JPH05167258A - Multilayer wiring board - Google Patents

Multilayer wiring board

Info

Publication number
JPH05167258A
JPH05167258A JP3328711A JP32871191A JPH05167258A JP H05167258 A JPH05167258 A JP H05167258A JP 3328711 A JP3328711 A JP 3328711A JP 32871191 A JP32871191 A JP 32871191A JP H05167258 A JPH05167258 A JP H05167258A
Authority
JP
Japan
Prior art keywords
wiring board
multilayer wiring
hole
coaxial cable
rigid coaxial
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP3328711A
Other languages
Japanese (ja)
Inventor
Yasuaki Fukuma
靖晃 福間
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP3328711A priority Critical patent/JPH05167258A/en
Publication of JPH05167258A publication Critical patent/JPH05167258A/en
Withdrawn legal-status Critical Current

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  • Production Of Multi-Layered Print Wiring Board (AREA)

Abstract

PURPOSE:To enable a signal transmission line to be set uniform in characteristic impedance and prevent delay and malfunction caused by the reflection of signal. CONSTITUTION:Recessed holes 126 and 127 whose ends are open on the rear side are made just under a terminal connection pad 121 and a surface wiring layer 122 located on the component mounting surface of a multilayer wiring board. Holes 128 and 129 are made between the base of the recessed hole 126 or 127 and the terminal connection pad 121 or the surface wiring layer 122 respectively, and rigid coaxial cables 130 and 140 and their conductors 131 ands 141 are inserted into the recessed holes 126 and 127 and the holes 128 and 129 respectively. Furthermore, the conductors 131 and 141 are connected to the terminal connection pad 121 and the surface wiring layer 122 respectively. In a multilayer wiring board 120 constituted as above, signals are inputted into the terminal 111 of an LSI 110 through the terminal connection pad 121 or transmitted to the surface wiring layer 122 through the intermediary of the conductors 131 and 141 of the rigid coaxial cables 130 and 140.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は多層配線基板に関し、特
に部品の表面実装面と反対側の裏面とに入出力ピンを持
つマルチチップパッケージなどで使用される多層配線基
板に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a multi-layer wiring board, and more particularly to a multi-layer wiring board used in a multi-chip package having input / output pins on a surface mounting surface of a component and an opposite back surface.

【0002】[0002]

【従来の技術】マルチチップパッケージなどで使用され
る多層配線基板の従来例を図4に示した。この多層配線
基板410の部品実装面には、表面配線層(あるいは端
子接続用パッド)411からなる表面配線が、またその
裏面には入出力ピン416がそれぞれ設けられている。
これら表面配線層411と入出力ピン416の間におけ
る入出力信号の伝達経路は、多層配線基板410の内部
の信号用配線層412、あるいはグランド層413と各
層間に形成されたスルーホール状の層間配線414を介
して行なわれる。
2. Description of the Related Art FIG. 4 shows a conventional example of a multilayer wiring board used in a multi-chip package or the like. On the component mounting surface of the multi-layer wiring board 410, surface wiring composed of a surface wiring layer (or a pad for terminal connection) 411 is provided, and on the back surface thereof, input / output pins 416 are provided.
The transmission path of the input / output signal between the surface wiring layer 411 and the input / output pin 416 is a signal wiring layer 412 inside the multilayer wiring substrate 410, or a ground layer 413 and a through-hole-shaped interlayer formed between the layers. This is performed via the wiring 414.

【0003】[0003]

【発明が解決しようとする課題】ところが、上記従来の
多層配線基板では、表面配線層、入出力ピン間での信号
伝達が上記の通り内部の信号用配線層や層間配線を介し
て行なわれるから、部品実装面と裏面との間の厚さ方向
の信号伝達経路における特性インピーダンス(Z0 )が
不均一であり、信号の反射が起こり易い。このため、基
板が多層化して厚くなったり、あるいは信号の動作速度
が速くなると、信号の遅延や誤動作などが起こり、正確
な信号伝達が困難になるという問題がある。
However, in the above-mentioned conventional multilayer wiring board, signal transmission between the surface wiring layer and the input / output pins is performed via the internal signal wiring layer and the interlayer wiring as described above. The characteristic impedance (Z0) in the signal transmission path in the thickness direction between the component mounting surface and the back surface is non-uniform, and signal reflection easily occurs. For this reason, when the substrate is multi-layered and thickened, or when the signal operation speed is increased, signal delay and malfunction occur, which makes it difficult to transmit signals accurately.

【0004】それ故に本発明の課題は、厚さ方向の信号
伝達経路の特性インピーダンスの不均一性に起因する信
号の遅延および誤動作を防ぎ、正確な信号伝達を行うこ
とができる、多層配線基板を提供することにある。
Therefore, an object of the present invention is to provide a multilayer wiring board capable of preventing signal delay and malfunction due to non-uniformity of characteristic impedance of a signal transmission path in the thickness direction and performing accurate signal transmission. To provide.

【0005】[0005]

【問題点を解決するための手段】本発明によれば、内側
表面のメッキ膜が内層グランド層と接続された凹型孔
と、前記凹型孔の底面と表面配線の間に設けられたリジ
ット同軸ケーブルの心線の通過孔とを有し、前記凹型孔
と前記通過孔に挿入されたリジット同軸ケーブルを前記
表面配線に接続し、更に前記メッキ膜を前記リジット同
軸ケーブルのシールドと接続することを特徴とする多層
配線基板が得られる。即ちこの多層配線基板は、内側表
面のメッキ膜が内層グランド層と接続され且つリジット
同軸ケーブルが挿入できる大きさの凹型孔を基板裏面か
ら設けられたものである。
According to the present invention, a recessed hole in which a plating film on the inner surface is connected to an inner ground layer, and a rigid coaxial cable provided between the bottom surface of the recessed hole and the surface wiring. And connecting the rigid coaxial cable inserted into the concave hole and the through hole to the surface wiring, and further connecting the plating film to the shield of the rigid coaxial cable. A multilayer wiring board having That is, in this multilayer wiring board, the plated film on the inner surface is connected to the inner ground layer, and a concave hole having a size into which the rigid coaxial cable can be inserted is provided from the back surface of the board.

【0006】また本発明によれば、内側表面のメッキ膜
が内層グランド層と接続された貫通孔を有し、前記貫通
孔に挿入されたリジット同軸ケーブルを表面配線と接続
し、更に前記メッキ膜を前記リジット同軸ケーブルのシ
ールドと接続することを特徴とする多層配線基板が得ら
れる。即ちこのこの多層配線基板は、内側表面のメッキ
膜が内層グランド層と接続され且つリジット同軸ケーブ
ルが挿入できる大きさの貫通孔を備えたものである。
According to the present invention, the plating film on the inner surface has a through hole connected to the inner ground layer, the rigid coaxial cable inserted into the through hole is connected to the surface wiring, and the plating film is further formed. Is connected to the shield of the rigid coaxial cable to obtain a multilayer wiring board. That is, this multilayer wiring board is provided with a through hole having a size such that the plating film on the inner surface is connected to the inner ground layer and the rigid coaxial cable can be inserted.

【0007】また本発明によれば、表面配線と裏面の入
出力ピンが直接心線で接続された多層配線基板におい
て、前記心線は前記多層配線基板の表裏面近傍を除く範
囲で前記心線を中心軸として同心円筒状に誘電体で覆わ
れており、前記誘電体の外側はシールドで覆われてお
り、前記シールドが内層のグランド層と接続されている
ことを特徴とする多層配線基板が得られる。即ちこの多
層配線基板は、表面配線と裏面の入出力ピンとを接続す
る心線と、この心線を中心軸とする同心円筒状で心線を
覆う誘電体と、この誘電体を覆い且つ内層グランド層に
接続されたシールドからなる同軸ケーブルを備えたもの
である。
Further, according to the present invention, in the multilayer wiring board in which the front surface wiring and the input / output pins on the back surface are directly connected by the core wires, the core wires are the core wires within a range excluding the vicinity of the front and back surfaces of the multilayer wiring board. Is covered with a dielectric in a concentric cylindrical shape with the central axis as a central axis, the outside of the dielectric is covered with a shield, and the shield is connected to a ground layer of an inner layer, can get. That is, this multilayer wiring board has a core wire that connects the front surface wiring and the input / output pin on the back surface, a dielectric that is concentric in a cylindrical shape with the core wire as a central axis, and covers the core wire. It is provided with a coaxial cable consisting of shields connected to layers.

【0008】[0008]

【作用】部品実装面と裏面間の厚さ方向の信号伝達路を
同軸ケーブルで構成したことで、信号伝達路における特
性インピーダンスが均一で連続となり、信号の反射が起
こりにくくなる。よって、基板が多層化して厚くなった
り、信号の動作速度が速くなっても、信号の反射による
遅延や誤動作などが起こりにくくなり、信号伝達が正確
に行える。
By configuring the signal transmission path in the thickness direction between the component mounting surface and the back surface with the coaxial cable, the characteristic impedance in the signal transmission path becomes uniform and continuous, and signal reflection hardly occurs. Therefore, even if the substrate becomes multi-layered and becomes thicker or the signal operation speed becomes faster, delay or malfunction due to signal reflection is less likely to occur, and signal transmission can be performed accurately.

【0009】[0009]

【実施例】以下に本発明の実施例を説明する。図1は請
求項1記載の本発明の実施例であって、LSIを実装し
た場合の多層配線基板の断面図である。また図2、3は
それぞれ請求項2、3記載の本発明の実施例を示した断
面図である。
EXAMPLES Examples of the present invention will be described below. 1 is an embodiment of the present invention as set forth in claim 1 and is a cross-sectional view of a multilayer wiring board when an LSI is mounted. 2 and 3 are sectional views showing embodiments of the present invention according to claims 2 and 3, respectively.

【0010】図1に示した多層配線基板120におい
て、その部品実装面の端子接続用パッド121や所望の
表面配線層122の直下には、裏面側に開口した凹型孔
126、127が設けられている。凹型孔126、12
7は、リジット同軸ケーブル130、140が挿入でき
る大きさである。また凹型孔126、127の内側表面
は金属でメッキされてメッキ膜124、125となって
いる。これらのメッキ膜124、125は、内層のグラ
ンド層123にそれぞれ接続されてグランド電位となっ
ている。
In the multilayer wiring board 120 shown in FIG. 1, recessed holes 126 and 127 opening to the back side are provided immediately below the terminal connecting pads 121 on the component mounting surface and the desired surface wiring layer 122. There is. Recessed holes 126, 12
7 is a size into which the rigid coaxial cables 130 and 140 can be inserted. The inner surfaces of the concave holes 126 and 127 are plated with metal to form plated films 124 and 125. These plated films 124 and 125 are respectively connected to the inner ground layer 123 and have a ground potential.

【0011】凹型孔126あるいは127の底面と、端
子接続用パッド121あるいは表面配線層122の間の
長さは、部品実装面上に部品を実装しても破壊せず、ま
たメッキ膜124、125が端子接続用パッド121あ
るいは表面配線層122に接触しない限りにおいて、で
きるだけ短くすることが好ましい。
The length between the bottom surface of the concave hole 126 or 127 and the terminal connecting pad 121 or the surface wiring layer 122 is not destroyed even when a component is mounted on the component mounting surface, and the plating films 124 and 125 are formed. Is preferably as short as possible, as long as it does not contact the terminal connection pad 121 or the surface wiring layer 122.

【0012】また、凹型孔126あるいは127の底面
と端子接続用パッド121あるいは表面配線層122の
間には、リジット同軸ケーブル130、140の心線1
31、141が通る程度の孔128、129が開けられ
ている。これらの孔128、129の中に、リジット同
軸ケーブル130、140およびその心線131、14
1が挿入される。心線131、141は更に、端子接続
用パッド121、表面配線層122にそれぞれ接続され
る。
Further, between the bottom surface of the concave hole 126 or 127 and the terminal connecting pad 121 or the surface wiring layer 122, the core wire 1 of the rigid coaxial cable 130, 140 is provided.
Holes 128 and 129 are formed to allow the passage of 31, 141. In these holes 128, 129, the rigid coaxial cables 130, 140 and their core wires 131, 14 are placed.
1 is inserted. The core wires 131 and 141 are further connected to the terminal connection pad 121 and the surface wiring layer 122, respectively.

【0013】上記構成の多層配線基板120において信
号は、リジット同軸ケーブル130、140の心線13
1、141を介し、端子接続用パッド121を通じてL
SI110の端子111に入出力されるか、あるいは表
面配線層122に伝達される。リジット同軸ケーブル外
周のシールド132、142は、多層配線基板120の
凹型孔126、127の表面のメッキ膜124、125
と接触しており、これによりグランド電位となってい
る。
In the multilayer wiring board 120 having the above structure, signals are transmitted through the core wires 13 of the rigid coaxial cables 130 and 140.
1, 141, through the terminal connection pad 121
It is input / output to / from the terminal 111 of the SI 110 or transmitted to the surface wiring layer 122. The shields 132 and 142 on the outer periphery of the rigid coaxial cable are plated films 124 and 125 on the surfaces of the concave holes 126 and 127 of the multilayer wiring board 120.
It is in contact with, and is at the ground potential.

【0014】図2において、多層配線基板210の表面
配線層(あるいは端子接続用パッド)212の近傍には
貫通孔226が設けられている。貫通孔226は、リジ
ット同軸ケーブル220が挿入できる程度の大きさであ
る。貫通孔226の内側表面は金属でメッキされてメッ
キ膜214となっている。このメッキ膜214は、内層
のグランド層213に接続されてグランド電位となって
いる。また貫通孔226の中にはリジット同軸ケーブル
220が挿入される。リジット同軸ケーブル220の心
線221は部品実装面に引出され、表面配線層(あるい
は端子接続用パッド)212に接続されている。
In FIG. 2, a through hole 226 is provided near the surface wiring layer (or terminal connecting pad) 212 of the multilayer wiring board 210. The through hole 226 has a size such that the rigid coaxial cable 220 can be inserted therein. The inner surface of the through hole 226 is plated with metal to form a plated film 214. The plating film 214 is connected to the inner ground layer 213 and has a ground potential. The rigid coaxial cable 220 is inserted into the through hole 226. The core wire 221 of the rigid coaxial cable 220 is drawn out to the component mounting surface and connected to the surface wiring layer (or terminal connection pad) 212.

【0015】この構成の多層配線基板210において信
号は、外部からリジット同軸ケーブル220の心線22
1を介して表面配線層(あるいは端子接続用パッド)2
12に入出力される。リジット同軸ケーブル220の外
周のシールド222は、多層配線基板210の貫通孔2
26の表面のメッキ膜213と接触して、グランド電位
となっている。
In the multilayer wiring board 210 having this structure, signals are transmitted from the outside to the core wire 22 of the rigid coaxial cable 220.
Surface wiring layer (or terminal connection pad) 2
Input / output to / from 12. The shield 222 on the outer periphery of the rigid coaxial cable 220 has the through hole 2 of the multilayer wiring board 210.
It contacts the plated film 213 on the surface of 26 and has a ground potential.

【0016】図3において、多層配線基板310の表面
配線層(あるいは端子接続用パッド)312と入出力ピ
ン316の間は、心線311で直接接続されている。ま
た多層配線基板310の内部の表裏面近傍を除く範囲に
おいて、心線311の外周は、心線311を中心軸とす
る同心円筒状に誘電体315で覆われている。誘電体3
15の外側は、金属層からなるシールド314で覆われ
ている。シールド314は、多層配線基板310の内部
のグランド層315に接続されてグランド電位となって
いる。
In FIG. 3, the surface wiring layer (or the terminal connecting pad) 312 of the multilayer wiring board 310 and the input / output pin 316 are directly connected by a core wire 311. In addition, in the range excluding the vicinity of the front and back surfaces inside the multilayer wiring board 310, the outer circumference of the core wire 311 is covered with a dielectric 315 in a concentric cylindrical shape with the core wire 311 as the central axis. Dielectric 3
The outside of 15 is covered with a shield 314 made of a metal layer. The shield 314 is connected to the ground layer 315 inside the multilayer wiring substrate 310 and has a ground potential.

【0017】多層配線基板310の表面あるいは裏面と
シールド314との間の長さは、シールド314が表面
配線層(あるいは端子接続用パッド)312や裏面の入
出力ピン316に接触しない限りにおいて、できるだけ
短くすることが好ましい。そして、これら心線311、
誘電体315、およびグランド電位のシールド314に
よって、同軸ケーブルが形成される。
The length between the front surface or the back surface of the multilayer wiring board 310 and the shield 314 is as long as possible, as long as the shield 314 does not come into contact with the front surface wiring layer (or the terminal connection pad) 312 or the back surface input / output pin 316. It is preferable to shorten it. And these core wires 311,
The dielectric 315 and the ground potential shield 314 form a coaxial cable.

【0018】[0018]

【発明の効果】以上説明した通り、本発明の多層配線基
板は、部品実装面と裏面間の厚さ方向の信号伝達経路を
同軸ケーブルで構成したことにより、特性インピーダン
スが均一で連続となり、このため信号の反射が起こりに
くい。よって、基板が多層化して厚くなったり、信号の
動作速度が速くなっても、信号の反射による遅延や誤動
作などが起こりにくく、正確に信号伝達ができるという
効果を奏する。
As described above, in the multilayer wiring board of the present invention, the characteristic impedance is uniform and continuous because the signal transmission path in the thickness direction between the component mounting surface and the back surface is constituted by the coaxial cable. Therefore, signal reflection is unlikely to occur. Therefore, even if the substrate becomes multi-layered and becomes thicker, or the signal operation speed becomes faster, delay and malfunction due to signal reflection are less likely to occur, and the signal can be accurately transmitted.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の実施例の断面図である。FIG. 1 is a sectional view of an embodiment of the present invention.

【図2】本発明の他の実施例の断面図である。FIG. 2 is a sectional view of another embodiment of the present invention.

【図3】本発明のその他の実施例の断面図である。FIG. 3 is a sectional view of another embodiment of the present invention.

【図4】従来例の断面図である。FIG. 4 is a sectional view of a conventional example.

【符号の説明】[Explanation of symbols]

110 LSI 111 LSI端子 120、210、310、410 多層配線基板 121 端子接続用パッド 122、212、312 表面配線層 123、213、313、413 グランド層 124、125、214 メッキ膜 126、127 凹型孔 130、140、220 リジット同軸ケーブル 131、141、221、311 心線 132、142、222、314 シールド 226 貫通孔 316、416 入出力ピン 110 LSI 111 LSI terminal 120, 210, 310, 410 Multi-layer wiring board 121 Terminal connection pad 122, 212, 312 Surface wiring layer 123, 213, 313, 413 Ground layer 124, 125, 214 Plating film 126, 127 Recessed hole 130 , 140, 220 Rigid coaxial cable 131, 141, 221, 311 Core wire 132, 142, 222, 314 Shield 226 Through hole 316, 416 Input / output pin

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 内側表面のメッキ膜が内層グランド層と
接続された凹型孔と、前記凹型孔の底面と表面配線の間
に設けられたリジット同軸ケーブルの心線の通過孔とを
有し、前記凹型孔と前記通過孔に挿入されたリジット同
軸ケーブルを前記表面配線に接続し、更に前記メッキ膜
を前記リジット同軸ケーブルのシールドと接続すること
を特徴とする多層配線基板。
1. A plated film on an inner surface has a concave hole connected to an inner ground layer, and a through hole for a core wire of a rigid coaxial cable provided between a bottom surface of the concave hole and surface wiring. A multi-layer wiring board characterized in that a rigid coaxial cable inserted into the recessed hole and the passage hole is connected to the surface wiring, and further the plating film is connected to a shield of the rigid coaxial cable.
【請求項2】 内側表面のメッキ膜が内層グランド層と
接続された貫通孔を有し、前記貫通孔に挿入されたリジ
ット同軸ケーブルを表面配線と接続し、更に前記メッキ
膜を前記リジット同軸ケーブルのシールドと接続するこ
とを特徴とする多層配線基板。
2. The plated film on the inner surface has a through hole connected to the inner ground layer, the rigid coaxial cable inserted into the through hole is connected to the surface wiring, and the plated film is further connected to the rigid coaxial cable. A multilayer wiring board characterized by being connected to the shield of.
【請求項3】 表面配線と裏面の入出力ピンが直接心線
で接続された多層配線基板において、前記心線は前記多
層配線基板の表裏面近傍を除く範囲で前記心線を中心軸
として同心円筒状に誘電体で覆われており、前記誘電体
の外側はシールドで覆われており、前記シールドが内層
のグランド層と接続されていることを特徴とする多層配
線基板。
3. In a multilayer wiring board in which front surface wiring and input / output pins on the back surface are directly connected by a core wire, the core wire is concentric with the core wire as a central axis in a range excluding the vicinity of the front and back surfaces of the multilayer wiring board. A multilayer wiring board, which is covered with a dielectric in a cylindrical shape, the outside of the dielectric is covered with a shield, and the shield is connected to an inner ground layer.
JP3328711A 1991-12-12 1991-12-12 Multilayer wiring board Withdrawn JPH05167258A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3328711A JPH05167258A (en) 1991-12-12 1991-12-12 Multilayer wiring board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3328711A JPH05167258A (en) 1991-12-12 1991-12-12 Multilayer wiring board

Publications (1)

Publication Number Publication Date
JPH05167258A true JPH05167258A (en) 1993-07-02

Family

ID=18213333

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3328711A Withdrawn JPH05167258A (en) 1991-12-12 1991-12-12 Multilayer wiring board

Country Status (1)

Country Link
JP (1) JPH05167258A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001352017A (en) * 2000-06-06 2001-12-21 Fujitsu Ltd Electronic device packaging substrate and its manufacturing method
US6911734B2 (en) 2002-02-28 2005-06-28 Hitachi, Ltd. Semiconductor device and electronic device
US7033934B2 (en) 2001-11-07 2006-04-25 Shinko Electric Industries Co., Ltd. Method of production of semiconductor package
US9368440B1 (en) * 2013-07-31 2016-06-14 Altera Corporation Embedded coaxial wire and method of manufacture

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001352017A (en) * 2000-06-06 2001-12-21 Fujitsu Ltd Electronic device packaging substrate and its manufacturing method
JP4628520B2 (en) * 2000-06-06 2011-02-09 富士通株式会社 Manufacturing method of electronic device mounting substrate
US7033934B2 (en) 2001-11-07 2006-04-25 Shinko Electric Industries Co., Ltd. Method of production of semiconductor package
CN1306601C (en) * 2001-11-07 2007-03-21 新光电气工业株式会社 Semiconductor package and its manufacture
US6911734B2 (en) 2002-02-28 2005-06-28 Hitachi, Ltd. Semiconductor device and electronic device
US6911733B2 (en) 2002-02-28 2005-06-28 Hitachi, Ltd. Semiconductor device and electronic device
US9368440B1 (en) * 2013-07-31 2016-06-14 Altera Corporation Embedded coaxial wire and method of manufacture

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