JPH05266793A - Exposure device for color picture tube panel - Google Patents

Exposure device for color picture tube panel

Info

Publication number
JPH05266793A
JPH05266793A JP6443092A JP6443092A JPH05266793A JP H05266793 A JPH05266793 A JP H05266793A JP 6443092 A JP6443092 A JP 6443092A JP 6443092 A JP6443092 A JP 6443092A JP H05266793 A JPH05266793 A JP H05266793A
Authority
JP
Japan
Prior art keywords
light source
glass plate
color picture
picture tube
exposure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP6443092A
Other languages
Japanese (ja)
Inventor
Masayoshi Okiyama
昌由 沖山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP6443092A priority Critical patent/JPH05266793A/en
Publication of JPH05266793A publication Critical patent/JPH05266793A/en
Withdrawn legal-status Critical Current

Links

Abstract

PURPOSE:To correct the mislanding of a rotation pattern. CONSTITUTION:In an exposure device for color picture tube panel, in which a correcting lens 11 is arranged between a panel 44 for color picture tube formed with the photoresist film and an exposing light source 33 to expose the photoresist film, an optical correcting glass plate 22, which has plural sector areas discontinuously blocked by straight lines radially extended from the center, is installed to the upper part of the light source 33. The light source 33 and the optical correcting glass plate 22 are rotated to eliminate the influence of the discontinuous surface to the panel 44 and eliminate the mislanding of the rotation pattern.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明はカラー受像管パネルの露
光装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a color picture tube panel exposure apparatus.

【0002】[0002]

【従来の技術】従来、受像管の蛍光面の形成に当たって
は、図4に示すように、ホトレジストを塗布したパネル
44をシャドウマスク45を通して露光し、所定の位置
に蛍光体層と吸光物質層を形成している。
2. Description of the Related Art Conventionally, in forming a phosphor screen of a picture tube, a panel 44 coated with photoresist is exposed through a shadow mask 45 as shown in FIG. Is forming.

【0003】このカラー受像管パネルの露光装置におけ
るレンズ系は、偏向ヨークが電子を偏向して出来る電子
ビーム軌道に光源33からの光線軌道を近似させるよう
に構成する。近似が電子ビームランディング点と露光時
のランディング点の位置のずれの許容範囲に入れば、色
再現の良好なカラー受像管が得られる。
The lens system in the exposure apparatus of this color picture tube panel is constructed so that the trajectory of the light beam from the light source 33 approximates the trajectory of the electron beam formed by the deflection yoke deflecting the electrons. If the approximation falls within the allowable range of the positional deviation between the electron beam landing point and the landing point during exposure, a color picture tube with good color reproduction can be obtained.

【0004】近年、カラー受像管の高精細化の要望が高
まりカラー受像管の蛍光面のピッチが細かくなってき
た。蛍光面のピッチが細かくなると、電子ビームランデ
ィングの許容範囲が小さくなりより精密な光線軌道の近
似が必要となってくる。電子ビームと光線軌道の違いか
ら生じるランディング位置のずれ、いわゆる、ミスラン
ディングのパターンの1つに図5に示すような回転方向
成分誤差がある。矢印はミスランディングの方向を示す
ものであり、逆方向も当然有り得る。回転方向成分を有
するミスランディングを補正するためには円周方向に傾
斜を有する補正レンズ11を用いれば良いが、その曲面
形状は必ず不連続面を有し、従来の補正レンズ11を露
光中固定したままのカラー受像管パネルの露光装置で
は、不連続面がそのままスクリーンにむらとなって現わ
れるという不具合を生じていた。
In recent years, the demand for higher definition of color picture tubes has increased, and the pitch of the fluorescent screen of the color picture tubes has become finer. As the pitch of the phosphor screen becomes finer, the allowable range of electron beam landing becomes smaller, and more precise approximation of the ray trajectory becomes necessary. One of the so-called mislanding patterns, which is a misalignment of the landing position caused by the difference between the electron beam and ray trajectories, has a rotation direction component error as shown in FIG. The arrow indicates the direction of mislanding, and the opposite direction is naturally possible. A correction lens 11 having an inclination in the circumferential direction may be used to correct a mislanding having a rotational direction component, but the curved surface shape always has a discontinuous surface, and the conventional correction lens 11 is fixed during exposure. In the exposure apparatus for the color picture tube panel as it was, there was a problem that the discontinuous surface appeared as unevenness on the screen as it was.

【0005】[0005]

【発明が解決しようとする課題】以上説明したように、
従来、回転方向成分を有するミスランディングを補正す
るレンズ系において、補正レンズ面に不連続面を有する
ものはその部分に対応するスクリーン上の場所が膜むら
を起こしてしまう。これを解決する手段としては補正レ
ンズを回転させる事が考えられるが、大口径の補正レン
ズを回転させる機構を露光装置に備えるには多額の費用
を必要とする。更に、スクリーンに比較的近い位置にあ
る為膜への影響も大きい。さらに、補正レンズでは径が
大きくなり加工費用と加工期間がかかってしまう。
As described above,
Conventionally, in a lens system that corrects mislanding having a rotational direction component, a correction lens surface having a discontinuous surface causes film unevenness at a position corresponding to that portion on the screen. As a means for solving this, it is conceivable to rotate the correction lens, but it requires a large amount of cost to equip the exposure apparatus with a mechanism for rotating the correction lens having a large aperture. Furthermore, since it is located relatively close to the screen, it greatly affects the film. Further, the correction lens has a large diameter, which requires processing cost and processing time.

【0006】本発明の目的は、加工費用と加工期間を低
減し、回転方向成分を有するミスランディングを容易に
補正できるカラー受像管パネルの露光装置を提供するこ
とにある。
An object of the present invention is to provide an exposure apparatus for a color picture tube panel which can reduce the processing cost and the processing period and can easily correct the mislanding having the rotational direction component.

【0007】[0007]

【課題を解決するための手段】本発明は内面にホトレジ
スト膜が形成されたカラー受像管パネルを載置する外囲
器と、該外囲器の底部に設けられた露光用光源と、該露
光用光源と前記パネルの中間に配置された複数の補正レ
ンズとを有し、前記露光用光源から放射された光線を前
記補正レンズを透して前記ホトレジスト膜に照射して露
光するカラー受像管の露光装置において、前記露光用光
源の前記光線の放射面に光源補正ガラス板を設け、該光
源補正ガラス板が中心部より放射状に伸びる直線によっ
て区切られた不連続面を有する複数の扇状領域を有し、
該扇状領域のそれぞれの表面上の任意の点における前記
光源補正ガラス板の底面からの厚みをZ、前記扇状領域
を区切る一不連続面と任意の点と中心を結ぶ直線とのな
す角度をθ、前記中心部から半径方向の距離をrとしf
(r)を連続函館数、中心の厚さをTとしたときに、 Z=f(r)・θ+T の関係を有し、前記露光用光源を回転させて前記ホトレ
ジストを露光する。
SUMMARY OF THE INVENTION The present invention provides an envelope for mounting a color picture tube panel having a photoresist film formed on its inner surface, an exposure light source provided at the bottom of the envelope, and the exposure. Of a color picture tube having a plurality of correction light sources arranged in the middle of the panel and a light source emitted from the light source for exposure through the correction lens and irradiating the photoresist film with light. In the exposure apparatus, a light source correction glass plate is provided on the radiation surface of the light beam of the exposure light source, and the light source correction glass plate has a plurality of fan-shaped regions having discontinuous surfaces separated by straight lines extending radially from the central portion. Then
The thickness from the bottom surface of the light source correction glass plate at an arbitrary point on each surface of the fan-shaped region is Z, and the angle formed by one discontinuous surface that divides the fan-shaped region and a straight line connecting the arbitrary point and the center is θ. , F is the radial distance from the center, and f
When (r) is the number of continuous Hakodate and the thickness of the center is T, the following relationship is satisfied: Z = f (r) · θ + T, and the exposure light source is rotated to expose the photoresist.

【0008】[0008]

【実施例】次に、本発明の実施例について図面を参照し
て説明する。
Embodiments of the present invention will now be described with reference to the drawings.

【0009】図1は本発明の一実施例の構成の概略を示
す断面図、図2は図1の光学補正ガラス板の不連続面を
示す斜視図、図3(a),(b)は図1の光学補正ガラ
ス板の構成を示す平面図及びその側面図である。
FIG. 1 is a sectional view showing the outline of the configuration of an embodiment of the present invention, FIG. 2 is a perspective view showing a discontinuous surface of the optical correction glass plate of FIG. 1, and FIGS. 3 (a) and 3 (b) are 2A and 2B are a plan view and a side view showing the configuration of the optical correction glass plate of FIG. 1.

【0010】図1に示すように、開口部1を有する外囲
器2内の底部には露光用光源33が配設され、更に、外
囲器2内には光源33側から開口部1側へ向って回転パ
ターン補正用光学補正ガラス板22,補正レンズ11が
それぞれ順次所定間隔を置いて配設されている。
As shown in FIG. 1, an exposure light source 33 is arranged at the bottom of the envelope 2 having the opening 1, and the envelope 2 is further opened from the light source 33 side to the opening 1 side. The optical correction glass plate 22 for correcting the rotation pattern and the correction lens 11 are sequentially arranged at predetermined intervals toward each other.

【0011】カラー受像管パネル44の露光に当って
は、外囲器2の開口部1を覆うようにホトレジスト膜を
形成したパネル44を載置しホトレジスト膜を露光す
る。この際、光学補正ガラス板22は、図2に示すよう
に、ガラス表面を中央部より放射状に伸びる直線によっ
て不連続に区切られた複数の扇形の扇状領域55に分け
て円周方向に傾斜を設け、扇状領域55毎に不連続面6
6を形成させ、露光時には光源33と共に回転させる。
In exposing the color picture tube panel 44, the panel 44 having a photoresist film formed thereon so as to cover the opening 1 of the envelope 2 is placed and the photoresist film is exposed. At this time, as shown in FIG. 2, the optical correction glass plate 22 is divided into a plurality of fan-shaped fan-shaped regions 55, which are discontinuously divided from each other on the glass surface by a straight line extending radially from the central portion, and is inclined in the circumferential direction. The discontinuous surface 6 is provided for each fan-shaped region 55.
6 is formed and is rotated together with the light source 33 at the time of exposure.

【0012】この光学補正ガラス板22は、図3
(a),(b)に示すように構成する。各扇状領域55
は、回転方向成分誤差補正のための傾斜を有していて、
各扇状領域55間は不連続面66によって区切られてい
る。光学補正ガラス板22の曲面は、各扇状領域55毎
に、 Z=f(r)・θ+T で表わされる。
This optical correction glass plate 22 is shown in FIG.
It is configured as shown in (a) and (b). Each fan-shaped area 55
Has an inclination for correcting the rotational direction component error,
The fan-shaped regions 55 are separated from each other by a discontinuous surface 66. The curved surface of the optical correction glass plate 22 is represented by Z = f (r) · θ + T for each fan-shaped region 55.

【0013】ここで、Zは光学補正ガラス板の表面の高
さ,Tはその中心の厚さ,rは中心から半径方向の距離
を表わし、f(r)は半径方向についての関数である。
Here, Z is the height of the surface of the optical correction glass plate, T is the thickness of its center, r is the radial distance from the center, and f (r) is a function in the radial direction.

【0014】このような光学補正ガラス板22は、不連
続面66の影響を無くすために、パネル44に対して回
転させて使用する。回転させても不連続面66の影響の
出易い光学補正ガラス板22の中心部は、f(r)を、
r→0のときf(r)→0とすることで、不連続面66
の影響を軽減出来た。
Such an optical correction glass plate 22 is used by rotating it with respect to the panel 44 in order to eliminate the influence of the discontinuous surface 66. Even if rotated, the central portion of the optical correction glass plate 22 where the influence of the discontinuous surface 66 is likely to appear is f (r)
By setting f (r) → 0 when r → 0, the discontinuous surface 66
I was able to reduce the effect of.

【0015】f(r)が定数の場合は、光学補正ガラス
板22は、単純な型による加工で実現され、安価であっ
てその効果は大きい。
When f (r) is a constant, the optical correction glass plate 22 is realized by processing with a simple die, is inexpensive, and has a great effect.

【0016】また、不連続面を多量に分割すれば、隣接
する扇状領域55の段差が小さくなる為、不連続面66
に当る露光光線の散乱が少なく良質の露光が可能である
が、光学補正ガラス板22の加工が難しく、分割数が増
す程コストが上るため、分割数が少なく比較的光線の散
乱が少ない条件で光源の回転を組合せて良質の露光が行
なわれる分割数は、8分割が適当である。
Further, if the discontinuous surface is divided into a large number, the step difference between the adjacent fan-shaped regions 55 becomes small, and therefore the discontinuous surface 66.
It is possible to perform high-quality exposure with less scattering of the exposure light rays, but it is difficult to process the optical correction glass plate 22 and the cost increases as the number of divisions increases. It is appropriate that the number of divisions in which high-quality exposure is performed by combining the rotation of the light source is 8 divisions.

【0017】[0017]

【発明の効果】以上説明したように本発明は、回転方向
成分誤差補正用光学補正ガラス板を回転させて用いるこ
とにより、従来のカラー受像管パネルの露光装置では解
決困難であった回転方向成分のミスランディングを容易
に補正する事が出来、又、補正レンズに比べ光源に近い
ため不連続面の影響も小さく出来、従来から使われてい
る回転露光装置の光源に装着するので補正レンズの回転
機構を新たに付加する必要もなく、さらに、補正レンズ
に比べ径が小さいので、光学補正ガラス板作成にかかる
費用と期間も低減することが出来る効果がある。
As described above, according to the present invention, by rotating the optical correction glass plate for correcting the rotational direction component error, the rotational direction component which is difficult to be solved by the conventional exposure apparatus for the color picture tube panel is used. Mis-landing can be easily corrected, and the effect of the discontinuous surface can be reduced because it is closer to the light source than the correction lens, and the rotation of the correction lens can be done by mounting it on the light source of the conventional rotary exposure device. There is no need to newly add a mechanism, and since the diameter is smaller than that of the correction lens, there is an effect that the cost and period required for producing the optical correction glass plate can be reduced.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例の構成の概略を示す断面図で
ある。
FIG. 1 is a sectional view showing the outline of the configuration of an embodiment of the present invention.

【図2】図1の光学補正ガラス板の不連続面を示す斜視
図である。
FIG. 2 is a perspective view showing a discontinuous surface of the optical correction glass plate of FIG.

【図3】図1の光学補正ガラス板の構成を示す平面図及
びその側面図である。
3A and 3B are a plan view and a side view showing the configuration of the optical correction glass plate of FIG.

【図4】従来のカラー受像管パネルの露光装置の一例の
構成の概略を説明する断面図である。
FIG. 4 is a cross-sectional view illustrating the outline of the configuration of an example of a conventional exposure apparatus for a color picture tube panel.

【図5】ミスランディングの回転方向成分の一例を示す
平面図である。
FIG. 5 is a plan view showing an example of a rotational direction component of mislanding.

【符号の説明】[Explanation of symbols]

1 開口部 2 外囲器 11 補正レンズ 22 光学補正ガラス板 33 光源 44 パネル 45 シャドウマスク 55 扇状領域 66 不連続面 1 Aperture 2 Envelope 11 Correction Lens 22 Optical Correction Glass Plate 33 Light Source 44 Panel 45 Shadow Mask 55 Fan-shaped Area 66 Discontinuous Surface

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 内面にホトレジスト膜が形成されたカラ
ー受像管パネルを載置する外囲器と、該外囲器の底部に
設けられた露光用光源と、該露光用光源と前記パネルの
中間に配置された複数の補正レンズとを有し、前記露光
用光源から放射された光線を前記補正レンズを透して前
記ホトレジスト膜に照射して露光するカラー受像管の露
光装置において、前記露光用光源の前記光線の放射面に
光源補正ガラス板を設け、該光源補正ガラス板が中心部
より放射状に伸びる直線によって区切られた不連続面を
有する複数の扇状領域を有し、該扇状領域のそれぞれの
表面上の任意の点における前記光源補正ガラス板の底面
からの厚みをZ、前記扇状領域を区切る一不連続面と任
意の点と中心を結ぶ直線とのなす角度をθ、前記中心部
から半径方向の距離をrとしf(r)を連続函館数、中
心の厚さをTとしたときに、 Z=f(r)・θ+T の関係を有し、前記露光用光源を回転させて前記ホトレ
ジストを露光することを特徴とするカラー受像管パネル
の露光装置。
1. An envelope for mounting a color picture tube panel having a photoresist film formed on its inner surface, an exposure light source provided at the bottom of the envelope, and an intermediate between the exposure light source and the panel. And a plurality of correction lenses arranged in the exposure light source for irradiating the photoresist film with the light emitted from the light source for exposure through the correction lenses to expose the photoresist film. A light source correction glass plate is provided on the emission surface of the light beam of the light source, and the light source correction glass plate has a plurality of fan-shaped regions having discontinuous surfaces separated by straight lines extending radially from the center, and each of the fan-shaped regions. Z is the thickness from the bottom surface of the light source correction glass plate at any point on the surface of, and the angle between the one discontinuous surface dividing the fan-shaped region and a straight line connecting the center with the angle θ is from the central portion. Radial distance When f is the number of continuous Hakodates and r is the thickness of the center, and T is the number of continuous Hakodates, the relationship of Z = f (r) · θ + T is established, and the exposure light source is rotated to expose the photoresist. An exposure device for a color picture tube panel.
【請求項2】 前記f(r)が定数であることを特徴と
する請求項1記載のカラー受像管パネルの露光装置。
2. The exposure apparatus for a color picture tube panel according to claim 1, wherein the f (r) is a constant.
【請求項3】 前記光学補正ガラス板が8分割された扇
状領域によって構成されていることを特徴とする請求項
1記載のカラー受像管パネルの露光装置。
3. An exposure apparatus for a color picture tube panel according to claim 1, wherein said optical correction glass plate is composed of eight divided fan-shaped regions.
JP6443092A 1992-03-23 1992-03-23 Exposure device for color picture tube panel Withdrawn JPH05266793A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6443092A JPH05266793A (en) 1992-03-23 1992-03-23 Exposure device for color picture tube panel

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6443092A JPH05266793A (en) 1992-03-23 1992-03-23 Exposure device for color picture tube panel

Publications (1)

Publication Number Publication Date
JPH05266793A true JPH05266793A (en) 1993-10-15

Family

ID=13258055

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6443092A Withdrawn JPH05266793A (en) 1992-03-23 1992-03-23 Exposure device for color picture tube panel

Country Status (1)

Country Link
JP (1) JPH05266793A (en)

Similar Documents

Publication Publication Date Title
US2937297A (en) Image display device
JPH05266793A (en) Exposure device for color picture tube panel
US3767395A (en) Multiple exposure color tube screening
US3499372A (en) Cathode ray tube screen exposure
JPH07105843A (en) Method for forming phosphor screen for color picture tube, and exposing device
US3788848A (en) Methods of manufacture of color picture tubes
US3043975A (en) Image display device
US3581136A (en) Color dot screen with dot form compensation for apparent shift of beam deflection center
US20020018945A1 (en) Exposure apparatus for multi-neck cathode ray tube and exposure method using the same
US3738233A (en) Camera process for color tube screen printing
EP0675518B1 (en) Exposing apparatus
US3579768A (en) Method of fabricating cathode ray tube screen
KR100252064B1 (en) An exposing device for crt
JPH0294227A (en) Exposure apparatus for color picture tube
US4034382A (en) Apparatus for forming a color television picture tube screen
KR200166670Y1 (en) Color cathode ray tube
JPH04296426A (en) Exposure device and manufacture of color image receiving tube
JPH0773802A (en) Manufacture of color cathode-ray tube (crt)
JPH0963480A (en) Fluorescent screen formation method for color cathode-ray tube and its exposure device
JPH09223460A (en) Exposing apparatus for color picture tube
JPS62140336A (en) Exposure method for color picture tube pannel
JP2000260317A (en) Aligner for forming phosphor screen of color cathode ray tube
JPH0963481A (en) Fluorescent screen formation method for color cathode-ray tube and its exposure device
JPS5968144A (en) Exposure device for forming phosphor screen
JPH08298072A (en) Exposure device and exposing method

Legal Events

Date Code Title Description
A300 Withdrawal of application because of no request for examination

Free format text: JAPANESE INTERMEDIATE CODE: A300

Effective date: 19990608