JPH05222451A - Production of ni-fe alloy - Google Patents

Production of ni-fe alloy

Info

Publication number
JPH05222451A
JPH05222451A JP4027882A JP2788292A JPH05222451A JP H05222451 A JPH05222451 A JP H05222451A JP 4027882 A JP4027882 A JP 4027882A JP 2788292 A JP2788292 A JP 2788292A JP H05222451 A JPH05222451 A JP H05222451A
Authority
JP
Japan
Prior art keywords
alloy
ingot
etching
shadow mask
oxygen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4027882A
Other languages
Japanese (ja)
Inventor
Takashi Mukai
孝 向井
Kiyotaka Takachio
清孝 高知尾
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Proterial Ltd
Original Assignee
Hitachi Metals Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Metals Ltd filed Critical Hitachi Metals Ltd
Priority to JP4027882A priority Critical patent/JPH05222451A/en
Publication of JPH05222451A publication Critical patent/JPH05222451A/en
Pending legal-status Critical Current

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  • Heat Treatment Of Steel (AREA)
  • Electrodes For Cathode-Ray Tubes (AREA)

Abstract

PURPOSE:To remarkably improve the occurrence of striped irregularity at the time of photoetching by subjecting an ingot of an Ni-Fe alloy where the contents of carbon, sulfur, and oxygen as impurities are regulated to specific values or below, respectively, to soaking treatment. CONSTITUTION:An ingot of an Ni-Fe alloy having a composition containing, by weight, <=0.005% C, <=0.003% S, and <=25ppm oxygen is heated and soaked up to a temp. between 1150 deg.C and the melting point and held for at least 3hr or more to undergo soaking treatment where Ni and Mn are sufficiently dispersed. This ingot is rolled into an extra thin alloy foil of about 0.15mm thickness and this foil is pierced by photoetching, by which a shadow mask is produced. By this method, the shadow mask excellent in etching characteristics, such as the uniformity of etching pits and the uniformity of etching velocity, and minimal in the occurrence of striped irregularity can be produced.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、主として大型テレビや
ディスプレイ用のブラウン管などに用いられるシャドウ
マスクに使用されるNi−Fe系合金の製造方法に関す
るものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for producing a Ni-Fe alloy used for a shadow mask mainly used for cathode ray tubes for large-sized televisions and displays.

【0002】[0002]

【従来の技術】アンバー合金として知られる36Ni−F
e系合金をはじめとするNiを20〜60%含有する鉄合金
は、優れた低熱膨張係数を示すことから、カラーテレビ
やコンピュータ用ビデオディスプレイ等のブラウン管に
使用されるシャドウマスクの素材として注目されてい
る。特にカラーテレビやビデオディスプレイに対して
は、高精細化への社会的な要請がますます高まろうとし
ている。これは従来用いられていた軟鋼製のシャドウマ
スクに比べて、電子ビームの衝突による温度上昇に伴う
熱膨張が小さいため、画像の色ズレ等の不都合が小さい
ためである。
36 Ni-F known as Amber alloy
Iron alloys containing 20 to 60% Ni, such as e-based alloys, have an excellent low thermal expansion coefficient, and are therefore attracting attention as materials for shadow masks used in cathode ray tubes for color TVs, computer video displays, and the like. ing. Especially for color TVs and video displays, social demands for higher definition are increasing. This is because thermal expansion due to temperature rise due to electron beam collision is small compared to the conventionally used shadow mask made of mild steel, and therefore inconvenience such as image color misregistration is small.

【0003】[0003]

【発明が解決しようとする課題】しかしながら、このN
i−Fe系合金製シャドウマスクを厚さ 0.15mm程度の
極薄合金帯からフォトエッチングにより穿孔して製造す
る際、すじむら、きぬ目、すじ目(以下代表して、すじ
むらと記す)と称される欠陥が発生することがある。こ
のすじむらは、フォトエッチングにより穿孔された孔の
径あるいは形状がすじ状に不揃いの部分ができる現象で
あり、程度の著しい場合には、このシャドウマスクを用
いたブラウン管の画像に歪が生じる恐れがあるため、シ
ャドウマスクとして使用できない。従来から、このすじ
むらの発生原因のひとつとして、非金属介在物の存在が
あげられ、出発原料の厳選や各種精錬法による介在物の
低減が検討されている。しかし、これらはすじむらを低
める効果はあるものの満足できるものではなかった。
However, this N
When a shadow mask made of an i-Fe alloy is manufactured by punching an ultrathin alloy band having a thickness of about 0.15 mm by photoetching, streaks, creases, and creases (representatively referred to as streaks) are used. A so-called defect may occur. This streak is a phenomenon in which the diameter or shape of the holes punched by photoetching is uneven in the form of streaks. Therefore, it cannot be used as a shadow mask. Conventionally, the existence of non-metallic inclusions has been cited as one of the causes of this streaking, and careful selection of starting materials and reduction of inclusions by various refining methods have been studied. However, although these have the effect of reducing streaks, they are not satisfactory.

【0004】これに対して、特公昭61−23864号
あるいは特公昭63−64514号などでは、すじむら
の原因をNiのミクロ偏析であるとして、前者はNi−
Fe系合金鋳塊を850℃以上、融点以下の温度で加熱
し、1ヒートまたは2ヒート以上で、断面減少率 40%以
上の条件で、また後者は前記鋳塊をエレクトロスラグ溶
解炉あるいは真空脱ガス炉等で溶製後、1150℃で熱間圧
延し、厚さ 5mm板とした後に適宜1100℃×1時間以上の
熱処理を行なって、それぞれNiのミクロ偏析を解消す
る方法が提案されている。これらの方法とてもすじむら
を完全に解消するまでには至らず、製品歩留が低いこと
からコストも高くNi−Fe系合金のシャドウマスクの
普及を妨げていたため、さらなる改善が望まれていた。
本発明の目的は、これまでのNi−Fe系合金のシャド
ウマスクのフォトエッチング時のすじむらを大幅に改善
し得るNi−Fe系合金の製造方法を提供することであ
る。
On the other hand, in Japanese Examined Patent Publication No. 61-23864 or Japanese Examined Patent Publication No. 63-64514, it is considered that the cause of streaking is Ni micro-segregation and the former is Ni-.
The Fe-based alloy ingot is heated at a temperature of 850 ° C. or higher and a melting point or lower, and the heat treatment is performed for 1 heat or 2 heats or more and the cross-section reduction rate is 40% or more. After melting in a gas furnace or the like, hot rolling at 1150 ° C to make a plate with a thickness of 5 mm, and then appropriately heat-treating at 1100 ° C for 1 hour or more to eliminate the Ni microsegregation, respectively. . These methods have not been able to completely eliminate the streak, and the low product yield has caused a high cost, which has hindered the widespread use of shadow masks of Ni—Fe alloys, and therefore further improvements have been desired.
An object of the present invention is to provide a method for producing a Ni—Fe based alloy capable of significantly improving the streak unevenness during photo-etching of the conventional Ni—Fe based alloy shadow mask.

【0005】[0005]

【課題を解決するための手段】発明者は、このすじむら
を解消するために研究を重ね、すじむらの原因が圧延方
向に展伸された微細な線状、あるいは連鎖状の非金属介
在物、さらにはNiやMnなどの偏析がフォトエッチン
グ性にミクロ的な差を生じ、その結果、肉眼ですじ状に
見えることを知見した。さらに詳しくは、幅 2μm、長
さ 250μm程度の極微細な線状あるいは連鎖状の非金属
介在物であっても、高精細ブラウン管に用いられるシャ
ドウマスクのようにドットピッチが0.20mm程度になると
使用上問題となることがわかった。このような、すじむ
らの原因となる微細な非金属介在物の種類には、マンガ
ンシリケート、マンガンオキサイド、マンガンサルファ
イド、カルシウムアルミネート、酸化鉄などの線状非金
属介在物およびアルミナ、ジルコニアなどの連鎖状非金
属介在物などがある。
Means for Solving the Problems The inventor has conducted extensive research to eliminate this streak, and the cause of the streak is a fine linear or chain-like non-metallic inclusion that is spread in the rolling direction. Furthermore, it was found that the segregation of Ni, Mn, etc. causes a microscopic difference in the photoetching property, and as a result, it looks like streaks with the naked eye. More specifically, even if it is an ultrafine linear or chained non-metallic inclusion with a width of 2 μm and a length of about 250 μm, it will be used when the dot pitch becomes about 0.20 mm like the shadow mask used for high definition cathode ray tubes. Turns out to be a problem. Such types of fine nonmetallic inclusions that cause streaking include linear nonmetallic inclusions such as manganese silicate, manganese oxide, manganese sulfide, calcium aluminate, and iron oxide, and alumina, zirconia, and the like. There are chain-like non-metallic inclusions.

【0006】上記の非金属介在物のうち、マンガンサル
ファイドを除いては、すべて酸化物であり、本発明はマ
ンガンサルファイドを低減するとともに、酸化物の数量
を最少限とする一方、NiやMnの偏析を解消し、同時
にフォトエッチング速度の観点からC含有量を低めたN
i−Fe系合金の製造方法に関するものである。すなわ
ち本発明は、重量%で、不純物である炭素、硫素、酸素
がそれぞれC 0.005%以下、S 0.003%以下、酸素含有量
が25ppm以下のNi−Fe系合金鋳塊をソーキング処理
することを特徴とするNi−Fe系合金の製造方法であ
る。
Of the above non-metallic inclusions, except for manganese sulfide, all are oxides, and the present invention reduces manganese sulfide and minimizes the number of oxides, while reducing the amount of Ni and Mn. N that eliminates segregation and at the same time reduces the C content from the viewpoint of photoetching rate.
The present invention relates to a method for manufacturing an i-Fe alloy. That is, the present invention is to soak a Ni-Fe alloy ingot containing C, 0.005% or less of S, 0.003% or less of C, 0.003% or less of oxygen, and 25 ppm or less of oxygen content as impurities, respectively, in weight%. It is a method for producing a characteristic Ni-Fe alloy.

【0007】[0007]

【作用】本発明でいうNi−Fe系合金とは、Fe基の
合金で少なくともNiが20ないし60%含まれているもの
であり、その合金帯がシャドウマスク用に使用されてい
るものに限定される。但し、Niが上記の範囲であれ
ば、合金の脱酸や強化のために添加される、例えばS
i,Mn,Mg,B,Cr,Mo,Vなどの他の元素が
含まれても良いものとする。以下に、各元素の限定理由
について述べる。
The Ni-Fe alloy as used in the present invention is an Fe-based alloy containing at least 20 to 60% Ni, and the alloy strip is limited to those used for shadow masks. To be done. However, if Ni is in the above range, it is added to deoxidize or strengthen the alloy, for example, S
Other elements such as i, Mn, Mg, B, Cr, Mo and V may be included. The reasons for limiting each element will be described below.

【0008】Cは、0.005%を越えると、エッチング速度
が極度に遅くなり、生産性を著しく阻害するばかりでな
く、すじむらを生成しやすくなるため、不純物としての
上限を0.005%に限定する。Sは、不純物として0.003%を
越えると硫化物系の非金属介在物が多くなり、すじむら
不良の原因となるために、その上限を0.003%に限定す
る。酸素は不純物として前述のように線状ないし連鎖状
の非金属介在物の主な構成元素であり、合金帯をフォト
エッチングする際のすじむらの原因になるため、その上
限を25ppmとする。
If the content of C exceeds 0.005%, the etching rate becomes extremely slow and not only the productivity is significantly hindered, but also the streaking is likely to occur, so the upper limit as an impurity is limited to 0.005%. If S exceeds 0.003% as an impurity, the amount of sulfide-based non-metallic inclusions increases, which causes uneven streaks. Therefore, the upper limit of S is limited to 0.003%. As described above, oxygen is a main constituent element of the linear or chain-shaped non-metallic inclusions as an impurity and causes streaking when photo-etching the alloy strip. Therefore, the upper limit is set to 25 ppm.

【0009】このように不純物元素として、C,Sおよ
び酸素含有量を制限したNi−Fe系合金の鋳塊はNi
やMnを高温で十分拡散させるためにソーキング処理を
行なう。前述の特公昭61−23864号では、鋳造す
るために鋳塊を短時間加熱するものであるが、本発明に
よれば鋳塊を少なくとも1150℃以上、融点以下の温度に
加熱し、鋳塊寸法にもよるが、例えば300mmφ以上で
は、均熱後最低3時間以上に十分保持する時間的経過を
経る拡散工程が必要である。また、前述の特公昭63−
64514号では、具体的に1150℃で熱間圧延し、厚さ
5mm板とした後に1100℃×1時間以上の熱処理でNiの
拡散処理することが開示されている。ところが、板材の
高温処理では表面積が著しく大きいため、多量の酸化層
の発生または特別な雰囲気中で熱処理を行なう必要があ
り、多大な費用と装置を要する。
As described above, the ingot of the Ni--Fe alloy in which the contents of C, S and oxygen as the impurity elements are limited is Ni.
Soaking treatment is performed in order to sufficiently diffuse Mn and Mn at high temperature. In the above-mentioned Japanese Patent Publication No. 61-23864, the ingot is heated for a short time for casting, but according to the present invention, the ingot is heated to a temperature of at least 1150 ° C. or higher and a melting point or lower to obtain the ingot size. Depending on the condition, for example, when the diameter is 300 mm or more, a diffusion process is required in which sufficient time is maintained for at least 3 hours after soaking. In addition, the aforementioned Japanese Patent Publication No. 63-
In No. 64514, the thickness was hot rolled at 1150 ° C.
It is disclosed that after forming a 5 mm plate, the diffusion treatment of Ni is performed by heat treatment at 1100 ° C. for 1 hour or more. However, since the surface area of a plate material is extremely large in the high temperature treatment, it is necessary to generate a large amount of an oxide layer or to perform heat treatment in a special atmosphere, which requires a large amount of cost and equipment.

【0010】本発明によれば、ソーキング処理は鋳塊の
段階で行なうため、表面積も小さく、酸化防止剤等を塗
布すれば、大気中で実施することができ、経済的にも有
利である。このように本発明によれば、Ni−Fe系合
金のC,Sおよび酸素の含有量をそれぞれ特定量以下に
限定し、さらに鋳塊をソーキング処理することで、はじ
めてエッチング時の孔の均一性、エッチング速度の均一
性といったエッチング性に優れ、しかもすじむらの発生
を最少限としたシャドウマスクを提供できるのである。
According to the present invention, since the soaking treatment is performed at the stage of the ingot, it has a small surface area and can be carried out in the atmosphere if an antioxidant or the like is applied, which is economically advantageous. As described above, according to the present invention, the contents of C, S and oxygen in the Ni—Fe alloy are limited to specific amounts or less, respectively, and the ingot is subjected to a soaking treatment, so that the uniformity of pores at the time of etching is not increased. In addition, it is possible to provide a shadow mask that has excellent etching properties such as uniformity of etching rate and that minimizes the occurrence of streaking.

【0011】以下、実施例にて本発明の説明を行なう。
まず、真空誘導溶解炉に低C、低Sの鉄源を装入し、N
iを装入後、真空中にて溶解後、脱炭反応を行なわせ、
その後脱酸剤を添加することにより脱酸し、その後、真
空中で鋳造を行ない、C:0.004%、S:0.002%、酸素含
有量が20ppmの鋼塊を鋳造し、続いて1280℃でソーキン
グ処理後、鍛造圧延し、冷間圧延後の0.15mm、厚さの鋼
帯でのきぬ目の発生状況を調査した。また、他の組成お
よびソーキング処理を実施しない場合等のすじむらの発
生状況も含め、表1に比較鋼2〜4として示した。
The present invention will be described below with reference to examples.
First, charge a vacuum induction melting furnace with a low C, low S iron source, and
After charging i, melted in vacuum and then decarburized,
Then deoxidize by adding a deoxidizer, and then cast in vacuum to cast a steel ingot with C: 0.004%, S: 0.002% and oxygen content of 20 ppm, and then soaking at 1280 ° C. After the treatment, forging and rolling, and the cold rolling, the occurrence state of the crevices in the 0.15 mm thick steel strip was investigated. In addition, Table 1 shows Comparative Steels 2 to 4 including other compositions and the occurrence of streaking when no soaking treatment is performed.

【0012】[0012]

【表1】 [Table 1]

【0013】表1にて、No.1が本発明鋼であるが、
S,Oとも低く、かつソーキング処理を実施した場合に
はすじむらは発生しないが、No.2,3,4,5の如く、S,
Oのいずれかが高いか、ソーキング処理を実施しない場
合には、前記のような理由により、すじむら模様が発生
する。したがって、S,Oとも低減し、かつソーキング
処理を実施することによって、はじめてすじむらの発生
を防止することができる。なお、Cについては、エッチ
ング効率の関係で極低C化する必要があり、すじむらの
発生と直接関係はない。
In Table 1, No. 1 is the steel of the present invention,
Both S and O are low, and no streaking occurs when soaking treatment is performed, but as in Nos. 2, 3, 4, and 5, S,
If either of the values of O is high or if the soaking process is not performed, a streak pattern is generated due to the above reason. Therefore, it is possible to prevent the occurrence of streaking for the first time by reducing both S and O and performing the soaking process. Note that, regarding C, it is necessary to make extremely low C in relation to etching efficiency, and it is not directly related to occurrence of streaking.

【0014】[0014]

【発明の効果】以上述べた如く、C,S,Oを下げるだ
けでなく、鋳塊の状態でソーキング処理により、偏析を
低減してはじめてエッチング速度に優れ、しかもすじむ
らのない高品質の36Ni−Fe系合金をはじめとするN
i−Fe系合金を製造することができるため、安定的に
品質の良好なシャドウマスク材を供給することができ、
その工業的意義は大きい。
As described above, not only the C, S, and O are lowered, but also the soaking process is performed in the state of the ingot to reduce the segregation, and the etching rate is excellent, and the high quality 36Ni without streaks is obtained. -Fe based alloys and other N
Since it is possible to produce an i-Fe alloy, it is possible to stably supply a good quality shadow mask material,
Its industrial significance is great.

───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.5 識別記号 庁内整理番号 FI 技術表示箇所 // C21D 8/02 Z 7412−4K ─────────────────────────────────────────────────── ─── Continuation of front page (51) Int.Cl. 5 Identification code Office reference number FI technical display location // C21D 8/02 Z 7412-4K

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 重量%で、不純物である炭素、硫素、酸
素がそれぞれC 0.005%以下、S 0.003%以下、酸素含有
量が25ppm以下のNi−Fe系合金鋳塊をソーキング処
理することを特徴とするNi−Fe系合金の製造方法。
1. A soaking treatment is performed on a Ni—Fe alloy ingot containing C 0.005% or less, S 0.003% or less, and an oxygen content of 25 ppm or less, which are impurities such as carbon, sulfur, and oxygen in weight%. A method for producing a characteristic Ni-Fe alloy.
JP4027882A 1992-02-14 1992-02-14 Production of ni-fe alloy Pending JPH05222451A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4027882A JPH05222451A (en) 1992-02-14 1992-02-14 Production of ni-fe alloy

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4027882A JPH05222451A (en) 1992-02-14 1992-02-14 Production of ni-fe alloy

Publications (1)

Publication Number Publication Date
JPH05222451A true JPH05222451A (en) 1993-08-31

Family

ID=12233267

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4027882A Pending JPH05222451A (en) 1992-02-14 1992-02-14 Production of ni-fe alloy

Country Status (1)

Country Link
JP (1) JPH05222451A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1205269A1 (en) * 1999-05-27 2002-05-15 Toyo Kohan Co., Ltd. Casting slab for shadow mask, method for heat treatment therof and material for shadow mask

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6184356A (en) * 1984-09-29 1986-04-28 Dainippon Printing Co Ltd Raw material for use in fine etching
JPS61113746A (en) * 1984-11-07 1986-05-31 Nippon Mining Co Ltd Material for shadow mask
JPH01252725A (en) * 1988-03-31 1989-10-09 Nippon Steel Corp Manufacture of fe-ni alloy sheet for shadow mask
JPH03191024A (en) * 1989-12-20 1991-08-21 Nippon Mining Co Ltd Manufacture of iron-nickel base alloy stock for shadow mask
JPH05214492A (en) * 1991-12-12 1993-08-24 Nkk Corp Fe-ni alloy excellent in sticking and seizure preventing property at the time of annealing and gas diffusing property and its production

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6184356A (en) * 1984-09-29 1986-04-28 Dainippon Printing Co Ltd Raw material for use in fine etching
JPS61113746A (en) * 1984-11-07 1986-05-31 Nippon Mining Co Ltd Material for shadow mask
JPH01252725A (en) * 1988-03-31 1989-10-09 Nippon Steel Corp Manufacture of fe-ni alloy sheet for shadow mask
JPH03191024A (en) * 1989-12-20 1991-08-21 Nippon Mining Co Ltd Manufacture of iron-nickel base alloy stock for shadow mask
JPH05214492A (en) * 1991-12-12 1993-08-24 Nkk Corp Fe-ni alloy excellent in sticking and seizure preventing property at the time of annealing and gas diffusing property and its production

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1205269A1 (en) * 1999-05-27 2002-05-15 Toyo Kohan Co., Ltd. Casting slab for shadow mask, method for heat treatment therof and material for shadow mask
EP1205269A4 (en) * 1999-05-27 2004-12-22 Toyo Kohan Co Ltd Casting slab for shadow mask, method for heat treatment therof and material for shadow mask

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