JPH05215807A - Element characteristic measuring device - Google Patents

Abstract

PURPOSE:To confirm the characteristic measurement easily by enabling a characteristic curve sample to be seen when a characteristic is selected. CONSTITUTION:When an element characteristic measuring device is placed in a catalog mode, an element menu 22 to be measured in order to select a kind of an element to be measured and a characteristic menu 24 on which plural number of characteristics relating to the element, are displayed on a display device. When the characteristics to be measured are selected by using these menus, a typical sample having the selected characteristics is displayed in a characteristic sample display area 28 on an image screen.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an element characteristic measuring apparatus for measuring various characteristics of semiconductors and other elements.

[0002]

2. Description of the Related Art A curve tracer is a device for measuring various characteristics of semiconductor elements such as transistors and thyristors, and other electronic elements and optical semiconductor elements.
FIG. 4 is a block diagram showing the basic configuration of a conventional curve tracer. The CPU 100 transfers R via the bus 102.
Program data in an OM (Read Only Memory) 104 or input data by operating the input device 106 is received, and other components are controlled via the bus 102 according to these data. The input device 104 is a push
The input device is a combination of an operation panel having keys, a display screen and push keys, or a touch panel input device using the display screen. The measurement circuit 108 is a CPU
(Central processing unit) 100 controlled variable voltage source,
It includes three measuring units that function as a variable current source, a voltage measuring circuit and a current measuring circuit, or perform grounding and opening. Under the control of the CPU 100, the measurement circuit 108
From the output terminal of the first set to the DUT (device under test) 110
Supply test signal to. In FIG. 3, the DUT 110 is a bipolar transistor, and for example, the collector-emitter voltage VCE-collector current IC of this transistor is used.
In order to measure the characteristics, a constant voltage is supplied to the collector, a staircase current is supplied to the base, and the emitter is grounded. As a result, the X and Y analog signals corresponding to VCE and IC, respectively, are output from the second set of output terminals of the measuring circuit 108 for each step.

ADC (analog / digital converter) 11
2 is a clock generator 1 controlled by the CPU 100
At the timing of the sampling clock fs from 14, the X and Y analog signals are converted into X and Y digital data, respectively. The X and Y digital data from the ADC 112 is address-controlled by the CPU 100 and stored in the memory 116. The display control circuit 118 displays the X and Y digital data read from the memory 116 on the display device 120 such as a cathode ray tube as horizontal axis and vertical axis data, respectively, as shown in FIG. The collector-emitter voltage VCE-collector current IC characteristics of the DUT 110, which is a transistor, are displayed. In such a curve tracer, in addition to this characteristic measurement, DU
By controlling the function of the measurement unit connected to each terminal of T110, various characteristics other than the ICBO-VCBO characteristics, β-IC characteristics, IC-VBE characteristics shown in FIGS. 5B, 5C and 5D are obtained. Can be measured and displayed.

[0004]

In the above curve tracer, the function of each measuring unit is selected by rewriting the table of the measuring unit displayed on the screen in order to set the measuring condition for each characteristic. These tables are stored, for example, with names such as ICE-VCE and ICBO-VCBO, and thereafter, by calling this, the DUT measurement conditions are automatically set. The characteristic measurement condition to be stored is D
Depending on the UT, many may be needed. 4A-
As shown in FIG. 4D, each characteristic curve has a characteristic, and the operator often recognizes each characteristic measurement in association with the shape of the characteristic curve. Therefore, if the sample of the characteristic curve can be seen when the measurement condition to be used is selected, the target characteristic measurement can be easily confirmed.

Therefore, an object of the present invention is to provide an element characteristic measuring apparatus for displaying a sample of the result of the intended measurement in advance.

[0006]

A device characteristic measuring apparatus according to the present invention comprises a CPU 100, a storage device 104, an input device 106 such as a touch panel, and a display device 1.
Have twenty. The storage device stores a program for performing the processing of the device of the present invention. When the device is placed in catalog mode, a DUT menu for selecting the type of device under test and a properties menu listing a plurality of properties for that device are displayed on the display device. When the characteristic to be measured is selected using these menus, a representative sample of the selected characteristic is displayed in the characteristic sump display area on the screen.

[0007]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The element characteristic measuring apparatus of the present invention has the same configuration as that shown in FIG. 4, but the ROM 104 stores a program for performing the processes described below. Figure 2
Is a display device 1 when the configuration (CONFIG) mode, which is one mode of the device characteristic measuring apparatus of the present invention, is selected.
20 shows a display example. The screen of the display device 120 is used for the touch panel input device 106, and the operation by the operator is performed by touch input. At the top of the configuration mode display is the mode used by this device, namely measurement (MEA
SURE mode, disk (DISK) mode, program (PROG) mode, utility (UTIL)
A group of soft keys 10 for selecting the ITY mode and the CATALOG mode is arranged in the lateral direction. Further, this display has a connection area 12, a graph display setting area 16, a measurement mode setting area 14, and a signal source setting area 18.

The connection region 12 shows the state of the measurement unit in the measurement circuit 108 for the DUT 110, and the terminals of the device under test represented by the central square are connected to the current source, the voltage source, the ground potential, or opened. The situation is drawn.
When changing the signal source connected to each terminal, for example,
To change the illustrated I (current source) to V (voltage source),
Touching the target "I" in connection area 12 will bring up a menu with the letters V and I on the screen, and touching "V" in that menu will change I to V. Also, when a finger or the like is touched on the central portion of the region of the device under test, the display is switched as shown in FIG. Touching one of these boxes will return the screen to the CONFIG mode display and the connection sample in the selected box will be displayed in the connection area 12.
Displayed in. At the same time, the measuring circuit 108 is the CPU
The connection state of the selected connection sample is controlled by 100.

The graph display setting area 14 is divided into equal scales (LIN) on the horizontal and vertical axes of the graph displaying the measurement results.
Or a logarithmic scale (LOG) is an area to be selected, and this selection can be performed in the same manner as when I or V is selected in the connection area 12. Further, the graph display setting area 14 has a graph display area for displaying already measured results, and the graph in the graph display area also changes according to the change of the display setting. Normally, the characteristic curve as the measurement result is displayed in most of the screen area for observation by switching to the above-mentioned measurement mode. Since there is a graph display area inside, it is not necessary to switch to the measurement mode each time the display settings are changed. This allows
The measurement condition setting and the display state setting can be performed using one screen of the configuration mode display, and the troublesome operation is reduced.

The measurement mode setting area 14 and the signal source setting area 18 are areas for setting the type, generation condition and value of the signal used for measurement, but the description thereof is omitted here.

In configuration mode, CA of soft key group 10
Select the TALOG key to enter catalog mode. FIG. 1 shows a catalog mode display screen, which has a connection area 20, a DUT menu area 22, a characteristic menu area 24, a measurement mode setting area 26 and a characteristic sample display area 28. In the configuration mode described above, the connection area 12, the measurement mode setting area 16 and the signal source setting area 18 are used to select individual items and set the measurement conditions, but in the catalog mode, the menus 22 and 2 are used.
4 can be used to set the measurement conditions for a typical characteristic measurement. In the DUT menu area 22, N
Type FET (FET N), P type FET (FET P), N
PN type bipolar transistor (BJT NPN),
PNP type bipolar transistor (BJT PNP)
A device under test, which is a diode (DIODE), is prepared. For example, if the element to be measured is an NPN type bipolar transistor, as shown in FIG.
Select PN. If you select the type of DUT like this,
The properties typically measured for that DUT are displayed in the properties menu 24. In Fig. 1, 10 characteristics of BJT NPN are displayed. Among these characteristics, IC-VC
This indicates that the E characteristic has been selected. When a specific characteristic is selected, the connection state for measuring the selected characteristic is displayed in the connection area 20, and the generation condition of the signal source used for the measurement is displayed in the measurement mode setting area 26. .. Corresponding to this display, the CPU 100 sets the measuring unit in the measuring circuit 108.

One of the characteristics of the measuring device of the present invention is that when a characteristic is selected using the menus 22 and 24, a representative sample of the characteristic curve is displayed in the characteristic sample display area 28. In FIG. 1, a representative sample of the characteristic curve of the IC-VCE characteristic of the NPN bipolar transistor is displayed in the characteristic sample display area. This sample does not display the measurement result by this characteristic device, but it is the characteristic curve displayed as a result of programming to draw a specific characteristic curve by selecting each characteristic in the menus 22 and 24. Please note. In the properties menu, select another property, for example ICBO-VCBO.
When the characteristic, β-IC characteristic or IC-VBE characteristic is selected, the characteristic curves of FIGS. 5B to 5D are displayed in the characteristic sample display area. The characteristic operator often recognizes each characteristic by the shape of the characteristic curve based on the characteristic curve published in the device catalog, etc., so displaying such a characteristic sample is the purpose of the operator. It is very useful to confirm that the setting of the characteristic measurement is done.

[0013]

According to the device characteristic measuring apparatus of the present invention, when the characteristic measuring condition is selected, the sample of the characteristic curve can be seen, so that the desired characteristic measurement can be easily confirmed.

[Brief description of drawings]

FIG. 1 is a diagram showing a catalog mode display screen of an element characteristic measuring device of the present invention.

FIG. 2 is a diagram showing a configuration mode display screen of the device of the present invention.

FIG. 3 is a diagram showing a screen displaying a connection sample in the configuration mode of FIG.

FIG. 4 is a block diagram showing the hardware of the device of the present invention.

FIG. 5 is a graph showing various characteristics of a bipolar transistor.

[Explanation of symbols]

 100 CPU 104 Storage device 106 Input device 120 Display device

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Yoshinori Sada 5-9-31 Kita-Shinagawa, Shinagawa-ku, Tokyo Inside Sony Tektronix Co., Ltd. (72) Osamu Hosoi 5--9, Kitashinagawa, Shinagawa-ku, Tokyo No. 31 within Sony Tektronix Co., Ltd.

Claims (1)

[Claims] 1. An element characteristic measuring apparatus characterized in that a sample of characteristics to be measured of an element to be measured is displayed in a graph before measurement.