JPH052449Y2 - - Google Patents

Info

Publication number
JPH052449Y2
JPH052449Y2 JP1987105941U JP10594187U JPH052449Y2 JP H052449 Y2 JPH052449 Y2 JP H052449Y2 JP 1987105941 U JP1987105941 U JP 1987105941U JP 10594187 U JP10594187 U JP 10594187U JP H052449 Y2 JPH052449 Y2 JP H052449Y2
Authority
JP
Japan
Prior art keywords
mask
container
dust
air
blower
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987105941U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6411945U (US06534493-20030318-C00166.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987105941U priority Critical patent/JPH052449Y2/ja
Publication of JPS6411945U publication Critical patent/JPS6411945U/ja
Application granted granted Critical
Publication of JPH052449Y2 publication Critical patent/JPH052449Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Details Of Rigid Or Semi-Rigid Containers (AREA)
  • Packaging Frangible Articles (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
JP1987105941U 1987-07-10 1987-07-10 Expired - Lifetime JPH052449Y2 (US06534493-20030318-C00166.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987105941U JPH052449Y2 (US06534493-20030318-C00166.png) 1987-07-10 1987-07-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987105941U JPH052449Y2 (US06534493-20030318-C00166.png) 1987-07-10 1987-07-10

Publications (2)

Publication Number Publication Date
JPS6411945U JPS6411945U (US06534493-20030318-C00166.png) 1989-01-23
JPH052449Y2 true JPH052449Y2 (US06534493-20030318-C00166.png) 1993-01-21

Family

ID=31339006

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987105941U Expired - Lifetime JPH052449Y2 (US06534493-20030318-C00166.png) 1987-07-10 1987-07-10

Country Status (1)

Country Link
JP (1) JPH052449Y2 (US06534493-20030318-C00166.png)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5398595B2 (ja) * 2010-03-04 2014-01-29 東京エレクトロン株式会社 基板収納装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55134239A (en) * 1979-04-04 1980-10-18 Toshiba Corp Clean box

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55134239A (en) * 1979-04-04 1980-10-18 Toshiba Corp Clean box

Also Published As

Publication number Publication date
JPS6411945U (US06534493-20030318-C00166.png) 1989-01-23

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