JPH05240709A - Wavelength measuring device - Google Patents
Wavelength measuring deviceInfo
- Publication number
- JPH05240709A JPH05240709A JP4286292A JP4286292A JPH05240709A JP H05240709 A JPH05240709 A JP H05240709A JP 4286292 A JP4286292 A JP 4286292A JP 4286292 A JP4286292 A JP 4286292A JP H05240709 A JPH05240709 A JP H05240709A
- Authority
- JP
- Japan
- Prior art keywords
- fabry
- temperature
- wavelength
- pressure
- refractive index
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
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- Spectrometry And Color Measurement (AREA)
- Lasers (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、波長測定装置に関す
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wavelength measuring device.
【０００２】[0002]
【従来の技術】従来の波長測定装置については、特開平
１−２８７４２７号公報等に詳細に記述されている。2. Description of the Related Art A conventional wavelength measuring device is described in detail in JP-A-1-287427.
【０００３】図３は従来の波長測定装置を説明するため
の図である。FIG. 3 is a diagram for explaining a conventional wavelength measuring device.
【０００４】図３において、波長を測定したい光を入射
窓２０から導入し、拡散板３によりビームを拡げて反射
面間媒質２２のファブリ−ペローエタロン２１を透過さ
せる。透過光は集光光学系２３により結像され干渉縞を
検出装置２４上に形成する。この干渉縞は波長の違いに
より形状が変化するので、干渉縞形状を観測することに
より波長を測定できる。In FIG. 3, the light whose wavelength is to be measured is introduced from the entrance window 20, the beam is expanded by the diffusing plate 3 and transmitted through the Fabry-Perot etalon 21 of the inter-reflecting medium 22. The transmitted light is imaged by the condensing optical system 23 to form interference fringes on the detection device 24. Since the shape of this interference fringe changes depending on the difference in wavelength, the wavelength can be measured by observing the shape of the interference fringe.
【０００５】ここで、精度および再現性よく波長を測定
するために、反射面間の媒質２２の温度変化あるいは圧
力変化による屈折率変化を排除する必要がある。この目
的で、ファブリ−ペローエタロン２１を機密容器２５内
に設け、温度制御装置２６および圧力制御装置２７で温
度および圧力を制御している。Here, in order to measure the wavelength with high accuracy and reproducibility, it is necessary to eliminate the change in the refractive index of the medium 22 between the reflecting surfaces due to the temperature change or the pressure change. For this purpose, the Fabry-Perot etalon 21 is provided in the airtight container 25, and the temperature and pressure are controlled by the temperature control device 26 and the pressure control device 27.
【０００６】[0006]
【発明が解決しようとする課題】ところで従来の波長測
定装置においては、ファブリ−ペローエタロンの反射面
間の媒質が温度変化あるいは圧力変化の影響を受ける
と、屈折率が変動し干渉縞形状が同一波長でも変化して
しまう。これを抑えるために、ファブリ−ペローエタロ
ンを温度および圧力が一定の気密室内に設ける必要があ
る。In the conventional wavelength measuring apparatus, when the medium between the reflecting surfaces of the Fabry-Perot etalon is affected by temperature change or pressure change, the refractive index changes and the interference fringe shape remains the same. It also changes with the wavelength. In order to suppress this, it is necessary to install the Fabry-Perot etalon in an airtight chamber whose temperature and pressure are constant.
【０００７】しかし気密室内の温度あるいは圧力を一定
に維持するには、温度検出器および温度調整器あるいは
圧力検出器および圧力調整器等の装置を設置しなければ
ならず、装置が大かがりになるという問題がある。However, in order to keep the temperature or pressure in the airtight chamber constant, devices such as a temperature detector and a temperature regulator or a pressure detector and a pressure regulator must be installed, and the device becomes oversized. There is a problem.
【０００８】本発明の目的は、温度維持あるいは圧力維
持のための気密性および制御機構の必要のない簡便な波
長測定装置を提供することにある。An object of the present invention is to provide a simple wavelength measuring device which does not require airtightness and a control mechanism for maintaining temperature or pressure.
【０００９】[0009]
【課題を解決するための手段】第１の発明による波長測
定装置は、２つ以上のファブリ−ペロー干渉計から構成
され、それぞれの干渉計のファブリ−ペローエタロンの
反射面間の媒質の屈折率の温度係数が異なっていること
を特徴とする。The wavelength measuring device according to the first invention comprises two or more Fabry-Perot interferometers, and the refractive index of the medium between the reflecting surfaces of the Fabry-Perot etalons of each interferometer. Are characterized by different temperature coefficients.
【００１０】第２の発明による波長測定装置は、２つ以
上のファブリ−ペロー干渉計から構成され、それぞれの
干渉計のファブリ−ペローエタロンの反射面間の媒質の
屈折率の圧力係数が異なっていることを特徴とする。The wavelength measuring device according to the second invention is composed of two or more Fabry-Perot interferometers, and the pressure coefficient of the refractive index of the medium between the reflecting surfaces of the Fabry-Perot etalons of each interferometer is different. It is characterized by being
【００１１】[0011]
【作用】第１の発明による波長測定装置においては、反
射面間の媒質の屈折率の温度係数が異なるファブリ−ペ
ローエタロンを透過した光がそれぞれ形成する干渉縞の
変化量が温度の変化に対する場合と波長の変化に対する
場合とで異なるため、干渉縞の変化量から波長変化量お
よび温度変化量を同時に検出できる。これより測定装置
雰囲気の温度変化が生じても精度良く波長を測定でき
る。In the wavelength measuring device according to the first aspect of the invention, when the amount of change in the interference fringes formed by the light transmitted through the Fabry-Perot etalon having different temperature coefficients of the refractive index of the medium between the reflecting surfaces is related to the change in temperature. The difference between the change in the interference fringes and the change in the wavelength can be detected simultaneously from the change in the interference fringes. As a result, the wavelength can be accurately measured even if the temperature of the atmosphere of the measuring device changes.
【００１２】第２の発明による波長測定装置において
は、反射面間の媒質の屈折率の圧力係数が異なるファブ
リ−ペローエタロンを透過した光がそれぞれ形成する干
渉縞の変化量が、圧力の変化に対する場合と波長の変化
に対する場合とで異なるため、干渉縞の変化量から波長
変化量および圧力変化量を同時に検出できる。これより
測定装置雰囲気の圧力変化が生じても精度良く波長を測
定できる。In the wavelength measuring device according to the second aspect of the invention, the change amount of the interference fringes formed by the light transmitted through the Fabry-Perot etalon having different pressure coefficients of the refractive index of the medium between the reflecting surfaces is relative to the change of the pressure. Since the case and the case with respect to the wavelength change are different, the wavelength change amount and the pressure change amount can be simultaneously detected from the change amount of the interference fringes. As a result, the wavelength can be accurately measured even if the pressure in the atmosphere of the measuring device changes.
【００１３】[0013]
【実施例】本発明の実施例を図面用いて説明する。Embodiments of the present invention will be described with reference to the drawings.
【００１４】図１は、第１の発明の波長測定装置の一実
施例を説明するための図である。FIG. 1 is a diagram for explaining an embodiment of the wavelength measuring device of the first invention.
【００１５】図１に示した波長測定装置は、２つの干渉
計に測定光を分割するための部分反射鏡１と全反射鏡あ
るいは部分反射鏡２、測定光を広げるための拡散板３、
反射面間距離Ｌ1 で屈折率の温度係数がβ1 の媒質５
（屈折率ｎ1 （ｔ），ｔ：温度）を反射面間にもつファ
ブリ−ペローエタロン４、干渉縞を結像するための集光
光学系６、集光光学系６の焦点面近傍で集光光学系６か
らの距離Ｆ1 に配置した干渉縞を観測するための検出装
置７、および反射面間距離Ｌ2 で屈折率の温度係数がβ
2 の媒質９（屈折率ｎ2 （ｔ））を反射面間にもつファ
ブリ−ペローエタロン８、干渉縞を結像するための集光
光学系１０、集光光学系１０の焦点面近傍で集光光学系
１０からの距離Ｆ2 に配置した干渉縞を観測するための
検出装置１１とから構成される。配置は図示の如くであ
る。The wavelength measuring device shown in FIG. 1 has a partial reflection mirror 1 and a total reflection mirror or partial reflection mirror 2 for dividing the measurement light into two interferometers, a diffusion plate 3 for spreading the measurement light,
Medium 5 with a distance L 1 between reflecting surfaces and a temperature coefficient of refractive index β 1
A Fabry-Perot etalon 4 having (refractive index n 1 (t), t: temperature) between reflecting surfaces, a condensing optical system 6 for forming an interference fringe, and a condensing optical system 6 near the focal plane. A detector 7 for observing interference fringes arranged at a distance F 1 from the optical optical system 6, and a temperature coefficient β of the refractive index at a distance L 2 between the reflecting surfaces.
A Fabry-Perot etalon 8 having a medium 9 of 2 (refractive index n 2 (t)) between reflecting surfaces, a condensing optical system 10 for forming an interference fringe, and a condensing optical system 10 having a focal plane near the focal plane. A detector 11 for observing interference fringes arranged at a distance F 2 from the optical optical system 10. The arrangement is as shown.
【００１６】この波長測定装置において、ある特定の波
長λ0 、温度ｔ0 における、ファブリ−ペローエタロン
４を透過したｍ1 次光による干渉縞の検出装置７上での
光軸からの距離ｘ1 、およびファブリ−ペローエタロン
８を透過したｍ2 次光による干渉縞の検出装置１１上で
の光軸からの距離ｘ2 を事前に測定する。In this wavelength measuring device, at a specific wavelength λ 0 and temperature t 0 , a distance x 1 from the optical axis on the detecting device 7 of an interference fringe due to the m 1 -order light transmitted through the Fabry-Perot etalon 4 is detected. , And the distance x 2 from the optical axis on the detection device 11 of the interference fringes due to the m 2 -order light transmitted through the Fabry-Perot etalon 8 are measured in advance.
【００１７】測定光の波長λは、ファブリ−ペローエタ
ロン４を透過したｍ1 次光による干渉縞の検出装置７上
での光軸からの距離がｙ1 、ファブリ−ペローエタロン
８を透過したｍ2 次光による干渉縞の検出装置１１上で
の光軸からの距離がｙ2 のとき、The wavelength λ of the measurement light is m 1 after passing through the Fabry-Perot etalon 8 when the distance from the optical axis on the detector 7 for the interference fringes due to the m 1st- order light passing through the Fabry-Perot etalon 4 is y 1 . When the distance from the optical axis on the detection device 11 of the interference fringes due to the secondary light is y 2 ,
【００１８】[0018]
【数１】 [Equation 1]
【００１９】で表せる。この式には温度ｔが含まれない
ため測定装置雰囲気の温度変化に関係なく波長を測定で
きる。従って、第１の発明を用いれば、温度維持のため
の気密性および制御機構の必要のない簡便な波長測定装
置を提供できる。Can be expressed as Since this expression does not include the temperature t, the wavelength can be measured regardless of the temperature change in the atmosphere of the measuring device. Therefore, by using the first invention, it is possible to provide a simple wavelength measuring device that does not require airtightness and a control mechanism for maintaining temperature.
【００２０】図２は、第２の発明の波長測定装置の一実
施例を説明するための図である。FIG. 2 is a diagram for explaining an embodiment of the wavelength measuring device of the second invention.
【００２１】図２に示した波長測定装置は、２つの干渉
計に測定光を分割するための部分反射鏡１と全反射鏡あ
るいは部分反射鏡２、測定光を広げるための拡散板３、
反射面間距離Ｌ3 で屈折率の圧力係数がγ3 の媒質１３
（屈折率ｎ3 （ｐ）），ｐ：圧力）を反射面間にもつフ
ァブリ−ペローエタロン１２、干渉縞を結像するための
集光光学系１４、集光光学系１４の焦点面近傍で集光光
学系１４からの距離Ｆ3 に配置した干渉縞を観測するた
めの検出装置１５、および反射面間距離Ｌ4 で屈折率の
圧力係数がγ4 の媒質１７（屈折率ｎ4 （ｐ））を反射
面間にもつファブリ−ペローエタロン１６、干渉縞を結
像するための集光光学系１８、集光光学系１８の焦点面
近傍で集光光学系１８からの距離Ｆ4 に配置した干渉縞
を観測するための検出装置１９とから構成される。配置
は図示の如くである。The wavelength measuring device shown in FIG. 2 has a partial reflection mirror 1 and a total reflection mirror or partial reflection mirror 2 for splitting the measurement light into two interferometers, a diffusion plate 3 for spreading the measurement light,
A medium 13 having a distance L 3 between the reflecting surfaces and a pressure coefficient of refractive index γ 3
A Fabry-Perot etalon 12 having (refractive index n 3 (p), p: pressure) between reflecting surfaces, a condensing optical system 14 for forming interference fringes, and in the vicinity of the focal plane of the condensing optical system 14. detector 15, and the pressure coefficient of the refractive index at the reflecting surface distance L 4 is gamma 4 medium 17 for observing the interference fringes are arranged in a distance F 3 from the condensing optical system 14 (refractive index n 4 (p )) Between the reflecting surfaces, a Fabry-Perot etalon 16, a condensing optical system 18 for forming an interference fringe, and a distance F 4 from the condensing optical system 18 near the focal plane of the condensing optical system 18. And a detection device 19 for observing the interference fringes. The arrangement is as shown.
【００２２】この波長測定装置において、ある特定の波
長λ0 、圧力ｐ0 における、ファブリ−ペローエタロン
１２を透過したｍ3 次光による干渉縞の検出装置１５上
での光軸からの距離ｘ3 、およびファブリ−ペローエタ
ロン１６を透過したｍ4 次光による干渉縞の検出装置１
９上での光軸からの距離ｘ4 を事前に測定する。In this wavelength measuring device, at a specific wavelength λ 0 and pressure p 0 , a distance x 3 from the optical axis on the detecting device 15 of the interference fringes due to the m 3 -order light transmitted through the Fabry-Perot etalon 12 is measured. , And a device 1 for detecting interference fringes by the m 4th order light transmitted through the Fabry-Perot etalon 16
The distance x 4 from the optical axis on 9 is measured in advance.
【００２３】測定光の波長λは、ファブリ−ペローエタ
ロン１２を透過したｍ3 次光による干渉縞の検出装置１
５上での光軸からの距離がｙ3 、ファブリ−ペローエタ
ロン１６を透過したｍ4 次光による干渉縞の検出装置１
９上での光軸からの距離がｙ4 のとき、The wavelength λ of the measurement light is a device 1 for detecting interference fringes by the m 3 -order light transmitted through the Fabry-Perot etalon 12.
5, the distance from the optical axis on the optical axis is y 3 , and the interference fringe detection device 1 is the m 4th- order light transmitted through the Fabry-Perot etalon 16
When the distance from the optical axis on 9 is y 4 ,
【００２４】[0024]
【数２】 [Equation 2]
【００２５】で表せる。この式には圧力ｐが含まれない
ため測定装置雰囲気の圧力変化に関係なく波長を測定で
きる。従って、第２の発明を用いれば、圧力維持のため
の気密性および制御機構の必要のない簡便な波長測定装
置を提供できる。Can be expressed as Since this formula does not include the pressure p, the wavelength can be measured regardless of the pressure change in the atmosphere of the measuring device. Therefore, by using the second invention, it is possible to provide a simple wavelength measuring device that does not require airtightness and a control mechanism for maintaining pressure.
【００２６】[0026]
【発明の効果】以上述べたように本発明によれば、温度
変化あるいは圧力変化に関係なく波長を測定できるた
め、温度維持あるいは圧力維持のための気密性および制
御機構の必要のない簡便な波長測定装置を提供できる。As described above, according to the present invention, the wavelength can be measured irrespective of the temperature change or the pressure change. Therefore, a simple wavelength which does not require the airtightness and the control mechanism for maintaining the temperature or the pressure. A measuring device can be provided.
【図１】第１の発明による波長測定装置の一実施例を示
す図である。FIG. 1 is a diagram showing an embodiment of a wavelength measuring device according to the first invention.
【図２】第２の発明による波長測定装置の一実施例を示
す図である。FIG. 2 is a diagram showing an embodiment of a wavelength measuring device according to the second invention.
【図３】従来の波長測定装置を示す図である。FIG. 3 is a diagram showing a conventional wavelength measuring device.
１ 部分反射鏡 ２ 全反射鏡あるいは部分反射鏡 ３ 拡散板 ４ 反射面間距離Ｌ1 のファブリ−ペローエタロン ５ 屈折率の温度係数がβ1 の媒質 ６ 焦点距離Ｆ1 の集光光学系 ７，１１，１５，１９，２４ 検出装置 ８ 反射面間距離Ｌ2 のファブリ−ペローエタロン ９ 屈折率の温度係数がβ2 の媒質 １０ 焦点距離Ｆ2 の集光光学系 １２ 反射面間距離Ｌ3 のファブリ−ペローエタロン １３ 屈折率の圧力係数がγ3 の媒質 １４ 焦点距離Ｆ3 の集光光学系 １６ 反射面間距離Ｌ4 のファブリ−ペローエタロン １７ 屈折率の圧力係数がγ4 の媒質 １８ 焦点距離Ｆ4 の集光光学系 ２０ 入射窓 ２１ ファブリ−ペローエタロン ２２ 反射面間媒質 ２３ 焦点距離Ｆ5 の集光光学系 ２５ 気密室 ２６ 温度制御装置 ２７ 圧力制御装置DESCRIPTION OF SYMBOLS 1 partial reflection mirror 2 total reflection mirror or partial reflection mirror 3 diffuser plate 4 Fabry-Perot etalon with distance L 1 between reflection surfaces 5 medium with temperature coefficient of refractive index β 1 6 focusing optics with focal length F 1 7, 11, 15, 19, 24 Detection device 8 Fabry-Perot etalon with inter-reflecting surface distance L 2 9 Medium with temperature coefficient of refractive index β 2 10 Condensing optical system with focal length F 2 12 Inter-reflecting surface distance L 3 Fabry - Perot etalon 13 the refractive index of the pressure coefficient of gamma 3 medium 14 focal length F 3 of the converging optical system 16 reflecting surface distance L 4 Fabry - Perot etalon 17 medium 18 the focus of the pressure coefficient of the refractive index is gamma 4 Focusing optical system with distance F 4 20 Entrance window 21 Fabry-Perot etalon 22 Medium between reflecting surfaces 23 Focusing optical system with focal length F 5 25 Airtight chamber 26 Temperature controller 27 Pressure controller
Claims (2)
成され、それぞれの干渉計のファブリ−ペローエタロン
の反射面間の媒質の屈折率の温度係数が異なっているこ
とを特徴とする波長測定装置。1. A wavelength measurement comprising two or more Fabry-Perot interferometers, wherein the temperature coefficient of the refractive index of the medium between the reflecting surfaces of the Fabry-Perot etalons of each interferometer is different. apparatus.
成され、それぞれの干渉計のファブリ−ペローエタロン
の反射面間の媒質の屈折率の圧力係数が異なっているこ
とを特徴とする波長測定装置。2. A wavelength measurement comprising two or more Fabry-Perot interferometers, wherein the pressure coefficient of the refractive index of the medium between the reflecting surfaces of the Fabry-Perot etalons of each interferometer is different. apparatus.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4286292A JPH05240709A (en) | 1992-02-28 | 1992-02-28 | Wavelength measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4286292A JPH05240709A (en) | 1992-02-28 | 1992-02-28 | Wavelength measuring device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH05240709A true JPH05240709A (en) | 1993-09-17 |
Family
ID=12647846
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4286292A Pending JPH05240709A (en) | 1992-02-28 | 1992-02-28 | Wavelength measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH05240709A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016200155A1 (en) * | 2015-06-08 | 2016-12-15 | 주식회사 고영테크놀러지 | Humid air forming device, inspection device comprising same, and inspection method |
-
1992
- 1992-02-28 JP JP4286292A patent/JPH05240709A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016200155A1 (en) * | 2015-06-08 | 2016-12-15 | 주식회사 고영테크놀러지 | Humid air forming device, inspection device comprising same, and inspection method |
| US10619870B2 (en) | 2015-06-08 | 2020-04-14 | Koh Young Technology Inc. | Humid air forming device, inspection device comprising same, and inspection method |
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