JPH05149711A - Three-phase linear scale - Google Patents

Three-phase linear scale

Info

Publication number
JPH05149711A
JPH05149711A JP3341697A JP34169791A JPH05149711A JP H05149711 A JPH05149711 A JP H05149711A JP 3341697 A JP3341697 A JP 3341697A JP 34169791 A JP34169791 A JP 34169791A JP H05149711 A JPH05149711 A JP H05149711A
Authority
JP
Japan
Prior art keywords
linear scale
phase
main body
analog
detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3341697A
Other languages
Japanese (ja)
Inventor
Manabu Komiyama
学 小宮山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanki Engineering Co Ltd
Original Assignee
Sanki Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanki Engineering Co Ltd filed Critical Sanki Engineering Co Ltd
Priority to JP3341697A priority Critical patent/JPH05149711A/en
Publication of JPH05149711A publication Critical patent/JPH05149711A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To obtain an inexpensive three-phase linear scale having high detection accuracy by eliminating low stop accuracy due to the lack of positional information about the vicinity of a stopping position seen in the conventional linear scale. CONSTITUTION:This three-phase linear scale is composed of a linear scale main body 11 provided along the traveling route of a traveling object 12, detecting head 13 mounted on the main body 11 closely to the object 12, and detecting and arithmetic section 14. The main body 11 has a group of light inputting ports having a 1/2-pitch width and arranged at regular pitches along the traveling route of the object 12 and the head 13 is provided with three sets of light-transmissive analog sensors 15 which are arranged in the running direction of the head 13 so that the sensors 15 can be shifted from the pitches of the light inputting ports by 1/3 pitches. The section 14 obtains a group of three-phase alternative signals having phase shifts corresponding to the detection accuracy by calculating the three-phase analog outputs of the sensors 15 and outputs a positional signal by detecting the positive-negative value changing points of the signals.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、移動体の位置情報を出
力する三相リニヤスケールに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a three-phase linear scale which outputs position information of a moving body.

【0002】[0002]

【従来の技術】図12に示すように、移動経路にそって
設けたリニヤスケール本体と移動体に搭載した検出素子
とにより位置情報を走行制御部に出力する従来のリニヤ
スケールは、移動経路に沿って固設したリニヤスケール
本体1に移動体3の振動が直接伝わらないように間接的
に接続した検出素子よりなる検出ヘッド2を移動体3の
走行とともに移動させ、位置情報をシーケンサまたはマ
イコン等よりなる制御部4に出力し、制御部4にて所要
の演算カウンタ等の処理をなし内蔵する制御系を介して
走行用のモータMの増減速、停止等をなし移動体の位置
制御をしている。
2. Description of the Related Art As shown in FIG. 12, a conventional linear scale that outputs position information to a traveling control unit by a linear scale main body provided along a moving path and a detection element mounted on the moving body A detection head 2 including a detection element indirectly connected to the linear scale main body 1 fixed along the movable scale 3 so that the vibration of the mobile body 3 is not directly transmitted is moved as the mobile body 3 travels, and position information is transferred to a sequencer, a microcomputer, or the like. The control unit 4 controls the position of the moving body by accelerating and decelerating and stopping the traveling motor M through a control system that performs necessary processing such as a calculation counter and is built in the control unit 4. ing.

【0003】上記のように位置情報を出力するリニヤス
ケールは、リニヤスケール本体と検出ヘッドとは非接触
状態に設ける、検出素子は近接スイッチまたは磁力線に
より作動するリードスイッチ等が使われ、それぞれの停
止位置に設けられた被検出体を検出してその停止位置に
対応する絶対番地である位置信号を出力し、前記制御部
4においてあらかじめ設定した目的番地と比較して走行
用のモータを制御するようにしている。
In the linear scale that outputs position information as described above, the main body of the linear scale and the detection head are provided in a non-contact state, and the detection element is a proximity switch or a reed switch that operates by magnetic lines of force. The object to be detected provided at the position is detected, a position signal which is an absolute address corresponding to the stop position is output, and the traveling motor is controlled by comparing with a target address preset in the control unit 4. I have to.

【0004】[0004]

【発明が解決しようとする課題】従来のリニヤスケール
は隣接する検出素子同志の相互影響が大きいため、設定
間隔も大きくなり、そのため位置情報提供密度は疎とな
り停止位置近傍に於ける位置情報に乏しく、高い停止精
度を求めることは困難であった。また、検出素子を他に
影響を与えない光電管を使用するとか、エンコーダを使
用するとかにしても限度があった。本発明は上記事項を
解決して安価で高い検出精度を持つ三相リニヤスケール
を提供することを目的とする。
In the conventional linear scale, since the mutual influence of adjacent detecting elements is large, the setting interval is also large, so that the position information providing density is sparse and the position information near the stop position is poor. It was difficult to obtain high stopping accuracy. Further, there is a limit in using a photoelectric tube that does not affect the detection element or using an encoder. An object of the present invention is to solve the above problems and provide a three-phase linear scale that is inexpensive and has high detection accuracy.

【0005】[0005]

【課題を解決するための手段】上記目的を達成するた
め、本発明三相リニヤスケールは、移動体のを移動経路
に沿って設けたリニヤスケール本体と、リニヤスケール
本体に近接した位置の移動体上に搭載した検出ヘッド
と、検出演算部とよりなり、前記リニヤスケール本体は
移動経路に沿って等ピッチで、かつ1/2ピッチ幅の光
投入口群を有し、前記検出ヘッドは前記光投入口のピッ
チに対し1/3ピッチづつのピッチのずれをもつよう走
行方向に配設した3組の光透過型アナログセンサを有
し、前記検出演算部は前記3組のアナログセンサより出
力される3相アナログ出力を演算して検出精度に対応し
た位相ずれを持つ3相交番信号群を得て、それらの信号
値の正負の変換点を検出して位置信号を出力する構成と
したことを特徴とする。また、前記リニヤスケール本体
は、移動体の移動経路に沿って等長の光反射面と非反射
面とを交互に設け、前記アナログセンサは反射形として
もよい。
In order to achieve the above object, a three-phase linear scale of the present invention is a linear scale main body having a moving body along a moving path, and a moving body positioned close to the linear scale main body. The linear scale main body has a light input port group having a uniform pitch and a 1/2 pitch width along the movement path, and the detection head includes the detection head mounted above. It has three sets of light-transmissive analog sensors arranged in the running direction so as to have a pitch shift of 1/3 pitch with respect to the pitch of the input port, and the detection calculation section outputs from the three sets of analog sensors. A three-phase alternating signal group having a phase shift corresponding to the detection accuracy is obtained by calculating the three-phase analog output, and the positive and negative conversion points of those signal values are detected to output the position signal. Characterize. Further, the linear scale main body may alternately have equal-length light-reflecting surfaces and non-reflecting surfaces along a moving path of the moving body, and the analog sensor may be of a reflective type.

【0006】[0006]

【作用】本発明の三相式リニヤスケールは上記構成であ
るので、移動体の走行によりヘッドに内蔵された3相ア
ナログセンサは、移動経路に沿って配設されたリニヤス
ケール本体の光投入口群により該投入口のピッチに対し
該ピッチの1/3(投入口の1ピッチを360°とする
と120°になる)づつ位相のずれを持つ3相アナログ
信号を出力する。ついで演算部でそれぞれの差を演算し
て3相交番信号に変換する。この変換信号で1/6ピッ
チ(P/6)毎の位置信号を出力できる訳であるが、更
に高い要求検出精度に対しては、P/12,P/24,
P/48等の位相のずれを持った3相交番信号を得て、
それらの信号値の正負の転換点を検出してそれぞれ検出
精度P/12,P/24,P/48……に対応する位置
信号を出力する。
Since the three-phase linear scale of the present invention has the above-described structure, the three-phase analog sensor built in the head by the traveling of the moving body is the light input port of the linear scale main body arranged along the moving path. The group outputs a three-phase analog signal having a phase shift of ⅓ of the pitch of the input port (120 ° when one pitch of the input port is 360 °). Next, the difference is calculated by the calculation unit and converted into a three-phase alternating signal. This conversion signal can output a position signal for each 1/6 pitch (P / 6), but for higher required detection accuracy, P / 12, P / 24,
Obtaining a three-phase alternating signal with a phase shift of P / 48,
Positive and negative turning points of those signal values are detected, and position signals corresponding to the detection accuracies P / 12, P / 24, P / 48 ... Are output.

【0007】[0007]

【実施例】次に図面に基づき本発明を具体的に説明す
る。図1は本発明の三相リニヤスケールの一実施例を示
す正面図、図2及び図3は図1の縦断平面図及び側面図
である。図において、10は移動経路、11は移動経路
に沿って設けたリニヤスケール本体、12は移動体、1
3は移動体12に搭載した検出ヘッド、14は検出演算
部、15は検出ヘッド13に取付けた3組のアナログセ
ンサ、16は光投入口、Pは光投入口16のピッチであ
る。図に示すように、リニヤスケール本体11は移動経
路10に沿って設けられた水平帯状部材で、光投入口1
6はP/2の幅を持ち等ピッチに配設されている。検出
ヘッド13は移動体12に搭載され内蔵するモータMに
より移動経路に沿って走行するようにしてある。ヘッド
13に取付けたアナログセンサ15は、光投入口16の
ピッチPの1/3の位置ずれを持たせて図1に示すよう
に、P/2±P/3=5P/6またはP/6の間隔をあ
けて設けてあり、それぞれ投光部15aと受光部15b
を持つ透過型の構造にしてある。
DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described in detail with reference to the drawings. FIG. 1 is a front view showing an embodiment of a three-phase linear scale of the present invention, and FIGS. 2 and 3 are a vertical plan view and a side view of FIG. In the figure, 10 is a moving path, 11 is a linear scale main body provided along the moving path, 12 is a moving body, 1
3 is a detection head mounted on the moving body 12, 14 is a detection calculation unit, 15 is three sets of analog sensors attached to the detection head 13, 16 is a light input port, and P is a pitch of the light input port 16. As shown in the figure, the linear scale main body 11 is a horizontal strip-shaped member provided along the movement path 10 and includes the light input port 1
6 have a width of P / 2 and are arranged at equal pitches. The detection head 13 is mounted on the moving body 12 and runs along a moving path by a built-in motor M. The analog sensor 15 attached to the head 13 has a position shift of 1/3 of the pitch P of the light input port 16 and, as shown in FIG. 1, P / 2 ± P / 3 = 5P / 6 or P / 6. Are provided with a space between them, and each of the light projecting portion 15a and the light receiving portion 15b
It has a transparent structure.

【0008】図4、5、6は、移動体12の移動経路に
沿って光反射面と非反射面とを交互に設け、前記アナロ
グセンサは反射形とした別の実施例の平面図、正面図、
側面図をそれぞれ示す。すなわち、リニヤスケール本体
21は移動体12の移動経路に沿って等長の光反射面2
6と非反射面27とが等ピッチPで交互に設けており、
かつ反射面26、非反射面27ともP/2の幅を有して
いる。これに対応して検出ヘッド23は移動体22の上
に搭載され、走行方向の中央軸部に受光部25bを持
ち、その両側に投光部25aを持つ反射型アナログセン
サ25を前記反射面のピッチPに対しそれぞれP/3の
おくれを持つよう配設してある。
4, 5 and 6 are plan views and front views of another embodiment in which light reflecting surfaces and non-reflecting surfaces are alternately provided along the moving path of the moving body 12 and the analog sensor is a reflection type. Figure,
Side views are shown respectively. That is, the linear scale main body 21 has the same length of the light reflecting surface 2 along the moving path of the moving body 12.
6 and the non-reflective surface 27 are alternately provided at an equal pitch P,
Moreover, both the reflective surface 26 and the non-reflective surface 27 have a width of P / 2. Corresponding to this, the detection head 23 is mounted on the moving body 22 and has a reflection type analog sensor 25 having a light receiving portion 25b at the central axis portion in the traveling direction and light emitting portions 25a on both sides thereof on the reflection surface. It is arranged so as to have a pitch of P / 3 for each pitch P.

【0009】次に上記装置の作用について説明する。移
動体12または22をリニヤスケール本体11に沿って
走行させると、リニヤスケール本体11と検出ヘッド1
3または23との位置関係により、図7に示すようなア
ナログセンサ15または25から3相の出力(A),
(B),(C)を得る。このアナログ出力は正弦波形で
も三角波であってもよい。これを検出演算部14の演算
により、図8に示す3相交番信号A=(A)−(B),
B=(B)−(C),C=(C)−(A)に変換する。
変換された信号Aは点P/6で正から負に、点4P/6
で負から正に値を変わる。同様にして信号Bは点0で負
から正に、点P/2で正から負に値を変え、信号Cは点
2P/6で負から正に、点5P/6で正から負に値を変
わる。このように信号A,B,Cの値がそれぞれ正から
負、負から正になる点を検出演算部14で検出すればP
/6の位相のずれを持つ位置信号を出力して検出精度は
P/6になる。すなわちP=24m/m とすれば検出精度
は4mmとなる。
Next, the operation of the above device will be described. When the moving body 12 or 22 travels along the linear scale main body 11, the linear scale main body 11 and the detection head 1
Depending on the positional relationship with 3 or 23, the output (A) of three phases from the analog sensor 15 or 25 as shown in FIG.
(B) and (C) are obtained. This analog output may be sinusoidal or triangular. This is calculated by the detection calculation unit 14, and the three-phase alternating signal A = (A) − (B) shown in FIG.
Convert to B = (B)-(C) and C = (C)-(A).
The converted signal A changes from positive to negative at point P / 6, and at point 4P / 6
Changes the value from negative to positive. Similarly, the value of signal B changes from negative to positive at point 0, the value of positive changes from negative to positive at point P / 2, and the value of signal C changes from negative to positive at point 2P / 6 and from positive to negative at point 5P / 6. Change. In this way, if the detection calculation unit 14 detects the points where the values of the signals A, B, and C change from positive to negative and from negative to positive, respectively.
By outputting a position signal having a phase shift of / 6, the detection accuracy becomes P / 6. That is, if P = 24 m / m, the detection accuracy is 4 mm.

【0010】次に図9に示すように、図8の信号A,
B,CにD=1/2(A−B),E=1/2(B−
C),F=1/2(C−A),G=1/2(B−A),
H=1/2(C−B),I=1/2(A−C)の6個の
信号を追加して、各信号が正から負、負から正に変化す
る点を検出すれば、P/2の位相ずれを持つパルス列で
出力して検出精度は2mmとなる。更に図10に示すよう
に、図9のA,B,C,D,E,F,G,H,Iの9個
の信号に、J=1/2(C−I)=1/2(C+F),
K=1/2(A−G)=1/2(A+D),L=1/2
(B−H)=1/2(B+E),M=1/2(C−
E),N=1/2(A−F),R=1/2(B−D)を
追加して、それぞれが正から負、負から正に変化する点
を検出すれば、P/24の位相ずれを持つパルス列を出
力して検出精度は1mmとなる。
Next, as shown in FIG. 9, the signals A,
For B and C, D = 1/2 (AB), E = 1/2 (B-
C), F = 1/2 (CA), G = 1/2 (BA),
If six signals of H = 1/2 (C-B) and I = 1/2 (A-C) are added and the points where each signal changes from positive to negative and from negative to positive are detected, A pulse train with a phase shift of P / 2 is output and the detection accuracy is 2 mm. Further, as shown in FIG. 10, in nine signals A, B, C, D, E, F, G, H, and I in FIG. 9, J = 1/2 (C−I) = 1/2 ( C + F),
K = 1/2 (A-G) = 1/2 (A + D), L = 1/2
(B-H) = 1/2 (B + E), M = 1/2 (C-
E), N = 1/2 (A-F) and R = 1/2 (B-D) are added to detect points where each changes from positive to negative and from negative to positive, P / 24 A pulse train with a phase shift of is output and the detection accuracy is 1 mm.

【0011】なお、上記位置報用3相交番信号は次のよ
うにして決定する。例えばR=1/2(B−D)の場合
について説明する。図10において点P/24と点2P
/24の間を通過する交番信号を求める場合を示すと次
の様になる。点P/24のX座標は信号Bと信号Dとの
交点(R)のX座標に相当することにより、求める信号
の関係式はR=1/2(B−D)となる。このようにし
て3P/24以下の点を通過する交番信号K−N−J−
M,Lの関係式は、K=1/21(A−G)=1/2
(A+D)、N=1/2(A−F)、J=1/2(C−
I)、M=1/2(C−E)、L=1/2(B−H)に
よって求めることができる。また、図11に示すよう
に、点,,,……を通過する交番信号の関係式
は、それぞれ1/2(R−B)、1/2(G−R)、−
1/2(K−G)……となり、該交番信号の正負の変換
点を検出すれば検出精度P/48(P=24mmとすれば
P/48=0.5mm)の位相ずれを持つ位置信号である
パルス列を出力することができる。
The three-phase alternating signal for position information is determined as follows. For example, a case of R = 1/2 (BD) will be described. Point P / 24 and point 2P in FIG.
The case of obtaining an alternating signal passing between / 24 is as follows. Since the X coordinate of the point P / 24 corresponds to the X coordinate of the intersection (R) of the signal B and the signal D, the relational expression of the signal to be obtained is R = 1/2 (BD). In this way, the alternating signal K-N-J- that passes the points of 3P / 24 or less.
The relational expression of M and L is K = 1/211 (AG) = 1/2
(A + D), N = 1/2 (A-F), J = 1/2 (C-
I), M = 1/2 (CE), and L = 1/2 (BH). Further, as shown in FIG. 11, the relational expressions of the alternating signals passing through the points, ..., Are 1/2 (RB), 1/2 (GR), −, respectively.
1/2 (K-G) ... and a position having a phase shift of detection accuracy P / 48 (P / 48 = 0.5 mm when P = 24 mm) when positive / negative conversion points of the alternating signal are detected. A pulse train that is a signal can be output.

【0012】[0012]

【発明の効果】上記のように本発明の3相リニヤスケー
ルによれば、3組のアナログセンサより出力される3相
アナログ出力から、検出精度に対応する位相のずれを持
つ位置情報用の3相交番信号が得られるため、センサが
3個で細かい位置検出のできる安価にして高精度のリニ
ヤスケールを提供することが可能である。
As described above, according to the three-phase linear scale of the present invention, the three-phase linear scales for position information having a phase shift corresponding to the detection accuracy from the three-phase analog outputs output from the three sets of analog sensors. Since the phase alternating signal is obtained, it is possible to provide a linear scale with low cost and high accuracy that can detect fine positions with three sensors.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の3相リニヤスケールの一実施例を示す
正面図である。
FIG. 1 is a front view showing an embodiment of a three-phase linear scale of the present invention.

【図2】図1の縦断平面図である。2 is a vertical plan view of FIG.

【図3】図1の側面図である。FIG. 3 is a side view of FIG.

【図4】本発明の3相リニヤスケールの他の実施例を示
す平面図である。
FIG. 4 is a plan view showing another embodiment of the three-phase linear scale of the present invention.

【図5】図4の正面図である。FIG. 5 is a front view of FIG.

【図6】図4の側面図である。FIG. 6 is a side view of FIG.

【図7】本発明の3相アナログセンサの2/3のずれを
持つ3相アナログ出力を示すチャートである。
FIG. 7 is a chart showing a three-phase analog output having a shift of 2/3 of the three-phase analog sensor of the present invention.

【図8】図7の3相アナログ出力より検出演算部の演算
により得られたP/3のずれを持つ3相交番信号群を示
すチャートで、P/6の位相ずれのパルス列を出力する
模様を示している。
8 is a chart showing a three-phase alternating signal group having a P / 3 shift obtained by the calculation of a detection calculation unit from the three-phase analog output of FIG. 7, and showing that a pulse train having a P / 6 phase shift is output. Is shown.

【図9】図8の3相交番信号にD,E,F,G,H,I
の交番信号を追加してP/12の位相ずれのパルス列を
出力する3相交番信号群を示すチャートである。
9 is a diagram showing the three-phase alternating signal of FIG. 8 with D, E, F, G, H, I
5 is a chart showing a three-phase alternating signal group that outputs a pulse train having a P / 12 phase shift by adding the alternating signal of FIG.

【図10】図9の3相交番信号群にN,J,R,K,
M,Lの交番信号群を追加してP/24の位相ずれのパ
ルス列を出力する3相交番信号群を示すチャートであ
る。
FIG. 10 shows N, J, R, K, in addition to the three-phase alternating signal group of FIG.
It is a chart which shows the three-phase alternating signal group which outputs the pulse train of the phase shift of P / 24 by adding the alternating signal group of M and L.

【図11】図10の3相交番信号群よりP/48の位相
ずれのパルス列を出力する3相交番信号群を得る方法を
示すチャートである。
11 is a chart showing a method of obtaining a three-phase alternating signal group which outputs a pulse train having a phase shift of P / 48 from the three-phase alternating signal group of FIG.

【図12】従来のリニヤスケールの概略を示す図であ
る。
FIG. 12 is a diagram showing an outline of a conventional linear scale.

【符号の説明】[Explanation of symbols]

10,20 移動経路 11,21 リニヤスケール体 12,22 移動体 13,23 検出ヘッド 14 検出演算部 15 透過型アナログセンサ 25 反射型アナログセンサ 26 反射面 27 非反射面 10, 20 Moving path 11,21 Linear scale body 12,22 Moving body 13,23 Detection head 14 Detection calculation section 15 Transmission type analog sensor 25 Reflection type analog sensor 26 Reflection surface 27 Non-reflection surface

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 移動体の移動経路に沿って設けたリニヤ
スケール本体と、リニヤスケール本体に近接した位置の
移動体上に搭載した検出ヘッドと、検出演算部とよりな
り、前記リニヤスケール本体は移動経路に沿って等ピッ
チで、かつ1/2ピッチ幅の光投入口群を有し、前記検
出ヘッドは前記光投入口のピッチに対し1/3ピッチづ
つのピッチのずれをもつよう走行方向に配設した3組の
光透過型アナログセンサを有し、前記検出演算部は前記
3組のアナログセンサより出力される3相アナログ出力
を演算して検出精度に対応した位相ずれを持つ3相交番
信号群を得て、それらの信号値の正負の変換点を検出し
て位置信号を出力する構成としたことを特徴とする三相
リニヤスケール。
1. A linear scale main body provided along a moving path of a moving body, a detection head mounted on the moving body at a position close to the linear scale main body, and a detection calculation unit, the linear scale main body comprising: There is a group of light input ports having an equal pitch and a ½ pitch width along the movement path, and the detection head has a deviation of 1/3 pitch from the pitch of the light input ports in the traveling direction. 3 sets of light-transmissive analog sensors, the detection / calculation section calculates 3-phase analog outputs output from the 3 sets of analog sensors and has a phase shift corresponding to the detection accuracy. A three-phase linear scale having a configuration in which an alternating signal group is obtained, positive and negative conversion points of those signal values are detected, and a position signal is output.
【請求項2】 前記リニヤスケール本体は、移動体の移
動経路に沿って等長の光反射面と非反射面とを交互に有
しており、前記アナログセンサは反射型アナログセンサ
であることを特徴とする請求項1記載の三相リニヤスケ
ール。
2. The linear scale main body alternately has equal-length light reflecting surfaces and non-reflecting surfaces along a moving path of a moving body, and the analog sensor is a reflective analog sensor. The three-phase linear scale according to claim 1, which is characterized in that.
JP3341697A 1991-12-02 1991-12-02 Three-phase linear scale Pending JPH05149711A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3341697A JPH05149711A (en) 1991-12-02 1991-12-02 Three-phase linear scale

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3341697A JPH05149711A (en) 1991-12-02 1991-12-02 Three-phase linear scale

Publications (1)

Publication Number Publication Date
JPH05149711A true JPH05149711A (en) 1993-06-15

Family

ID=18348076

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3341697A Pending JPH05149711A (en) 1991-12-02 1991-12-02 Three-phase linear scale

Country Status (1)

Country Link
JP (1) JPH05149711A (en)

Similar Documents

Publication Publication Date Title
US4465373A (en) Encoder
US5959295A (en) Timing device and method for positioning non-linear machine parts
JP2648181B2 (en) Linear encoder
TWI493308B (en) Position detector and position detection method
JP5660671B2 (en) Encoder signal processing device
US6285023B1 (en) Apparatus for generating origin signal of optical linear scale
JPH05149711A (en) Three-phase linear scale
JP2023128398A (en) Positioning device, drive device, positioning method and positioning program
CN101354267B (en) Magnetic position sensing device and positioning method thereof
JP2000009492A5 (en) 2D absolute position sensor, robot and robot controller
JP3009554B2 (en) Linear encoder
JP2009271076A6 (en) Measuring device for detecting position and / or velocity
JPS59229609A (en) Control device of industrial robot
JP2023180003A (en) Positioning device and drive unit
JP2023124791A (en) Positioning switch device, driving device, and positioning switch method
WO2003079555A2 (en) Encoder with reference marks
KR20230127896A (en) Apparatus for switching positioning, driving device, method for positioning switching
JPS63148855A (en) Position detector for x-y linear motor
JPH08219711A (en) Position detector
CN100498218C (en) Direction displacement sensing method
JP2749622B2 (en) Position detection device
JPH05149710A (en) Photoelectric linear scale
JPH0755458Y2 (en) Length measuring device
JP2023128399A (en) Positioning scale, movable element and drive device
JPH06137899A (en) Optical type linear encoder

Legal Events

Date Code Title Description
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20040113

A61 First payment of annual fees (during grant procedure)

Effective date: 20040126

Free format text: JAPANESE INTERMEDIATE CODE: A61

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20080213

Year of fee payment: 4

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20090213

Year of fee payment: 5

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100213

Year of fee payment: 6

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100213

Year of fee payment: 6

FPAY Renewal fee payment (prs date is renewal date of database)

Year of fee payment: 7

Free format text: PAYMENT UNTIL: 20110213

LAPS Cancellation because of no payment of annual fees