JPH0519930Y2

JPH0519930Y2 -

Info

Publication number: JPH0519930Y2
Application number: JP17432087U
Authority: JP
Priority date: 1987-11-13
Filing date: 1987-11-13
Publication date: 1993-05-25
Anticipated expiration: 2002-11-13
Also published as: JPH0179262U

Description

【考案の詳細な説明】〔分野の概要〕本考案は電磁石の磁極部と真空箱とを一体化構
造とした、ビーム分析用電磁石、或いはビーム偏
向電磁石に係り、特に真空箱の役割も兼ねている
磁極部を、電磁石を分解せずに取り外し可能とし
た電磁石磁極部の構造に関するものである。[Detailed description of the invention] [Overview of the field] The present invention relates to an electromagnet for beam analysis or a beam deflection electromagnet, which has an integrated structure of the magnetic pole part of the electromagnet and a vacuum box. This invention relates to a structure of an electromagnet magnetic pole part that can be removed without disassembling the electromagnet.

[Contents and problems of conventional technology]

磁極部と真空箱が一体化した構造の電磁石は、
磁極部が真空箱の上下板を兼ねているので、真空
箱をはさみ込むタイプの電磁石に比べて磁極間隙
を小さくすることができる。 The electromagnet has a structure in which the magnetic pole part and the vacuum box are integrated.
Since the magnetic pole parts also serve as the upper and lower plates of the vacuum box, the gap between the magnetic poles can be made smaller compared to an electromagnet that sandwiches the vacuum box.

従つて、このような構造の電磁石は、電磁石が
置かれるスペースに制約があつたり、重量が制限
される場合等、電磁石の小型化を計る時に用いら
れる。しかし、長時間使用していくにつれて、真
空室内面に不要のガスが吸着し真空度が低下して
くるので、時々真空度を向上する目的で真空室を
200ないし300℃に加熱し、真空に引く所謂真空引
きを行なう必要があるが、従来この様な構造の電
磁石は、真空引きを行なうために電磁石を分解し
て磁極部を取り出さねばならず、真空引きの度に
電磁石の分解、組立を行なわねばならない欠点が
あつた。 Therefore, an electromagnet having such a structure is used when reducing the size of the electromagnet, such as when the space in which the electromagnet is placed is limited or the weight is limited. However, as the vacuum chamber is used for a long time, unnecessary gases are adsorbed on the inside of the vacuum chamber and the vacuum level decreases, so sometimes the vacuum chamber is opened to improve the vacuum level.
It is necessary to heat the electromagnet to 200 to 300°C and draw a vacuum, which is called vacuuming. Conventionally, electromagnets with this type of structure had to be disassembled to take out the magnetic poles in order to vacuum. The drawback was that the electromagnet had to be disassembled and reassembled each time it was pulled.

[Purpose of invention]

本考案はこのような欠点を除去するため、電磁
石全体の分解を行なうことなく磁極部のみの取り
外しが可能になるようにしたもので、容易に真空
引きができる構造の電磁石を提供することを目的
とする。 The purpose of this invention is to eliminate these drawbacks by making it possible to remove only the magnetic pole part without disassembling the entire electromagnet, and to provide an electromagnet with a structure that can be easily evacuated. shall be.

[Structure of the idea]

本考案は容易に真空引きができるように、磁極
部のみの着脱が可能になるよう構成したもので、
磁極部の着脱部をはめ合い方式とし、またその位
置決めにピンを使用していることを特徴とする。 This invention is designed so that only the magnetic pole part can be attached and detached so that vacuum can be easily drawn.
It is characterized in that the attachment and detachment of the magnetic pole part is a fitting method, and a pin is used for positioning.

〔Example〕

以下本考案の実施例を図面を参照して説明す
る。 Embodiments of the present invention will be described below with reference to the drawings.

第１図に、磁極部と真空箱が一体化した構造の
電磁石の一例を示す。第１図ａはその平面図、ｂ
はＡ−Ａ部における断面図を示す。上下磁極は真
空箱の上下板に相当し、真空箱の側板は磁極部に
直接非磁性板の真空シール用ステンレス板４を溶
接により固定し内部を密封しており、上下の磁極
２と真空シール用ステンレス板４に囲まれた空間
は真空に引かれ、内部を原子ビームが走行する。
第２図は第１図Ｂ部の拡大図で上下磁極間には溶
接等の影響によつて、磁極間隙寸法が狂わないよ
う、例えばステンレスのSUS304で作つた非磁性
のスペーサ５を挿入し、また上下磁極間は真空シ
ール用非磁性板４を用い、板幅の両側は磁極に溶
接し真空室を形成している。非磁性板にはステン
レスのSUS304の板を使用している。さらに、磁
極部全体は、第３図に示すようテーパ、又は平行
構造のはめ合い方式となつており、第３図は第１
図に於ける磁極２の部分の端面を示す図であり、
磁極を含む真空室７はピン６を利用することによ
り磁極の位置決めができる構造としてある。ま
た、第４図は電磁石装置の側面から見た図である
が、側面側もピン６を用い電磁石を真空室に固定
する。従つてこのピン６を取り外し、電磁石本体
側を移動することにより真空を保持したまま、一
部の磁極部を取り付けた真空室を取り出し真空引
きを行なうことが可能となる。 FIG. 1 shows an example of an electromagnet with a structure in which a magnetic pole part and a vacuum box are integrated. Figure 1 a is its plan view, b
shows a cross-sectional view at section A-A. The upper and lower magnetic poles correspond to the upper and lower plates of the vacuum box, and the side plate of the vacuum box has a non-magnetic vacuum sealing stainless steel plate 4 directly fixed to the magnetic pole part by welding to seal the inside, and the vacuum seal is sealed with the upper and lower magnetic poles 2. The space surrounded by the stainless steel plate 4 is evacuated, and the atomic beam travels inside.
Figure 2 is an enlarged view of part B in Figure 1.A non-magnetic spacer 5 made of stainless steel SUS304, for example, is inserted between the upper and lower magnetic poles to prevent the magnetic pole gap dimension from being distorted due to effects such as welding. A non-magnetic plate 4 for vacuum sealing is used between the upper and lower magnetic poles, and both sides of the plate width are welded to the magnetic poles to form a vacuum chamber. A stainless steel SUS304 plate is used for the non-magnetic plate. Furthermore, the entire magnetic pole part has a tapered or parallel structure fitting method as shown in Figure 3, and Figure 3
It is a diagram showing the end face of the magnetic pole 2 part in the figure,
The vacuum chamber 7 containing the magnetic poles has a structure in which the position of the magnetic poles can be determined by using pins 6. Furthermore, although FIG. 4 is a side view of the electromagnet device, pins 6 are also used on the side surface to fix the electromagnet in the vacuum chamber. Therefore, by removing this pin 6 and moving the electromagnet main body side, it becomes possible to take out the vacuum chamber to which some of the magnetic pole parts are attached and evacuate it while maintaining the vacuum.

尚、このような磁極部構造は、磁極が平行な構
造のものだけでなく、傾斜した構造の磁極にも適
用できる。 Incidentally, such a magnetic pole structure can be applied not only to a structure in which the magnetic poles are parallel, but also to a magnetic pole in an inclined structure.

[Effect of idea]

以上述べたごとく本考案によれば、電磁石全体
を分解せずに磁極部の一部を取り外すのみで、容
易に磁極部の上下面を真空室の一部に利用した電
磁石装置の真空引きを行なえる小型、軽量化した
ビーム分析用、或いはビーム偏向用電磁石が提供
できるようになつた。 As described above, according to the present invention, an electromagnet device that uses the upper and lower surfaces of the magnetic pole part as part of the vacuum chamber can be easily evacuated by simply removing a part of the magnetic pole part without disassembling the entire electromagnet. It has now become possible to provide a compact and lightweight electromagnet for beam analysis or beam deflection.

[Brief explanation of the drawing]

第１図は、磁極部と真空箱が一体化した構造の
電磁石の一例を示す図で、ａは電磁石全体の平面
図、ｂはａのＡ−Ａ断面図である。第２図は、第
１図のＢ部の詳細を示す図。第３図は、分離可能
な磁極部（真空室）の着脱のしくみを示した図
で、第１図に於ける電磁石端面の図。第４図は、
分離可能な磁極部（真空室）を電磁石の磁極にピ
ンで取り付けた図。１……コイル、２……磁極、３……フランジ、
４……真空シール用非磁性板、５……非磁性スペ
ーサ、６……ピン、７……磁極、真空シール用非
磁性板を含む真空室。 FIG. 1 is a diagram showing an example of an electromagnet having a structure in which a magnetic pole part and a vacuum box are integrated, in which a is a plan view of the entire electromagnet, and b is a sectional view taken along line A-A of a. FIG. 2 is a diagram showing details of section B in FIG. 1. FIG. 3 is a diagram showing a mechanism for attaching and detaching a separable magnetic pole part (vacuum chamber), and is a view of the end face of the electromagnet in FIG. 1. Figure 4 shows
A diagram showing a separable magnetic pole part (vacuum chamber) attached to the magnetic pole of an electromagnet with a pin. 1...Coil, 2...Magnetic pole, 3...Flange,
4...Nonmagnetic plate for vacuum sealing, 5...Nonmagnetic spacer, 6... Pin, 7... Magnetic pole, vacuum chamber including nonmagnetic plate for vacuum sealing.

Claims

[Scope of utility model registration request]

In a beam electromagnet that has an iron core, a magnetic pole, a coil, and a vacuum box, and has a structure in which the upper and lower magnetic pole surfaces form part of the vacuum box, the magnetic pole part that forms the upper and lower magnetic pole surfaces that also serve as the vacuum box within the coil gap, An electromagnetic device characterized by a structure in which parallel or tapered connecting surfaces can be separated, removed, and attached.