JPH0517149A - Lead titanate solid solution and sealing material using the same solid solution - Google Patents

Lead titanate solid solution and sealing material using the same solid solution

Info

Publication number
JPH0517149A
JPH0517149A JP3189207A JP18920791A JPH0517149A JP H0517149 A JPH0517149 A JP H0517149A JP 3189207 A JP3189207 A JP 3189207A JP 18920791 A JP18920791 A JP 18920791A JP H0517149 A JPH0517149 A JP H0517149A
Authority
JP
Japan
Prior art keywords
solid solution
lead titanate
thermal expansion
sealing material
low
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3189207A
Other languages
Japanese (ja)
Other versions
JP3157014B2 (en
Inventor
Atsuo Hiroi
淳雄 弘井
Hiroshi Seki
宏志 関
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Iwaki Glass Co Ltd
Original Assignee
Iwaki Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Iwaki Glass Co Ltd filed Critical Iwaki Glass Co Ltd
Priority to JP18920791A priority Critical patent/JP3157014B2/en
Publication of JPH0517149A publication Critical patent/JPH0517149A/en
Application granted granted Critical
Publication of JP3157014B2 publication Critical patent/JP3157014B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01GCOMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
    • C01G23/00Compounds of titanium
    • C01G23/003Titanates
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01PINDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2002/00Crystal-structural characteristics
    • C01P2002/50Solid solutions
    • C01P2002/52Solid solutions containing elements as dopants
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01PINDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00Particle morphology
    • C01P2004/60Particles characterised by their size
    • C01P2004/61Micrometer sized, i.e. from 1-100 micrometer

Abstract

PURPOSE:To obtain a sealing material lowered in thermal expansion coefficient by mixing a lead titanate solid solution body obtained by replacing Pb of tetragonal PbTiO3 with a prescribed amount of Na and La with low-melting glass. CONSTITUTION:Pb of tetragonal PbTiO3 is replaced with Na and La at a ratio of Na and La of 14-40mol% and molar ratio of Na/La of 0.43-2.33 to provide lead titanate solid solution having low thermal expansion. The solid solution is mixed with low melting glass (e.g. PbO-B2O3 based, PbO-ZnO-B2O3 based or PbO-B2O3-ZnOSiO2 based glass) to provide a sealing material. The sealing material is utilized for sealing of electric component because of low thermal expansion coefficient.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、低熱膨張材料及びこれ
をフィラーとしてガラスと混合してなるものに関し、半
導体部品、蛍光表示管等の電子部品の封着に適した封着
材料、及びそのフィラーに関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a low thermal expansion material and a material obtained by mixing the same with glass as a filler, and a sealing material suitable for sealing electronic parts such as semiconductor parts and fluorescent display tubes, and the like. It concerns a filler.

【0002】[0002]

【従来の技術】従来より、正方晶PbTiO3のPbを置換した
チタン酸鉛固溶体は誘電材料、圧電材料としてよく知ら
れていた。これらは、例えばPb1/2(Mg1/3Nb2/3)1/2Ti
O3,Pb(Zr0.52Ti0.48)O3,(Pb0.94Sr0.06)(Zr0.53Ti0.47)
O3等が提案されており、主に多結晶焼結体として圧電材
料等に用いられてきている。
2. Description of the Related Art Conventionally, Pb-substituted lead titanate solid solutions of tetragonal PbTiO 3 have been well known as dielectric materials and piezoelectric materials. These are, for example, Pb 1/2 (Mg 1/3 Nb 2/3 ) 1/2 Ti
O 3 ,, Pb (Zr 0.52 Ti 0.48 ) O 3 , (Pb 0.94 Sr 0.06 ) (Zr 0.53 Ti 0.47 )
O 3 and the like have been proposed and have been mainly used as a polycrystalline sintered body for piezoelectric materials and the like.

【0003】正方晶PbTiO3は、誘電、圧電材料以外にも
その低熱膨張性を利用して低融点封着ガラスのフィラー
として用いられている。低融点封着ガラスはPbO-ZnO-B2
O3系等が知られているが、一般にこれらのガラスは熱膨
張係数が90×10-7/℃以上であり、80×10-7
℃以下の被封着物を封着するには不適当である。このた
め封着ガラスを被封着物の熱膨張係数に近づける必要が
あり、低熱膨張材料をフィラーとして低融点ガラスに混
合した封着材料が主に用いられている。
Tetragonal PbTiO 3 is used as a filler for low melting point sealing glass by utilizing its low thermal expansion property in addition to dielectric and piezoelectric materials. Low melting point sealing glass is PbO-ZnO-B 2
O 3 type is known, but generally, these glasses have a coefficient of thermal expansion of 90 × 10 −7 / ° C. or more, and 80 × 10 −7 /
It is unsuitable for sealing objects to be sealed below ℃. For this reason, it is necessary to bring the sealing glass close to the thermal expansion coefficient of the material to be sealed, and a sealing material in which a low thermal expansion material is mixed with a low melting point glass as a filler is mainly used.

【0004】この低熱膨張フィラーは、各種のものが提
案されており、ジルコン、コージェライト、ウイレマイ
ト、ムライト、β−ユークリプタイト、β−スポジュー
メン、酸化スズ、チタン酸鉛があり、これらを1種類以
上低融点ガラスに添加して用いている。
Various types of low thermal expansion fillers have been proposed, and there are zircon, cordierite, willemite, mullite, β-eucryptite, β-spodumene, tin oxide, and lead titanate. The above is added to the low melting point glass and used.

【0005】上記した各種フィラーの中でもチタン酸鉛
は熱膨張係数が低く、低融点ガラスの熱膨張係数低減効
果が大きく、従来よりチタン酸鉛またはその固溶体を用
いた封着材料が提案されている。例えば、特開昭62-256
741 には、チタン酸鉛のPbの一部をCaで置換してなるフ
ィラーを用いた封着材料、特開平2-30639 には、チタン
酸鉛のPbの一部をCaに、Tiの一部をFe,Wに置換してなる
封着材料が提案されている。
Among the above-mentioned various fillers, lead titanate has a low coefficient of thermal expansion, and the effect of reducing the coefficient of thermal expansion of low-melting glass is great, and conventionally a sealing material using lead titanate or a solid solution thereof has been proposed. . For example, JP-A-62-256
741 is a sealing material using a filler in which a part of Pb of lead titanate is replaced by Ca. JP-A-2-30639 describes a part of Pb of lead titanate as Ca and Ti A sealing material has been proposed in which the parts are replaced with Fe and W.

【0006】[0006]

【発明が解決しようとする課題】しかしながら、上記の
誘電体、圧電体としてのチタン酸鉛固溶体は、その電気
特性を利用したものであり、また低融点封着ガラスで利
用されているチタン酸鉛固溶体は、封着材料として使用
するには、種々の課題がある。例えば、特開昭62-25674
1 の封着材料は、フィラーの粒径が小さい場合でも低熱
膨張係数を有するが、フィラーの熱膨張係数が著しく小
さいため、フィラー周辺のガラスにマイクロクラックが
発生すると言う課題があった。
However, the lead titanate solid solution as the above-mentioned dielectric or piezoelectric material utilizes the electrical characteristics of the lead titanate solid solution and is used in the low melting point sealing glass. The solid solution has various problems when used as a sealing material. For example, JP-A-62-25674
The sealing material of 1 has a low coefficient of thermal expansion even when the particle size of the filler is small, but there is a problem that microcracks occur in the glass around the filler because the coefficient of thermal expansion of the filler is extremely small.

【0007】特開平2-30639 の封着材料は、マイクロク
ラックの発生をなくした封着材料を提案しているが、こ
れに使用しているフィラーすなわちチタン酸鉛のPbの一
部をCaに、Tiの一部をFe,Wに置換したチタン酸鉛固溶体
を使用したものは熱膨張係数が大きいという課題があ
る。本発明は、従来知られていなかった、一般のチタン
酸鉛より熱膨張の低いチタン酸鉛固溶体とそれを用いる
封着材料を提供することを目的とする。
The sealing material of Japanese Patent Laid-Open No. 2-30639 proposes a sealing material that eliminates the occurrence of microcracks. However, a filler used for this sealing material, that is, a part of Pb of lead titanate is converted to Ca. , Using a lead titanate solid solution in which a part of Ti is replaced by Fe, W has a problem that the coefficient of thermal expansion is large. An object of the present invention is to provide a lead titanate solid solution having a thermal expansion lower than that of general lead titanate and a sealing material using the same, which has not been known.

【0008】[0008]

【課題を解決するための手段】本発明は、正方晶系PbTi
O3のPbをNa及びLaで14〜40モル%置換したチタン酸
鉛固溶体、及びそれを低融点ガラスと混合してなる封着
材料を提供する。
The present invention is directed to tetragonal PbTi
Provided is a lead titanate solid solution in which Pb of O 3 is substituted with Na and La by 14 to 40 mol%, and a sealing material obtained by mixing the solid solution with lead titanate.

【0009】本発明のチタン酸鉛固溶体は、正方晶系の
ペロブスカイト構造を有する。正方晶系ペロブスカイト
構造はPbTiO3で表現されるが、本発明のチタン酸鉛固溶
体は、PbをNa及びLaで置換したものである。具体的に化
学式で示せば(PbX,Na(1-X)/2,La(1-X)/2)TiO3 と表現さ
れるが、必ずしもこの原子比でなくてもよく、ある程度
のずれは特性を損なうものではない。
The lead titanate solid solution of the present invention has a tetragonal perovskite structure. The tetragonal perovskite structure is represented by PbTiO 3 , but the lead titanate solid solution of the present invention is one in which Pb is replaced with Na and La. Specifically, it can be expressed as (Pb X , Na (1-X) / 2 , La (1-X) / 2 ) TiO 3 by a chemical formula, but it does not necessarily have to be this atomic ratio, and there is some deviation. Does not impair the characteristics.

【0010】本発明のチタン酸鉛固溶体は、PbをNa及び
Laで置換してなることを特徴としているが、Pbの置換量
を40モル%以下と限定した理由は、それ以上置換した
ものはチタン酸鉛固溶体とならずに副生成物が生成し、
熱膨張係数を小さくする効果が低減されたり、固溶体と
なるが熱膨張が小さくならなくなるためである。一方、
置換量が14モル%未満では熱膨張率が大きくなるので
好ましくない。
The lead titanate solid solution of the present invention contains Pb as Na and
Although it is characterized in that it is replaced with La, the reason for limiting the Pb substitution amount to 40 mol% or less is that by further substitution, a by-product is generated without becoming a lead titanate solid solution,
This is because the effect of reducing the coefficient of thermal expansion is reduced, or a solid solution is formed, but the thermal expansion does not decrease. on the other hand,
When the amount of substitution is less than 14 mol%, the coefficient of thermal expansion increases, which is not preferable.

【0011】かかるチタン酸鉛は次のようにして製造さ
れる。PbO 等の鉛化合物、TiO2等のチタン化合物、酸化
ランタン化合物、炭酸ナトリウム等のナトリウム化合物
を製造しようとする原子比になるように混合する。次い
でこれを800〜1000℃の温度で大気中で0.5〜
2時間加熱することにより得られる。
The lead titanate is manufactured as follows. A lead compound such as PbO, a titanium compound such as TiO 2 , a lanthanum oxide compound, and a sodium compound such as sodium carbonate are mixed in an atomic ratio to be produced. Then, this is heated in the atmosphere at a temperature of 800 to 1000 ° C. to 0.5 to
Obtained by heating for 2 hours.

【0012】本発明のチタン酸鉛固溶体のPb置換量は熱
膨張係数を小さくする効果を考慮すると、好ましくは1
8〜35モル%が望ましい。また置換するNa,La 比は、
電荷のバランスを考慮すると1が望ましいが0.43〜2.33
の範囲内にあれば熱膨張係数を低下させる効果は損なわ
れない。
The Pb substitution amount of the lead titanate solid solution of the present invention is preferably 1 considering the effect of reducing the thermal expansion coefficient.
8 to 35 mol% is desirable. The ratio of Na and La to be replaced is
Considering the balance of charges, 1 is preferable, but 0.43 to 2.33
Within the range, the effect of lowering the coefficient of thermal expansion is not impaired.

【0013】本発明の低熱膨張チタン酸鉛固溶体をフィ
ラーとした封着材料に使用される。低融点ガラスは、特
に限定されるものではなく、公知のものが使用できる
が、具体的に、たとえば、PbO 40〜90%,B2O3
〜15%からなるPbO-B2O3系、PbO 70〜85%,ZnO
0.5 〜7%,B2O3 7〜15%からなるPbO-ZnO-B2O
3系、PbO 77〜86%,B2O3 6〜15%,ZnO 7〜
12%,SiO2 0.5 〜3%からなるPbO-B2O3-ZnO-SiO2
等の軟化点が400℃以下の低融点ガラスが好適に使用
される。
The low thermal expansion lead titanate solid solution of the present invention is used as a sealing material with a filler. The low melting point glass is not particularly limited, and known ones can be used. Specifically, for example, PbO 40 to 90%, B 2 O 3 8
PbO-B 2 O 3 -based consisting ~15%, PbO 70~85%, ZnO
0.5 ~7%, B 2 O 3 consisting of 7~15% PbO-ZnO-B 2 O
3 series, PbO 77-86%, B 2 O 3 6-15%, ZnO 7-
A low melting point glass having a softening point of 400 ° C. or less, such as a PbO—B 2 O 3 —ZnO—SiO 2 system composed of 12% and SiO 2 0.5 to 3% is preferably used.

【0014】[0014]

【作用】本発明のチタン酸鉛固溶体は、PbをNa及びLaで
置換し一般のチタン酸鉛と比較して、低熱膨張となるこ
とを特徴としている。この作用機構は、必ずしも明確で
はないが、以下の如き作用を生ずるものと考えられる。
正方晶系ペロブスカイト構造のチタン酸鉛は、a軸とb
軸は同じ長さであり、α、β、γの角度は90度であ
る。格子の中心にPbが、各頂点にTiが入る。このPbの代
わりに酸素との原子間距離の短いNa,La が置換されると
ペロブスカイト構造のc軸が、著しく短くなり以下のよ
うな働きが生じ、熱膨張係数が低下するものと考えられ
る。
The lead titanate solid solution of the present invention is characterized in that Pb is replaced with Na and La to have a low thermal expansion as compared with general lead titanate. Although this mechanism of action is not always clear, it is considered to cause the following actions.
The lead titanate having a tetragonal perovskite structure has a-axis and b-axis.
The axes have the same length and the angles α, β and γ are 90 degrees. Pb is in the center of the lattice and Ti is in each vertex. It is considered that when Na, La, which has a short interatomic distance to oxygen, is substituted for Pb, the c-axis of the perovskite structure is significantly shortened and the following functions occur and the coefficient of thermal expansion decreases.

【0015】第1に、各原子間の結合がより強固にな
り、熱による原子振動が起こりにくくなる。第2に、格
子間に歪が生じ、熱による原子振動が直接格子を伸ばす
方向に働きにくくなる。第3に、置換した元素がイオン
半径の減少ほど格子定数が短くならず、各原子間のすき
間が大きくなり、熱による原子振動を許容しやすくな
る、などのことがあげられる。いずれの場合でも、結晶
が加熱されたときに、体積の増加以外にエントロピーを
増やす機構がより増強されることにより、一般のチタン
酸鉛より低熱膨張となる。
First, the bonds between the atoms become stronger, and atomic vibrations due to heat are less likely to occur. Secondly, strain is generated between the lattices, and it becomes difficult for the atomic vibrations due to heat to directly act to extend the lattices. Thirdly, the lattice constant of the substituted element does not become shorter as the ionic radius decreases, the gap between the atoms increases, and it becomes easier to allow atomic vibration due to heat. In any case, when the crystal is heated, the mechanism for increasing the entropy in addition to the increase in volume is further enhanced, so that the thermal expansion is lower than that of general lead titanate.

【0016】[0016]

【実施例】【Example】

実施例1 酸化鉛、炭酸ナトリウム、酸化ランタン、酸化チタンを
表1試料 No.1〜5の組成になるように所定量秤量し、
乾式混合後1100℃で2時間仮焼した。この仮焼物を乾式
粉砕し、更に1200℃で5 時間焼成した。こうしてできた
焼成物を乾式粉砕し、250メッシュのふるいを通過さ
せて平均粒径を5〜6μmとした。ここでできた粉末を
30℃、300℃の温度で粉末X線回折装置を用い格子
定数を決定し、体積熱膨張係数を計算した結果を表1に
示した。比較のため同様の方法で通常のチタン酸鉛を表
1試料 No.6に示した。
Example 1 Lead oxide, sodium carbonate, lanthanum oxide, and titanium oxide were weighed in predetermined amounts so as to have the compositions shown in Table 1, Sample Nos. 1 to 5,
After dry mixing, it was calcined at 1100 ° C for 2 hours. This calcined product was dry pulverized and further calcined at 1200 ° C. for 5 hours. The fired product thus obtained was dry-pulverized and passed through a 250-mesh sieve to have an average particle size of 5 to 6 μm. Table 1 shows the results of calculating the volume thermal expansion coefficient of the powder obtained here by determining the lattice constant using a powder X-ray diffractometer at temperatures of 30 ° C and 300 ° C. For comparison, ordinary lead titanate is shown in Sample No. 6 of Table 1 by the same method.

【0017】実施例2 酸化鉛、酸化ホウ素、酸化珪素、酸化アルミニウム、酸
化亜鉛を表2に示す組成になるよう所定量秤量し乾式混
合後、白金るつぼに入れ900℃で1時間溶解した後、
板状に成形した。この成形物を乾式粉砕し、150メッ
シュのふるいを通過させた。
Example 2 Lead oxide, boron oxide, silicon oxide, aluminum oxide, and zinc oxide were weighed in predetermined amounts so as to have the composition shown in Table 2, dry-mixed, put in a platinum crucible and melted at 900 ° C. for 1 hour.
It was formed into a plate shape. This molded product was dry-ground and passed through a 150-mesh sieve.

【0018】表1に示したフィラーと表2に示したガラ
スを所定量混合し封着材料としたときの線熱膨張係数を
表3に示した。なお、表3において、コージェライト
は、酸化マグネシウム、水酸化アルミニウム、酸化珪素
を2MgO・2Al2O3・5SiO2の化学量論比になるように秤量
し乾式混合後、白金るつぼに入れ1600℃で3時間溶解し
た後、板状に成形した。この成形物を乾式粉砕し、1200
℃で8時間焼成し、さらに粉砕し300メッシュのふる
いを通過させたものを使用した。酸化スズは市販品を3
00メッシュのふるいを通過させたものを使用した。
Table 3 shows the coefficient of linear thermal expansion when a predetermined amount of the filler shown in Table 1 and the glass shown in Table 2 were mixed to form a sealing material. In Table 3, as for cordierite, magnesium oxide, aluminum hydroxide and silicon oxide were weighed so as to have a stoichiometric ratio of 2MgO · 2Al 2 O 3 · 5SiO 2 and dry-mixed, and then placed in a platinum crucible at 1600 ° C. After being melted for 3 hours, it was formed into a plate. This molded product is dry crushed to 1200
The product was calcined at 8 ° C. for 8 hours, further pulverized, and passed through a 300 mesh sieve. Commercially available tin oxide is 3
What was passed through a 00 mesh sieve was used.

【0019】β−ユークリプタイトは、炭酸リチウム、
水酸化アルミニウム、酸化珪素をLi2O・Al2O3・2SiO2
化学量論比になるように秤量し乾式混合後、1200℃で3
時間焼成し、さらに粉砕し300メッシュのふるいを通
過させたものを使用した。ジルコンは、酸化ジルコニウ
ム、酸化珪素をZrO2・SiO2の化学量論比になるように秤
量し乾式混合後、1400℃で12時間焼成し、さらに粉砕
し300メッシュのふるいを通過させたものを使用し
た。
Β-eucryptite is lithium carbonate,
Aluminum hydroxide and silicon oxide are weighed so as to have a stoichiometric ratio of Li 2 O · Al 2 O 3 · 2SiO 2 and dry-mixed, and then at 1200 ° C for 3
It was used after being fired for a time, further crushed, and passed through a 300-mesh sieve. Zircon is obtained by weighing zirconium oxide and silicon oxide in a stoichiometric ratio of ZrO 2 · SiO 2 , dry-mixing, firing at 1400 ° C. for 12 hours, further pulverizing and passing through a 300-mesh sieve. used.

【0020】[0020]

【表1】 [Table 1]

【0021】[0021]

【表2】 [Table 2]

【0022】[0022]

【表3】 [Table 3]

【0023】[0023]

【発明の効果】以上のように本発明のチタン酸鉛固溶体
は、熱膨張係数が低いため各種材料のフィラーとして使
用することにより、その熱膨張係数を減少する効果があ
る。特に、本発明のチタン酸鉛固溶体と、低融点ガラス
を混合してなる封着材料は、熱膨張係数を下げる効果が
大きいため電子部品の封着に好適である。
As described above, since the lead titanate solid solution of the present invention has a low coefficient of thermal expansion, it is effective in reducing the coefficient of thermal expansion when used as a filler for various materials. In particular, the sealing material obtained by mixing the lead titanate solid solution of the present invention and the low melting point glass is suitable for sealing electronic parts because it has a great effect of lowering the thermal expansion coefficient.

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】正方晶系PbTiO3のPbを、Na及びLaで14〜
40モル%置換してなることを特徴とする低熱膨張チタ
ン酸鉛固溶体。
1. Pb of tetragonal PbTiO 3 with Na and La of 14 to
A low-thermal-expansion lead titanate solid solution characterized by being substituted by 40 mol%.
【請求項2】前記低熱膨張チタン酸鉛固溶体において、
Na,Laがモル比でNa/La=0.43〜2.33の範囲内にある請
求項1の低熱膨張チタン酸鉛固溶体。
2. In the low thermal expansion lead titanate solid solution,
The low thermal expansion lead titanate solid solution according to claim 1, wherein Na and La are in a molar ratio of Na / La = 0.43 to 2.33.
【請求項3】請求項1のチタン酸鉛固溶体と低融点ガラ
スとを混合してなる封着材料。
3. A sealing material obtained by mixing the lead titanate solid solution according to claim 1 and a low melting point glass.
【請求項4】フィラーとして、ジルコン、コージェライ
ト、ウイレマイト、ムライト、β−ユークリプタイト、
β−スポジューメン、酸化スズの少なくとも1種類の粉
末と請求項1の低熱膨張チタン酸鉛固溶体と低融点ガラ
スとを含むことを特徴とする封着材料。
4. Zircon, cordierite, willemite, mullite, β-eucryptite, as a filler,
A sealing material comprising at least one powder of β-spodumene and tin oxide, the low thermal expansion lead titanate solid solution according to claim 1 and a low melting point glass.
JP18920791A 1991-07-03 1991-07-03 Lead titanate solid solution and sealing material using the same Expired - Fee Related JP3157014B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18920791A JP3157014B2 (en) 1991-07-03 1991-07-03 Lead titanate solid solution and sealing material using the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18920791A JP3157014B2 (en) 1991-07-03 1991-07-03 Lead titanate solid solution and sealing material using the same

Publications (2)

Publication Number Publication Date
JPH0517149A true JPH0517149A (en) 1993-01-26
JP3157014B2 JP3157014B2 (en) 2001-04-16

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Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Link
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114249529A (en) * 2021-12-06 2022-03-29 北京北旭电子材料有限公司 Lithium-aluminum-silicon filler composition, lithium-aluminum-silicon filler and preparation method thereof, glass sealing material and application thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114249529A (en) * 2021-12-06 2022-03-29 北京北旭电子材料有限公司 Lithium-aluminum-silicon filler composition, lithium-aluminum-silicon filler and preparation method thereof, glass sealing material and application thereof
CN114249529B (en) * 2021-12-06 2024-03-01 北京北旭电子材料有限公司 Lithium aluminum silicon filler composition, lithium aluminum silicon filler and preparation method thereof, glass sealing material and application thereof

Also Published As

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