JPH05176566A - Actuator utilizing radiant pressure - Google Patents

Abstract

PURPOSE:To improve the reliability of a piezoelectric transducer by a method wherein electrodes for the vibration of the thickness direction of the piezoelectric transducer are made by a vacuum thin film forming method or a CVD method and positions for drawing out the electrodes are provided in the one side only. CONSTITUTION:In the case of a rotary actuator, a piezoelectric transducer 2 has its cathode 2b on its outer edge and on a air chamber side and has its anode 2a on its center and on the air chamber side. The ring-shaped part 10a of a (-) electrode 10 is brought into contact with the cathode 2b on the outer edge of the piezoelectric transducer and the end of a lead wire 11b is soldered to the terminal 10b of the (-) electrode 10. The ring-shaped part 9a of a (+) electrode 9 is provided in parallel with the piezoelectric transducer without being brought into contact with it and the end of a lead wire 11a is soldered to the terminal 9b of the (+) electrode 9 and, further, the spring contact 9c of the (+) electrode 9 is so formed as to be brought into contact with the anode 2a on the center of the piezoelectric transducer 2. In order to avoid the deterioration of the piezoelectric transducer caused by penetration of liquid which is sonic field medium and in order to improve abrasion resistance of a junction surface with a contact connected to a control circuit, the electrodes 2a and 2b are composed of precise films made by a vacuum thin film forming method or a CVD method.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is an actuator using radiation pressure, and can be used for an actuator that performs rotary motion, linear motion, and the like.

[0002]

2. Description of the Related Art Conventionally, an electric motor has been used as an energy conversion device for converting an amount of electricity into a momentum, but a large amount of electric power is required to obtain a required torque, which is not suitable for energy saving. Further, the shape is large, and there is an influence of heat generation and the like.

Therefore, an ultrasonic motor has been developed which can obtain a larger torque than the same diameter. As disclosed in Japanese Patent Application Laid-Open No. 2-41677 and the like, this ultrasonic motor includes a stator composed of a vibrator and an elastic body, a friction material disposed on the stator and abutting on the stator, and an elastic body. The rotor and spring means for pressing the rotor toward the stator are provided, and by generating a traveling wave in the oscillator, an elliptical locus motion is generated at an arbitrary point on the surface of the elastic body of the stator, and the stator is generated by the motion. The frictional force between the rotors moves the rotors in the direction opposite to the traveling wave generated in the stator.

This ultrasonic motor has advantages that it has a smaller shape and consumes less energy than the above electric motor.

However, since the above-mentioned ultrasonic motor converts the vibration energy generated on the surface of the elastic body into mechanical work through frictional force, it generates heat, is inefficient, and it is difficult to achieve high output. There is a point. In practice, the output is about 30 W, which limits the practical use and cannot replace the electric motor.

Further, since a vibration displacement of about several μm is used, a high processing precision is required, and a highly precise and highly reliable bonding technique is required as a means for fixing the vibrator to the elastic body. The sex was also bad.

Therefore, the applicant of the present invention has a vibrating body which generates a sound wave in a medium, and a movable body which is arranged on the progress of the sound wave generated from the vibrating body and is movable by radiation pressure accompanying the progress of the sound wave. We invented an actuator that utilizes pressure. According to this, the vibrating body generates a sound wave in the medium.
This sound wave propagates in the medium and hits the movable body. The movable body receives radiation pressure associated with the progress of the sound wave. Therefore, the movable body receives pressure in the traveling direction of the sound wave and moves. According to this technique, since the vibration energy of the vibrating body is transmitted to the movable body as radiation pressure via the medium, the energy conversion efficiency is good.

However, since the vibrating body vibrates at a high frequency and one surface thereof is exposed to the medium, there is a possibility that deterioration due to permeation of the medium may occur.

[0009]

Therefore, the applicant of the present invention has made it an object to improve the reliability of the vibrating body with respect to the actuator.

[0010]

Means for Solving the Problems In order to solve the above-mentioned problems, the means used in the present invention is to form an electrode for vibrating in the thickness direction of a vibrating body by a vacuum thin film manufacturing method or a CVD manufacturing method, and place the electrode extraction position on one side. That is what I did.

[0011]

According to the above means, the deterioration due to the permeation of the acoustic wave medium is prevented in the exposed portion to the sound field medium. Also,
The wear resistance of the contact bonding surface with the control circuit is improved.

[0012]

Embodiments of the present invention will be described below with reference to the drawings.

1 and 2 show a first embodiment of the present invention, which is a rotary actuator for converting the vibrations of the vibrators 2 and 3 which are vibrating bodies into the rotational movement of a rotor 5 which is a movable body.

As shown in FIGS. 1 and 2, the housing 1 has a side wall 1a and a side wall 1a which is closely fixed to the side wall 1a.
It is composed of an upper lid 1b and a lower lid 1c that close the upper and lower portions of the. A plurality of circular windows 1d are formed on the side wall 1a. The housing 1 is filled with a liquid 6 that is a medium.

A rotor 5 is provided in the housing 1 so as to be rotatably supported by an upper lid 1b and a lower lid 1c. The rotor 5 includes a rotating shaft 5c, a cylindrical body 5a fixed around the rotating shaft 5c and used as a reflection layer, and a covering material 5b fixed on the outer peripheral surface of the cylindrical body 5a and used as a passage absorption layer.
It consists of and. A sound wave reflector is used for the cylindrical body 5a. The covering material 5b uses a sound wave absorbing material.

Disc-shaped vibrators 2 and 3 are oscillatably supported by a window 1d of the housing 1 via a rubber bush 4 in a sealed state. Liquid 6 sandwiching vibrators 2 and 3
An air chamber 8 is formed in a portion opposite to. This is because the sound wave generated by the vibration of the vibrators 2 and 3 is transmitted to the housing 1.
It has a role of effectively propagating to the liquid 6 inside. Housing 1 when using this actuator in air
There is no need to make a seal structure with the outside of the. When this actuator is used in liquid, a seal structure is required. The present embodiment shows an example of use in the atmosphere, and the air chamber 8 communicates with the atmosphere through the breathing hole 8a.

When the present actuator is used in a liquid, if the liquid outside the actuator and the liquid 6 are the same, a strict seal between the rotary shaft 5c of the rotor 5 and the housing 1 becomes unnecessary. Only the air chamber 8 that does not move may be sealed.

The vibrators 2 and 3 generate sound waves in the direction of their central axes. The vibrators 2 and 3 are arranged such that the traveling direction of the sound wave generated by the vibration is such that the outermost circumference of the sound wave beam is in contact with the outer circumference of the rotor 5. The oscillator 2 is for normal rotation, and the oscillator 3 is for reverse rotation, and they are arranged at symmetrical positions.

In this embodiment, the oscillators 2 and 3 are P
Made of ZT (titanate-zirconate-lead), thickness 1.2m
A ceramic piezoelectric vibrator of φ20 mm with m and longitudinal resonance frequency of 1.7 MHz is used in the ultrasonic range.

The structure around the vibrator 2 is shown in FIG. The vibrator 3 has the same configuration. The disk-shaped vibrator 2 is supported by the rubber bush 4 around the positive electrode 9 and the negative electrode 10. As shown in FIG. 5, the vibrator 2 has a negative electrode 2b on the outer edge on the gas chamber side and a positive electrode 2 on the center on the gas chamber side.
a. As shown in FIG. 6, the negative electrode 10 includes a ring-shaped portion 10a and a terminal 10b. The ring-shaped portion 10a of the negative electrode 10 is in contact with the negative electrode 2b at the outer edge of the vibrators 2 and 3. The end portion of the lead wire 11b is soldered to the terminal 10b of the negative electrode 10. The positive electrode 9 includes a ring-shaped portion 9a, a terminal 9b and a spring-shaped contact 9c. The ring-shaped portion 9a of the positive electrode 9 is arranged in parallel with the vibrators 2 and 3 in a non-contact manner. The end of the lead wire 11a is soldered to the terminal 9b of the positive electrode 9. The spring contact 9c of the positive electrode 9 is formed so as to come into contact with the positive electrode 2a at the substantially center of the vibrator 2. The vibrator 2 can be vibrated to generate a sound wave having a desired frequency by controlling the voltage and / or the current applied to the lead wires 11a and 11b. It should be noted that with the above-mentioned configuration, high frequency vibration can be generated.

The electrodes 2a and 2b of the vibrators 2 and 3 prevent deterioration of the vibrators 2 and 3 due to permeation of the liquid 6, which is a sound field medium, and the resistance of the contact bonding surface with the contact connected to the control circuit. In order to improve the wear resistance, a dense film is formed by the vacuum thin film manufacturing method. A CVD method may be used instead of the vacuum thin film method.

The sound wave generated by the vibration of the disk-shaped vibrator 2 forms a sound field as shown in FIG. 9A on the side in contact with the liquid 6. The energy density of the sound field extends in the central axis direction of the oscillator. The actual radiation pressure is as complicated as the sound wave distribution, but in the case of a disk-shaped oscillator with a diameter of 20 mm in a liquid sound field medium, as shown in FIG. Since it becomes about 3 ° or less and becomes a beam, it can be practically approximated to a plane traveling wave. on the other hand,
At high frequencies, the attenuation is large, and when in liquid,
As shown in 0, the attenuation distance is several 10 cm at about 10 MHz or more.
It becomes the following. Therefore, in order to obtain an actuator having a size of several cm to several tens of cm, it is preferable to vibrate the vibrator at a frequency of 1 to 10 MHz.

As a sound wave radiating medium, a liquid can input an acoustic power higher than that of gas by three digits or more.

When PZT (titanate-zirconate-lead) is used as a vibrator, the permissible acoustic power to be put into water is about 800 W / cm ² , whereas it is about 0.2 in air.
Only W / cm ² of acoustic power can be input. Therefore,
A liquid is suitable as the medium. However, even a liquid that absorbs and attenuates sound waves is not suitable as a radiation medium. Also,
When the oscillator has a structure in which one side is liquid and the other side is gas as in the present embodiment, most of the energy of the oscillator can be introduced into the liquid, and the electroacoustic conversion efficiency in that case is 90. Reach over%.

Force F due to radiation pressure received by an object placed in an infinite plane traveling wave sound field with an energy density E of the sound field.
Varies depending on the property of the object, as shown in FIG. If the surface area of the oscillator is S, then F = SE if the object is a perfect absorber. If the object is a perfect reflector, then F = 2SE. For a partial reflector in which the reflectance of sound wave intensity is R, F = SE (1 + R). Rubber is typically used as the absorber, but in most materials, this corresponds to the case of a partial reflector having an acoustic intensity reflectance of R. The reflectivity is the acoustic impedance of the sound field medium and the object Z ₁ , Z ₂
Related to

[0026]

## EQU1 ## R = ((Z ₂ -Z ₁ ) / (Z ₂ + Z ₁ )) ² . The reflectance R is about 90% for water and SUS, and about 70% for water and Al.

In the present embodiment, as shown in FIG. 7, the sound wave is obliquely applied to the covering material 5b which is the absorbing material, and then reflected by the surface of the cylindrical body 5a which is the reflecting material. If the material and the thickness of the covering material 5b which is a sound absorbing material are selected so that the sound wave is substantially attenuated while passing through the path in the covering material 5b, the reflected sound field after reflection is very small. Only the radiation force f1 due to the incident sound field is received near the surface of the cylindrical body 5a. With the above-described structure, the rotor 5 has the radiation force f.
Since the tangential component force F ′ due to 1 can be received at the outermost circumference, the maximum torque can be obtained. In the case of only the cylindrical body 5a made of the reflecting material, both radiation forces due to the incident sound field are received, and the resultant force is fixed in the opposite direction because it is directed in the rotation axis direction.

The covering material 5b absorbs energy from the vibrator and receives a force that rotates in the counterclockwise direction in the drawing. The force f1 is received when the sound wave is incident, and the force f2 is received after the sound wave is reflected.
Receive. Since the combined force of f1 and f2 acts almost in the tangential direction of the rotor, a large rotational force acts. The force acting on the cylindrical body 5a is f3 at the time of incidence and f4 at the time of reflection, and the combined force acts in the axial direction of the rotor and therefore has almost no effect on the rotation.

By making good use of the combined effect of the passage, absorption, and reflection of sound waves in this way, radiation pressure suitable for the shape of the movable body can be used well in addition to the direction in which the sound waves travel straight.
Here, the rotor can be rotated even if the rotor is a blade-shaped rotor made of a reflector or an absorber as shown in FIG. 14, but the viscous resistance from liquid is large, or the material is close to a perfect reflector. When is used, the sound wave is disturbed and it is difficult to obtain an effective radiation pressure, so that the efficiency is lowered.

The passing rate T of the sound wave intensity to the covering material 5b is the reverse of the reflectance,

[0031]

## EQU2 ## T = 1-R = ₄ Z ₁ Z ₂ / (Z ₁ + Z ₂ ) ² Since acoustic impedances of water and rubber are almost equal, R = 0 and T = 100%. Rubber also absorbs and attenuates sound waves so that sound waves are rapidly attenuated while passing through the rubber. Therefore, the covering material 5 of the present embodiment
Rubber is suitable for b. Further, the reflectance of acoustic intensity between rubber and stainless steel is about 90%, which is almost the same as in the case of water and stainless steel, and stainless steel is preferable for the cylindrical body 5a.

In order to obtain a reflectance of 100%, gas may be used instead of metal for the reflecting material. FIG. 13 shows a second embodiment in which gas is used as the reflecting material. The outer circumference of the rotor is in the shape of a hollow rubber tube, and sound waves are generated by the rubber layer 14 and the air layer 1.
It is reflected at the interface with 3.

In order to obtain the maximum torque effect, it is sufficient that the sound wave is absorbed by the first time when it enters the coating material 5b and is absorbed by the second half after being reflected. Vibration frequency of oscillator 2, distance between oscillator and coating 5b, medium 6, coating 5
b, by adjusting the material of the reflector 5a and the thickness of the covering material 5b, the energy of the sound wave can be efficiently converted into rotational kinetic energy.

As described above, the vibrations of the vibrators 2 and 3 are converted into the rotation of the rotor 5 by the radiation pressure from the sound field. Therefore, unlike the prior art, frictional force is not required for energy conversion, which is efficient. Further, in the conventional device, fixing of the vibrator occupies a large weight in terms of performance, and precise bonding is required, but in the present invention, precise bonding is required for supporting the vibrators 2 and 3 on the housing 1. It is possible to significantly improve the assembling workability and the performance stability and the reliability without the need for. Further, it can be used in a liquid, which is difficult with the conventional device, and the utilization range can be greatly improved, and the cooling effect of the rotary actuator can be expected to be greatly improved. Moreover, since radiation pressure is generated in the traveling direction after reflection, passage, and bending of the sound waves generated from the vibrators 2 and 3 due to its principle, the degree of freedom in design can be greatly improved in the arrangement of the rotor 5 and the like. ..

In this embodiment, when the electrodes of the vibrators 2 and 3 are formed, the durability of the vibrator is improved by forming the electrodes of the vibrators 2 and 3 by the vacuum thin film manufacturing method or the CVD manufacturing method. , Reliability increases. In addition, the positive electrode 9
In contacting with the spring-like contact 9c, even when the vibrators 2, 3 vibrate, the electrodes of the vibrators 2, 3 are formed by the vacuum thin film manufacturing method or the CVD manufacturing method, so that the wear resistance can be improved. And the reliability is improved.

[0036]

According to the present invention, since the deterioration due to the permeation of the acoustic wave medium is prevented in the exposed portion to the acoustic field medium, the durability is improved.

Further, the wear resistance of the contact joint surface with the control circuit is improved.

[Brief description of drawings]

FIG. 1 is a plan view of a first embodiment of an actuator according to the present invention.

FIG. 2 is a sectional view of the first embodiment.

FIG. 3 is a perspective view of the rotor of the first embodiment.

FIG. 4 is a sectional view of the vicinity of the vibrator of the first embodiment.

FIG. 5 is a plan view of the vibrator according to the first embodiment.

FIG. 6 is a perspective view of a vibrator and electrodes of the first embodiment.

FIG. 7 is an explanatory diagram of the first embodiment.

FIG. 8 is an explanatory diagram of the first embodiment.

FIG. 9 is a graph showing the state of sound waves of the vibrator of the first embodiment.

FIG. 10 is a graph showing the state of sound waves of the vibrator of the first embodiment.

FIG. 11 is an explanatory diagram of the present invention.

FIG. 12 is an explanatory diagram of the present invention.

FIG. 13 is a perspective view of a rotor of the second embodiment.

FIG. 14 is a plan view of the related art.

[Explanation of symbols]

 1 Housing 1a Side Wall 1b Upper Lid 1c Lower Lid 1d Window 2,3 Vibrator (Vibration Body) 2a Positive Electrode 2b Negative Electrode 4 Rubber Bushing 5 Rotor (Movable Body) 5a Cylindrical Body (Reflective Layer) 5b Coating Material (Passing Absorption Layer) 5c Rotation Axis 6 Liquid (medium) 8 Air chamber 8a Breathing hole 9 Positive electrode 9a Ring portion 9b Terminal 9c Spring contact 10 Negative electrode 10a Ring portion 10b Terminal 11a, 11b Lead wire 12 Wall 13 Air layer 14 Rubber layer 15 Movable body 15a Reflective layer 15b Transmissive layer

Claims (1)

[Claims] 1. A vibrating body for generating a sound wave in a medium,
An actuator utilizing radiation pressure, comprising: a movable body, which is arranged on the traveling of a sound wave generated from the vibrating body and is movable by the radiation pressure accompanying the traveling of the sound wave, wherein an electrode for vibrating in the thickness direction of the vibrating body is a vacuum thin film. Manufacturing method or C
An actuator using radiation pressure, characterized in that it is made by the VD manufacturing method, and the electrode extraction position is arranged on one side.