JPH05169652A - Ink jet printer head - Google Patents

Ink jet printer head

Info

Publication number
JPH05169652A
JPH05169652A JP34534391A JP34534391A JPH05169652A JP H05169652 A JPH05169652 A JP H05169652A JP 34534391 A JP34534391 A JP 34534391A JP 34534391 A JP34534391 A JP 34534391A JP H05169652 A JPH05169652 A JP H05169652A
Authority
JP
Japan
Prior art keywords
head substrate
vibrating element
fixing member
positioning
head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP34534391A
Other languages
Japanese (ja)
Other versions
JP3199076B2 (en
Inventor
Hisashi Miyazawa
久 宮澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP34534391A priority Critical patent/JP3199076B2/en
Priority to EP97108517A priority patent/EP0795404B1/en
Priority to DE69233523T priority patent/DE69233523T2/en
Priority to SG1996008561A priority patent/SG49270A1/en
Priority to EP92121977A priority patent/EP0550030B1/en
Priority to DE69224975T priority patent/DE69224975T2/en
Priority to US07/997,571 priority patent/US5517225A/en
Publication of JPH05169652A publication Critical patent/JPH05169652A/en
Priority to US08/471,230 priority patent/US5630274A/en
Priority to US08/469,504 priority patent/US5764257A/en
Priority to US09/070,766 priority patent/US6286942B1/en
Priority to HK98110817A priority patent/HK1010045A1/en
Priority to JP2000322400A priority patent/JP3427894B2/en
Application granted granted Critical
Publication of JP3199076B2 publication Critical patent/JP3199076B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Particle Formation And Scattering Control In Inkjet Printers (AREA)

Abstract

PURPOSE:To achieve stabilization of ink discharge by attaining densification of a head an improving in a tip position accuracy of a vibrating element by a method wherein the vibrating element is fixed by positioning to a head substrate fixing member with a positioning element and a head substrate. CONSTITUTION:A head substrate 3 is positioned in an enclosed manner to a head substrate guide deformed hole 4e of a head substrate fixing member 4. A vibrating element 1 is positioned with the head substrate fixing member 4 by throwing the head substrate into the head substrate fixing member. Since a positioning jig is not required by the throwing-into structure of the head substrate 3, a manufacturing process becomes easy. Further, since both end surfaces of the head substrate 3 is guide in an enclosed manner with the head substrate fixing member 4 in the throwing into process, a vibrating element 1 consisting of a comparatively brittle laminate piezoelectric element can be prevented from being ruptured owing to collision with other members.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】本発明における詳細な説明を、次の項目に
従って記載する。
A detailed description of the present invention will be given in accordance with the following items.

【0002】[0002]

【産業上の利用分野】本発明はインクジェット記録装置
に係わるもので、特に振動素子の位置決めに関するもの
である。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ink jet recording apparatus, and more particularly to positioning of a vibrating element.

【0003】[0003]

【従来の技術】従来のインクジェットプリンタヘッドの
振動素子は、特開昭58−119871号公報に見られ
るように各振動子を支持部材により包囲することで、位
置決めされ、各々固定していた。
2. Description of the Related Art A conventional vibration element of an ink jet printer head has been positioned and fixed by surrounding each vibrator with a supporting member as disclosed in Japanese Patent Laid-Open No. 58-119871.

【0004】[0004]

【発明が解決しょうとする課題】従来のインクジェット
プリンタヘッドは、各振動素子を支持部材で、包囲的に
支持しており、振動素子間に支持部材があるため、振動
素子間隔を狭めて、ヘッドを高密度化する事が困難であ
るという問題があった。
In the conventional ink jet printer head, each vibrating element is surrounded and supported by a supporting member, and since there is a supporting member between the vibrating elements, the vibrating element interval is narrowed and the head is reduced. There is a problem that it is difficult to increase the density.

【0005】また振動素子を直接保持するため保持長さ
の制限が生じ、且つ振動素子の変位先端は変形阻害の点
から保持できない事から、振動素子の先端から離れた所
を保持しており、振動素子の先端を支持部材に高精度に
位置決めする事が困難で、安定したインク吐出を達成す
るという点で、問題があった。
Further, since the vibrating element is directly held, the holding length is limited, and since the displacement tip of the vibrating element cannot be held from the point of inhibiting deformation, the vibrating element is held at a position apart from the tip. There is a problem in that it is difficult to position the tip of the vibrating element on the support member with high precision, and stable ink ejection is achieved.

【0006】したがって本発明の技術的課題は、ヘッド
の高密度化を達成し、かつ振動素子の先端位置精度を向
上することでインクの吐出を安定させて、高印字品質の
インクジェットプリンタヘッドを提供する事にある。
Therefore, a technical object of the present invention is to provide an ink jet printer head of high printing quality, which achieves high density of the head and improves the accuracy of the position of the tip of the vibrating element to stabilize ink ejection. There is something to do.

【0007】[0007]

【課題を解決するための手段】上記技術的課題を課題を
解決するため、本発明はヘッド基板上に固定された振動
素子と、この振動素子の両側に、前記振動素子と同じ部
材からなり、且つ同一加工工程で形成された位置決め素
子を有し、前記振動素子がこの位置決め素子とヘッド基
板とによって、ヘッド基板固定部材に位置決めされ、前
記ヘッド基板がヘッド基板固定部材に固定される手段を
設けた。
In order to solve the above technical problems, the present invention comprises a vibrating element fixed on a head substrate and the same member as the vibrating element on both sides of the vibrating element. And a positioning element formed in the same processing step, wherein the vibrating element is positioned by the positioning element and the head substrate on the head substrate fixing member, and the head substrate is fixed on the head substrate fixing member. It was

【0008】[0008]

【作用】本発明の上記の構成によれば、ヘッド基板上に
振動素子と、該振動素子の両側に、位置決め素子を設
け、位置決め素子を支持部材であるヘッド基板固定部材
で包囲的に支持する事で、振動素子をヘッド基板固定部
材に位置決めできる。したがって直接的に各振動素子を
包囲的に支持部材によって保持する必要がないため、振
動素子間に、包囲する支持部材が不要となるので、各振
動素子の間隔を狭め、高密度なヘッドができる。
According to the above structure of the present invention, the vibrating element is provided on the head substrate and the positioning elements are provided on both sides of the vibrating element, and the positioning element is surrounded and supported by the head substrate fixing member which is a supporting member. Therefore, the vibrating element can be positioned on the head substrate fixing member. Therefore, since it is not necessary to directly surround each vibrating element and hold it by a supporting member, a supporting member that encloses each vibrating element is not required, so that the interval between the vibrating elements can be narrowed and a high-density head can be formed. ..

【0009】また、位置決め素子として、振動素子と同
じ部材からなり、且つ同一の加工工程で、位置決め素子
が形成されるため、振動素子との位置合わせ接合が不要
で、且つ加工機の精度で振動素子と位置決め素子の位置
が決まる為、位置決め素子を振動素子に対して高精度に
位置決めでき、かつ容易に製造できる。
Further, since the positioning element is made of the same member as the vibrating element, and the positioning element is formed in the same processing step, it is not necessary to join the vibrating element in alignment and to vibrate with the accuracy of the processing machine. Since the positions of the element and the positioning element are determined, the positioning element can be positioned with respect to the vibrating element with high accuracy and can be easily manufactured.

【0010】さらに、振動素子が位置決め素子とヘッド
基板とによって、ヘッド基板固定部材に位置決めされる
ため、振動素子の変位先端と同一の面上で、位置決め素
子を位置決めできる。つまり、従来振動素子の変形阻害
の点から変位先端と極力離れた振動素子部を支持してお
り、支持部材と振動素子間の微少なスキマや、支持部材
の僅かな傾きが、振動素子の支持部材による非拘束部の
長さにより拡大され、振動素子の先端を高精度に位置決
めする事が困難であったが、本発明によると、位置決め
素子の先端を保持する事で、振動素子の変位先端を支持
したのと同様の効果があり、振動素子の先端を高精度に
ヘッド基板固定部材に位置決めする事ができる。
Further, since the vibrating element is positioned on the head substrate fixing member by the positioning element and the head substrate, the positioning element can be positioned on the same plane as the displacement tip of the vibrating element. In other words, the conventional vibrating element supports the vibrating element portion that is as far as possible from the displacement tip from the viewpoint of preventing deformation of the vibrating element, and a slight gap between the supporting member and the vibrating element or a slight inclination of the supporting member prevents the vibrating element from supporting. Although it was difficult to position the tip of the vibrating element with high accuracy because it was enlarged due to the length of the non-restricted portion by the member, according to the present invention, by holding the tip of the positioning element, the displacement tip of the vibrating element is held. The same effect as that of supporting the vibration element can be obtained, and the tip of the vibration element can be positioned on the head substrate fixing member with high accuracy.

【0011】またヘッド基板と位置決め素子によって、
ヘッド基板固定部材に振動素子を位置決めする事で、振
動系の制限から、形状の制限を受ける振動素子よりも、
制限をうけないヘッド基板を用いてヘッド基板固定部材
に固定する事で、ヘッド基板のガイドの範囲を広げら
れ、ヘッド基板固定部材に、振動素子の先端をより高精
度に位置決めできる。
Further, by the head substrate and the positioning element,
By positioning the vibrating element on the head substrate fixing member, the vibrating element is restricted by the shape of the vibrating element due to the restriction of the vibrating system.
By fixing the head substrate to the head substrate fixing member using a head substrate that is not restricted, the range of the guide of the head substrate can be widened, and the tip of the vibration element can be positioned on the head substrate fixing member with higher accuracy.

【0012】ヘッド基板固定部材に対する、振動素子の
位置精度が及ぼす影響を述べると、ヘッド基板固定部材
に圧力室及び圧力室壁を有する部材が固定されており、
振動素子の変位を利用して、その変位方向に圧力室壁を
変位させるため、圧力室間の壁は剛性が高く、圧力室と
振動素子の先端との間の壁は、圧力室中央ほど剛性が低
い。よって前記、振動素子の位置決め精度が低いと、高
密度ヘッドほど圧力室壁から振動素子が受ける反力がば
らつき、圧力室内のインクへの加圧も同様に均一化され
ず、逆に振動素子の位置決め精度が高いと、おなじ理由
で、各圧力室内のインクへの加圧も均一化されること
で、、各圧力室から吐出されるインク量の均一化が図ら
れ、高印字品質のインクジェットプリンタヘッドを提供
できる。
The effect of the positional accuracy of the vibration element on the head substrate fixing member will be described. A member having a pressure chamber and a pressure chamber wall is fixed to the head substrate fixing member.
Since the displacement of the vibrating element is used to displace the pressure chamber wall in the displacement direction, the wall between the pressure chambers has high rigidity, and the wall between the pressure chamber and the tip of the vibrating element is as rigid as the center of the pressure chamber. Is low. Therefore, when the positioning accuracy of the vibrating element is low, the reaction force received by the vibrating element from the pressure chamber wall varies as the density of the head increases, and the pressure applied to the ink in the pressure chamber is not uniformed. For the same reason, if the positioning accuracy is high, the pressure applied to the ink in each pressure chamber is also made uniform, so that the amount of ink ejected from each pressure chamber is made uniform, and an inkjet printer with high printing quality is achieved. A head can be provided.

【0013】[0013]

【実施例】図1(a)は、本発明によるインクジェット
プリンタヘッドの一実施例を示す断面図で、(b)はそ
の部分拡大図であり、特に圧力室5bを示す。振動素子
1は積層圧電素子からなり、この振動素子1と位置決め
素子2は、ヘッド基板3に固定され、且つ振動素子1の
変位先端1aは、ヘッド基板3には拘束されず、圧力室
壁5aに固定されている。また位置決め素子2の先端2
aの最先端面は圧力室板5に固定されている。上記の構
成により振動素子1の変位先端1aを圧力室壁5aに固
定する際に、位置決め素子2の先端2aの最先端面が圧
力室板5の面に度当たることで振動素子1の変位先端1
aの矢印z方向の位置が決まるため、圧力室壁5aを大
きく変形させる事がなく、安定的に製造できる効果があ
る。
1 (a) is a sectional view showing an embodiment of an ink jet printer head according to the present invention, and FIG. 1 (b) is a partially enlarged view thereof, particularly showing a pressure chamber 5b. The vibrating element 1 is composed of a laminated piezoelectric element. The vibrating element 1 and the positioning element 2 are fixed to the head substrate 3, and the displacement tip 1a of the vibrating element 1 is not restrained by the head substrate 3 and the pressure chamber wall 5a. It is fixed to. In addition, the tip 2 of the positioning element 2
The frontmost surface of a is fixed to the pressure chamber plate 5. When the displacement tip 1a of the vibrating element 1 is fixed to the pressure chamber wall 5a with the above configuration, the tip end 2a of the positioning element 2 contacts the surface of the pressure chamber plate 5 so that the vibrating element 1 is displaced. 1
Since the position of a in the direction of arrow z is determined, the pressure chamber wall 5a is not significantly deformed, and there is an effect that stable manufacturing is possible.

【0014】矢印zは振動素子1の変位方向を示す。圧
力室5bは、圧力室板5と圧力室壁5aと、ノズル6a
を有するノズル板6から形成される。圧力室板5とノズ
ル板6には、ヘッド基板固定部材4との位置決めのた
め、ガイド穴5cとガイド穴5d及び、ガイド穴6cと
ガイド穴6dがあり、ヘッド基板固定部材4の、ガイド
ダボ4cとガイドダボ4dにより、ヘッド基板固定部材
4へ位置決めされて、固定されている。
The arrow z indicates the displacement direction of the vibration element 1. The pressure chamber 5b includes a pressure chamber plate 5, a pressure chamber wall 5a, and a nozzle 6a.
Is formed from a nozzle plate 6 having The pressure chamber plate 5 and the nozzle plate 6 have a guide hole 5c and a guide hole 5d and a guide hole 6c and a guide hole 6d for positioning the head substrate fixing member 4, and the guide dowel 4c of the head substrate fixing member 4 is provided. With the guide dowel 4d, the head substrate fixing member 4 is positioned and fixed.

【0015】また位置決め素子2は振動素子1群の両側
に位置し、位置決め素子2の先端2aとヘッド基板固定
部材4の先端4aは、矢印y方向に極僅かなスキマを持
ち、位置決め素子2は、ヘッド基板固定部材4に位置決
めされている。またヘッド基板固定部材4の先端4aを
後端4bよりも突起させる事で、位置決め素子2との接
触を先端だけに制限でき、複数からなる振動素子1の先
端1aを圧力室板5に密接に接合し、かつ位置決め素子
2の先端2aによって正確に位置決めされる。ヘッド基
板3は、ヘッド基板固定部材4の斜線部との重なり面に
接着剤でヘッド基板固定部材4に固定されている。
The positioning elements 2 are located on both sides of the vibrating element 1 group, and the tip 2a of the positioning element 2 and the tip 4a of the head substrate fixing member 4 have a slight gap in the arrow y direction, and the positioning element 2 is The head substrate fixing member 4 is positioned. Further, by making the front end 4a of the head substrate fixing member 4 project more than the rear end 4b, the contact with the positioning element 2 can be limited to only the front end, and the front end 1a of the vibrating element 1 composed of a plurality of elements can be closely contacted with the pressure chamber plate 5. They are joined and accurately positioned by the tip 2a of the positioning element 2. The head substrate 3 is fixed to the head substrate fixing member 4 with an adhesive on the overlapping surface of the head substrate fixing member 4 with the hatched portion.

【0016】上記の構成により、振動子1の変位先端1
aはヘッド基板3→位置決め素子2→ヘッド基板固定部
材4→圧力室板5を介して矢印yの方向について、圧力
室壁5aに位置決めされ、固定されている。
With the above configuration, the displacement tip 1 of the vibrator 1
a is positioned and fixed to the pressure chamber wall 5a in the direction of arrow y through the head substrate 3 → positioning element 2 → head substrate fixing member 4 → pressure chamber plate 5.

【0017】ここで、動作について説明すると、圧力室
内5bにはインクが供給されており振動素子1を充電さ
せると振動素子1が収縮することで、先端1aはノズル
6aから離れる方向に変位する、前述の振動素子1の動
作に伴い圧力室5bの体積が増加し、さらにインクが供
給され、圧力室内を満たす。ここで振動素子1に蓄えら
れた電荷を放電させると、振動素子1は初期状態に戻
り、圧力室を加圧する。加圧されたインクは、圧力室へ
のインク供給側とノズル6aにインクが逃げ、ノズルオ
リフィスの効果によってインクの流速が増し、ノズル6
aからインクが吐出する。
Here, the operation will be described. Ink is supplied to the pressure chamber 5b, and when the vibrating element 1 is charged, the vibrating element 1 contracts, and the tip 1a is displaced in the direction away from the nozzle 6a. The volume of the pressure chamber 5b increases with the operation of the vibrating element 1 described above, and ink is further supplied to fill the pressure chamber. Here, when the electric charge stored in the vibrating element 1 is discharged, the vibrating element 1 returns to the initial state and pressurizes the pressure chamber. The pressurized ink escapes to the ink supply side to the pressure chamber and to the nozzle 6a, and the flow velocity of the ink increases due to the effect of the nozzle orifice.
Ink is ejected from a.

【0018】図2は、振動素子1の矢印x方向へのヘッ
ド基板固定部材4との位置決めを説明するための平面図
で、圧力室板5とノズル板6を除いている。
FIG. 2 is a plan view for explaining the positioning of the vibration element 1 with respect to the head substrate fixing member 4 in the direction of arrow x, and the pressure chamber plate 5 and the nozzle plate 6 are omitted.

【0019】ヘッド基板固定部材4のヘッド基板ガイド
異形穴4eにヘッド基板3が包囲的に位置決めされてお
り、ヘッド基板をヘッド基板固定部材に投げ込むこと
で、振動素子1はヘッド基板固定部材4に位置決めされ
る。
The head substrate 3 is positioned so as to surround the head substrate guide deformed hole 4e of the head substrate fixing member 4, and the vibrating element 1 is moved to the head substrate fixing member 4 by throwing the head substrate into the head substrate fixing member 4. Positioned.

【0020】このヘッド基板3の投げ込み構造により、
位置決め治具が不要であるため、製造工程が容易にな
る、また前記の投げ込み過程においてヘッド基板固定部
材4にヘッド基板3の両端面が包囲的に案内されるた
め、比較的脆い積層圧電素子からなる振動素子1を他部
材との衝突による破壊から防止できる効果がある。
Due to the throwing structure of the head substrate 3,
Since no positioning jig is required, the manufacturing process is facilitated, and since both end surfaces of the head substrate 3 are surrounded and guided by the head substrate fixing member 4 in the throwing process, a relatively fragile laminated piezoelectric element can be obtained. The vibrating element 1 can be prevented from being damaged by a collision with another member.

【0021】図3の(a)は、振動素子1と位置決め素
子2とヘッド基板3の組立時の斜視図で、ヘッド基板3
の面上には、薄膜電極3vと薄膜電極3wがパターン状
に形成されている。振動素子1と位置決め素子2は、積
層圧電素子からなり、共通電極として薄膜電極3vと、
電極として薄膜電極3wさらに共通電極板7を介して、
振動素子1へ充放電する事で、振動素子1の先端1aの
変形させる。(b)は、振動素子1部の断面図で、振動
素子1には、電極1wと共通電極1vが形成され、ヘッ
ド基板3の薄膜電極3wと電極1wは導電し、さらに固
定されている。また共通電極板7と共通電極1vも導電
している。ここで薄膜電極3wと共通電極板7から振動
素子1の電極1wと共通電極1vを通じて、振動素子1
へ充電すると、矢印z方向に振動素子1の先端1aは収
縮する。次に振動素子1に充電した電荷を放電すると振
動素子1の収縮は、充電前の状態に復帰する。
FIG. 3A is a perspective view of the vibrating element 1, the positioning element 2, and the head substrate 3 when they are assembled.
A thin film electrode 3v and a thin film electrode 3w are formed in a pattern on the surface. The vibrating element 1 and the positioning element 2 are made of laminated piezoelectric elements, and have a thin film electrode 3v as a common electrode.
Through the thin film electrode 3w and the common electrode plate 7 as an electrode,
By charging and discharging the vibrating element 1, the tip 1a of the vibrating element 1 is deformed. (B) is a cross-sectional view of the vibrating element 1 part. In the vibrating element 1, an electrode 1w and a common electrode 1v are formed, and the thin film electrode 3w and the electrode 1w of the head substrate 3 are electrically conductive and further fixed. The common electrode plate 7 and the common electrode 1v are also electrically conductive. Here, from the thin film electrode 3w and the common electrode plate 7 to the vibrating element 1 through the electrode 1w and the common electrode 1v of the vibrating element 1.
When charged to, the tip 1a of the vibration element 1 contracts in the direction of arrow z. Next, when the electric charge charged in the vibrating element 1 is discharged, the contraction of the vibrating element 1 returns to the state before the charging.

【0022】図4は、振動素子1と位置決め素子2を形
成するための工程図で、ヘッド基板3の面上に2ミクロ
ンメートル以下の薄膜電極3uが形成されている
((a)の状態)。厚膜電極だと、後に説明する(c)
での加工時に電極剥離を起こし易く、薄膜電極が望まし
い。次に積層圧電素子からなる振動素子1と位置決め素
子2の積層圧電素子素材8を、快削性セラミックスから
なるヘッド基板3及び薄膜電極3uに接合する((b)
の状態)。次にスライシング機によってに、薄膜電極3
uと素材8を切断し、かつヘッド基板3を僅かに切削す
る程度の深さに加工する事で、振動素子1と位置決め素
子2と薄膜電極3vさらに薄膜電極3wが形成される。
また、振動素子1と位置決め素子2は、スライシング機
で同一工程で加工できる為、位置決め素子2の両外形と
振動素子1を同時加工することで、振動素子1に対する
位置決め素子2の位置精度は、機械精度で決まり、高精
度化が図られる((c)の状態)。
FIG. 4 is a process diagram for forming the vibrating element 1 and the positioning element 2. A thin film electrode 3u of 2 μm or less is formed on the surface of the head substrate 3 (state (a)). . A thick film electrode will be described later (c)
A thin film electrode is desirable because electrode peeling easily occurs during processing. Next, the laminated piezoelectric element material 8 composed of the laminated piezoelectric element and the positioning element 2 is bonded to the head substrate 3 and the thin film electrode 3u made of free-cutting ceramics ((b)).
Condition). Next, the thin film electrode 3
The vibrating element 1, the positioning element 2, the thin film electrode 3v, and the thin film electrode 3w are formed by cutting u and the material 8 and processing the head substrate 3 to a depth that allows the head substrate 3 to be slightly cut.
Further, since the vibrating element 1 and the positioning element 2 can be processed in the same process by the slicing machine, by simultaneously machining both outer shapes of the positioning element 2 and the vibrating element 1, the positional accuracy of the positioning element 2 with respect to the vibrating element 1 is It is determined by machine precision, and high precision is achieved (state (c)).

【0023】次に共通電極板7を振動素子1に導通接続
を図る((d)の状態)事で、図3の(a)と等しくな
る。
Next, the common electrode plate 7 is electrically connected to the vibrating element 1 (state (d)) so that it becomes equal to that of FIG. 3 (a).

【0024】[0024]

【発明の効果】本発明の上記の構成によれば、ヘッド基
板上に固定された振動素子をヘッド基板固定部材にヘッ
ド基板を固定する事で、振動素子を固定できる為、各振
動素子を包囲的に支持部材によって保持する必要がな
く、振動素子間に、包囲する支持部材が不要となるの
で、各振動素子の間隔を狭め、ヘッドを高密度化できる
効果がある。
According to the above configuration of the present invention, the vibrating element fixed on the head substrate can be fixed by fixing the vibrating element to the head substrate fixing member. Therefore, each vibrating element is surrounded. Since it is not necessary to hold it by a supporting member, and a supporting member that surrounds the vibrating elements is not required, there is an effect that the interval between the vibrating elements can be narrowed and the head density can be increased.

【0025】また、位置決め素子として、ヘッド基板上
に固定された振動素子と、この振動素子の両側に、前記
振動素子と同じ部材からなり、且つ同一加工工程で形成
される為、位置決め素子は振動素子との位置合わせ接合
が不要で、加工機の精度で振動素子と位置決め素子の位
置が決まる為、位置決め素子を振動素子に対して高精度
に位置決めでき、かつ容易に製造できる効果がある。
Further, as the positioning element, the vibrating element fixed on the head substrate and the same member as the vibrating element on both sides of the vibrating element are formed in the same processing step, so that the positioning element vibrates. Positioning and joining with the element is not required, and the positions of the vibrating element and the positioning element are determined by the accuracy of the processing machine, so that the positioning element can be positioned with respect to the vibrating element with high accuracy and can be easily manufactured.

【0026】さらに、振動素子がこの位置決め素子とヘ
ッド基板とによって、ヘッド基板固定部材に位置決めさ
れる為、振動素子の変位先端と同一の面上で、位置決め
素子を位置決めできる。つまり、従来振動素子の変形阻
害の点から変位先端と極力離れた振動素子部を支持して
おり、支持部材と振動素子間の微少なスキマや、支持部
材の僅かな傾きが、振動素子の支持部材による非拘束部
の長さにより拡大され、振動素子の先端を高精度に位置
決めする事が困難であったが、本発明によると、位置決
め素子の先端を保持する事で、振動素子の変位先端を支
持したのと同様の作用があり、振動素子の先端を高精度
にヘッド基板固定部材に位置決めする事ができる効果が
ある。
Further, since the vibrating element is positioned on the head substrate fixing member by this positioning element and the head substrate, the positioning element can be positioned on the same surface as the displacement tip of the vibrating element. In other words, the conventional vibrating element supports the vibrating element portion that is as far as possible from the displacement tip from the viewpoint of preventing deformation of the vibrating element, and a slight gap between the supporting member and the vibrating element or a slight inclination of the supporting member prevents the vibrating element from supporting. Although it was difficult to position the tip of the vibrating element with high accuracy because it was enlarged due to the length of the non-restricted portion by the member, according to the present invention, by holding the tip of the positioning element, the displacement tip of the vibrating element is held. There is an effect similar to that of supporting the above, and there is an effect that the tip of the vibrating element can be positioned with high accuracy on the head substrate fixing member.

【0027】またヘッド基板と位置決め素子によって、
ヘッド基板固定部材に振動素子を位置決めする事で、振
動系の制限から、形状の制限を受ける振動素子よりも、
制限をうけないヘッド基板を用いて支持部材で包囲的に
支持する事で、ガイドの範囲を広げられ、ヘッド基板固
定部材に、振動素子の先端をより高精度に位置決めでき
る効果がある。
Further, by the head substrate and the positioning element,
By positioning the vibrating element on the head substrate fixing member, the vibrating element is restricted from the shape due to the restriction of the vibration system,
By surrounding and supporting the support member with the support member using the head substrate that is not restricted, there is an effect that the range of the guide can be widened and the tip of the vibrating element can be more accurately positioned on the head substrate fixing member.

【0028】また、振動素子をヘッド基板固定部材に高
精度に位置決めされる事で、圧力室壁に振動素子を高精
度に位置でき、振動素子が変位したときの圧力室壁から
受ける反力が均一化し、振動素子による、各圧力室内の
インクへの加圧も均一化されることで、、各圧力室から
吐出されるインク量の均一化が図られ、高印字品質化が
できる効果がある。
Further, since the vibrating element is positioned with high accuracy on the head substrate fixing member, the vibrating element can be positioned with high accuracy on the pressure chamber wall, and the reaction force received from the pressure chamber wall when the vibrating element is displaced. By uniformizing the pressure applied to the ink in each pressure chamber by the vibrating element, the amount of ink ejected from each pressure chamber can be made uniform, and high printing quality can be achieved. ..

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明のインクジェットプリンタヘッドの断面
図。
FIG. 1 is a sectional view of an inkjet printer head of the present invention.

【図2】本発明の振動素子1の矢印x方向へのヘッド基
板固定部材4との位置決めを説明するための平面図。
FIG. 2 is a plan view for explaining positioning of the vibrating element 1 of the present invention with the head substrate fixing member 4 in the arrow x direction.

【図3】本発明の振動素子1と位置決め素子2とヘッド
基板3の斜視図。
FIG. 3 is a perspective view of a vibrating element 1, a positioning element 2, and a head substrate 3 of the present invention.

【図4】本発明の振動素子1と位置決め素子2を形成す
るための工程図。
FIG. 4 is a process drawing for forming the vibration element 1 and the positioning element 2 of the present invention.

【符号の説明】[Explanation of symbols]

1 振動素子 1a 振動素子の先端 2 位置決め素子 3 ヘッド基板 4 ヘッド基板固定部材 5 圧力室板 5a 圧力室壁 5b 圧力室 6 ノズル板 6a ノズル 7 共通電極板 8 積層圧電素子素材 DESCRIPTION OF SYMBOLS 1 Vibration element 1a Tip of vibration element 2 Positioning element 3 Head substrate 4 Head substrate fixing member 5 Pressure chamber plate 5a Pressure chamber wall 5b Pressure chamber 6 Nozzle plate 6a Nozzle 7 Common electrode plate 8 Multilayer piezoelectric element material

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 振動素子の変位を利用して、その変位方
向に圧力室壁を変位させて、該圧力室内のインクを加圧
し、該圧力室に連通するノズルよりインク滴を噴射する
インクジェットプリンタヘッドにおいて、ヘッド基板上
に固定された振動素子と、この振動素子の両側に、前記
振動素子と同じ部材からなり、且つ同一加工工程で形成
された位置決め素子を有し、前記振動素子がこの位置決
め素子とヘッド基板とによって、ヘッド基板固定部材に
位置決めされ、前記ヘッド基板がヘッド基板固定部材に
固定されている事を特徴とするインクジェットプリンタ
ヘッド。
1. An ink jet printer which utilizes displacement of a vibrating element to displace a pressure chamber wall in the displacement direction to pressurize ink in the pressure chamber and eject ink droplets from a nozzle communicating with the pressure chamber. In the head, a vibrating element fixed on the head substrate and positioning elements made of the same member as the vibrating element on the both sides of the vibrating element and formed in the same machining step are provided, and the vibrating element is positioned by this positioning element. An inkjet printer head characterized in that the head substrate is fixed to a head substrate fixing member by an element and a head substrate, and the head substrate is fixed to the head substrate fixing member.
JP34534391A 1991-12-26 1991-12-26 Ink jet recording head and piezoelectric unit for ink jet recording head Expired - Lifetime JP3199076B2 (en)

Priority Applications (12)

Application Number Priority Date Filing Date Title
JP34534391A JP3199076B2 (en) 1991-12-26 1991-12-26 Ink jet recording head and piezoelectric unit for ink jet recording head
DE69233523T DE69233523T2 (en) 1991-12-26 1992-12-24 Inkjet printhead
SG1996008561A SG49270A1 (en) 1991-12-26 1992-12-24 Ink jet recording head and process for forming same
EP92121977A EP0550030B1 (en) 1991-12-26 1992-12-24 Ink jet recording head and process for forming same
DE69224975T DE69224975T2 (en) 1991-12-26 1992-12-24 Inkjet printhead and its manufacturing process
EP97108517A EP0795404B1 (en) 1991-12-26 1992-12-24 Ink jet recording head
US07/997,571 US5517225A (en) 1991-12-26 1992-12-28 Ink jet recording head
US08/471,230 US5630274A (en) 1991-12-26 1995-06-06 Method of making an ink jet recording head
US08/469,504 US5764257A (en) 1991-12-26 1995-06-06 Ink jet recording head
US09/070,766 US6286942B1 (en) 1991-12-26 1998-05-01 Ink jet recording head with mechanism for positioning head components
HK98110817A HK1010045A1 (en) 1991-12-26 1998-09-22 Ink jet recording head and process for forming same
JP2000322400A JP3427894B2 (en) 1991-12-26 2000-10-23 Piezoelectric unit for inkjet recording head and method of manufacturing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP34534391A JP3199076B2 (en) 1991-12-26 1991-12-26 Ink jet recording head and piezoelectric unit for ink jet recording head

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP2000322400A Division JP3427894B2 (en) 1991-12-26 2000-10-23 Piezoelectric unit for inkjet recording head and method of manufacturing the same
JP2001009921A Division JP3362787B2 (en) 2001-01-18 2001-01-18 Piezoelectric unit for inkjet recording head

Publications (2)

Publication Number Publication Date
JPH05169652A true JPH05169652A (en) 1993-07-09
JP3199076B2 JP3199076B2 (en) 2001-08-13

Family

ID=18375954

Family Applications (1)

Application Number Title Priority Date Filing Date
JP34534391A Expired - Lifetime JP3199076B2 (en) 1991-12-26 1991-12-26 Ink jet recording head and piezoelectric unit for ink jet recording head

Country Status (1)

Country Link
JP (1) JP3199076B2 (en)

Also Published As

Publication number Publication date
JP3199076B2 (en) 2001-08-13

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