JPH05270814A - Production of silicon for solar battery - Google Patents
Production of silicon for solar batteryInfo
- Publication number
- JPH05270814A JPH05270814A JP4064639A JP6463992A JPH05270814A JP H05270814 A JPH05270814 A JP H05270814A JP 4064639 A JP4064639 A JP 4064639A JP 6463992 A JP6463992 A JP 6463992A JP H05270814 A JPH05270814 A JP H05270814A
- Authority
- JP
- Japan
- Prior art keywords
- silicon
- impurities
- treatment
- filtration
- silica
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Landscapes
- Silicon Compounds (AREA)
- Photovoltaic Devices (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、太陽電池用に使用され
る高純度シリコンの製造方法に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for producing high-purity silicon used for solar cells.
【0002】[0002]
【従来の技術】太陽電池原料となるシリコンは、不純物
の含有量が1ppm 以下の高純度シリコンが必要とされ、
このため、従来電子産業で使用される単結晶シリコンの
格外品等が使用されているが、たとえば、単結晶引上げ
時のルツボ残留物や、単結晶を基板化するときに発生す
る切断時の鋸挽きスラリー等は不純物の含有量が多く実
質的には廃棄されている。2. Description of the Related Art Silicon used as a raw material for solar cells requires high-purity silicon with an impurity content of 1 ppm or less.
For this reason, extraordinary products of single-crystal silicon used in the electronics industry have been used. For example, crucible residue when pulling a single crystal and saws used when cutting a single crystal into a substrate. The ground slurry has a large amount of impurities and is practically discarded.
【0003】これに対して、特開昭 62-252393号公報に
は、このような廃棄物の不純物を高周波プラズマとゾー
ンメルテングを組み合せた処理で除去する方法が開示さ
れているが、たとえば、SiC の除去ができないなどその
利用に限界があり、また高周波プラズマを利用するため
エネルギー効率が悪いことや生産性に問題があった。On the other hand, Japanese Unexamined Patent Publication No. 62-252393 discloses a method of removing impurities of such a waste by a combination of high frequency plasma and zone melting. There is a limit to its use, such as the inability to remove SiC, and there is a problem with poor energy efficiency and productivity due to the use of high-frequency plasma.
【0004】[0004]
【発明が解決しようとする課題】本発明の目的は、半導
体産業から排出されるシリコン廃棄物中に混入し易い不
純物を簡便に除去することのできる高純度の太陽電池用
シリコンの製造方法を提供することである。SUMMARY OF THE INVENTION It is an object of the present invention to provide a method for producing high-purity silicon for solar cells, which can easily remove impurities that are easily mixed in silicon waste discharged from the semiconductor industry. It is to be.
【0005】[0005]
【課題を解決するための手段】本発明は、太陽電池用シ
リコンの製造方法において、半導体産業で発生するシリ
コン廃棄物を出発原料として、これをまず溶融し、次い
で底部に貫通孔を有し、珪素化合物を主成分とする物質
から構成したろ過容器に珪素化合物を主成分とする物質
をフィルター材として充填したろ過装置でろ過処理し、
次いでろ過処理後に酸化処理を施し、次いで減圧処理を
施した後、一方向凝固させることを特徴とする太陽電池
用シリコンの製造方法である。The present invention relates to a method for producing silicon for solar cells, in which silicon waste generated in the semiconductor industry is used as a starting material, which is first melted and then has a through hole at the bottom, Filtration treatment is performed by a filtering device in which a substance having a silicon compound as a main component is filled as a filter material in a filtration container made of a substance having a silicon compound as a main component,
Next, the method is a method for producing silicon for a solar cell, which comprises subjecting the material to a filtration treatment, an oxidation treatment, a depressurization treatment, and a unidirectional solidification.
【0006】[0006]
【作用】半導体産業で使用される単結晶シリコン基板自
体は、太陽電池用の原料として十分な純度を有している
が、その製造工程での廃棄物は、環境からの汚染、ドー
ピングされる成分あるいは切断時の砥粒の混入等によ
り、不純物が混入しており、これを分離することが難し
いため、実際には利用されず廃棄されていた。The single crystal silicon substrate itself used in the semiconductor industry has a sufficient purity as a raw material for solar cells, but the waste in the manufacturing process is a component that is polluted from the environment and doped. Alternatively, impurities are mixed due to mixing of abrasive grains at the time of cutting, and it is difficult to separate them, so that they were not actually used and discarded.
【0007】これに対して、本発明では、まず、廃棄物
シリコンを溶融し、これをシリカ、石英等の粒子充填層
を通すことで、シリコンに混入している砥粒等に起因す
るSiC をろ過除去することができる。このろ過のより具
体的方法は本出願人が既に出願している特願平2−4085
17号公報に詳述してある。次に、ろ液を酸化処理する
が、ろ過処理中にろ過容器の底部より酸化性ガスを吹込
んでもよく、あるいはまた、ろ過後の溶融シリコンにシ
リカをライニングした容器中で水蒸気等の酸化性ガスを
吹込みながら酸化処理してもよい。この処理により単結
晶引上げ時に雰囲気から不可避に入ってくる炭素ならび
にドーピング元素として添加したボロン等を除去するこ
とができる。On the other hand, in the present invention, first, waste silicon is melted and passed through a particle packing layer of silica, quartz or the like to remove SiC caused by abrasive grains mixed in silicon. It can be filtered off. A more specific method of this filtration is disclosed in Japanese Patent Application No. 2-4085 filed by the present applicant.
It is described in detail in Japanese Patent Publication No. 17. Next, the filtrate is subjected to an oxidation treatment, but an oxidizing gas may be blown from the bottom of the filtration container during the filtration treatment, or alternatively, an oxidizing gas such as water vapor may be added in a container obtained by lining the fused silicon with silica after filtration. The oxidation treatment may be performed while blowing gas. By this treatment, it is possible to remove carbon that is inevitably entered from the atmosphere when pulling the single crystal, boron added as a doping element, and the like.
【0008】つづいて、この処理容器の雰囲気を好まし
くは10torr以下の減圧下におくことで、リン、ヒ素など
の蒸発し易い不純物が除去される。そして、一方向凝固
用の鋳型に鋳込み、一方向凝固させる。一方向凝固で
は、太陽電池として有害なFe、Al、Caなどの不純物(こ
れは、半導体用シリコン単結晶製造時に作業環境から混
入し易い元素である。)や、他の金属不純物が除かれ
る。これらの不純物は固液間の平衡分配係数が非常に小
さいため、すべて最終凝固部(全体の20%以下)に濃縮
することができる。このような処理をして得られた一方
向凝固後のシリコンインゴットの最終凝固部の頭部を約
20%切断除去することで、残部80%を太陽電池用シリコ
ンとして再生できる。Subsequently, the atmosphere of the processing container is preferably kept under a reduced pressure of 10 torr or less to remove easily evaporated impurities such as phosphorus and arsenic. Then, it is cast into a mold for unidirectional solidification and unidirectionally solidified. Unidirectional solidification removes impurities such as Fe, Al, and Ca that are harmful to solar cells (this is an element that easily mixes from the work environment during the production of silicon single crystals for semiconductors) and other metal impurities. Since these impurities have a very small equilibrium partition coefficient between solid and liquid, they can all be concentrated in the final solidification part (20% or less of the whole). About the head of the final solidification part of the unidirectionally solidified silicon ingot obtained by such treatment.
By cutting and removing 20%, the remaining 80% can be recycled as silicon for solar cells.
【0009】[0009]
実施例1 半導体用単結晶引上げ時のルツボ残留シリコンおよび切
断時に発生した鋸挽きスラリーの混合物を1480℃で溶解
し、シリカ粒子充填層を通過させたのち1570℃でシリカ
ルツボ中でAr+5%H2O の混合ガスを3時間吹込み、引
きつづいて、10torrの減圧に1時間置いてのち、1mm/
min で一方向凝固させた。このときの各工程での代表的
な不純物含有量の変化は表1のようであり、これを用い
た太陽電池では、10.2%の光電変換効率がえられた。Example 1 A mixture of residual silicon in a crucible at the time of pulling a single crystal for semiconductors and a sawing slurry generated at the time of melting was melted at 1480 ° C., passed through a silica particle packed bed, and then at 1570 ° C. in a silica crucible Ar + 5% H 2 O Blow in the mixed gas for 3 hours, and then put it under a reduced pressure of 10 torr for 1 hour, then 1 mm /
Unidirectionally solidified at min. Table 1 shows typical changes in the content of impurities in each step at this time, and a solar cell using this obtained a photoelectric conversion efficiency of 10.2%.
【0010】[0010]
【表1】 [Table 1]
【0011】[0011]
【発明の効果】従来、金属Siの精製が研究されている
が、このように産業の廃棄物を有効に処理する技術を開
発したことで、太陽電池の原料不足の問題を大きく解決
しうる道が開けた。The refining of metallic Si has been researched in the past, but the development of such a technique for effectively treating industrial wastes has the potential to greatly solve the problem of insufficient raw materials for solar cells. Opened.
Claims (1)
て、半導体産業で発生するシリコン廃棄物を出発原料と
して、これをまず溶融し、次いで底部に貫通孔を有し、
珪素化合物を主成分とする物質から構成したろ過容器に
珪素化合物を主成分とする物質をフィルター材として充
填したろ過装置でろ過処理し、次いで該ろ過処理後に酸
化処理を施し、次いで減圧処理を施した後、一方向凝固
させることを特徴とする太陽電池用シリコンの製造方
法。1. A method for producing silicon for solar cells, wherein a silicon waste generated in the semiconductor industry is used as a starting material, which is first melted and then has a through hole at the bottom,
A filtration container composed of a substance containing a silicon compound as a main component is subjected to a filtration treatment with a filtration device in which a substance containing a silicon compound as a main component is filled as a filter material, then the filtration treatment is followed by an oxidation treatment, and then a pressure reduction treatment. And then unidirectionally solidifying, a method for producing silicon for solar cells.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4064639A JPH05270814A (en) | 1992-03-23 | 1992-03-23 | Production of silicon for solar battery |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4064639A JPH05270814A (en) | 1992-03-23 | 1992-03-23 | Production of silicon for solar battery |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH05270814A true JPH05270814A (en) | 1993-10-19 |
Family
ID=13264045
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4064639A Pending JPH05270814A (en) | 1992-03-23 | 1992-03-23 | Production of silicon for solar battery |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH05270814A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0867405A1 (en) * | 1997-03-24 | 1998-09-30 | Kawasaki Steel Corporation | Method for producing silicon for use in solar cells |
JP2006240914A (en) * | 2005-03-02 | 2006-09-14 | Nippon Steel Corp | Method for removing carbon from silicon |
WO2008099717A1 (en) * | 2007-02-09 | 2008-08-21 | Kabushiki Kaisha Kobe Seiko Sho | Method of recycling scrap wafer and process for producing silicon substrate for solar cell |
JP2008247670A (en) * | 2007-03-30 | 2008-10-16 | Hayashi Shokai:Kk | Method of manufacturing high purity silicon |
US7732012B2 (en) | 2004-06-22 | 2010-06-08 | Shin-Etsu Film Co., Ltd | Method for manufacturing polycrystalline silicon, and polycrystalline silicon for solar cells manufactured by the method |
-
1992
- 1992-03-23 JP JP4064639A patent/JPH05270814A/en active Pending
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0867405A1 (en) * | 1997-03-24 | 1998-09-30 | Kawasaki Steel Corporation | Method for producing silicon for use in solar cells |
US6090361A (en) * | 1997-03-24 | 2000-07-18 | Kawasaki Steel Corporation | Method for producing silicon for use in solar cells |
US7732012B2 (en) | 2004-06-22 | 2010-06-08 | Shin-Etsu Film Co., Ltd | Method for manufacturing polycrystalline silicon, and polycrystalline silicon for solar cells manufactured by the method |
JP2006240914A (en) * | 2005-03-02 | 2006-09-14 | Nippon Steel Corp | Method for removing carbon from silicon |
WO2008099717A1 (en) * | 2007-02-09 | 2008-08-21 | Kabushiki Kaisha Kobe Seiko Sho | Method of recycling scrap wafer and process for producing silicon substrate for solar cell |
JP2008247670A (en) * | 2007-03-30 | 2008-10-16 | Hayashi Shokai:Kk | Method of manufacturing high purity silicon |
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