JPH05172378A - Clean room - Google Patents

Abstract

PURPOSE:To embody the energy saving by measuring contamination concentration in a clean room upstream or downstream of an exhauster, and fuzzy- controlling the movement of movement means of an air flow adjusting plate and powers of an air fan and the exhauster based upon the measurement. CONSTITUTION:Contamination concentration in a clean room is measured by contamination concentration measurement means 7 (particle counter) and is inputted to a fuzzy-control inference part 10 of a control part 8. The fuzzy- control inference part 10 compares the inputted measurement contamination with a threshold value stored in a fuzzy control rule storage part 9. An air fan 2, an exhauster 4, and movement means 6 of an air flow adjustment plate 5 are controlled through an output control part 11 based upon a compared result and a membership function. More specifically, when the measured contamination is less than the threshold value, the air fan 2, the exhauster 4 and the movement means 6 are operated to provide a down flow at a predetermined air speed, white when the same is mare than time threshold value, the operation is set to a maximum flow rate. Hereby, the contamination concentration is kept at allowable concentration or lower with optimum control, and hence a reduced energy consumption clean room is embodied.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a clean room which consumes less energy.

[0002]

2. Description of the Related Art As shown in FIG. 6, a conventional clean room of this type has a blower 2 upstream of the clean room 1, a filter 3 downstream of the blower 2, and a blower 4 downstream of the clean room 1 for human body. Fine pollutants such as dust, gas used, and mist generated from used chemicals were kept below the allowable value.

[0003]

However, in the above-mentioned conventional configuration, it is necessary to always keep the clean air having a constant wind speed and air volume, and there is a problem that the energy consumption is large.

The present invention solves the above-mentioned conventional problems, and an object thereof is to provide a clean room which consumes less energy.

[0005]

In order to achieve the above object, the clean room of the present invention comprises a blower on the upstream side, a filter on the downstream side of the blower, and an air volume adjusting plate having a vent hole on the downstream side of the filter. At least two sheets, a moving unit that abuts at least one of the air volume adjusting plates, an exhaust fan on the downstream side, a pollution concentration measuring unit upstream or downstream of the exhaust fan, the blower, the moving unit, and the exhaust fan. A fuzzy control rule storage unit, which includes a control unit for controlling the pollution concentration measuring unit, the control unit storing the movement amount of the moving unit and the electric power of the blower and the exhaust fan as a fuzzy control rule.
The configuration is composed of a fuzzy control inference unit and an output control unit.

[0006]

With the above-mentioned structure, the blower, the blower and the moving means are operated under optimum conditions in accordance with the pollution concentration.

[0007]

【Example】

(Embodiment 1) Hereinafter, a first embodiment of the present invention will be described with reference to FIG.
Will be described with reference to.

The difference between this embodiment and the conventional example shown in FIG. 6 is that the air volume adjusting plate 5 having a vent hole downstream of the filter 3.
A particle counter 7 that is one of the pollution concentration measuring means upstream of the air exhauster 4 and that has a moving means 6 that comes into contact with at least one of the air flow rate adjusting plates 5.
And a blower fan 2, an exhaust fan 4, and a moving means 6
The point is that the controller 8 for controlling Further, the control unit 8 includes a fuzzy control rule unit 9 and a fuzzy control inference unit 10.
And an output control unit 11.

In the above configuration, the operation will be outlined with reference to FIG. 2. When the particle counter 7 measures the contamination concentration of the clean room 12 and the signal is input to the fuzzy control inference unit 10 of the control unit 8, fuzzy control is performed. The output control unit 11 controls the operations of the blower 2, the blower 4, and the moving means 6 based on the membership function by comparing with the threshold value stored in the rule unit 9. The operation will be described in more detail with reference to FIG.

In the figure, the particle counter 7
Signal from the fuzzy inference unit 10 through the preprocessor 13.
Is given to the emergency value control 14 and the fuzzy control 15 after the comparison with the threshold value. While the fuzzy control 15 is operating, the blower 2, the blower 4, and the moving means 6 are operated so as to have a downflow of a constant wind speed. When the contamination concentration in the clean room 12 is lower than the lower limit of the threshold value, the clean room 12 is operated at the minimum air volume and the energy consumption becomes the minimum.
When the threshold value is less than or equal to the upper limit, the membership function is used to perform an operation to determine the output value. Since the control can be performed while calculating the time change of the output value and judging whether the pollution concentration is worsening or recovering, the problem that the control output changes too often and causes an unstable state is solved.

When the contamination concentration is above the upper limit of the threshold value, the emergency value control 14 operates to set the opening ratio of the air volume control plate 5 to the maximum, and then the blower 2 and the exhaust fan 4 operate at the maximum air volume. Energy consumption is highest because it is done. Here, the air volume control of the present embodiment is performed by the blower 2 as shown in FIG.
The air is blown to the filter 3 as clean air 16 to the two air volume control plates 5, and one of the air volume control plates is moved by the moving means 6 to be controlled by the position of the ventilation hole 17.

According to the clean room 12 of this embodiment,
Since the blower, the exhaust fan, and the moving means are operated under the optimum conditions according to the pollution concentration, the energy consumption is smaller than before.

(Second Embodiment) Next, a second embodiment of the present invention will be described with reference to FIG.

The clean room 18 of this embodiment is the first embodiment.
The difference from the clean room 12 is that the blower 2 is provided with three units, and the particle counter 7, the gas detector 19 and the smoke detector 20 are provided upstream of the three blowers 4 as the pollution concentration measuring means to measure the respective pollution concentration. The means is connected to the control unit 8, and three moving means 6-1 and 6 are provided for one air volume adjusting plate 5.
-2 and 6-3, and each moving means is connected to the control unit 8.

According to the clean room having the above-mentioned structure, the blower, the exhaust fan and the moving means are operated under the optimum conditions in accordance with the pollution concentration while measuring dust, gas and mist in three areas in the clean room. A cleaner atmosphere can be realized with low energy consumption.

[0016]

As is apparent from the above description, according to the clean room of the present invention, the following effects can be obtained.

(1) Since the pollution concentration is kept below the permissible concentration by optimal control, a clean room with less energy consumption than before can be realized.

(2) A cleaner atmosphere than before can be realized with low energy consumption.

[Brief description of drawings]

FIG. 1 is a sectional view of a clean room according to a first embodiment of the present invention.

FIG. 2 is a flowchart of the same operation

FIG. 3 is a detailed flowchart of the same operation.

FIG. 4 is a perspective view of an air volume adjusting plate and a moving unit.

FIG. 5 is a sectional view of a clean room according to a second embodiment of the present invention.

FIG. 6 is a sectional view of a conventional clean room.

[Explanation of symbols]

 2 Blower 4 Exhaust fan 5 Air volume adjusting plate 6 Moving means 7 Particle counter (pollution concentration measuring means) 8 Control unit 9 Fuzzy control rule storage unit 10 Fuzzy control inference unit 11 Output control unit 12, 18 Clean room

Claims (2)

[Claims] 1. A blower on the upstream side, a filter on the downstream side of the blower, at least two air volume adjusting plates having ventilation holes downstream of the filter, and a moving means for abutting on at least one of the air volume adjusting plates. And an exhaust fan on the downstream side, a pollution concentration measuring means upstream or downstream of the exhaust fan, and a controller for controlling the blower, the moving means, the exhaust fan and the pollution concentration measuring means, and the controller is A clean room comprising a fuzzy control rule storage section for storing the movement amount of the moving means and the electric power of the blower and the exhaust fan as a fuzzy control rule, a fuzzy control inference section and an output control section. 2. At least two blowers on the upstream side, a filter downstream of the blower, and at least two air volume adjusting plates having ventilation holes downstream of the filter, and at least one of the air volume adjusting plates. The contact means, the two or more exhaust fans on the downstream side, the two or more kinds of pollution concentration measuring means upstream or downstream of the exhaust fan, the blower, the moving means, the exhaust fan, and the pollution concentration measuring means. And a control unit for controlling,
A clean room including a fuzzy control rule storage unit, a fuzzy control reasoning unit, and an output control unit, the control unit of which stores the movement amount of the moving unit and the electric power of the blower and the exhaust fan as a fuzzy control rule.