JPH05272674A - Bellows - Google Patents
BellowsInfo
- Publication number
- JPH05272674A JPH05272674A JP4074664A JP7466492A JPH05272674A JP H05272674 A JPH05272674 A JP H05272674A JP 4074664 A JP4074664 A JP 4074664A JP 7466492 A JP7466492 A JP 7466492A JP H05272674 A JPH05272674 A JP H05272674A
- Authority
- JP
- Japan
- Prior art keywords
- bellows
- circumferential direction
- flange
- ribs
- thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Joints Allowing Movement (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、真空容器や気体・液体
の配管の一部をなす柔軟な可撓構造のベローズに関する
ものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a bellows having a flexible structure which is a part of a vacuum container or a pipe for gas or liquid.
【0002】[0002]
【従来の技術】図4は従来のベローズの上面図、図5は
同じく一部断面概略図を示すもので、図中、1は円筒、
2はひだ、3はフランジ、4は気密接合材である。この
ベローズは、薄肉の金属からなる円筒1に軸線方向の断
面が波形のひだ2を連続して形成してなり、その両端に
フランジ3を気密接合材4で固着して用いるのが一般的
である。2. Description of the Related Art FIG. 4 is a top view of a conventional bellows, and FIG. 5 is a schematic partial sectional view thereof, in which 1 is a cylinder,
2 is a fold, 3 is a flange, and 4 is an airtight joining material. This bellows is generally formed by continuously forming a corrugated fold 2 having a corrugated section in the axial direction on a cylinder 1 made of a thin metal, and a flange 3 is fixed to both ends of the fold 2 with an airtight bonding material 4. is there.
【0003】このベローズでは、外力によってひだ2の
部分が軸線方向、即ち長さ方向に撓み伸縮することがで
きるほか、軸線方向に対する曲げ、両端の軸線が互いに
平行にずれる撓み方が可能であり、バネ材を用いたもの
は復元性がある。In this bellows, the pleats 2 can be flexed and expanded and contracted in the axial direction, that is, the lengthwise direction by an external force, and the bellows can be bent in the axial direction and flexed so that the axial lines at both ends are displaced from each other. The one using the spring material has a restoring property.
【0004】このような機能があるため、真空容器や気
体・液体の管路における自在継手あるいはダンパ構成部
品等の広い用途に使用されている。Because of such a function, it is used in a wide variety of applications such as a universal joint or a damper component in a vacuum container or a gas / liquid conduit.
【0005】ひだ2の他の構造としては、2枚の円環板
の外周あるいは内周を溶接して1個のひだ2を形成し、
これを連ねて溶接したものがあり、変形の柔軟性という
点では成形品に優る。また、円環板の材質としてはゴム
や高分子素材等が用いられている。As another structure of the pleat 2, one pleat 2 is formed by welding the outer circumference or the inner circumference of two annular plates.
Some of these are welded in series, which is superior to molded products in terms of flexibility of deformation. Further, rubber or polymer material is used as the material of the annular plate.
【0006】[0006]
【発明が解決しようとする課題】しかしながら、何れの
ベローズも構造上円周方向のねじれ変形が不可能である
ため、円周方向に回転をなすような動きには追従するこ
とができず、撓み方に制限があるという問題点があっ
た。However, since any of the bellows is structurally incapable of being twisted and deformed in the circumferential direction, it is not possible to follow the movement of rotating in the circumferential direction, and the flexure There was a problem that there was a limit to one.
【0007】本発明は前記問題点に鑑みてなされたもの
であり、その目的とするところは、円周方向に回転をな
すようなねじれ変形を可能とするベローズを提供するこ
とにある。The present invention has been made in view of the above problems, and an object of the present invention is to provide a bellows which can be twisted and deformed so as to rotate in a circumferential direction.
【0008】[0008]
【課題を解決するための手段】本発明は前記目的を達成
するために、請求項1では、円筒軸の方向につづら折り
をなす薄肉の可撓部を円周方向に連続して形成してい
る。In order to achieve the above-mentioned object, the present invention provides, in claim 1, thin-walled flexible portions which are folded in a zigzag direction in the direction of the cylinder axis and are continuously formed in the circumferential direction. .
【0009】また、請求項2では、請求項1記載のベロ
ーズに円筒軸の方向に伸縮可能なベローズを連結してい
る。According to a second aspect of the present invention, the bellows according to the first aspect is connected to a bellows which can expand and contract in the direction of the cylindrical axis.
【0010】[0010]
【作用】請求項1のベローズによれば、円周方向の外力
が加わると、可撓部がつづら折りの折り点によって方向
付けされた撓み方向へねじれながら撓み、ねじり反力が
吸収される。According to the bellows of the first aspect, when an external force is applied in the circumferential direction, the flexible portion is bent while being twisted in the bending direction directed by the folding point of the zigzag, and the twisting reaction force is absorbed.
【0011】また、請求項1のベローズによれば、請求
項1のベローズに連結した円筒軸の方向に伸縮可能なベ
ローズにより、請求項1のベローズが撓むときにねじれ
によって生ずる自らの全長の変化が吸収される。According to the bellows of claim 1, the bellows which is connected to the bellows of claim 1 and is capable of expanding and contracting in the direction of the cylindrical axis allows the bellows of claim 1 to have its own entire length caused by twisting when it flexes. Change is absorbed.
【0012】[0012]
【実施例】図1及び図2は本発明の一実施例を示すもの
で、図1はベローズの一部破断上面図、図2はその側面
図である。1 and 2 show an embodiment of the present invention. FIG. 1 is a partially cutaway top view of a bellows, and FIG. 2 is a side view thereof.
【0013】同図に示したベローズは、図1の破断部分
に示すように鋸歯状の断面を有する薄肉のひだ5を円筒
軸の方向につづら折りに形成し、これを円周方向に連続
して配列して可撓部6を形成し、その両端にはフランジ
7をそれぞれ気密接合材8で固着している。各フランジ
7にはボルト挿通孔7aが円周方向の計4箇所に設けら
れ、このボルト挿通孔7aは相手部品と結合するとき必
要に応じて用いる。また、各フランジ7には気密シール
材9がそれぞれ貼着され、相手部品と結合した後の気密
性を維持できるようになっている。In the bellows shown in the figure, thin folds 5 having a saw-tooth cross section are formed in a zigzag shape in the direction of the cylinder axis as shown in the broken portion in FIG. The flexible portions 6 are arranged to form the flexible portions 6, and the flanges 7 are fixed to both ends of the flexible portions 6 by the airtight bonding material 8. Bolt insertion holes 7a are provided in each flange 7 at a total of four positions in the circumferential direction, and the bolt insertion holes 7a are used as necessary when connecting with a mating component. Further, an airtight sealing material 9 is attached to each of the flanges 7 so that the airtightness after being combined with the mating parts can be maintained.
【0014】このような構造であるから、上方のフラン
ジ7に例えば図1の矢印で示す円周方向の外力が加わる
と、ひだ5がつづら折りの折り点10によって方向付け
された撓み方向にそれぞれ撓み、ねじり反力が吸収され
る。また、折り点10が屈曲部となって軸線方向に対す
る多少の曲げも可能である。With such a structure, when an external force is applied to the upper flange 7 in the circumferential direction, for example, as shown by the arrow in FIG. 1, the pleats 5 are respectively bent in the bending directions directed by the folding points 10 of the zigzag fold. , The torsion reaction force is absorbed. Further, the folding point 10 serves as a bent portion, so that it can be bent to some extent in the axial direction.
【0015】ところで、フランジ7が回転可能な角度
は、つづら折りの角度、折り点10の段数、ひだ5の寸
法(幅、長さ)及び配列数によって異なる。例えば、本
実施例のように折り点10の段数が2段の場合、可撓部
6の外径を65mm、山折り側のひだ5が折り点10で
なす角度を120°、ひだ5の長さを35mm、その配
列数を10とした場合、フランジ7の回転可能な角度は
約35°である。The angle at which the flange 7 can be rotated depends on the angle of folding, the number of folding points 10, the size (width, length) of the pleats 5, and the number of arrangements. For example, when the number of folding points 10 is two as in the present embodiment, the outer diameter of the flexible portion 6 is 65 mm, the angle formed by the folds 5 on the mountain folding side at the folding points 10 is 120 °, and the length of the folds 5 is long. When the height is 35 mm and the number of arrangements is 10, the rotatable angle of the flange 7 is about 35 °.
【0016】可撓部6の製作方法としては、ひだ5を薄
板溶接で形成する方法、薄円筒にひだ5を成型する方
法、或いは薄平板にひだ5を成型したのち円筒状に溶接
する方法がある。As the method of manufacturing the flexible portion 6, a method of forming the pleats 5 by thin plate welding, a method of forming the pleats 5 on a thin cylinder, or a method of forming the pleats 5 on a thin flat plate and then welding them in a cylindrical shape. is there.
【0017】図3は本発明の他の実施例を示すもので、
前記実施例の従来例と同様の伸縮ベローズを連結したも
のである。FIG. 3 shows another embodiment of the present invention.
The same expansion and contraction bellows as in the conventional example of the above embodiment are connected.
【0018】即ち、11は円筒軸の方向に伸縮可能な円
筒で、軸線方向に波形のひだ12を連続して形成したも
のである。この円筒1の一端は前記ベローズのフランジ
7に気密接合材8で固着され、その他端には気密シール
材9を有するフランジ7が気密接合材8で固着されてい
る。That is, 11 is a cylinder which can expand and contract in the direction of the cylinder axis, and is formed by continuously forming corrugated folds 12 in the axial direction. One end of the cylinder 1 is fixed to the flange 7 of the bellows with an airtight joining material 8, and the other end is fixed with a flange 7 having an airtight sealing material 9 with the airtight joining material 8.
【0019】このような構成により、前記実施例のベロ
ーズによる円周方向のねじれ変形に加え、軸線方向に対
する曲げ、両端の軸線が互いに平行にずれる撓み方が可
能になり、前記実施例のベローズが撓むときにねじれに
よって生ずる自らの全長の変化を円筒1の伸縮によって
吸収することができる。従って、ベローズ全長の変化が
制限されるような空間部へ組込んで使用することができ
る。With this structure, in addition to the torsional deformation in the circumferential direction by the bellows of the above-described embodiment, bending in the axial direction and bending so that the axes of both ends are displaced from each other are possible. It is possible to absorb the change in the entire length of the cylinder 1 caused by the twist when the cylinder 1 bends by the expansion and contraction of the cylinder 1. Therefore, the bellows can be used by incorporating it in a space where the change in the total length of the bellows is limited.
【0020】尚、本実施例では前記実施例のベローズと
従来の伸縮ベローズとを各々1個ずつ組み合わせたもの
を示したが、前記実施例のベローズを従来の伸縮ベロー
ズの両端に連結したり、或いは従来の伸縮ベローズを前
記実施例のベローズの両端に連結してもよく、組み合わ
せの展開ができる。また、前記実施例のベローズを複数
個つなげることにより回転角度を大きくすることも可能
である。In this embodiment, the bellows of the above embodiment and the conventional expandable bellows are combined one by one, but the bellows of the above embodiment is connected to both ends of the conventional expandable bellows. Alternatively, a conventional expandable bellows may be connected to both ends of the bellows of the above embodiment, and the combination can be developed. It is also possible to increase the rotation angle by connecting the plurality of bellows of the above embodiment.
【0021】[0021]
【発明の効果】以上説明したように、請求項1のベロー
ズによれば、一般の真空容器や気体・液体の管路におけ
る自在継手などに適用した場合、伸縮方向の変形に加え
て円周方向に撓ませることができるので、ベローズとし
ての自在性が大幅に向上するとともに、接続に際しての
位置合わせも容易になる。また、このような構造である
から、真空雰囲気での素子実装を可能とした光学素子の
ボンディング装置(特願平4−54982号等)との組
合わせにより、素子保持用のピンセット導入孔部分に組
付けて使用すると特に有効である。As described above, according to the bellows of the first aspect, when applied to a general vacuum container or a universal joint in a gas / liquid pipeline, in addition to the deformation in the expansion / contraction direction, the circumferential direction The flexibility as a bellows is greatly improved and the positioning at the time of connection becomes easy. Further, because of such a structure, by combining with an optical element bonding device (Japanese Patent Application No. 4-54982, etc.) capable of mounting the element in a vacuum atmosphere, the tweezers introduction hole portion for holding the element is provided. It is especially effective when used by assembling.
【0022】また、請求項2のベローズによれば、請求
項1の効果を達成し得るとともに、請求項1のベローズ
が撓むときにねじれによって生ずる自らの全長の変化を
吸収することができるので、ベローズ全長の変化が制限
されるような空間部へ組込んで使用することもできる。According to the bellows of the second aspect, the effect of the first aspect can be achieved, and at the same time, when the bellows of the first aspect flexes, it is possible to absorb a change in the entire length of the bellows itself caused by twisting. It can also be used by incorporating it into a space where the change in the overall length of the bellows is limited.
【図1】本発明の一実施例を示すベローズの一部破断上
面図FIG. 1 is a partially cutaway top view of a bellows showing an embodiment of the present invention.
【図2】ベローズの側面図[Figure 2] Side view of bellows
【図3】本発明の他の実施例を示すベローズの側面図FIG. 3 is a side view of a bellows showing another embodiment of the present invention.
【図4】従来例を示すベローズの上面図FIG. 4 is a top view of a bellows showing a conventional example.
【図5】従来例を示すベローズの一部断面概略図FIG. 5 is a partial cross-sectional schematic view of a bellows showing a conventional example.
6…可撓部、11…円筒。 6 ... Flexible part, 11 ... Cylinder.
Claims (2)
可撓部を円周方向に連続して形成したことを特徴とする
ベローズ。1. A bellows, characterized in that a thin flexible portion that is folded in a zigzag direction in a cylindrical axis is continuously formed in a circumferential direction.
に伸縮可能なベローズを連結したことを特徴とするベロ
ーズ。2. A bellows, wherein the bellows according to claim 1 is connected to a bellows which is expandable and contractable in a direction of a cylindrical axis.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4074664A JPH05272674A (en) | 1992-03-30 | 1992-03-30 | Bellows |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4074664A JPH05272674A (en) | 1992-03-30 | 1992-03-30 | Bellows |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH05272674A true JPH05272674A (en) | 1993-10-19 |
Family
ID=13553732
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4074664A Pending JPH05272674A (en) | 1992-03-30 | 1992-03-30 | Bellows |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH05272674A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003086504A (en) * | 2001-08-15 | 2003-03-20 | Asml Netherlands Bv | Lithography apparatus, device manufacturing method, and device manufactured by the same method |
WO2003089824A2 (en) * | 2002-04-16 | 2003-10-30 | Hardy David J | Corrugated pipe coupling having six degrees of freedom |
JP2013185609A (en) * | 2012-03-06 | 2013-09-19 | Chugoku Bendo Kk | Round nonmetallic bellows-type expansion joint |
-
1992
- 1992-03-30 JP JP4074664A patent/JPH05272674A/en active Pending
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003086504A (en) * | 2001-08-15 | 2003-03-20 | Asml Netherlands Bv | Lithography apparatus, device manufacturing method, and device manufactured by the same method |
WO2003089824A2 (en) * | 2002-04-16 | 2003-10-30 | Hardy David J | Corrugated pipe coupling having six degrees of freedom |
US6715799B2 (en) | 2002-04-16 | 2004-04-06 | David J. Hardy | Corrugated pipe coupling having six degrees of freedom |
WO2003089824A3 (en) * | 2002-04-16 | 2004-06-24 | David J Hardy | Corrugated pipe coupling having six degrees of freedom |
US6916049B2 (en) | 2002-04-16 | 2005-07-12 | David J. Hardy | Corrugated pipe coupling having six degrees of freedom |
JP2013185609A (en) * | 2012-03-06 | 2013-09-19 | Chugoku Bendo Kk | Round nonmetallic bellows-type expansion joint |
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