JPH0518644Y2 - - Google Patents

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Publication number
JPH0518644Y2
JPH0518644Y2 JP1986142890U JP14289086U JPH0518644Y2 JP H0518644 Y2 JPH0518644 Y2 JP H0518644Y2 JP 1986142890 U JP1986142890 U JP 1986142890U JP 14289086 U JP14289086 U JP 14289086U JP H0518644 Y2 JPH0518644 Y2 JP H0518644Y2
Authority
JP
Japan
Prior art keywords
measured
sheet
head
coil
magnetic core
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1986142890U
Other languages
Japanese (ja)
Other versions
JPS6348107U (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Priority to JP1986142890U priority Critical patent/JPH0518644Y2/ja
Publication of JPS6348107U publication Critical patent/JPS6348107U/ja
Application granted granted Critical
Publication of JPH0518644Y2 publication Critical patent/JPH0518644Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

【考案の詳細な説明】 イ 産業上の利用分野 本考案は非接触的に紙等のシート状物の厚さを
測定する装置に関する。
[Detailed Description of the Invention] A. Field of Industrial Application The present invention relates to an apparatus for non-contactly measuring the thickness of a sheet-like object such as paper.

ロ 従来の技術 製造工程を走行中の紙等の厚さ測定は対象が走
行しているので、非接触的な方法が望ましい。こ
のため電磁的な測定装置が提案されている(特開
昭54−25755号,特願昭59−50088号等)。これら
の装置の原理は被測定面に対して垂直方向に自由
に移動可能な測定ヘツドの端面を被測定面に対向
させ、ヘツドに加圧流体を送つて上記端面から噴
出させることによつて測定ヘツドを被測定面から
浮上させ、加圧流体の圧力を一定に保つて上記浮
上量を一定に保つようにし、このような測定ヘツ
ドを被測定シートをはさんで対向させたものであ
る。被測定体の表面とヘツド端面との距離が一定
に保たれているので、対向させた二つの測定ヘツ
ド間の距離が被測定シートの厚さに応じて変化す
ることになり、この距離の変化による二つの測定
ヘツド間の電磁的結合度合の変化を検出して被測
定シートの厚さの信号とするものである。
B. Prior Art When measuring the thickness of paper, etc. during the manufacturing process, since the object is moving, a non-contact method is desirable. For this reason, electromagnetic measuring devices have been proposed (Japanese Patent Laid-Open No. 54-25755, Japanese Patent Application No. 59-50088, etc.). The principle of these devices is to place the end face of a measurement head that is freely movable perpendicularly to the surface to be measured, facing the surface to be measured, and to measure by sending pressurized fluid to the head and ejecting it from the end face. The head is floated above the surface to be measured, and the pressure of the pressurized fluid is kept constant to keep the flying height constant, and such measurement heads are placed opposite to each other with the sheet to be measured interposed therebetween. Since the distance between the surface of the object to be measured and the end face of the head is kept constant, the distance between the two opposing measurement heads changes depending on the thickness of the sheet to be measured, and the change in this distance The change in the degree of electromagnetic coupling between the two measurement heads is detected and used as a signal indicating the thickness of the sheet to be measured.

ハ 考案が解決しようとする問題点 上述した既提案の装置には次のような問題点が
ある。上記特開昭54−25755号記載のものは測定
ヘツド内に収納されているセンサが鉄心にコイル
を巻装したもので、一方のヘツドのコイルに励磁
交流を流し、他方のヘツドの巻線から誘導起電力
を取出してこれを検出出力とするものであるか
ら、二つのヘツドを被測定体をはさんで対向させ
る必要があり、ロールに接して走行しているシー
トに対して片側だけから厚さ測定を行うことがで
きない。上記特願昭59−500588号記載のものでは
センサは一方のヘツド内蔵のものは磁心にコイル
を巻いたもので、他方のヘツドは磁心だけで、磁
心同士の距離の変化によるインダクタンスの変化
を検出するものなので、ロールに接したシートで
も、ロール自体を磁心とみなすことで、シートの
片側からだけで厚さ測定ができるものであるが、
ヘツドからリード線が出ていることは特開昭54−
25755号のものと同じである。
C. Problems to be solved by the invention The previously proposed devices described above have the following problems. In the sensor described in JP-A-54-25755 mentioned above, the sensor housed in the measuring head has a coil wound around an iron core. Since the induced electromotive force is extracted and used as the detection output, it is necessary to have two heads facing each other with the object to be measured in between. measurements cannot be taken. In the sensor described in Japanese Patent Application No. 59-500588, one has a built-in head with a coil wound around a magnetic core, and the other head has only a magnetic core, and detects changes in inductance due to changes in the distance between the magnetic cores. Therefore, even if the sheet is in contact with a roll, the thickness can be measured from only one side of the sheet by considering the roll itself as the magnetic core.
The fact that the lead wire is coming out from the head is JP-A-54-
Same as No. 25755.

測定ヘツドは被測定面に対して垂直の方向に自
由に動き得ることが必要であるが、上述したよう
にヘツドからリード線が引出されていると、この
リード線の剛性を0にすることはできないから、
どうしてもヘツドの上下動が若干拘束され、測定
精度及び感度の低下を来たす。また、長期間に亘
り使用していると、金属疲労でリード線が切断す
るという問題もある。本考案は被測定シートの片
側だけで厚さ測定可能であり、ヘツド自身からは
リード線が出ていないようにして、その自由な動
きを保証し高精度、高感度の厚さ測定を可能にし
ようとするものである。
The measurement head needs to be able to move freely in the direction perpendicular to the surface to be measured, but if a lead wire is drawn out from the head as described above, it is impossible to reduce the rigidity of this lead wire to zero. Because I can't
The vertical movement of the head is inevitably somewhat restricted, resulting in a decrease in measurement accuracy and sensitivity. There is also the problem that when used for a long period of time, the lead wires may break due to metal fatigue. This invention enables thickness measurement on only one side of the sheet to be measured, and prevents the lead wire from protruding from the head itself, ensuring free movement and enabling high-accuracy, high-sensitivity thickness measurement. This is what I am trying to do.

ニ 問題点解決のための手段 測定ヘツド内に収納されるセンサと外部の測定
回路とを電磁的結合によつて結合し、この電磁的
結合において、センサ側のコイルが巻装される磁
心を棒状にし、同磁心上において測定回路側のコ
イルがその軸方向に自由に動き得るようにし、被
測定シートをはさんで上記測定ヘツドと対向させ
て導体片を配置し、上記測定ヘツドの被測定面と
対向する面より加圧流体を噴出させて測定ヘツド
と被測定面との間の距離を一定に保つようにし
た。
D. Means for solving the problem The sensor housed in the measurement head and the external measurement circuit are coupled by electromagnetic coupling, and in this electromagnetic coupling, the magnetic core around which the coil on the sensor side is wound is shaped like a bar. The coil on the measurement circuit side can move freely in the axial direction on the same magnetic core, and the conductor piece is placed facing the measurement head with the sheet to be measured in between, and the measurement surface of the measurement head is The distance between the measurement head and the surface to be measured was kept constant by ejecting pressurized fluid from the surface facing the surface.

ホ 作用 センサと信号取出し回路との間の結合が電磁結
合であつてリード線による結合ではないので、測
定ヘツドの被測定面に対する移動は完全に自由で
あり、このため高精度、高感度が得られる。また
測定ヘツドは被測定シートの片側だけに配置さ
れ、反対側は単なる導体片であるから、両面フリ
ーな状態にあるシートに対して一方側には測定ヘ
ツドを、反対側には導体片を配置するようにする
こともできるし、ロールに接して走行するシート
の場合、ロールを測定ヘツドの反対側の導体片と
して利用することもできる。何れの場合でも、測
定ヘツド内のセンサと反対側の導体片との距離の
変化によりセンサのインダクタンスが変化するの
を検出して厚さを測定するのである。
E. Effect Since the coupling between the sensor and the signal extraction circuit is electromagnetic coupling and not coupling by lead wires, the measurement head can move completely with respect to the surface to be measured, resulting in high precision and high sensitivity. It will be done. Also, since the measurement head is placed only on one side of the sheet to be measured, and the other side is just a piece of conductor, the measurement head is placed on one side of the sheet with both sides free, and the piece of conductor is placed on the other side. In the case of a sheet running against a roll, the roll can also be used as a conductor strip on the opposite side of the measuring head. In either case, the thickness is measured by detecting changes in the inductance of the sensor due to changes in the distance between the sensor in the measurement head and the conductor piece on the opposite side.

ヘ 実施例 第1図に本考案の一実施例を示す。1は被測定
シート、2は被測定シートの下に配置された導体
片、3が測定ヘツドである。導体片2及び測定ヘ
ツドは被測定シート1の面に垂直方向に移動可能
に保持され、シート面と対向する端面には空気噴
出口が設けられていて各端面がシート面から一定
の距離を保つようになつている。
F. Embodiment FIG. 1 shows an embodiment of the present invention. 1 is a sheet to be measured, 2 is a conductor piece placed under the sheet to be measured, and 3 is a measurement head. The conductor piece 2 and the measurement head are held movably in a direction perpendicular to the surface of the sheet to be measured 1, and an air outlet is provided on the end surface facing the sheet surface, so that each end surface is maintained at a constant distance from the sheet surface. It's becoming like that.

測定ヘツド3内でSがセンサであり、磁心C1
にコイルK1を巻装したものである。このコイル
K1は測定ヘツド内で結合用コイルK2と接続し
てある。C2は結合コイルの磁心である。測定ヘ
ツド3の外で、OSCは発振器、K3は結合コイ
ルで、コイルK2と電磁結合するようにK2と同
一軸上に位置させてあり、C2はコイルK3の磁
心と共通でコイルK3をゆるく貫通している。コ
イルK3は位置的に固定しており、コイルK3の
一端は発振器OSCの一つの出力端子に接続され、
他端はオペアンプAの反転端子に接続され、オペ
アンプで反転端子と出力端子との間にフイードバ
ツクコイルK4が接続してある。この構成により
コイルK3の両端には発振器の出力電圧が作用す
ることになる。シート1の厚さの変化によつてヘ
ツド3と導体片2との距離が変ると、コイルK1
と導体片2との間の電磁結合状態が変化する。導
体片2には渦電流が形成されており、結合状態の
変化によりコイルK1のインダクタンスが変化す
る。このインダクタンスの変化はコイルK3の両
端電圧の変化となつて表れ、この電圧変化、つま
り発振器OSCの出力の電圧振幅が変化し、この
振幅変化はコイルK4に拡大されて表れる。この
振幅変化が検波増幅回路Dで直流化されて検出さ
れ、これが被測定シートの厚さの情報となる。
In the measurement head 3, S is a sensor, and the magnetic core C1
A coil K1 is wound around the coil K1. This coil K1 is connected in the measuring head to a coupling coil K2. C2 is the magnetic core of the coupling coil. Outside the measurement head 3, OSC is an oscillator, and K3 is a coupling coil, which is positioned on the same axis as K2 so as to be electromagnetically coupled with coil K2.C2 is common to the magnetic core of coil K3 and loosely passes through coil K3. are doing. The coil K3 is fixed in position, and one end of the coil K3 is connected to one output terminal of the oscillator OSC.
The other end is connected to the inverting terminal of the operational amplifier A, and a feedback coil K4 is connected between the inverting terminal and the output terminal of the operational amplifier. With this configuration, the output voltage of the oscillator acts on both ends of the coil K3. When the distance between the head 3 and the conductor piece 2 changes due to a change in the thickness of the sheet 1, the coil K1
The electromagnetic coupling state between and the conductor piece 2 changes. An eddy current is formed in the conductor piece 2, and the inductance of the coil K1 changes as the coupling state changes. This change in inductance appears as a change in the voltage across the coil K3, and this voltage change, that is, the voltage amplitude of the output of the oscillator OSC changes, and this amplitude change is magnified and appears in the coil K4. This amplitude change is converted into a direct current and detected by the detection amplifier circuit D, and this becomes information on the thickness of the sheet to be measured.

測定ヘツド3は第2図に示すように上下方向に
可動なように空気ベアリング4で側面を保持され
た筒体で、別途空気供給孔5を通して内部に加圧
空気が送入されるようになつている。筒体の下端
面はプラスチツク製の底体6になつており、空気
噴出口7が開口している。底体6がプラスチツク
であるので、これはコイルK1に対して電磁的な
影響はない。空気噴出口7から加圧空気が噴出す
ることで、測定ヘツド3は重力に抗して被測定面
から一定高さだけ浮上せしめられている。導体片
2も測定ヘツド3と同じ構造で筒体の底面(この
場合筒体の上端面となる)がプラスチツクでなく
導体であつて、これがコイルK1と電磁的に結合
されることになる。筒体は下端をばねによつて支
えられ、シート下面に圧接されるようにしたあつ
て、加圧空気の噴出よりシート下面から離れて一
定距離を保つようになつている。
As shown in FIG. 2, the measuring head 3 is a cylindrical body whose side surfaces are supported by air bearings 4 so as to be movable in the vertical direction, and pressurized air is supplied into the measuring head through a separate air supply hole 5. ing. The lower end surface of the cylinder is a bottom body 6 made of plastic, and an air outlet 7 is opened therein. Since the bottom body 6 is made of plastic, it has no electromagnetic influence on the coil K1. By ejecting pressurized air from the air outlet 7, the measurement head 3 is made to float a certain height above the surface to be measured against gravity. The conductor piece 2 has the same structure as the measuring head 3, and the bottom surface of the cylinder (in this case, the top surface of the cylinder) is not made of plastic but a conductor, and is electromagnetically coupled to the coil K1. The lower end of the cylindrical body is supported by a spring and is brought into pressure contact with the underside of the seat, but is kept at a certain distance from the underside of the seat by the jet of pressurized air.

被測定シートの下面が測定ヘツド3の前後2位
置でロールにより支承されているときは、シート
下面の位置は一定に規制されるから、導体片2は
シート下面に近接させて固定しておけばよい。
When the bottom surface of the sheet to be measured is supported by rolls at two positions, front and back of the measurement head 3, the position of the bottom surface of the sheet is regulated to a constant value, so the conductor piece 2 can be fixed close to the bottom surface of the sheet. good.

またシートがロールに接して走行しているとき
は、そのロールを導体片として兼用することで、
別途導体片2を設ける必要がない。
Also, when the sheet is running in contact with a roll, the roll can also be used as a conductor piece.
There is no need to provide a separate conductor piece 2.

第3図は測定ヘツド3の端面の空気噴出口7の
配置の一例で、端面に90°間隔で4個設けられ、
一つおきに大面積の開口と小面積の開口になつて
いる。この配置によると、測定ヘツド下端面と対
向シート面との間の圧力分布はX軸に沿う方向で
は第4図Xのように広い幅に渡つて高圧力であ
り、Y軸に沿う方向では第4図Yに示すように圧
力分布の山の幅がせまい。このためロールに接し
て走行するシートに対して、X軸方向をロール母
線と平行になるようにすると、ロール母線方向に
広い範囲で高い圧力部分が分布することになり、
ロールの直径の影響を余り受けないで測定ヘツド
をシートから浮かしておくことができ、端面の各
方向一律に同じ面積の開口を設けるのに比し小径
のロールに接しているシートに対しても、測定ヘ
ツドを使用することが可能となる。
FIG. 3 shows an example of the arrangement of the air jet ports 7 on the end face of the measuring head 3, in which four are provided at 90° intervals on the end face.
Every other hole has a large area opening and a small area opening. According to this arrangement, the pressure distribution between the lower end surface of the measurement head and the opposing sheet surface is high in the direction along the X-axis over a wide width as shown in FIG. As shown in Figure 4 Y, the width of the peak of the pressure distribution is narrow. For this reason, if the X-axis direction of the sheet running in contact with the roll is parallel to the roll generatrix, high pressure areas will be distributed over a wide range in the roll generatrix direction.
The measuring head can be kept floating above the sheet without being affected by the diameter of the roll, and can be used even for sheets that are in contact with rolls of small diameter, compared to openings with the same area in each direction on the end face. , it becomes possible to use a measuring head.

ト 効果 本考案の厚さ測定装置は上述したような構成
で、測定ヘツドと測定回路との間が電磁的結合で
リード線がないから耐久性があるとともに測定ヘ
ツドの動きが自由であり、そのため測定精度と感
度の向上が得られ、また測定原理としてセンサと
対向導体片との間の距離の変化による電磁的結合
度の変化を検出するようになつているので、導体
片としてシート走行をガイドするローラ等を利用
することができ、装置の簡単化が計れる。
Effects The thickness measuring device of the present invention has the above-mentioned configuration, and the measuring head and the measuring circuit are electromagnetically coupled and there is no lead wire, so it is durable and the measuring head can move freely. The measurement accuracy and sensitivity have been improved, and the measurement principle is to detect changes in the degree of electromagnetic coupling due to changes in the distance between the sensor and the opposing conductor piece, so it can be used as a conductor piece to guide the sheet travel. The device can be simplified by using rollers, etc.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本考案の一実施例の電気的構成を示す
側面図、第2図は同実施例における測定ヘツドの
縦断側面図、第3図は測定ヘツド端面の空気噴出
口の形状および配置の一例の平面図、第4図は同
実施例におけるヘツド下端面の圧力分布を示すグ
ラフである。 1……被測定シート、2……導体片、3……測
定ヘツド、OSC……発振器、A……オペアンプ、
D……検波増幅回路、7……空気噴出口。
Fig. 1 is a side view showing the electrical configuration of an embodiment of the present invention, Fig. 2 is a longitudinal cross-sectional side view of the measuring head in the same embodiment, and Fig. 3 shows the shape and arrangement of the air outlet on the end face of the measuring head. FIG. 4, which is a plan view of an example, is a graph showing the pressure distribution on the lower end surface of the head in the same embodiment. 1... Sheet to be measured, 2... Conductor piece, 3... Measurement head, OSC... Oscillator, A... Operational amplifier,
D...Detection amplification circuit, 7...Air jet port.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 軸方向に摺動可能に保持され、被測定シート面
と対向する端面に加圧流体噴出口を設けて被測定
シート面から一定距離だけ離れているようにした
測定ヘツド内に電磁的センサを収納し、この電磁
的センサと外部測定回路とを電磁的に結合するに
当たつて、同センサ側の結合用コイルが巻装され
る磁心を棒状にし、この磁心に対して上記外部測
定回路側の結合用コイルを軸方向自由にゆるく嵌
挿し、上記電磁的センサに試料をはさんで対向さ
せて固定配置され上記電磁的センサからの誘導作
用により渦電流が生起される導体片との間の距離
の変化を検出するようにしたシート状物の厚さ測
定装置。
An electromagnetic sensor is housed in a measurement head that is held slidably in the axial direction and has a pressurized fluid outlet on the end face facing the sheet surface to be measured so that it is a certain distance away from the sheet surface to be measured. However, when electromagnetically coupling this electromagnetic sensor and an external measurement circuit, the magnetic core around which the coupling coil on the sensor side is wound is made into a rod shape, and the magnetic core on the external measurement circuit side is connected to this magnetic core. The distance between a coupling coil that is loosely inserted in the axial direction and a conductor piece that is fixedly placed opposite the electromagnetic sensor with a sample sandwiched therebetween and where an eddy current is generated by the inductive action from the electromagnetic sensor. A sheet thickness measuring device that detects changes in the thickness of sheets.
JP1986142890U 1986-09-17 1986-09-17 Expired - Lifetime JPH0518644Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986142890U JPH0518644Y2 (en) 1986-09-17 1986-09-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986142890U JPH0518644Y2 (en) 1986-09-17 1986-09-17

Publications (2)

Publication Number Publication Date
JPS6348107U JPS6348107U (en) 1988-04-01
JPH0518644Y2 true JPH0518644Y2 (en) 1993-05-18

Family

ID=31052054

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986142890U Expired - Lifetime JPH0518644Y2 (en) 1986-09-17 1986-09-17

Country Status (1)

Country Link
JP (1) JPH0518644Y2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006022882B4 (en) * 2006-05-15 2016-04-14 Immobiliengesellschaft Helmut Fischer Gmbh & Co. Kg Device for measuring the thickness of thin layers with a measuring probe

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5534267B2 (en) * 1977-12-05 1980-09-05

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5534267U (en) * 1978-08-28 1980-03-05
JPH0124710Y2 (en) * 1981-06-02 1989-07-26

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5534267B2 (en) * 1977-12-05 1980-09-05

Also Published As

Publication number Publication date
JPS6348107U (en) 1988-04-01

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