abrasive grains are charged and aggregate and adhere. In addition, the jet nozzle 101
The abrasive grains solidify and flow out from the nozzle, or only compressed air is ejected from the ejection nozzle 101, so that stable ejected abrasive grains cannot be ejected to the surface to be processed, resulting in uneven surface accuracy and surface roughness. Is.

[0005]

However, in such a conventional powder beam processing apparatus and powder beam processing method, compressed air and abrasive grains supplied from the suction nozzle of the compressed air supply pipe to the negative pressure chamber are supplied. Since the abrasive grains supplied from the tube were mixed in a negative pressure chamber and ejected as a powder beam from an ejection nozzle, only abrasive grains having a particle size of about 15 to 100 μm can be used. , Only available for rough surface finish. Therefore, the conventional powder beam processing apparatus and powder beam processing method are limited to applications such as shot peaking, deburring, rust removal, surface storm and decoration, and can only use removal processing. As a result, recording / reproducing devices such as magnetic disks and optical disks and flying heads,
Alternatively, there is a problem that it cannot be used as a processing apparatus or a processing method that requires fine processing such as a micromachine.

Further, when fine processing is performed by using a conventional powder beam processing apparatus or powder beam processing method, it is necessary to use abrasive grains having a particle size of several micrometers or less. However, as described above, there is a problem in that the jetted abrasive grains cannot be jetted stably due to the charging and cohesion of the abrasive grains, and the surface accuracy and the surface roughness become uneven.

Further, when the particle diameter of the abrasive grains is reduced and the diameter of the ejection hole of the ejection nozzle is also reduced, the abrasive grains agglomerate and adhere to the ejection nozzle, resulting in clogging of the ejection nozzle. As a result, there is a problem that maintenance is required to remove the clogging, processing efficiency is deteriorated, and the life of the ejection nozzle is shortened.

The present invention has been made in view of the above problems, and a first object thereof is to accelerate a solid-gas two-phase mixed flow by a first nozzle and an oscillating and accelerated first nozzle. By providing a second nozzle that uniformly disperses the solid-gas two-phase mixed flow, it is possible to jet a uniformly dispersed powder beam at high speed without agglomerating and adhering the powder. Powder beam processing that can perform processing with uniform surface roughness with high accuracy, does not cause clogging even when the hole diameter of the ejection nozzle is small, has a long ejection nozzle life, and has good processing efficiency. To provide a device.

A second object of the present invention is to perform a first step of accelerating the solid-gas two-phase mixed flow and a second step of uniformly oscillating the solid-gas two-phase mixed flow accelerated by the first nozzle. Process of
By providing the powder, it is possible to eject a uniformly dispersed powder beam at high speed without agglomerating and adhering the powder, and it is possible to perform processing with uniform surface accuracy and surface roughness with high accuracy. It is an object of the present invention to provide a powder beam processing method capable of excellent processing efficiency without causing clogging.

[0010]

According to the present invention, the first object is to process a work piece by ejecting a solid-gas two-phase mixed flow of powder and gas as a powder beam onto the work piece. In the powder beam processing apparatus, a solid-gas mixing means for mixing powder and high-pressure fluid into a solid-gas two-phase mixed flow and a solid-gas two-phase mixed flow mixed by the solid-gas mixing means are accelerated to accelerate flow. It is achieved by a powder beam processing device including a first nozzle that ejects as a powder beam and a second nozzle that excites the accelerated flow that is ejected from the first nozzle as a powder beam.

Further, it is achieved by the second nozzle making the accelerating flow ejected from the first nozzle into a parallel flow and vibrating it to eject it as a powder beam.

Further, a second object is a powder beam processing method for processing a workpiece by jetting a solid-gas two-phase mixed flow of powder and gas as a powder beam onto the workpiece. Generated by the accelerating step, and the accelerating step of accelerating the solid-gas two-phase mixed flow mixed by the solid-gas mixing step into an accelerating flow. And a vibrating step of vibrating the accelerated flow into a powder beam.

Further, the vibrating step is achieved by making the accelerating flow generated in the accelerating step into a parallel flow and vibrating it into a powder beam.

[0014]

According to the above construction, the powder and the high-pressure fluid are mixed by the solid-gas mixing means to form a solid-gas two-phase mixed flow, and the mixed solid-gas two-phase mixed flow is accelerated by the first nozzle. Ejects as an accelerated flow. The acceleration flow ejected from the first nozzle is vibrated by the second nozzle and ejected as a powder beam onto the workpiece.

Therefore, the solid-gas two-phase mixed flow accelerated by the first nozzle is vibrated by the second nozzle to form a uniformly dispersed powder beam without agglomeration and adhesion. As a result, it is possible to jet a uniformly dispersed powder beam at high speed, and it is possible to perform processing with uniform surface accuracy and surface roughness of the surface to be processed with high accuracy, and to reduce the hole diameter of the jet nozzle. However, clogging does not occur.

Further, if the second nozzle makes the accelerating flow ejected from the first nozzle a parallel flow and vibrates it to eject it as a powder beam, the powder beam can be made more uniform. Therefore, it is possible to further improve the surface accuracy and the surface roughness of the surface to be processed.

According to the above powder beam processing method, first, the powder and the high-pressure fluid are mixed in the solid-gas mixing step to form a solid-gas two-phase mixed flow, and the solid-gas two-phase mixed flow is accelerated in the accelerating step. And make it an accelerated flow. Next, the accelerating flow generated by the accelerating step is oscillated by the oscillating step to be ejected as a powder beam onto the workpiece.

Therefore, the solid gas 2 accelerated in the acceleration process
The phase-mixed flow is vibrated in the vibrating step, and becomes a uniformly dispersed powder beam without agglomerating and adhering. As a result, a uniformly dispersed powder beam can be jetted onto the workpiece at high speed, which enables precise machining of the surface precision and surface roughness of the surface to be machined, and the hole diameter of the jet nozzle. Even if is set to a small value, clogging does not occur.

Further, by virtue of the vibrating step, the accelerating flow generated in the accelerating step is made into a parallel flow, and by vibrating it into a powder beam, the powder beam can be made more uniform.

[0020]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT A preferred embodiment of the present invention will be described below in detail with reference to the accompanying drawings. It should be noted that the examples described below are suitable specific examples of the present invention, and therefore, various technically preferable limitations are attached thereto, but the scope of the present invention particularly limits the present invention in the following description. Unless otherwise stated, the present invention is not limited to these modes.

1 to 3 are views showing a powder beam processing apparatus and a powder beam processing method according to an embodiment of the present invention, and FIG. 1 is a front sectional view of the powder beam processing apparatus,
2 is a sectional view taken along the line AA of FIG. 1, and FIG. 3 is a front enlarged sectional view of the second nozzle.

In FIG. 1, a powder beam processing apparatus 1
Is equipped with a solid-gas two-phase mixed flow carrier pipe 2. Solid-gas two-phase mixture flow conveying pipe 2, for example, it is formed of ceramics such as Al ₂ 0 _3, the circular cross section of the conveying path 3 is formed in a cylindrical shape at its center.

A suction nozzle 4 is connected to one end of the solid-gas two-phase mixed flow carrier pipe 2 by screw fastening, and the screw fastening portion is sealed with a sealant. A fluid supply pipe 5 is connected to the suction nozzle 4 by screw fastening with a sealant applied, and the fluid supply pipe 5 is provided with a cylindrical supply passage 6 having a circular cross section at the center thereof. There is.
The fluid supply pipe 5 is made of, for example, stainless steel, and a high pressure fluid (for example, 1-1
0 kg / cm ² of air, dry nitrogen, or the like) is supplied to the solid-gas two-phase mixed flow carrier pipe 2 via the suction nozzle 4.

Further, a fine particle supply pipe 7 is connected to a side portion on one end side of the solid-gas two-phase mixed flow carrier pipe 2 by screw fastening coated with a sealant. The fine particle supply pipe 7 is, for example, , Made of stainless steel. The fine particle supply pipe 7 is formed in a cylindrical shape, and a supply passage 8 having a circular cross section is formed in the center thereof. The particle supply pipe 7 is
Powder (fine particles) is supplied to the solid-gas two-phase mixed flow carrier pipe 2 through the supply passage 8.

As the powder, Al ₂ O ₃ , SiC, T
Inorganic materials such as iC, SiO ₂ , Si ₃ N ₄ , Al ₂ O ₃ .TiC and diamond, Au, Ag, Cu, Al, S
Metal materials such as n, Pb, Fe, Co, Cr, Ni and P,
Alternatively, contained alloy materials and organic materials such as polyethylene, polystyrene, polyimide and PMMA are used.

Therefore, the solid-gas two-phase mixed flow carrier pipe 2, the suction nozzle 4, the fluid supply pipe 5 and the fine particle supply pipe 7 are provided.
Constitutes a solid-gas mixing means for mixing the powder and the high-pressure fluid as a whole to form a solid-gas two-phase mixed flow.

At the other end of the solid-gas two-phase mixed flow carrier pipe 2, a first
The nozzles 9 are connected by screw fastening with a sealant applied, and the first nozzles 9 are made of ceramics such as Al ₂ O ₃ . The first nozzle 9 has an accelerating tube section 10.
The accelerating pipe portion 10 has a diameter from the diameter of the solid-gas two-phase mixed flow carrier pipe 2 to the nozzle portion 11.
It has a conical shape that decreases to the pipe diameter. Also, the first
The nozzle 9 has a fitting portion 12 formed at its tip.

The fitting portion 12 of the first nozzle 9 is provided.
And the second nozzle 13 is connected by fitting,
As shown in FIGS. 2 and 3, the nozzle 13 has a vibrating portion 16 sandwiched between a cylindrical inner tube 14 and an outer tube 15.
The inner pipe 14 has a nozzle portion 14a formed in the center thereof, and the nozzle portion 14a is formed in a parallel passage by the inner surface of the inner pipe 14. The vibration unit 16 is formed by sandwiching a phosphor bronze electrode plate 19 between two piezoelectric ceramic plates 17 and 18, and further sandwiching the outer surfaces of the two piezoelectric ceramic plates 17 and 18 with electrode plates 20 and 21. For example, PZT is used as the material of the piezoelectric ceramic plate.

A lead wire 22 is connected to the central electrode plate 19, and the two outer electrode plates 20 and 21 are connected to each other.
The lead wire 23 is connected. The lead wire 22 and the lead wire 23 are drawn out to the outside through a lead wire escape groove 9a formed in the first nozzle 9.

As described above, since the suction nozzle 4 is attached to one end of the solid-gas two-phase mixed flow transfer pipe 2 and the first nozzle 9 and the second nozzle 13 are attached to the other end, the suction nozzle 4 is attached. Directs the solid-gas two-phase mixed flow toward the first nozzle 9 and the second nozzle 13, and after the gas flow ejected from the suction nozzle 4 is accelerated by the first nozzle 9, It passes and is ejected to the outside. At this time, when a predetermined voltage having a predetermined frequency is applied via the lead wires 22 and 23, the vibrating section 16 vibrates, vibrates the inner pipe 14, and the inner pipe 14 is vibrated. Thereby, the powder of the solid-gas two-phase mixed flow flowing in the inner pipe 14 is vibrated.

Next, an example of the powder beam processing method will be described by explaining the operation of the above apparatus. To process a workpiece using the powder beam processing apparatus 1, first, a high-pressure fluid is supplied to the supply path 6 of the fluid supply pipe 5, and the high-pressure fluid is passed through the suction nozzle 4 and solid-phase two-phase. It is jetted into the conveying path 3 of the mixed flow conveying pipe 2.

When high-pressure gas is ejected from the suction nozzle 4 into the carrier passage 3, the part of the supply passage 8 formed in the fine particle supply pipe 7 that communicates with the carrier passage 3 becomes negative pressure, and the fine particle supply pipe 7 is pulverized. The (fine particles) are supplied into the carrier path 3 of the solid-gas two-phase mixed flow carrier pipe 2.

The powder supplied from the fine particle supply pipe 7 is sucked by the high-pressure fluid ejected from the fluid supply pipe 5, mixed and dispersed in the carrier passage 3 of the solid-gas two-phase mixed flow carrier pipe 2, As a solid-gas two-phase mixed flow, the first nozzle 9 is formed in the conveyance path 3.
Be transported to.

In the first nozzle 9, the solid-gas two-phase mixed flow is accelerated by the conical accelerating tube section 10 to become an accelerating flow,
Flowing through the nozzle portion 11 of the first nozzle 9, the second nozzle 13
Flow to.

In the second nozzle 13, the lead wires 22,
23, a predetermined frequency (for example, 20
KHz to 120 KHz) predetermined voltage (for example, 60 to 2)
00 V) is applied, and when this voltage is applied, the vibrating section 16 vibrates the piezoelectric ceramic plates 17 and 18 to vibrate the inner tube 14 of the vibrating section 16. Inner tube 14
When the powder vibrates, the powder of the solid-gas two-phase mixed flow that flows through the nozzle portion 14a formed by the inner pipe 14 is vibrated, and the powders are uniformly dispersed without agglomerating and adhering, and the workpiece is discharged from the nozzle portion 14a. Is sprayed as a powder beam on the surface to be processed.

In particular, the nozzle portion 14a formed by the inner tube 14
Are parallel passages, the solid-gas two-phase mixed flow passing through the nozzle portion 14a can be made into a parallel flow, and the powder can be evenly dispersed in parallel, and the powder beam can be made more uniform. it can.

Here, the diameter of the nozzle portion 14a is 3 mm or less, and the powder beam from the nozzle portion 14a is 40 m /
By jetting onto the surface to be processed at a high speed of s or more, fine processing of the work can be appropriately performed.

When a powder having a particle size of 1 μm or less is used and a powder beam is jetted onto a surface to be processed at a flow rate of 80 to 200 m / s, the object to be processed is deposited (adhesion processing) by the powder beam. be able to.

Furthermore, when a powder beam having a particle size of 1 μm or more is used and the powder beam is jetted onto the surface to be processed at a flow rate of 40 to 80 m / s, the object to be processed is etched (removed) by the powder beam. be able to.

As described above, the powder beam can be jetted at high speed without the powder agglomerating and adhering, and the surface accuracy and the surface roughness can be processed with high accuracy. Even if the hole diameter of the ejection nozzle is reduced, clogging does not occur, and the life of the ejection nozzle is long, and a powder beam machining apparatus with good machining efficiency can be provided.

Further, since the solid-gas two-phase mixed flow is made into a parallel flow by the second nozzle 13, a more uniform powder beam can be ejected, and further fine processing can be facilitated.

Further, by appropriately setting the particle size and flow velocity of the powder and the diameter of the second nozzle 13, the work piece can be deposited and etched by the powder beam, and the surface structure of the work surface can be obtained. It is possible to easily perform fine processing with good surface properties.

Therefore, microdevices such as recording / reproducing devices such as magnetic disks, optical disks and flying heads, micromachines such as electrostatic motors, fluid pumps, gears, levers and bearings, and artificial reality system elements such as tactile gloves. It can be applied to fine processing, and the utility of the powder beam processing apparatus 1 and the powder beam processing method can be improved.

[0044]

As described above, with the powder beam processing apparatus according to the present invention, it is possible to jet a uniformly dispersed powder beam at high speed without agglomerating and adhering the powder. A powder beam processing device that can perform uniform processing with high accuracy, does not cause clogging even if the hole diameter of the ejection nozzle is small, has a long ejection nozzle life, and has good machining efficiency. Can be provided. Also, with this powder beam processing method, it is possible to jet a parallel and evenly dispersed powder beam at high speed without agglomerating and adhering powder, and perform processing with uniform surface accuracy and surface roughness with high accuracy. In addition, it is possible to achieve good processing efficiency without causing clogging.

[Brief description of drawings]

FIG. 1 is a front sectional view of a powder beam processing apparatus according to an embodiment of a powder beam processing apparatus and a powder beam processing method according to the present invention.

FIG. 2 is a sectional view taken along the line AA of FIG.

FIG. 3 is an enlarged front sectional view of a second nozzle.

FIG. 4 is a front sectional view showing an example of a conventional powder beam processing apparatus.

[Explanation of symbols]

 1 Powder Beam Processing Device 2 Solid-Gas Two-Phase Mixed Flow Conveying Pipe 3 Conveying Passage 4 Suction Nozzle 5 Fluid Supply Pipe 6 Supplying Passage 7 Fine Particle Supplying Pipe 8 Supplying Passage 9 First Nozzle 10 Acceleration Pipe 11 Nozzle 13 Second Nozzle 14 Inner tube 15 Outer tube 16 Excitation part 17,18 Piezoelectric ceramic plate 19,20,21 Electrode plate 22,23 Lead wire

Claims (4)

[Claims] 1. A powder beam processing apparatus for processing a workpiece by jetting a solid-gas two-phase mixed flow of powder and gas as a powder beam onto the workpiece, wherein the powder and the high-pressure fluid are mixed and solidified. The solid-gas mixing means for forming a gas-two-phase mixed flow, the first nozzle for accelerating the solid-gas two-phase mixed flow mixed by the solid-gas mixing means and ejecting the accelerated flow, and the accelerating flow ejected by the first nozzle A powder beam processing apparatus, comprising: a second nozzle that vibrates and ejects as a powder beam. 2. The second nozzle is characterized in that the acceleration flow ejected from the first nozzle is made into a parallel flow and is vibrated and ejected as a powder beam.
The described powder beam processing equipment. 3. A powder beam processing method for processing a workpiece by jetting a solid-gas two-phase mixed flow of powder and gas as a powder beam onto the workpiece, wherein the powder and the high-pressure fluid are mixed and solidified. A solid-gas mixing process for forming a gas-two-phase mixed flow, an acceleration process for accelerating the solid-gas two-phase mixed flow mixed by the solid-gas mixing process into an accelerating flow, and an accelerating flow generated by the accelerating process. And a vibrating step of forming a powder beam.
Powder beam processing method. 4. The powder beam processing method according to claim 3, wherein in the vibrating step, the accelerating flow generated in the accelerating step is made into a parallel flow and vibrated into a powder beam.