JPH05241078A - Infrared microscope - Google Patents

Infrared microscope

Info

Publication number
JPH05241078A
JPH05241078A JP7932592A JP7932592A JPH05241078A JP H05241078 A JPH05241078 A JP H05241078A JP 7932592 A JP7932592 A JP 7932592A JP 7932592 A JP7932592 A JP 7932592A JP H05241078 A JPH05241078 A JP H05241078A
Authority
JP
Japan
Prior art keywords
main body
spectroscope
infrared
mirror
attachment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7932592A
Other languages
Japanese (ja)
Inventor
Toyohiko Tanaka
豊彦 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP7932592A priority Critical patent/JPH05241078A/en
Publication of JPH05241078A publication Critical patent/JPH05241078A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To utilize an infrared spectroscope for other measurements by providing a mechanism for fitting other optical systems on main body section and providing an optical path switching mechanism which guides infrared light out to other optical systems in the optical path of a main body optical system. CONSTITUTION:An attachment B is fixed to a microscope main body A by inserting a bolt into the through hole of its flange part. A switching mirror 1 is provided in the optical system optical path of the main body A. The mirror 1 is fitted to a cylinder 6 at 45 deg.. The cylinder 6 is fitted rotatably on the rear surface of the main body A. The projection light from the spectroscope of a light source is made incident from an opening 61 at an end of the cylinder 6 and 90 deg. rotated by the switching mirror 1. When a lock pin 7 is inserted into the bored hole of the main body A and, for example, a pin hole 6a of a collar 62 which are aligned with each other, the light from the spectroscope is directed upward in the main body A. When a pin hole 6b is aligned with the hole of the main body A, the mirror 1 faces sideways and the spectroscope projection light is directed to the attachment B.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、赤外分光器を光源とす
る赤外線顕微鏡に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an infrared microscope having an infrared spectroscope as a light source.

【0002】[0002]

【従来の技術】赤外顕微鏡の一般的構造を図2に示す。
赤外光源26の分光器(図外)からの赤外光を、透過測
定か反射測定かによって、透過/反射切替ミラー20
で、透過照明光学系(図で下側の光学系)か反射照明光
学系(図で上側の光学系)かに光路を切替え、コンデン
サー21若しくは対物光学系22によって集光され、試
料を照射する。試料を透過或は反射した赤外光は対物光
学系22で集められ、MCT検出器23に導かれてい
る。従来の赤外顕微鏡は上述したような構成で、分光器
と一体化されており、分光器を利用して、他の測定を行
うことができなかった。しかし、分光器自体が高価な装
置であるので、赤外顕微鏡専用となっていることは、ユ
ーザーにとって装置の経済的有効利用と云う点から、装
置のコスト上の負担感が大きく、顕微鏡付属の分光器を
他の測定に利用したいと云う願望があった。
2. Description of the Related Art The general structure of an infrared microscope is shown in FIG.
Depending on whether the infrared light from the spectroscope (not shown) of the infrared light source 26 is transmission measurement or reflection measurement, the transmission / reflection switching mirror 20
Then, the optical path is switched to the transmission illumination optical system (lower optical system in the figure) or the reflection illumination optical system (upper optical system in the figure), and the light is condensed by the condenser 21 or the objective optical system 22 to irradiate the sample. . The infrared light transmitted or reflected by the sample is collected by the objective optical system 22 and guided to the MCT detector 23. The conventional infrared microscope has the above-described configuration and is integrated with the spectroscope, and other measurements cannot be performed using the spectroscope. However, since the spectroscope itself is an expensive device, the fact that it is dedicated to the infrared microscope means that the user can use the device economically and effectively. There was a desire to use the spectrometer for other measurements.

【0003】[0003]

【発明が解決しようとする課題】本発明は、赤外分光顕
微鏡で赤外分光器を他の測定に利用できるようにするこ
とを目的とする。
SUMMARY OF THE INVENTION It is an object of the present invention to make an infrared spectroscope available for other measurements in an infrared spectroscopic microscope.

【0004】[0004]

【課題を解決するための手段】赤外顕微鏡において、本
体側面に他の光学系を取付ける機構と、本体光学系光路
内に赤外光を上記本体側面に取付けた他の光学系に取出
す光路切替機構とを設けた。
[Means for Solving the Problems] In an infrared microscope, a mechanism for mounting another optical system on the side surface of the main body, and an optical path switching for extracting infrared light into the other optical system mounted on the side surface of the main body in the optical path of the main body optical system. And the mechanism.

【0005】[0005]

【作用】本発明は、赤外顕微鏡側面に他の測定装置がア
タッチメントとして取付けできるようにし、赤外顕微鏡
本体内において、赤外分光器からの赤外光を透過測定光
学系と反射測定光学系とに切替える切替ミラーを、本体
側面に取付けたアタッチメントにも赤外光を導けるよう
な機構として、切替ミラーの切替え操作によって、透過
/反射/その他の他の光学系に赤外光を切替えできるよ
うにしたもので、これによって、赤外分光顕微鏡の赤外
分光器を他の測定に利用できるようになった。
According to the present invention, another measuring device can be attached to the side surface of the infrared microscope as an attachment, and the infrared light from the infrared spectroscope is transmitted and reflected in the infrared microscope main body. The switching mirror that switches to and is a mechanism that can guide infrared light to an attachment mounted on the side of the main unit, so that infrared light can be switched to transmission / reflection / other optical systems by switching the switching mirror. This made the infrared spectroscope of the infrared spectroscopic microscope available for other measurements.

【0006】[0006]

【実施例】図1は本発明の一実施例の平面図である。図
1において、Aは赤外顕微鏡本体で、これ自体は従来例
と同様で図2に示す構造をしている。Bは本体Aに着脱
自在なアタッチメントで図は本体に取付けられた状態を
示している。1は切替ミラーで、図2における透過/反
射切替ミラー20と同じ機能を備えている。従来はこの
ミラー1は図2において、光源26の分光器(図外)か
らの赤外光を上下方向に切替えて、顕微鏡の照明方法を
切替えているだけであるが、本実施例では、このミラー
1を側面方向にも赤外光を振分ける切替えができるよう
にして、側面に取付けたアタッチメントBに赤外光を導
入させている。図1でBはアタッチメントの一例で、ア
タッチメントBにおいて、2はミラーで、アタッチメン
トB内に導入された赤外光を反射し、凹面ミラー3に導
く、凹面ミラー3は試料Sに赤外光を集光し、試料Sを
透過した測定光を凹面ミラー4が集光し、検出器5に導
く。検出器5で試料透過光を測定する。上記アタッチメ
ントBは、試料用の通常の分光透過測定装置であるが、
別のアタッチメント例えば拡散反射測定装置等を取付け
ても良いのは、自明の理である。
1 is a plan view of an embodiment of the present invention. In FIG. 1, A is an infrared microscope main body, which itself has the structure shown in FIG. 2 similar to the conventional example. Reference numeral B denotes an attachment that is detachably attached to the main body A, and the figure shows a state in which the attachment is attached to the main body. A switching mirror 1 has the same function as the transmission / reflection switching mirror 20 in FIG. Conventionally, in this mirror 1, in FIG. 2, infrared light from the spectroscope (not shown) of the light source 26 is switched up and down to switch the illumination method of the microscope. Infrared light is introduced into the attachment B mounted on the side surface so that the mirror 1 can be switched to distribute the infrared light also in the side direction. In FIG. 1, B is an example of an attachment. In the attachment B, 2 is a mirror that reflects infrared light introduced into the attachment B and guides it to a concave mirror 3. The concave mirror 3 directs infrared light to the sample S. The concave mirror 4 collects the measurement light that has been collected and transmitted through the sample S, and guides it to the detector 5. The detector 5 measures the light transmitted through the sample. The attachment B is an ordinary spectroscopic transmission measuring device for samples,
It is self-evident that another attachment such as a diffuse reflectance measuring device may be attached.

【0007】ミラー切替え機構の一例を図3に示す。こ
れは図2に示す顕微鏡本体A,光源26の分光器(図
外),アタッチメントBの配置における一例で、ミラー
1は円筒6に45°の角度で取付けられており、円筒6
の軸が図外光源26の分光器出射光の光軸と一致するよ
うに赤外顕微鏡本体Aの後面に回転可能に取付けられて
いる。光源26の分光器の出射光は円筒6のミラー1と
反射側の端の開口61から入射せしめられ、ミラー1で
90°転向される。開口61の外周はローレットが刻ん
であり、顕微鏡本体Aの背面に接する鍔62が設けてあ
る。鍔62にはロックピン7を挿入する3個の孔6a,
6b,6cが穿ってあり、顕微鏡本体1の背面には、こ
のロックピンが入る一個の穴が穿ってある。この穴と鍔
62のピン孔6aを重ねてノックピン7を挿入した時
は、分光器からの光は、顕微鏡本体内で上方に転向さ
れ、試料を上方から照らして反射顕微測定モードとな
る。孔6cを顕微鏡本体の穴に重ねた時は、分光器出射
光は、下方に転向されて試料を下から照らし顕微鏡の透
過測定モードとなる。ピン孔6bを穴に重ねた時、ミラ
ー1は横を向いて、分光器出射光をアタッチメントBの
方へ転向させる。上述したノックピンによる位置決め機
構は、他の周知の機構、例えば、クリック機構でもよい
し、ステッピングモータによるモータ駆動でもよい。
An example of the mirror switching mechanism is shown in FIG. This is an example of the arrangement of the microscope main body A, the spectroscope (not shown) of the light source 26, and the attachment B shown in FIG. 2. The mirror 1 is attached to the cylinder 6 at an angle of 45 °.
Is rotatably attached to the rear surface of the infrared microscope main body A such that the axis of is aligned with the optical axis of the light emitted from the spectroscope of the light source 26 outside the drawing. Light emitted from the spectroscope of the light source 26 is made incident through the mirror 1 of the cylinder 6 and the opening 61 at the end on the reflection side, and is turned by 90 ° by the mirror 1. The outer periphery of the opening 61 is knurled, and a collar 62 is provided in contact with the back surface of the microscope main body A. The collar 62 has three holes 6a for inserting the lock pins 7,
6b and 6c are bored, and one hole into which the lock pin is inserted is bored on the back surface of the microscope body 1. When this hole and the pin hole 6a of the collar 62 are overlapped and the knock pin 7 is inserted, the light from the spectroscope is turned upward in the microscope main body, and the sample is illuminated from above to enter the reflection microscopic measurement mode. When the hole 6c is superposed on the hole of the microscope main body, the spectroscopic output light is turned downward to illuminate the sample from below, and the transmission measurement mode of the microscope is set. When the pin hole 6b is superposed on the hole, the mirror 1 is turned sideways to divert the light emitted from the spectroscope toward the attachment B. The positioning mechanism using the knock pin described above may be another known mechanism, for example, a click mechanism or a motor drive by a stepping motor.

【0008】赤外顕微鏡本体下面は、図1に示すように
後部が左右に張出してあって、夫々の先端部にネジ脚
8,9が螺着してあり、本体Aの前部下面にネジ脚10
が螺着してあって、本体Aの水平を調整するようにして
ある。後方の2つのネジ脚が横に張出してあるのは、ア
タッチメントをつけた時のその重量に耐えて装置全体の
安定を維持させるためである。赤外顕微鏡本体Aの側面
には、アタッチメントBへ光を送り出す窓が設けてあ
り、通常その窓は蓋板(不図示)で覆ってある。アタッ
チメントBはその本体Aへの取付面のフランジ面と、本
体Aのアタッチメント取付面相互の平面度によって本体
Aに対するアタッチメント光学系の光軸の方向が規制さ
れるようになっている。アタッチメントのフランジ部の
透孔よりボルトによってアタッチメントBを本体Aに固
定する。上記した蓋板はアタッチメントのフランジと同
じ面積を有し、フランジと同じ位置に透孔が設けてあっ
て、通常は本体Aにボルト止めされてある。もっともア
タッチメントBの本体Aへの取付機構は、この実施例の
型に限定されない。
As shown in FIG. 1, the lower surface of the main body of the infrared microscope has a rear portion jutting out to the left and right, and screw legs 8 and 9 are screwed to the respective tip portions of the main body A. Leg 10
Is screwed on to adjust the level of the main body A. The rear two screw legs are extended laterally in order to bear the weight of the attachment when attached and maintain the stability of the entire device. A window for sending light to the attachment B is provided on the side surface of the infrared microscope main body A, and the window is usually covered with a cover plate (not shown). The direction of the optical axis of the attachment optical system with respect to the main body A of the attachment B is regulated by the flange surface of the mounting surface of the main body A and the flatness between the attachment mounting surfaces of the main body A. The attachment B is fixed to the main body A with a bolt through the through hole of the flange portion of the attachment. The cover plate has the same area as the flange of the attachment, has a through hole at the same position as the flange, and is usually bolted to the main body A. However, the attachment mechanism of the attachment B to the main body A is not limited to the mold of this embodiment.

【0009】[0009]

【発明の効果】本発明によれば、赤外顕微鏡で通常の赤
外分光測定や別のアタッチメントによる測定が可能にな
ったことで、測定範囲が一段と拡大され、分光器の有効
活用が計られる。
According to the present invention, since the ordinary infrared spectroscopic measurement with the infrared microscope and the measurement with another attachment are made possible, the measurement range is further expanded and the spectroscope can be effectively used. .

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例の平面図FIG. 1 is a plan view of an embodiment of the present invention.

【図2】上記実施例における赤外顕微鏡内の光学系図FIG. 2 is an optical system diagram in the infrared microscope in the above embodiment.

【図3】上記実施例におけるミラー切替え機構の斜視図FIG. 3 is a perspective view of a mirror switching mechanism in the above embodiment.

【符号の説明】[Explanation of symbols]

A 赤外顕微鏡本体 B アタッチメント S 試料 1 切替ミラー 2 ミラー 3 凹面ミラー 4 凹面ミラー 5 検出器 A Infrared microscope body B Attachment S Sample 1 Switching mirror 2 Mirror 3 Concave mirror 4 Concave mirror 5 Detector

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】顕微鏡本体側面に他の測定用のアタッチメ
ント光学系を取付ける機構と、本体光学系光路内に導入
される赤外分光器からの赤外光を上記本体側面に取付け
た他の光学系に向けて転向させる光路切替機構とを設け
たことを特徴とする赤外線顕微鏡。
1. A mechanism for mounting another measurement attachment optical system on the side surface of the microscope main body, and another optical system in which infrared light from an infrared spectroscope introduced into the optical path of the main body optical system is mounted on the side surface of the main body. An infrared microscope provided with an optical path switching mechanism for turning the light toward a system.
JP7932592A 1992-02-28 1992-02-28 Infrared microscope Pending JPH05241078A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7932592A JPH05241078A (en) 1992-02-28 1992-02-28 Infrared microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7932592A JPH05241078A (en) 1992-02-28 1992-02-28 Infrared microscope

Publications (1)

Publication Number Publication Date
JPH05241078A true JPH05241078A (en) 1993-09-21

Family

ID=13686735

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7932592A Pending JPH05241078A (en) 1992-02-28 1992-02-28 Infrared microscope

Country Status (1)

Country Link
JP (1) JPH05241078A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020013325A1 (en) 2018-07-13 2020-01-16 国立大学法人東京大学 Image generation device and image generation method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020013325A1 (en) 2018-07-13 2020-01-16 国立大学法人東京大学 Image generation device and image generation method
JPWO2020013325A1 (en) * 2018-07-13 2021-08-26 国立大学法人 東京大学 Image generator and image generation method

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