JPH05189713A - Block positioning and fixing method - Google Patents

Abstract

PURPOSE:To simultaneously perform exposure development etching on plural magnetic head blocks by positioning two axes of an XY-plane to be aligned with a reference position of a microscopic field of view, performing the alignment in contact with a reference plane and adjusting the height of an exposure surface of each magnetic head block in the direction of Z-axis by pressing the exposure surface against the reference plane. CONSTITUTION:In the XY-plane an element of the magnetic head block 1 (goods to be processed) is aligned with the reference position of a mask pattern in the field of view of a microscope 9. In the heightwise direction of the Z-axis the height of a floating surface side of the head block 1 is set evenly by pressing the floating surface of the magnetic head against the reference plane in order to absorb variations of the height of the head block 1. Thus, in a processing process of exposure development etching on the head block 1 positioned and fixed on a jig, the plural goods 1 to be processed are positioned on the same jig in the directions of three axes of X, Y and Z with high accuracy, and can be processed by exposure.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a processing process of positioning and fixing a magnetic head block (workpiece) on a jig, and exposing, developing, and etching a plurality of magnetic head blocks on the same jig. This is a method for positioning and fixing blocks, which is capable of performing batch exposure by positioning in the XYZ axis directions and considering mass productivity.

[0002]

2. Description of the Related Art Heretofore, a method of forming a rail shape of a slider by etching has been disclosed in a magnetic head by exposure / development etching, as described in JP-A-62-231481. .

[0003]

The above-mentioned prior art discloses a method of forming a rail shape by etching in order to use a workpiece as a slider. However, no consideration is given to the holding state of the work piece and the exposure and development process. Therefore, the workpieces cannot be positioned for exposing, developing, and etching a plurality of workpieces at the same time, which causes a problem in mass productivity.

An object of the present invention is to perform batch exposure in consideration of mass productivity in a processing process in which a magnetic head block (workpiece) is positioned and fixed on a jig and is exposed, developed and etched. It is an object of the present invention to provide a block positioning and fixing method characterized in that a plurality of workpieces are positioned with high precision in three XYZ directions.

[0005]

In order to achieve the above object, the elements of the head block are aligned with the reference positions of the mask pattern on the XY plane, and the air bearing surface of the magnetic head is made uniform in the height direction of the Z axis. It is necessary to set the

The outer shape of the magnetic head block, which is the object to be processed, is formed by machining and includes a micron-order shape error. Therefore, the positional accuracy of a large number of arrays cannot be obtained simply by arranging the magnetic head blocks. Therefore, on the XY plane, the element of the magnetic head block is aligned with the reference position of the mask pattern within the field of view of the microscope. Further, in the height direction of the Z axis, the air bearing surface of the magnetic head is brought into contact with the reference surface in order to absorb the height variation of the head block, and the air bearing surface side of the magnetic head block is made uniform in height.

[0007]

In the processing process of positioning and fixing the magnetic head block (workpiece) on the jig and exposing, developing, and etching, a plurality of workpieces are positioned on the same jig with high precision in the three XYZ directions. can do. By positioning the XY plane, the rail position of the air bearing surface can be formed with high positional accuracy on the head block, which is the workpiece, by etching. Therefore, in the processing step of forming the etching mask pattern, a plurality of head blocks can be exposed at the same time, which improves productivity.

Further, in order to absorb the height variation of the head block in the Z-axis height direction, the air bearing surface of the thin film magnetic head is brought into contact with the reference surface, and the head block is made uniform in height. In the process of forming the mask pattern, the amount of deviation from the focus position of the exposure can be reduced, so the shape accuracy of the mask pattern can be obtained, and the rail width of the air bearing surface formed by the etching process using this pattern. The dimensional accuracy of can be improved.

[0009]

EXAMPLES Examples of the present invention will be described below.

Embodiment 1 FIG. 1 schematically shows a positioning device for a magnetic head block 1 which is a workpiece used in the present invention. The configuration of the positioning device includes a bar 2 to be pressed in the X-axis direction, a screw portion 3 that determines the amount of displacement of the pressing bar 2, a Y-axis positioning guide pin 4, a Z-axis-based optical flat 5, an XY table 6, and an XY. A servo motor 7 that can drive the table in the Y-axis direction, a servo motor 8 (not shown) that can drive the table in the X-axis direction, a microscope 9, and a monitor camera 10 and a monitor 11 for observing the measurement field of view of the microscope 9.
Above the positioning device is a through jig 12 that holds a workpiece in the exposure, development and etching process.

Next, the positioning operation of the work piece will be described. The etched surface of the magnetic head block 1 is directed toward the optical flat 5 and held between the guide pins 2. The XY table 6 is moved to the set position by the servomotors 7 and 8. The monitor 12 measures the amount of deviation of the magnetic head block 1 from the set position and
Is used to displace the bar 2 to position the magnetic head block 1 in the X-axis direction. Positioning in the Y-axis direction is performed by pressing the head block against the guide pin 4. The same operation is sequentially repeated in positioning the next magnetic head block.

After the magnetic head block 1 is positioned on the XYZ triaxial axes, an adhesive is injected from the holes 13 of the through jig 12 and fixed to the through jig 12. After fixing, the feed of the screw portion 3 is returned and the restraining force for positioning the magnetic head block 1 by the pressing bar 3 is released. By these actions,
A plurality of magnetic head blocks 1 are positioned on the through jig 12 and fixedly held. The through jig 12, which holds the plurality of magnetic heads 1 fixed, performs photoresist coating, exposure and development of a mask pattern, and a milling process to form rails on the air bearing surface of the magnetic head block 1.

FIG. 2 shows the amount of deviation from the reference position on the XY plane, that is, the positioning accuracy. here,
Fifteen magnetic head blocks are positioned and held by a through jig having a diameter of 70 mm. X-axis positioning accuracy is ±
It is shown that the positioning accuracy of 5 μm and the Y-axis is within ± 20 μm.

FIG. 3 shows the height accuracy of the magnetic head block in the Z-axis direction. When the magnetic head block is positioned on the basis of the back surface of the air bearing surface of the magnetic head, the machining accuracy of the outer shape of the magnetic head block affects the positioning accuracy of the Z axis is ± 20 μm. By positioning with the air bearing surface of the magnetic head as a reference as in the present invention, the Z axis positioning accuracy is ± 2 μm.

[0015]

According to the present invention, a plurality of magnetic head blocks, which are workpieces, are simultaneously positioned on the same jig,
Since it can be held by the through jig, a plurality of magnetic head blocks can be exposed, developed and etched simultaneously. By obtaining the positioning accuracy of the XY plane, it is possible to perform a batch exposure, and further, by uniformly aligning the heights of the Z axis, it is possible to reduce the defocusing at the time of exposure. With these, dimensional accuracy and positional accuracy of processing and mass productivity can be obtained.

[Brief description of drawings]

FIG. 1 is a schematic view of a magnetic head block positioning device according to the present invention.

FIG. 2 is a diagram showing the positional accuracy of a magnetic head block in an XY plane according to the present invention.

FIG. 3 is a diagram showing the positional accuracy of a magnetic head block in the Z-axis direction according to the present invention.

[Explanation of symbols]

 1 ... Magnetic head block (workpiece) 2 ... Pressing bar 4 ... Guide pin 5 ... Optical flat 12 ... Through jig

Claims (3)

[Claims] 1. In a processing process of positioning and fixing a magnetic head block (workpiece) on a jig and exposing and developing and etching, batch exposure is performed in consideration of mass productivity. In a block positioning and fixing method for positioning a head block with high accuracy in the three directions of XYZ, positioning of one axis of the XY plane is aligned with a reference position in the field of view of the microscope, and one axis of the XY plane is brought into contact with the reference surface. A method for positioning and fixing a block, characterized in that the height of the exposed surface of the magnetic head block in the Z-axis direction is aligned by pressing the exposed surface against a reference surface. 2. The alignment of the XY plane of claim 1 is XY
Positioning and fixing method of the block characterized by aligning both of the two axes to the reference position in the microscope field of view. 3. The Z-axis height alignment according to claim 1, wherein the height of the magnetic head block is classified in units of 1 μm.
A method for positioning and fixing a block, wherein positioning is performed using the bottom surface of the head block as a reference to obtain height accuracy.