JPH05264998A - Oriented film - Google Patents

Oriented film

Info

Publication number
JPH05264998A
JPH05264998A JP8925792A JP8925792A JPH05264998A JP H05264998 A JPH05264998 A JP H05264998A JP 8925792 A JP8925792 A JP 8925792A JP 8925792 A JP8925792 A JP 8925792A JP H05264998 A JPH05264998 A JP H05264998A
Authority
JP
Japan
Prior art keywords
film
water
liquid crystal
alignment film
polysilazane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8925792A
Other languages
Japanese (ja)
Other versions
JP2634352B2 (en
Inventor
Toshihiro Nishimura
俊博 西村
Yoshio Hagiwara
嘉男 萩原
Tatsuhiko Shibuya
達彦 渋谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Ohka Kogyo Co Ltd
Original Assignee
Tokyo Ohka Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Ohka Kogyo Co Ltd filed Critical Tokyo Ohka Kogyo Co Ltd
Priority to JP4089257A priority Critical patent/JP2634352B2/en
Publication of JPH05264998A publication Critical patent/JPH05264998A/en
Application granted granted Critical
Publication of JP2634352B2 publication Critical patent/JP2634352B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Liquid Crystal (AREA)

Abstract

PURPOSE:To obtain the oriented film which has excellent orientability of a liquid crystal, is homogeneous in spite of the thick film, does not crack, has good moisture resistance and power to prevent the elution of alkaline ions, etc., from a substrate and is suitable for mass production. CONSTITUTION:The oriented film consisting of a polysilazane film formed under a non-water condition is constituted. The 'non-water condition' refers to the absence of water and the condition under which water is not formed. The peak of the IR absorption spectra of the polysiloxane film formed in the presence of the water or under the condition under which the water is formed exists in a range from 3200 to 3600cm<-1> wave number where the water exists but the peak of the polysilazane film used as the oriented film does not substantially exist in the range of the wave number. The polysilazane film is obtd. by applying an org. solvent soln. of a silazane compd. on, for example, the solid surface, then subjecting the coating to a heating treatment.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は新規な配向膜、さらに詳
しくは、液晶に対して優れた配向性を与えるとともに、
厚膜でもクラックなどが発生せず、かつ耐湿性及び基板
からのアルカリイオンなどの溶出防止力がよい上、量産
性に適し、液晶表示装置に好適に用いられる配向膜に関
するものである。
FIELD OF THE INVENTION The present invention relates to a novel alignment film, and more specifically, to give excellent alignment properties to liquid crystals,
The present invention relates to an alignment film which does not cause cracks even in a thick film, has a good moisture resistance and an ability to prevent elution of alkali ions from a substrate, is suitable for mass production, and is preferably used for a liquid crystal display device.

【0002】[0002]

【従来の技術】近年、液晶表示装置は、電卓、時計など
に使用され、かつドットマトリックス表示用のディスプ
レイとして情報処理などにその用途が拡大されつつあ
る。
2. Description of the Related Art In recent years, liquid crystal display devices have been used for calculators, watches and the like, and their applications have been expanded to information processing as displays for dot matrix display.

【0003】この液晶表示装置は、一般に一対の基板の
内側に電極及び配向膜を有し、その内側に液晶を封入し
た構造を有しており、そして、液晶表示装置による表示
は、通常電極に電圧を印加して該液晶の配向形態を変化
させ、その結果基板を透過する光量を変化させるという
原理に基づいて行われている。したがって、液晶の配向
性は液晶表示装置の性能にとって、極めて重要な役割を
有している。
This liquid crystal display device generally has an electrode and an alignment film inside a pair of substrates, and has a structure in which a liquid crystal is sealed inside. A liquid crystal display device normally uses electrodes. This is performed based on the principle that a voltage is applied to change the alignment form of the liquid crystal, and as a result, the amount of light transmitted through the substrate is changed. Therefore, the orientation of the liquid crystal plays an extremely important role in the performance of the liquid crystal display device.

【0004】従来、液晶の配向性はそれと接する配向膜
によって大きく影響されることが知られており、そのた
め種々の配向膜がこれまで開発され、実用化されてい
る。この配向膜は一般に有機配向膜と無機配向膜に大別
することができる。該有機配向膜としては、例えばポリ
イミド樹脂やポリビニルアルコールなどから成る配向膜
が知られている。
Conventionally, it is known that the orientation of liquid crystal is greatly influenced by the orientation film in contact with it, and therefore various orientation films have been developed and put to practical use. This alignment film can be generally classified into an organic alignment film and an inorganic alignment film. As the organic alignment film, an alignment film made of, for example, a polyimide resin or polyvinyl alcohol is known.

【0005】しかしながら、ポリイミド樹脂から成る配
向膜においては、200℃以上という高温でキュアリン
グすることが必要であって、基板が耐熱性のよいものに
限定されるのを免れないという欠点がある。また、ポリ
ビニルアルコールから成る配向膜は、高温キュアリング
は必要でないものの、液晶配向性の持続性に乏しく、経
時的に透過光量が変化しやすいという欠点を有してい
る。
However, an alignment film made of a polyimide resin has a drawback that it is necessary to cure at a high temperature of 200 ° C. or higher, and the substrate is necessarily limited to one having good heat resistance. Further, although the alignment film made of polyvinyl alcohol does not require high temperature curing, it has a drawback that the liquid crystal alignment property is poor in sustainability and the transmitted light amount easily changes with time.

【0006】一方、無機配向膜としては、SiO斜方蒸
着法により形成される配向膜が代表的なものとして知ら
れている。しかしながら、この配向膜は耐熱性に優れて
いるものの、均質性に劣る上、量産性を欠くなどの欠点
を有している。
On the other hand, as the inorganic alignment film, an alignment film formed by the SiO oblique vapor deposition method is known as a typical one. However, although this alignment film has excellent heat resistance, it has drawbacks such as poor homogeneity and lack of mass productivity.

【0007】また、ハロゲノシランやアルコキシシラン
を加水分解して得られた塗布液から形成されたポリシロ
キサン膜をラビング処理して成る配向膜も知られてい
る。しかしながら、この配向膜は量産性に適している
が、吸湿性を有し、雰囲気中の水分を吸収しやすく、か
つ厚膜にするとクラックが発生しやすい上、均質性が不
十分となり、しかもガラス基板からのアルカリ成分の溶
出防止効果に劣るなどの欠点を有している。
An alignment film formed by rubbing a polysiloxane film formed from a coating solution obtained by hydrolyzing a halogenosilane or an alkoxysilane is also known. However, although this alignment film is suitable for mass production, it has hygroscopicity, easily absorbs moisture in the atmosphere, and if a thick film is formed, cracks easily occur, and the homogeneity becomes insufficient. It has drawbacks such as inferior effect of preventing elution of alkaline components from the substrate.

【0008】[0008]

【発明が解決しようとする課題】本発明は、このような
従来の液晶用配向膜が有する欠点を克服し、液晶の配向
性に優れるとともに、厚膜でも均質で、クラックなどが
発生せず、かつ耐湿性及び基板からのアルカリイオンな
どの溶液防止力がよい上、200℃以上の高温キュアリ
ングを必要とせず、しかも量産性に適した液晶用配向膜
を提供することを目的としてなされたものである。
DISCLOSURE OF THE INVENTION The present invention overcomes the drawbacks of the conventional alignment film for liquid crystal as described above, is excellent in the alignment property of the liquid crystal, is uniform in a thick film, and does not cause cracks. In addition, it is made for the purpose of providing an alignment film for liquid crystal suitable for mass production, which has good moisture resistance and good ability to prevent solutions such as alkali ions from the substrate, does not require high-temperature curing at 200 ° C or higher. Is.

【0009】[0009]

【課題を解決するための手段】本発明者らは優れた性質
を有する配向膜を開発すべく鋭意研究を重ねた結果、非
水条件下で形成されたポリシラザン膜により、その目的
を達成しうることを見出し、この知見に基づいて本発明
を完成するに至った。
The inventors of the present invention have conducted extensive studies to develop an alignment film having excellent properties, and as a result, a polysilazane film formed under non-aqueous conditions can achieve the object. Based on this finding, the present invention has been completed.

【0010】すなわち、本発明は、非水条件下で形成さ
れたポリシラザン膜から成る配向膜を提供するものであ
る。
That is, the present invention provides an alignment film composed of a polysilazane film formed under non-aqueous conditions.

【0011】本発明でいう「非水条件下」とは、水の不
在下及び水の生成を伴わない条件下を意味する。水の存
在下又は水が生成する条件下で形成されたポリシロキサ
ン膜は、その赤外吸収スペクトルにおいて、水の存在に
起因する波数3200〜3600cm−1の範囲にピー
クが存在するのに対し、本発明の配向膜として用いられ
るポリシラザン膜は、前記波数の範囲に実質上ピークが
存在しない。
The term "non-aqueous conditions" as used in the present invention means the absence of water and the conditions without water formation. In the infrared absorption spectrum of the polysiloxane film formed in the presence of water or under the condition that water is produced, a peak exists in the wave number range of 3200 to 3600 cm −1 due to the presence of water. The polysilazane film used as the alignment film of the present invention has substantially no peak in the wave number range.

【0012】このような特徴をもつポリシラザン膜は、
例えば固体表面に、シラザン化合物の有機溶剤溶液を塗
布し、次いでこれを加熱処理することによって得られ
る。このシラザン化合物は、分子中にSi−N結合を有
する化合物の総称であるが、本発明においては、分子中
に酸素原子を含まないシラザン化合物を用いるのが好ま
しい。
A polysilazane film having such characteristics is
For example, it can be obtained by applying a solution of a silazane compound in an organic solvent to a solid surface and then heat-treating the solution. This silazane compound is a general term for compounds having a Si—N bond in the molecule, but in the present invention, it is preferable to use a silazane compound containing no oxygen atom in the molecule.

【0013】このようなシラザン化合物は、ハロゲノシ
ランやオルガノハロゲノシランとアンモニア又はアミン
類とを、有機溶媒中で反応させることによって得られ
る。この際用いられるハロゲノシランとしては、例えば
SiCl4、HSiCl3、HSiCl、HSiC
lなどを挙げることができるし、またオルガノハロゲノ
シランとしては、例えばCHSiHCl、CH
iHCl、CHSiCl、(CHSiCl
、(CHSiCl、CSiCl、(C
253SiCl、(C25)(C65)SiCl2
(C25)(C652SiCl、(CH33CSiH
Cl2、(CH32CHSiHCl2、(C65)SiH
Cl2、(C65)SiCl3、(C52SiC
、(CSiCl、CCHSiC
、(CCH2SiCl、(C6CH
SiClなどを挙げることができる。
Such silazane compounds can be obtained by reacting halogenosilane or organohalogenosilane with ammonia or amines in an organic solvent. Examples of the halogenosilane used at this time include SiCl 4 , HSiCl 3 , H 2 SiCl 2 , and H 3 SiC.
1 and the like, and examples of the organohalogenosilane include CH 3 SiHCl 2 and CH 3 S.
iH 2 Cl, CH 3 SiCl 3 , (CH 3 ) 2 SiCl
2 , (CH 3 ) 3 SiCl, C 2 H 5 SiCl 3 , (C
2 H 5) 3 SiCl, ( C 2 H 5) (C 6 H 5) SiCl 2,
(C 2 H 5) (C 6 H 5) 2 SiCl, (CH 3) 3 CSiH
Cl 2 , (CH 3 ) 2 CHSiHCl 2 , (C 6 H 5 ) SiH
Cl 2, (C 6 H 5 ) SiCl 3, (C 6 H 5) 2 SiC
l 2, (C 6 H 5 ) 3 SiCl, C 6 H 5 CH 2 SiC
l 3, (C 6 H 5 CH 2) 2 SiCl 2, (C 6 H 5 CH
2 ) 3 SiCl and the like.

【0014】一方、これらのハロゲノシランやオルガノ
ハロゲノシランと反応させるアミン類としては、例えば
モノメチルアミン、エチルアミン、プロピルアミン、ブ
チルアミンなどの低級アルキルアミンやエチレンジアミ
ンなどのポリアミン、ベンジルアミン、フェネチルアミ
ンなどのアラルキルアミンなどを挙げることができる。
On the other hand, examples of amines to be reacted with these halogenosilanes and organohalogenosilanes include lower alkylamines such as monomethylamine, ethylamine, propylamine and butylamine, polyamines such as ethylenediamine, aralkylamines such as benzylamine and phenethylamine. And so on.

【0015】また、これらの反応に用いる有機溶媒とし
ては、例えばトルエン、キシレン、ジエチルエーテル、
ジクロロメタンなどが挙げられる。
Examples of the organic solvent used in these reactions include toluene, xylene, diethyl ether,
Examples include dichloromethane.

【0016】特に好適なシラザン化合物は、前記有機溶
媒中にHSiCl、HSiCl、HSiClな
どのハロゲノシランを溶解し、これにアンモニアガスを
吹き込むことによって得られるものである。
A particularly suitable silazane compound is obtained by dissolving a halogenosilane such as HSiCl 3 , H 2 SiCl 2 or H 3 SiCl in the above organic solvent and blowing ammonia gas into the solution.

【0017】本発明においては、このようにして得られ
たハロゲノシラン又はオルガノハロゲノシランとアンモ
ニア又はアミン類との反応混合物をそのまま塗布液とす
ることもできるし、また、この反応混合物から減圧蒸留
などにより溶媒を除去して、所望のシラザン化合物を油
状物質又は固体物質として回収したのち、これを適当な
有機溶剤に溶解し、塗布液とすることもできる。
In the present invention, the reaction mixture of the halogenosilane or organohalogenosilane thus obtained and ammonia or amines may be used as it is as a coating solution, or the reaction mixture may be distilled under reduced pressure. The solvent can be removed by to recover the desired silazane compound as an oily substance or a solid substance, and this can be dissolved in an appropriate organic solvent to obtain a coating liquid.

【0018】この場合の有機溶剤としては、例えばメタ
ノール、エタノール、プロパノール、ブタノール、シク
ロヘキサノール、ベンジルアルコール、ジメチロールベ
ンゼン、フルフリルアルコール、テトラヒドロフルフリ
ルアルコール、ジアセトンアルコール、エチレングリコ
ールモノアルキルエーテル、ジエチレングリコールモノ
アルキルエーテル、トリエチレングリコールモノアルキ
ルエーテル、プロピレングリコールモノアルキルエーテ
ルなどのアルコール類、酢酸アルキルエステル、ジエチ
レングリコールモノアルキルエーテルアセテート、トリ
エチレングリコールモノアルキルエーテルアセテート、
プロピレングリコールモノアルキルエーテルアセテー
ト、アセト酢酸エチルエステル、乳酸アルキルエステ
ル、安息香酸アルキルエステル、ベンジルアセテート、
グリセリンジアセテートなどのエステル類、アセトン、
メチルエチルケトン、シクロヘキサノン、アセチルアセ
トン、イソホロン、ジエチルケトン、メチルイソブチル
ケトン、メチルn‐ブチルケトン、アセトニルアセトン
などのケトン類、n‐ペンタン、n‐ヘキサン、イソヘ
キサン、n‐ヘプタン、n‐オクタン、イソオクタン、
ベンゼン、トンエン、キシレン、エチルベンゼン、ジエ
チルベンゼン、イソプロピルベンゼン、テトラリンなど
の炭化水素類などが挙げられる。これらの有機溶剤は単
独で用いてもよいし、2種以上を混合して用いてもよ
い。
Examples of the organic solvent in this case include methanol, ethanol, propanol, butanol, cyclohexanol, benzyl alcohol, dimethylolbenzene, furfuryl alcohol, tetrahydrofurfuryl alcohol, diacetone alcohol, ethylene glycol monoalkyl ether, and diethylene glycol. Alcohols such as monoalkyl ether, triethylene glycol monoalkyl ether, propylene glycol monoalkyl ether, acetic acid alkyl ester, diethylene glycol monoalkyl ether acetate, triethylene glycol monoalkyl ether acetate,
Propylene glycol monoalkyl ether acetate, acetoacetic acid ethyl ester, lactic acid alkyl ester, benzoic acid alkyl ester, benzyl acetate,
Esters such as glycerin diacetate, acetone,
Ketones such as methyl ethyl ketone, cyclohexanone, acetylacetone, isophorone, diethyl ketone, methyl isobutyl ketone, methyl n-butyl ketone, acetonyl acetone, n-pentane, n-hexane, isohexane, n-heptane, n-octane, isooctane,
Hydrocarbons such as benzene, tonene, xylene, ethylbenzene, diethylbenzene, isopropylbenzene, and tetralin are included. These organic solvents may be used alone or in combination of two or more.

【0019】本発明の配向膜の形成に用いられる塗布液
としては、シラザン化合物を1〜60重量%、好ましく
は10〜30重量%の割合で含有し、かつ常温における
粘度が0.5〜50センチポイズ、好ましくは1〜20
センチポイズの範囲にあるものが実用上好適である。該
粘度は所望の膜厚などによって、有機溶剤の種類や量を
適宜選択することにより、調整することができる。
The coating liquid used for forming the alignment film of the present invention contains the silazane compound in an amount of 1 to 60% by weight, preferably 10 to 30% by weight, and has a viscosity at room temperature of 0.5 to 50%. Centipoise, preferably 1-20
Those in the range of centipoise are practically suitable. The viscosity can be adjusted by appropriately selecting the type and amount of the organic solvent according to the desired film thickness and the like.

【0020】本発明の配向膜は、前記のようにして調製
された塗布液を、電極を設けた基板上にスピンナー法、
スプレー法、浸せき法など、従来慣用されている手段に
より塗布したのち、100〜200℃程度の温度で加熱
処理してポリシラザン膜を形成させたのち、通常の方法
によりラビング処理を施すことにより、形成することが
できる。このようにして形成された配向膜は、膜厚が
0.2〜3.0μmのクラックのない均質な吸湿性の低
いポリシラザンから成る連続膜である。
For the alignment film of the present invention, the coating solution prepared as described above is applied onto a substrate provided with electrodes by a spinner method,
After being applied by a conventionally used means such as a spray method or a dipping method, a polysilazane film is formed by heat treatment at a temperature of about 100 to 200 ° C., and then a rubbing treatment is applied by an ordinary method to form the film. can do. The alignment film thus formed is a continuous film made of polysilazane having a film thickness of 0.2 to 3.0 μm, which is uniform and has a low hygroscopic property without cracks.

【0021】このようにして配向膜が形成された基板
は、その2枚を重ねた際に、一定の距離を保持させるた
めに、通常ギャップ剤が散布される。この基板を該配向
膜が対面するように2枚重ね、エポキシ樹脂などで周囲
を封止したのち、液晶を注入することにより、液晶セル
が得られる。
A gap agent is usually sprinkled on the substrate on which the alignment film is formed in this manner so as to maintain a constant distance when the two substrates are stacked. A liquid crystal cell is obtained by stacking two substrates so that the alignment films face each other, sealing the periphery with an epoxy resin or the like, and then injecting a liquid crystal.

【0022】この液晶セルの上下に偏光板を設け、電圧
がかからないときは光が透過せず、一定電圧がかかった
とき、液晶の配向によって光が透過するようにして液晶
表示体が作成される。
Polarizing plates are provided above and below this liquid crystal cell so that light does not pass when no voltage is applied, and when a constant voltage is applied, light is transmitted by the alignment of the liquid crystal to produce a liquid crystal display. ..

【0023】[0023]

【発明の効果】本発明の配向膜は、液晶の配向性に優れ
るとともに、厚膜でも均質で、クラックなどが発生せ
ず、かつ耐湿性及び基板からのアルカリイオンなどの溶
出防止力がよい上、量産性に適するなどの特徴を有し、
液晶表示装置に好適に用いられる。
EFFECT OF THE INVENTION The alignment film of the present invention is excellent in the alignment property of liquid crystal, is homogeneous in a thick film, does not generate cracks, and has a good moisture resistance and an ability to prevent the elution of alkali ions from the substrate. Has characteristics such as suitable for mass production,
It is preferably used for liquid crystal display devices.

【0024】[0024]

【実施例】次に、実施例により本発明をさらに詳細に説
明するが、本発明はこの例によってなんら限定されるも
のではない。
EXAMPLES Next, the present invention will be described in more detail with reference to examples, but the present invention is not limited to these examples.

【0025】実施例 ソーダガラス基体上にパターン化された透明電極が設け
られた基板の該透明電極上に、ハロゲノシランとアンモ
ニアとの反応生成物の20重量%キシレン溶液であるT
EFP[東燃(株)製、商品名]を、スピンナーを用い
て、3500rpmで均一に塗布し、150℃で30分
間加熱処理を施すことで膜厚0.3μmのポリシラザン
膜を形成した。このようにして得られたポリシラザン膜
の表面はクラックが認められず、極めて均質性の高い被
膜であり、さらに基板からのアルカリ成分の溶出を防止
する効果が確認された。また得られたポリシラザン膜の
赤外吸収スペクトルからは水の存在は確認できなかっ
た。
EXAMPLE A 20% by weight xylene solution of a reaction product of a halogenosilane and ammonia on a transparent electrode of a substrate provided with a patterned transparent electrode on a soda glass substrate, which is 20% by weight.
EFP [trade name, manufactured by Tonen Corporation] was uniformly applied at 3500 rpm using a spinner and heat-treated at 150 ° C. for 30 minutes to form a polysilazane film having a thickness of 0.3 μm. No cracks were observed on the surface of the polysilazane film thus obtained, and the film had a very high degree of homogeneity, and the effect of preventing the elution of the alkaline component from the substrate was confirmed. The presence of water could not be confirmed from the infrared absorption spectrum of the obtained polysilazane film.

【0026】次いで、このポリシラザン膜をフェルトで
一定方向にラビングし、配向性を付与した配向膜を有す
る基板を作成した。
Next, this polysilazane film was rubbed with a felt in a certain direction to prepare a substrate having an alignment film having an orientation property.

【0027】このように作成した2枚の基板の配向膜を
対向させて配置し、これらの基板を所定の間隔に設けて
接着剤により接着して液晶表示素子を作成した。この素
子の配向膜間にフェニルシクロヘキサン系の液晶を注入
し、2枚の直交偏光板間で液晶の配向性を調べたとこ
ろ、極めて良好な配向性を示した。
Alignment films of the two substrates thus prepared were arranged so as to face each other, and these substrates were provided at a predetermined interval and adhered with an adhesive to prepare a liquid crystal display element. Phenylcyclohexane-based liquid crystal was injected between the alignment films of this device, and the orientation of the liquid crystal was examined between the two orthogonal polarizing plates. As a result, extremely good orientation was exhibited.

【0028】比較例 実施例において、TEFPの代りに、テトラエトキシシ
ラン152gと氷酢酸240gとメチルアルコール24
0gとの混合物にシュウ酸10gを室温でかきまぜなが
ら加えて反応させて得られた溶液に、イソプロピルアル
コールを加えて濃度を5.9重量%に調整した溶液を用
いた以外は、実施例と全く同様にして基板の透明電極上
に膜厚0.3μmのポリシロキサン膜を形成させ、ラビ
ング処理を施して配向膜を有する基板を作成した。
Comparative Example In the examples, instead of TEFP, 152 g of tetraethoxysilane, 240 g of glacial acetic acid and 24 of methyl alcohol were used.
Except for using the solution obtained by adding 10 g of oxalic acid to a mixture with 0 g while stirring at room temperature and reacting with isopropyl alcohol to adjust the concentration to 5.9% by weight. Similarly, a polysiloxane film having a film thickness of 0.3 μm was formed on the transparent electrode of the substrate and subjected to rubbing treatment to prepare a substrate having an alignment film.

【0029】このようにして得られた配向膜は均質性が
悪く、基板からのアルカリ成分の溶出防止効果が劣るも
のであった。
The orientation film thus obtained had poor homogeneity and was inferior in the effect of preventing the elution of alkaline components from the substrate.

【0030】次いで、実施例と同様に液晶素子を作成
し、配向性を調べたところ、実施例と比べて配向性は劣
るものであった。
Then, when a liquid crystal element was prepared in the same manner as in the example and the orientation was examined, the orientation was inferior to that in the example.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 非水条件下で形成されたポリシラザン膜
から成る配向膜。
1. An alignment film comprising a polysilazane film formed under non-aqueous conditions.
JP4089257A 1992-03-16 1992-03-16 Alignment film Expired - Fee Related JP2634352B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4089257A JP2634352B2 (en) 1992-03-16 1992-03-16 Alignment film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4089257A JP2634352B2 (en) 1992-03-16 1992-03-16 Alignment film

Publications (2)

Publication Number Publication Date
JPH05264998A true JPH05264998A (en) 1993-10-15
JP2634352B2 JP2634352B2 (en) 1997-07-23

Family

ID=13965714

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4089257A Expired - Fee Related JP2634352B2 (en) 1992-03-16 1992-03-16 Alignment film

Country Status (1)

Country Link
JP (1) JP2634352B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6476894B1 (en) 1998-05-13 2002-11-05 Nec Corporation Liquid crystal display device and method of manufacturing the same
JP2007127757A (en) * 2005-11-02 2007-05-24 Seiko Epson Corp Liquid crystal device, method of manufacturing liquid crystal device, and electronic equipment

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS627022A (en) * 1985-07-03 1987-01-14 Semiconductor Energy Lab Co Ltd Liquid crystal display device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS627022A (en) * 1985-07-03 1987-01-14 Semiconductor Energy Lab Co Ltd Liquid crystal display device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6476894B1 (en) 1998-05-13 2002-11-05 Nec Corporation Liquid crystal display device and method of manufacturing the same
US6570635B2 (en) 1998-05-13 2003-05-27 Nec Corporation Method of manufacturing liquid crystal display device
US6717643B2 (en) 1998-05-13 2004-04-06 Nec Lcd Technologies, Ltd. Liquid crystal display device
JP2007127757A (en) * 2005-11-02 2007-05-24 Seiko Epson Corp Liquid crystal device, method of manufacturing liquid crystal device, and electronic equipment
JP4626488B2 (en) * 2005-11-02 2011-02-09 セイコーエプソン株式会社 Liquid crystal device, method for manufacturing liquid crystal device, and electronic apparatus

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