JPH05142184A - Electrostatic sensor apparatus - Google Patents

Electrostatic sensor apparatus

Info

Publication number
JPH05142184A
JPH05142184A JP3301770A JP30177091A JPH05142184A JP H05142184 A JPH05142184 A JP H05142184A JP 3301770 A JP3301770 A JP 3301770A JP 30177091 A JP30177091 A JP 30177091A JP H05142184 A JPH05142184 A JP H05142184A
Authority
JP
Japan
Prior art keywords
reference frequency
frequency signals
ceramic
frequency signal
resonance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3301770A
Other languages
Japanese (ja)
Other versions
JP2780545B2 (en
Inventor
Noboru Masuda
昇 増田
Tetsuo Osawa
哲夫 大澤
Yasuo Fujii
康生 藤井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP3301770A priority Critical patent/JP2780545B2/en
Publication of JPH05142184A publication Critical patent/JPH05142184A/en
Application granted granted Critical
Publication of JP2780545B2 publication Critical patent/JP2780545B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)

Abstract

PURPOSE:To improve the degree of freedom for installation and the stability of the title apparatus so as to reduce its size by adopting a radio transmission route consisting of radiation means and wave-receiving means to send a drive reference frequency signals to a ceramic resonance means. CONSTITUTION:A radiator 2 radiates reference frequency signals, while wave receiving apparatuses 3a-3c receive the radiated reference frequency signals. High-frequency amplifiers 4a-4c amplify the radiated reference frequency signals into the drive reference frequency signals, and since respective ceramic resonators 5a-5c output the signals with any amplitude corresponding to the drive reference frequency signals based on each resonance characteristics, the amplitude of each signal may vary accompanied with the change of respective resonance characteristics. Detectors 8a-8c extract the changes of signal amplitude and output the electrostatic capacity detection signal consequently. The drive reference frequency signals are supplied for the ceramic resonance means by means of radio wave, so that the degree of freedom for installation can be improved, and furthermore the stability can be also improved because the characteristic change of one channel gives no influence on oscillation means or other channels. The ceramic resonance means is adopted so as to reduce the size as well.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この発明は、静電センサ装置に関
し、特に、シート状物(紙や合板など)の厚さや,均一
性等の管理に有用な静電センサ装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electrostatic sensor device, and more particularly to an electrostatic sensor device useful for controlling the thickness, uniformity, etc. of a sheet-like material (paper, plywood, etc.).

【0002】[0002]

【従来の技術】図2は、従来の静電センサ装置の一例の
ブロック図である。この静電センサ装置200は、3個
の独立した検出部として、3対の電極6aと7a,6b
と7b,6cと7cおよび各ストリップライン共振器5
5a,55b,55cを有する。各対の電極間の静電容
量により各ストリップライン共振器55a,55b,5
5cの共振特性が決定される。一つの検出部をチャネル
と呼ぶ。従って、この静電センサ装置200は、3チャ
ネルの静電センサ装置である。
2. Description of the Related Art FIG. 2 is a block diagram of an example of a conventional electrostatic sensor device. The electrostatic sensor device 200 has three pairs of electrodes 6a and 7a, 6b as three independent detection units.
And 7b, 6c and 7c and each stripline resonator 5
5a, 55b, 55c. The strip line resonators 55a, 55b, 5 are formed by the capacitance between the electrodes of each pair.
The resonance characteristic of 5c is determined. One detector is called a channel. Therefore, the electrostatic sensor device 200 is a three-channel electrostatic sensor device.

【0003】各ストリップライン共振器55a,55
b,55cには、OSC2から出力された1GHz程度
の基準周波数信号が、マッチング回路52a,52b,
52cおよびストリップライン53a,53b,53c
およびマッチング回路54a,54b,54cを介し
て、駆動基準周波数信号として供給される。
Each stripline resonator 55a, 55
The reference frequency signal of about 1 GHz output from the OSC 2 is supplied to the matching circuits 52a, 52b, b, 55c.
52c and strip lines 53a, 53b, 53c
Also, it is supplied as a drive reference frequency signal via the matching circuits 54a, 54b, 54c.

【0004】各ストリップライン共振器55a,55
b,55cは、各共振特性に基づいて前記駆動基準周波
数信号に対応する振幅の信号をそれぞれ出力するので、
各対の電極間の静電容量が変化して各共振特性が変化す
れば、各信号の振幅が変化する。
Each stripline resonator 55a, 55
b and 55c each output a signal having an amplitude corresponding to the drive reference frequency signal based on each resonance characteristic,
When the capacitance between the electrodes of each pair changes and each resonance characteristic changes, the amplitude of each signal changes.

【0005】検波器8a,8b,8cは、前記ストリッ
プライン共振器55a,55b,55cの出力する信号
の振幅の変化を抽出し、それぞれ静電容量検出信号とし
て出力する。
The detectors 8a, 8b, 8c extract changes in the amplitude of the signals output by the stripline resonators 55a, 55b, 55c and output them as capacitance detection signals, respectively.

【0006】そこで、これら静電容量検出信号により、
例えば各対の電極間を通過するシート状物の厚さを検出
することが出来る。
Therefore, by these capacitance detection signals,
For example, it is possible to detect the thickness of the sheet-like material that passes between the electrodes of each pair.

【0007】[0007]

【発明が解決しようとする課題】上記従来の静電センサ
装置200では、各ストリップライン共振器55a,5
5b,55cに駆動基準周波数信号を供給するのに、マ
ッチング回路52a,52b,52cおよびストリップ
ライン53a,53b,53cおよびマッチング回路5
4a,54b,54cを用いている。このため、全ての
チャネルをOSC2と同一基板上に設置しなければなら
ないなど、設置場所の制約を受ける問題点があった。ま
た、マッチングを完全にとることが困難であるため、例
えば温度による一つのチャネルの特性変動がOSC2や
他チャネルに影響を及ぼし、安定性に問題点があった。
さらに、ストリップライン共振器を用いているため、サ
イズが大型化する問題点があった。
In the conventional electrostatic sensor device 200 described above, the stripline resonators 55a and 55a are arranged.
The matching circuits 52a, 52b, 52c, the strip lines 53a, 53b, 53c, and the matching circuit 5 are used to supply the drive reference frequency signals to 5b, 55c.
4a, 54b, 54c are used. Therefore, there is a problem in that the installation location is restricted, for example, all the channels must be installed on the same substrate as the OSC2. In addition, since it is difficult to achieve perfect matching, the characteristic variation of one channel due to temperature affects the OSC 2 and other channels, and there is a problem in stability.
Further, since the stripline resonator is used, there is a problem that the size becomes large.

【0008】そこで、この発明の目的は、設置自由度と
安定性を向上すると共に小型化が可能な静電センサ装置
を提供することにある。
SUMMARY OF THE INVENTION An object of the present invention is to provide an electrostatic sensor device which has improved installation flexibility and stability and can be miniaturized.

【0009】[0009]

【課題を解決するための手段】この発明の静電センサ装
置は、少なくとも一対の電極と、前記電極間の静電容量
の変化に応じて共振特性を変化させるセラミック共振手
段と、基準周波数信号を発振する発振手段と、前記基準
周波数信号を放射基準周波数信号として放射する放射手
段と、前記放射基準周波数信号を受波する少なくとも1
つの受波手段と、前記受波手段で受波した放射基準周波
数信号を増幅し駆動基準周波数信号として前記セラミッ
ク共振手段へ供給する増幅手段とを具備し、前記電極間
の静電容量の変化を前記セラミック共振手段の出力の変
化として検出することを構成上の特徴とするものであ
る。
An electrostatic sensor device according to the present invention includes at least a pair of electrodes, ceramic resonance means for changing resonance characteristics according to a change in capacitance between the electrodes, and a reference frequency signal. Oscillating means for oscillating, radiating means for radiating the reference frequency signal as a radiation reference frequency signal, and at least 1 for receiving the radiation reference frequency signal
One wave-receiving means and an amplifying means for amplifying the radiation reference frequency signal received by the wave-receiving means and supplying it to the ceramic resonance means as a drive reference frequency signal. The structural feature is to detect as a change in the output of the ceramic resonance means.

【0010】[0010]

【作用】この発明の静電センサ装置では、セラミック共
振手段への駆動基準周波数信号の供給に、放射手段と受
波手段により構成される無線伝送路を用いている。この
ため、発振手段と共振手段とを別の基板に設置すること
も可能であり、設置自由度が向上する。また、一つのチ
ャネルの特性変動が発振手段や他チャネルに影響を及ぼ
さないため、安定度が向上する。さらに、セラミック共
振手段を用いているため、サイズを小型化できる。
In the electrostatic sensor device of the present invention, the radio transmission line constituted by the radiation means and the wave reception means is used for supplying the driving reference frequency signal to the ceramic resonance means. Therefore, the oscillating means and the resonating means can be installed on different substrates, and the degree of freedom of installation is improved. In addition, the characteristic variation of one channel does not affect the oscillating means and the other channels, so that the stability is improved. Further, since the ceramic resonance means is used, the size can be reduced.

【0011】[0011]

【実施例】以下、この発明を図に示す実施例を用いてさ
らに詳しく説明する。なお、これによりこの発明が限定
されるものではない。図1は、この発明の一実施例によ
る静電センサ装置100のブロック図である。
The present invention will be described in more detail below with reference to the embodiments shown in the drawings. However, this does not limit the present invention. FIG. 1 is a block diagram of an electrostatic sensor device 100 according to an embodiment of the present invention.

【0012】この静電センサ装置100は、3チャネル
の静電センサ装置であり、3個の独立した検出部とし
て、3対の電極6aと7a,6bと7b,6cと7cお
よびセラミック共振器5a,5b,5cを有する。各対
の電極間の静電容量により各セラミック共振器5a,5
b,5cの共振特性が決定される。セラミック共振器5
a,5b,5cは、例えば「平成3年電気学会全国大会
予稿集 P.1-41〜P.1-42 」に開示されたものである。
The electrostatic sensor device 100 is a three-channel electrostatic sensor device, and has three pairs of electrodes 6a and 7a, 6b and 7b, 6c and 7c, and a ceramic resonator 5a as three independent detecting portions. , 5b, 5c. Depending on the capacitance between the electrodes of each pair, each ceramic resonator 5a, 5
The resonance characteristics of b and 5c are determined. Ceramic resonator 5
a, 5b, and 5c are disclosed, for example, in "The Proceedings of the 1st Annual Meeting of the Institute of Electrical Engineers of Japan, 1991 to P.1-41 to P.1-42".

【0013】一方、OSC1は1GHz程度の発振周波
数を有し、これを基準周波数信号として出力する。
On the other hand, the OSC1 has an oscillation frequency of about 1 GHz and outputs it as a reference frequency signal.

【0014】放射器2は、前記基準周波数信号を、放射
基準周波数信号として放射する。放射器2としては、例
えばλ/nマイクロストリップライン(nは正の整数)
を用いる。
The radiator 2 radiates the reference frequency signal as a radiation reference frequency signal. As the radiator 2, for example, λ / n microstrip line (n is a positive integer)
To use.

【0015】各チャネルの受波器3a,3b,3cは、
前記放射基準周波数信号を受波する。受波器3a,3
b,3cとしては、例えばλ/nマイクロストリップラ
インを用いる。
The receivers 3a, 3b, 3c of each channel are
Receiving the radiation reference frequency signal. Receiver 3a, 3
For example, λ / n microstrip lines are used as b and 3c.

【0016】高周波増幅器4a,4b,4cは、前記受
波した放射基準周波数信号を増幅し、駆動基準周波数信
号として各セラミック共振器5a,5b,5cに供給す
る。
The high frequency amplifiers 4a, 4b and 4c amplify the received radiation reference frequency signal and supply it to the respective ceramic resonators 5a, 5b and 5c as a driving reference frequency signal.

【0017】各セラミック共振器5a,5b,5cは、
各共振特性に基づいて前記駆動基準周波数信号に対応す
る振幅の信号をそれぞれ出力するので、各対の電極間の
静電容量が変化して各共振特性が変化すれば、各信号の
振幅が変化する。
Each ceramic resonator 5a, 5b, 5c is
Amplitude signals corresponding to the drive reference frequency signal are output based on each resonance characteristic, so that if the capacitance between the electrodes of each pair changes and each resonance characteristic changes, the amplitude of each signal changes. To do.

【0018】検波器8a,8b,8cは、前記セラミッ
ク共振器5a,5b,5cの出力する信号の振幅の変化
を抽出し、それぞれ静電容量検出信号として出力する。
The detectors 8a, 8b and 8c extract changes in the amplitude of the signals output from the ceramic resonators 5a, 5b and 5c and output them as capacitance detection signals, respectively.

【0019】そこで、これら静電容量検出信号により、
例えば各対の電極間を通過するシート状物の厚さを検出
することが出来る。
Therefore, by these capacitance detection signals,
For example, it is possible to detect the thickness of the sheet-like material that passes between the electrodes of each pair.

【0020】なお、上記実施例は3チャネルとしたが、
チャネル数は任意である。
Although the above embodiment has three channels,
The number of channels is arbitrary.

【0021】[0021]

【発明の効果】この発明の静電センサ装置では、セラミ
ック共振手段に対して駆動基準周波数信号を電波で供給
するため、設置自由度が向上する。また、一つのチャネ
ルの特性変動が発振手段や他チャネルに影響を及ぼさな
いため、安定度が向上する。さらに、セラミック共振手
段を用いているため、サイズを小型化できる。
In the electrostatic sensor device of the present invention, since the drive reference frequency signal is supplied to the ceramic resonance means by radio waves, the degree of freedom in installation is improved. In addition, the characteristic variation of one channel does not affect the oscillating means and the other channels, so that the stability is improved. Further, since the ceramic resonance means is used, the size can be reduced.

【図面の簡単な説明】[Brief description of drawings]

【図1】この発明の静電センサ装置の一実施例のブロッ
ク図である。
FIG. 1 is a block diagram of an embodiment of an electrostatic sensor device of the present invention.

【図2】従来の静電センサ装置の一例のブロック図であ
る。
FIG. 2 is a block diagram of an example of a conventional electrostatic sensor device.

【符号の説明】[Explanation of symbols]

100 静電センサ装置 1 OSC 2 放射器 3a,3b,3c 受波器 4a,4b,4c 高周波増幅器 5a,5b,5c セラミック共振器 6a,7a 電極 6b,7b 電極 6c,7c 電極 100 electrostatic sensor device 1 OSC 2 radiator 3a, 3b, 3c wave receiver 4a, 4b, 4c high frequency amplifier 5a, 5b, 5c ceramic resonator 6a, 7a electrode 6b, 7b electrode 6c, 7c electrode

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 少なくとも一対の電極と、前記電極間の
静電容量の変化に応じて共振特性を変化させるセラミッ
ク共振手段と、基準周波数信号を発振する発振手段と、
前記基準周波数信号を放射基準周波数信号として放射す
る放射手段と、前記放射基準周波数信号を受波する少な
くとも1つの受波手段と、前記受波手段で受波した放射
基準周波数信号を増幅し駆動基準周波数信号として前記
セラミック共振手段へ供給する増幅手段とを具備し、前
記電極間の静電容量の変化を前記セラミック共振手段の
出力の変化として検出することを特徴とする静電センサ
装置。
1. At least a pair of electrodes, ceramic resonance means for changing resonance characteristics according to a change in capacitance between the electrodes, and oscillation means for oscillating a reference frequency signal.
Radiating means for radiating the reference frequency signal as a radiation reference frequency signal, at least one wave receiving means for receiving the radiation reference frequency signal, and a drive reference for amplifying the radiation reference frequency signal received by the wave receiving means. An electrostatic sensor device comprising: an amplifying unit that supplies a frequency signal to the ceramic resonance unit, and detects a change in capacitance between the electrodes as a change in output of the ceramic resonance unit.
JP3301770A 1991-11-18 1991-11-18 Electrostatic sensor device Expired - Fee Related JP2780545B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3301770A JP2780545B2 (en) 1991-11-18 1991-11-18 Electrostatic sensor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3301770A JP2780545B2 (en) 1991-11-18 1991-11-18 Electrostatic sensor device

Publications (2)

Publication Number Publication Date
JPH05142184A true JPH05142184A (en) 1993-06-08
JP2780545B2 JP2780545B2 (en) 1998-07-30

Family

ID=17900968

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3301770A Expired - Fee Related JP2780545B2 (en) 1991-11-18 1991-11-18 Electrostatic sensor device

Country Status (1)

Country Link
JP (1) JP2780545B2 (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03212798A (en) * 1990-01-17 1991-09-18 Sekisui Chem Co Ltd Gas leakage detector
JP3023354U (en) * 1995-09-29 1996-04-16 岩坂鐡工有限会社 Hydroponics equipment

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03212798A (en) * 1990-01-17 1991-09-18 Sekisui Chem Co Ltd Gas leakage detector
JP3023354U (en) * 1995-09-29 1996-04-16 岩坂鐡工有限会社 Hydroponics equipment

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Publication number Publication date
JP2780545B2 (en) 1998-07-30

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