JPH05141560A - Fluid control valve - Google Patents

Fluid control valve

Info

Publication number
JPH05141560A
JPH05141560A JP32806691A JP32806691A JPH05141560A JP H05141560 A JPH05141560 A JP H05141560A JP 32806691 A JP32806691 A JP 32806691A JP 32806691 A JP32806691 A JP 32806691A JP H05141560 A JPH05141560 A JP H05141560A
Authority
JP
Japan
Prior art keywords
valve body
valve
iron core
hole
movable iron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP32806691A
Other languages
Japanese (ja)
Inventor
Kazumi Okura
一美 大倉
Yukio Miyano
征雄 宮野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Keihin Corp
Original Assignee
Keihin Seiki Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Keihin Seiki Manufacturing Co Ltd filed Critical Keihin Seiki Manufacturing Co Ltd
Priority to JP32806691A priority Critical patent/JPH05141560A/en
Publication of JPH05141560A publication Critical patent/JPH05141560A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To simply and inexpensively cancel the change in fluid pressure by simultaneously applying the fluid pressure inside a primary flow passage both to the front surface of a valve body facing to the primary flow passage and to the rear surface thereof facing to a pressure-receiving chamber into which the fluid pressure inside the primary flow passage is introduced. CONSTITUTION:When a solenoid 7 is not energized, the attraction between a fixed iron core 9 and a movable iron core 15 is not caused, so that a movable iron-core body T is depressed downwards by a spring 20. Accordingly, the valve part 16 of a valve body 14 is abutted on the valve seat 1, and the communication between primary and secondary flow passages 2, 3 is cut off. When the fluid pressure inside the primary flow passage 2 changes, this fluid pressure acts on the front surface 14B of the valve body 14. At the same time, this fluid pressure is introduced into a pressure-receiving chamber R passing through a pressure-introducing passage 17 of the valve body 14, and acts also on the rear surface 14A of the valve body 14. As a result, since the same fluid pressure can be simultaneously applied both to the front surface 14B and to the rear surface 14A of the valve body 14, the pressure change inside the primary flow passage 2 can be canceled.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、各種産業用機器の流体
の制御に用いられる流体制御弁に関し、そのうち特にソ
レノイドに生起する磁力によって可動鉄心を吸引動作し
て弁座を開閉制御した電磁式の流体制御弁に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a fluid control valve used for controlling fluid in various industrial equipment, and in particular, an electromagnetic type in which a movable iron core is attracted by a magnetic force generated in a solenoid to control opening and closing of a valve seat. Fluid control valve.

【0002】[0002]

【従来の技術】従来の流体制御弁は特開平1−1163
06号公報に示される。これによると、固定鉄心に対向
して配置される可動鉄心の長手軸心方向に沿って上下方
向にシャフトがのび、このシャフトの上端には弁座を閉
塞しうる弁体を備えたベローズが固定され、シャフトの
下端は固定鉄心を貫通して固定鉄心外へと突出する。ベ
ローズと可動鉄心の上端との間のシャフトには第1の板
バネの中心部が固定的に配置され、第1の板バネの外周
端は弁本体に穿設された位置決め収納孔に配置されて固
定される。又、固定鉄心を貫通して下方に向けて突出す
るシャフトの下端には第2の板バネの中心部が圧入プラ
グを介して固定的に配置され、第2の板バネの外周端は
弁本体の位置決め収納孔に配置されて固定される。この
ように、シャフトが第1の板バネ、第2の板バネによっ
て支持されたことによると、シャフトの長手方向軸心に
おける移動は許容され、長手方向軸心線に直交する周方
向における振れは抑止される。又、シャフトに弁体を備
えたベローズを配置したことは、一次側流路内の流体圧
力が変化した際において、弁体の前後面に一次側流路内
の圧力を同時に作用させて圧力をキャンセルし、ソレノ
イドに生起する磁力に対して可動鉄心の吸引を常に一定
にする上から必要となる。
2. Description of the Related Art A conventional fluid control valve is disclosed in Japanese Patent Laid-Open No. 1-1163.
No. 06 publication. According to this, the shaft extends vertically along the longitudinal axis direction of the movable core that is arranged to face the fixed core, and the bellows with the valve body that can close the valve seat is fixed to the upper end of the shaft. The lower end of the shaft penetrates the fixed core and projects outside the fixed core. The central portion of the first leaf spring is fixedly arranged on the shaft between the bellows and the upper end of the movable iron core, and the outer peripheral end of the first leaf spring is arranged in a positioning storage hole formed in the valve body. Fixed. Further, the central portion of the second leaf spring is fixedly arranged through a press-fitting plug at the lower end of the shaft penetrating the fixed iron core and projecting downward, and the outer peripheral end of the second leaf spring is at the valve body. Is positioned and fixed in the positioning storage hole. As described above, since the shaft is supported by the first leaf spring and the second leaf spring, the shaft is allowed to move in the longitudinal axis and the runout in the circumferential direction orthogonal to the longitudinal axis is prevented. Be deterred. In addition, the arrangement of the bellows with the valve element on the shaft means that when the fluid pressure in the primary side flow passage changes, the pressure in the primary side flow passage is simultaneously applied to the front and rear surfaces of the valve body to increase the pressure. It is necessary to cancel and keep the attraction of the movable iron core constant with respect to the magnetic force generated in the solenoid.

【0004】[0004]

【発明が解決しようとする課題】かかる従来の流体制御
弁によると次の不具合を有する。 ベローズは、その中心部を可動鉄心と一体的に形成
されたシャフトに固定され、外周部が弁本体に固着され
るもので、ソレノイドに磁力が発生し、可動鉄心が固定
鉄心に対して吸着されて移動する際、ベローズの蛇腹部
の収縮変形は可動鉄心の移動にとって抵抗となる。従っ
て、ベローズの特に蛇腹部は極めて弱い力によって変形
することが望ましいもので一般的には高価な合成樹脂材
料を削り出しによって形成している。例えば四沸化エチ
レン樹脂である。これによると、大径の丸棒を削り出し
て形成するもので材料の歩留りが悪く、且つ蛇腹部の加
工が困難で、切削加工時間が長く、材料が高価なことと
あいまってベローズの製造コストが大きく上昇し好まし
いものでなかった。 ベローズに合成樹脂材料を使用したことによると、
流路を流れる流体仕様が異なった機器に採用される際、
当該流体及び使用状態(温度,圧力等)に応じた耐久テ
ストを実施する必要が有り開発効率が劣るものであっ
た。 板バネの中心部は可動鉄心(シャフトも含む)に対
して、可動鉄心と圧入部材の二部材によって圧入固定さ
れるもので、部品点数が増加することと圧入作業を要す
ることより製造コスト高を招来して好ましいものでな
い。 シャフトは可動鉄心より上下方向にのび、可動鉄心
に比較して相当長く形成されるものであり、シャフトの
直径及び真直度は正確に形成されなければならない。シ
ャフトが正確に形成されないと固定鉄心の貫通孔とシャ
フトとが接触し、可動鉄心の動作上好ましいものでな
い。この為にシャフトの加工時間及び検査時間が長くな
ること、及び材料費がかさむことより部品の製造コスト
の上昇をもたらし好ましいものでない。 固定鉄心には貫通孔を穿設する必要があり、しかも
この貫通孔もまた正確に形成される必要があることから
前記シャフトと同様に部品の製造コストを引きあげるこ
とになる。 固定鉄心を貫通したシャフトの端部に第2の板バネ
を配置したことによると、流体制御弁のシャフト軸心方
向の長さが大型化してコンパクトにまとめることができ
ないもので機器への装着の自由度が阻害される。 本発明になる流体制御弁は、前記不具合に鑑みなされた
もので、ベローズに代えて新規な圧力キャンセル機構を
設けることによって製造コストの低減を図るとともに汎
用性の高い流体制御弁を提供することを目的とする。
The conventional fluid control valve described above has the following problems. The bellows has its central part fixed to a shaft integrally formed with the movable iron core, and the outer peripheral part is fixed to the valve body. Magnetic force is generated in the solenoid, and the movable iron core is attracted to the fixed iron core. When the bellows move, the contraction deformation of the bellows portion resists the movement of the movable core. Therefore, it is desirable that the bellows, especially the bellows part, be deformed by an extremely weak force, and is generally formed by cutting out an expensive synthetic resin material. For example, a tetraboride ethylene resin. According to this, it is formed by cutting out a large-diameter round bar, the yield of the material is poor, the processing of the bellows is difficult, the cutting time is long, and the material is expensive Was greatly increased, which was not preferable. According to the use of synthetic resin material for the bellows,
When equipment with different fluid specifications is used,
The development efficiency was poor because it was necessary to carry out a durability test according to the fluid and usage conditions (temperature, pressure, etc.). The central portion of the leaf spring is press-fitted and fixed to the movable iron core (including the shaft) by the movable iron core and the press-fitting member, which increases the number of parts and press-fitting work, resulting in high manufacturing cost. It is not desirable to invite. The shaft extends vertically from the movable iron core and is formed to be considerably longer than the movable iron core, and the diameter and straightness of the shaft must be accurately formed. If the shaft is not accurately formed, the through hole of the fixed core comes into contact with the shaft, which is not preferable for the operation of the movable core. For this reason, the processing time and inspection time of the shaft are lengthened, and the material cost is increased, so that the manufacturing cost of parts is increased, which is not preferable. Since it is necessary to form a through hole in the fixed iron core, and this through hole also needs to be accurately formed, the manufacturing cost of parts is increased as in the case of the shaft. By arranging the second leaf spring at the end of the shaft that penetrates the fixed iron core, the length of the fluid control valve in the axial direction of the shaft becomes large and it cannot be compactly assembled. Freedom is hindered. The fluid control valve according to the present invention has been made in view of the above-mentioned problems, and it is possible to reduce the manufacturing cost by providing a novel pressure canceling mechanism in place of the bellows and to provide a fluid control valve having high versatility. To aim.

【0005】[0005]

【課題を解決する為の手段】本は発明によれば、弁座に
て一次側流路と二次側流路とに区分され、二次側流路よ
り係止段部を介して位置決め収納孔が端部に向かって開
口した弁本体と;磁性材料にて形成された筒状体をな
し、その内部に、周囲にソレノイドを巻回された固定鉄
心を磁気的に結合して配置するとともに弁本体の位置決
め収納孔に挿入される挿入筒部を下部に設けたハウジン
グ体と;非磁性材料にて形成された筒状体をなし、弁本
体の係止段部上に配置されるとともに位置決め収納孔内
に挿入される挿入筒部と、弁座に向けて下端が開口した
有底カップ状の弁体収納室と、その中心部にあって弁体
収納室の底部に向けて開口する貫通孔と、を備えた受圧
室形成体と;受圧室形成体の貫通孔を上下方向に貫通し
て配置されたシャフトの下端に、弁体収納室の摺動面に
対してラビリンスシールされて弁体収納室内を移動しう
るとともに弁座を開閉制御する弁部と、弁体の前面と後
面とを貫通する圧力導入路を備えた弁体を配置し、一方
シャフトの上端に固定鉄心に対向する可動鉄心を配置し
た可動鉄心体と;により、流体制御弁を形成したもので
ある。
According to the present invention, a valve seat divides a primary side flow passage and a secondary side flow passage, and the secondary side flow passage is positioned and stored via a locking step portion. A valve body having a hole opening toward the end; a cylindrical body made of a magnetic material, in which a fixed iron core around which a solenoid is wound is magnetically coupled and arranged. A housing body provided with a lower portion of an insertion cylinder portion to be inserted into a positioning storage hole of the valve body; and a cylindrical body formed of a non-magnetic material, which is arranged on the locking step portion of the valve body and positioned. An insertion cylinder part inserted into the storage hole, a bottomed cup-shaped valve body storage chamber whose lower end opens toward the valve seat, and a penetrating opening at the center of the valve body storage chamber toward the bottom of the valve body storage chamber. A pressure receiving chamber forming body having a hole; and a shuff arranged vertically through a through hole of the pressure receiving chamber forming body. At the lower end of the valve, a valve part that is labyrinth-sealed against the sliding surface of the valve body storage chamber and can move in the valve body storage chamber and that controls the opening and closing of the valve seat, and pressure introduction that penetrates the front and rear surfaces of the valve body A fluid control valve is formed by a movable iron core body in which a valve body having a passage is arranged, and a movable iron core opposite to a fixed iron core is arranged at the upper end of a shaft.

【0006】[0006]

【作用】弁体収納室の摺動面に対してラビリンスシール
された弁体の後部に受圧室が形成され、この受圧室には
圧力導入路を介して一次側流路内の圧力が導入される。
一次側流路内の圧力は、弁体の一次側流路に対向する前
面と、圧力導入路を介して一次側流路内の圧力が導入さ
れた受圧室内に開口する弁体の後部に作用するので、弁
体に対する一次側流路の圧力はキャンセルされる。又、
可動鉄心は弁体が弁体収納室内にラビリンスシールされ
たことによってセンタリング支持され、板バネによるセ
ンタリング支持が不要となる。
The pressure receiving chamber is formed in the rear portion of the valve body that is labyrinth-sealed with respect to the sliding surface of the valve body housing chamber, and the pressure in the primary side flow passage is introduced into this pressure receiving chamber through the pressure introduction passage. It
The pressure in the primary side flow passage acts on the front surface facing the primary side flow passage of the valve body and the rear part of the valve body opening into the pressure receiving chamber where the pressure in the primary side flow passage is introduced through the pressure introduction passage. Therefore, the pressure of the primary side flow path to the valve body is canceled. or,
The movable iron core is centered and supported by the valve body being labyrinth-sealed in the valve body accommodating chamber, which eliminates the need for centering support by a leaf spring.

【0007】[0007]

【実施例】以下、本発明になる流体制御弁の一実施例を
図1,図2により説明する。Vは、内部を弁座1によっ
て一次側流路2と二次側流路3とに区分され、二次側流
路3より係止段部4を介して位置決め収納孔5が上方の
端部Aに向かって開口した弁本体である。この位置決め
収納孔5は横断面が円形をなす。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the fluid control valve according to the present invention will be described below with reference to FIGS. The inside of V is divided into a primary side flow passage 2 and a secondary side flow passage 3 by a valve seat 1, and the positioning storage hole 5 is located above the secondary side flow passage 3 via a locking step portion 4. The valve body is open toward A. The positioning storage hole 5 has a circular cross section.

【0008】Hは磁性材料にて形成された筒状体をなす
ハウジング体である。ハウジング体Hは上方筒部6A
と、下方にある挿入突部6Bと、上方筒部6Aと挿入筒
部6B間にあって内方に向かい中心部に通孔が穿設され
た内方鍔部6Cとよりなり、内方鍔部6C上にソレノイ
ド7が巻回されたコイルボビン8が配置され、コイルボ
ビン8の上方の開口より固定鉄心9がコイルボビン8内
に挿入され、固定鉄心9の上方より側方に向かう鍔部9
Aはハウジング体Hの上方筒部6Aにカシメられて固定
される。すなわち、ハウジング体Hにはソレノイド7が
巻回されたコイルボビン8、固定鉄心9が固着される。
尚、挿入筒部6Bは弁本体Vの位置決め収納孔5内に挿
入又は圧入される形状をなす。
Reference numeral H is a cylindrical housing body made of a magnetic material. The housing body H has an upper tubular portion 6A.
And an inner flange portion 6C which is located between the upper cylinder portion 6A and the insertion cylinder portion 6B and faces inward and has a through hole formed in the center thereof. A coil bobbin 8 around which a solenoid 7 is wound is arranged, a fixed iron core 9 is inserted into the coil bobbin 8 through an opening above the coil bobbin 8, and a collar portion 9 that extends laterally from above the fixed iron core 9.
A is crimped and fixed to the upper tubular portion 6A of the housing body H. That is, the coil bobbin 8 around which the solenoid 7 is wound and the fixed iron core 9 are fixed to the housing body H.
The insertion tube portion 6B has a shape to be inserted or press-fitted into the positioning storage hole 5 of the valve body V.

【0009】Pは非磁性材料によって形成された受圧室
形成体であり以下よりなる。受圧室形成体Pはその上方
に筒状の挿入筒部10が形成され、下方に弁体収納室1
1が形成され、その中央部に挿入筒部10と弁体収納室
11とを接続する中央突部12が形成される。挿入筒部
10は、弁本体Vの係止段部4上にあって位置決め収納
孔5内に挿入配置されるもので、弁体収納室11は弁座
1に向かって開口する有底カップ状をなし、弁体収納室
11の弁座1側の端部11Cは弁座1に接触することは
なく間隙Sを有する。そして中央突部12の中心には貫
通孔12Aが上下方向に貫通して穿設されるもので、貫
通孔12Aの下端は弁体収納室11の底部11Aに開口
し、貫通孔12Aの上端は中央突部12の上端に開口す
る。
P is a pressure receiving chamber forming member made of a non-magnetic material, and is composed of the following. The pressure-receiving chamber forming body P has a cylindrical insertion tube portion 10 formed above the pressure-receiving chamber forming body P, and the valve body storage chamber 1 below
1 is formed, and a central protrusion 12 that connects the insertion cylinder portion 10 and the valve body storage chamber 11 is formed in the central portion thereof. The insertion tube portion 10 is disposed on the locking step portion 4 of the valve body V and inserted into the positioning storage hole 5, and the valve body storage chamber 11 has a bottomed cup shape that opens toward the valve seat 1. The end portion 11C of the valve body storage chamber 11 on the valve seat 1 side does not contact the valve seat 1 and has a gap S. A through hole 12A is formed in the center of the central protrusion 12 so as to penetrate in the vertical direction. The lower end of the through hole 12A is opened to the bottom 11A of the valve body storage chamber 11, and the upper end of the through hole 12A is formed. It opens at the upper end of the central protrusion 12.

【0010】Tは可動鉄心体であり、以下の構成よりな
る。13は受圧室形成体Pの貫通孔12A内を上下方向
に貫通して中央突部12の上端及び弁体収納室11の底
部11Aより突出するシャフトであって、シャフト13
の下端には弁体14が固定的に配置され、シャフト13
の上端には可動鉄心15が配置される。弁体14は、弁
体収納室11の内壁に形成される摺動面11Bに対して
ラビリンスシールされるとともに弁体収納室11内を上
下方向に移動可能に配置される。ラビリンスシール(l
abyrinth seal)とは、摺動面の一部に多
段の環状シール溝Kを設け、気体の洩れを抑止したシー
ル機構であって本例で環状シール溝Kは弁体収納室11
の摺動面11Bに摺接する弁体14の外周に環状溝を二
段に渡って設けた。そして、シャフト13の下端にこの
弁体14が固定して配置されることによって弁体14の
後面14Aと弁体収納室11とによって受圧室Rが形成
される。又、弁体14の弁座1に対向する下面には弁体
16が形成されるもので、さらに又弁体14の弁座1側
の前面14B(一次側流路2に対向)と弁体の後面14
Aとは圧力導入路17が貫通して穿設される。すなわち
弁体14の後面14Aにある受圧室Rと一次側流路2と
は常に弁体14に穿設された圧力導入路17によって連
通状態にある。シャフト13の上端には磁性材料よりな
る可動鉄心15が固定して配置されるもので、固定鉄心
9、ハウジングHの上方突部6A、内方鍔部6C、可動
鉄心15によってソレノイド7の磁気回路が形成され
る。
T is a movable iron core having the following structure. Reference numeral 13 denotes a shaft which vertically penetrates through the through hole 12A of the pressure receiving chamber forming body P and projects from the upper end of the central protrusion 12 and the bottom 11A of the valve body storage chamber 11.
A valve body 14 is fixedly arranged at the lower end of the shaft 13 and
A movable iron core 15 is arranged at the upper end of the. The valve body 14 is labyrinth-sealed with respect to the sliding surface 11B formed on the inner wall of the valve body storage chamber 11, and is arranged in the valve body storage chamber 11 so as to be vertically movable. Labyrinth seal (l
The abyrinth seal is a sealing mechanism in which a multi-stage annular seal groove K is provided in a part of the sliding surface to prevent gas leakage. In this example, the annular seal groove K is the valve body storage chamber 11
An annular groove is provided in two steps on the outer circumference of the valve body 14 that is in sliding contact with the sliding surface 11B. The valve body 14 is fixedly arranged at the lower end of the shaft 13 to form a pressure receiving chamber R by the rear surface 14A of the valve body 14 and the valve body accommodating chamber 11. Further, a valve body 16 is formed on the lower surface of the valve body 14 facing the valve seat 1, and further, the front surface 14B of the valve body 14 on the valve seat 1 side (facing the primary side flow path 2) and the valve body Rear surface 14
The pressure introduction path 17 penetrates the hole A. That is, the pressure receiving chamber R on the rear surface 14 </ b> A of the valve body 14 and the primary side flow path 2 are always in communication with each other by the pressure introduction path 17 formed in the valve body 14. A movable iron core 15 made of a magnetic material is fixedly arranged on the upper end of the shaft 13. The fixed iron core 9, the upper protrusion 6A of the housing H, the inner flange 6C, and the movable iron core 15 form a magnetic circuit of the solenoid 7. Is formed.

【0011】次に流体制御弁の組みつけについて説明す
る。まず、図2により可動鉄心体Tと受圧室形成体Pと
の組みつけについて述べる。上部に可動鉄心15が形成
されたシャフト13を受圧室形成体Pの中央突部12に
穿設した貫通孔12Aの上方より下方に向けて挿入し、
弁体収納室11内の底部11Aに突出するシャフト13
の下端に弁体14を圧入する。これによると、シャフト
13の下端に配置した弁体14は弁体収納室11内に摺
動自在に配置されるもので、弁体14の外周に設けた環
状シール溝Kによって、弁体収納室11の摺動面11B
に対して弁体14は気密的にラビリンスシールされる。
Next, the assembly of the fluid control valve will be described. First, assembling of the movable iron core body T and the pressure receiving chamber forming body P will be described with reference to FIG. The shaft 13 having the movable iron core 15 formed in the upper portion is inserted downward from above the through hole 12A formed in the central projection 12 of the pressure receiving chamber forming body P,
The shaft 13 protruding to the bottom portion 11A in the valve body storage chamber 11
The valve element 14 is press-fitted into the lower end of the. According to this, the valve body 14 arranged at the lower end of the shaft 13 is slidably arranged in the valve body storage chamber 11, and the annular seal groove K provided on the outer periphery of the valve body 14 allows the valve body storage chamber to be closed. 11 sliding surface 11B
On the other hand, the valve element 14 is hermetically sealed in a labyrinth.

【0012】そして、可動鉄心体Tを備えた受圧室形成
体Pを次の如く弁本体Vへ挿入又は圧入する。受圧室形
成体Pの挿入筒部10を弁本体Vの端部Aより位置決め
収納孔5内に挿入し、挿入筒部10の底部10Aを弁本
体Vの係止段部4上に配置する。これによると、受圧室
形成体Pの弁体収納室11の端部11Cは弁座1に対向
するとともに弁座1と間隙Sをもって配置され、又、弁
体14の弁部16は弁座1に対向して配置される。
Then, the pressure receiving chamber forming body P having the movable iron core body T is inserted or press-fitted into the valve body V as follows. The insertion tube portion 10 of the pressure receiving chamber forming body P is inserted into the positioning storage hole 5 from the end portion A of the valve body V, and the bottom portion 10A of the insertion tube portion 10 is arranged on the locking step portion 4 of the valve body V. According to this, the end portion 11C of the valve body storage chamber 11 of the pressure receiving chamber forming body P faces the valve seat 1 and is arranged with a gap S from the valve seat 1, and the valve portion 16 of the valve body 14 has the valve seat 1 Is placed opposite to.

【0013】次に、ソレノイド7、固定鉄心9、を備え
たハウジング体Hの挿入筒部6Bを弁本体Vの端部Aよ
り位置決め収納孔5内へ向けて圧入する。これによる
と、ハウジング体Hの挿入筒部6Bの下端は受圧室形成
体Pの挿入筒部10の上端に当接し、可動鉄心体Tの可
動鉄心15は固定鉄心9に対向して配置されることにな
る。尚、20は固定鉄心9と可動鉄心15との間に縮設
されたスプリングである。
Next, the insertion tube portion 6B of the housing body H having the solenoid 7 and the fixed iron core 9 is press-fitted from the end portion A of the valve body V into the positioning housing hole 5. According to this, the lower end of the insertion cylinder portion 6B of the housing body H abuts on the upper end of the insertion cylinder portion 10 of the pressure receiving chamber forming body P, and the movable iron core 15 of the movable iron core body T is arranged to face the fixed iron core 9. It will be. Reference numeral 20 is a spring that is contracted between the fixed iron core 9 and the movable iron core 15.

【0014】以上によれば、可動鉄心体Tの弁体14
が、受圧室形成体Pの弁体収納室11の摺動面11Bに
ラビリンスシールされていることから可動鉄心体Tは受
圧室形成体Pにセンタリング支持されるとともに弁体1
4の弁部16が弁座1に対向して配置され、さらに可動
鉄心15が固定鉄心9に対向して配置される。
According to the above, the valve body 14 of the movable iron core body T is
However, since the sliding surface 11B of the valve body storage chamber 11 of the pressure receiving chamber forming body P is labyrinth-sealed, the movable iron core body T is centered and supported by the pressure receiving chamber forming body P and the valve body 1
The valve portion 16 of No. 4 is arranged to face the valve seat 1, and the movable iron core 15 is arranged to face the fixed iron core 9.

【0015】次にその作用について説明する。まず、ソ
レノイド7が非通電状態において、固定鉄心9と可動鉄
心15との間に吸引力が生起しない。而して、可動鉄心
体Tはスプリング20のバネ力によって下方に押圧さ
れ、弁体14の弁部16は弁座1に当接され、一次側流
路2と二次側流路3とは遮断されて保持される。受圧室
P内には一次側流路2内の流体が圧力導入路17を介し
て流入するが弁体14と弁体収納室11の摺動面11B
とがラビリンスシールされているので流体は洩れない。
かかる閉塞状態において、一次側流路2内の流体圧力が
変化すると、この一次側流路2内の流体圧力は弁座1に
向かって開口する弁体14の前面14Bに作用する。一
方、一次側流路2内の流体圧力は弁体14に穿設した圧
力導入路17を介して弁体14の後面14Aの受圧室P
内へ作用し、弁体14の後面14Bに作用する。(受圧
室Pは受圧室形成体Pの貫通孔12Aを介して上方へ連
通するが、位置決め収納孔5の開口はハウジング体Hに
よって閉塞されるので密閉的なる受圧室Pは保持される
ことになる。) 従って、弁体14の前面14B及び後面14Aに同一な
る一次側流路2内の流体圧力を同時に作用させることが
できたので一次側流路2内の圧力変化をキャンセルする
ことができ、常に一定なる押圧力によって可動鉄心体T
を弁座1に向けて押圧保持できたものである。いいかえ
るならば可動鉄心体Tは、一次側流路2内の流体圧力が
変化しても、常に一定の磁気吸引力をもって固定鉄心9
に向けて吸引できるということである。
Next, the operation will be described. First, when the solenoid 7 is in the non-energized state, no attractive force is generated between the fixed iron core 9 and the movable iron core 15. Thus, the movable iron core body T is pressed downward by the spring force of the spring 20, the valve portion 16 of the valve body 14 is brought into contact with the valve seat 1, and the primary side flow passage 2 and the secondary side flow passage 3 are separated from each other. Blocked and retained. Although the fluid in the primary side flow path 2 flows into the pressure receiving chamber P via the pressure introducing path 17, the sliding surface 11B between the valve body 14 and the valve body housing chamber 11
Since and are labyrinth sealed, fluid cannot leak.
When the fluid pressure in the primary side flow passage 2 changes in the closed state, the fluid pressure in the primary side flow passage 2 acts on the front surface 14B of the valve body 14 opening toward the valve seat 1. On the other hand, the fluid pressure in the primary side flow path 2 is transmitted through the pressure introducing passage 17 formed in the valve body 14 to the pressure receiving chamber P on the rear surface 14A of the valve body 14.
It acts inward and acts on the rear surface 14B of the valve element 14. (The pressure receiving chamber P communicates upward through the through hole 12A of the pressure receiving chamber forming body P, but since the opening of the positioning storage hole 5 is closed by the housing body H, the pressure receiving chamber P that is hermetically sealed is maintained. Therefore, since the same fluid pressure in the primary side flow passage 2 can be simultaneously applied to the front surface 14B and the rear surface 14A of the valve body 14, the pressure change in the primary side flow passage 2 can be canceled. , The movable iron core body T with a constant pressing force
Can be pressed and held toward the valve seat 1. In other words, the movable iron core body T always has a fixed magnetic attraction force even if the fluid pressure in the primary side flow path 2 changes.
It means that it can be sucked toward.

【0016】尚、このとき、弁体収納室11に開口する
弁体14の後面14Aの有効受圧面積と、弁座1に対向
して一次側流路2に開口する弁体14の前面14Bの有
効受圧面積とを略同一にすると、一次側流路2内の流体
圧力変化の影響を完全にキャンセルすることができる。
At this time, the effective pressure-receiving area of the rear surface 14A of the valve body 14 opening to the valve body storage chamber 11 and the front surface 14B of the valve body 14 facing the valve seat 1 and opening to the primary side flow passage 2 are shown. When the effective pressure receiving area is made substantially the same, the influence of the fluid pressure change in the primary side flow path 2 can be completely canceled.

【0017】次いでソレノイド7に通電されると、固定
鉄心9、ハウジング体H、可動鉄心15によって磁気回
路が形成され、可動鉄心体Tの可動鉄心15は磁気吸引
力に応じてスプリング20のバネ力に抗して固定鉄心9
に吸引され、弁体14は弁体収納室11内を上方に向か
って移動し、弁体14の弁部16が弁座1を開放して、
一次側流路2内の流体が弁座1を介して二次側流路3内
へ流入する。かかる可動鉄心体Tの移動時において、可
動鉄心体Tは、弁体14が弁体収納室11の摺動面11
Bに対してセンタリング支持されているので可動鉄心体
Tの移動が振れたりすることなく直線状に円滑に行なわ
れる。
Next, when the solenoid 7 is energized, a magnetic circuit is formed by the fixed iron core 9, the housing body H, and the movable iron core 15, and the movable iron core 15 of the movable iron core body T has a spring force of a spring 20 according to a magnetic attraction force. Fixed iron core 9 against
The valve body 14 moves upward in the valve body storage chamber 11 and the valve portion 16 of the valve body 14 opens the valve seat 1,
The fluid in the primary side flow passage 2 flows into the secondary side flow passage 3 via the valve seat 1. When the movable iron core body T is moved, the movable iron core body T has the valve body 14 with the sliding surface 11 of the valve body storage chamber 11.
Since the movable iron core body T is centered and supported with respect to B, the movable iron core body T can be smoothly moved linearly without swinging.

【0018】又、図3に示す如く、弁体14の外周を弁
体収納室11の摺動面11Bに対してラビリンスシール
してセンタリング支持するとともにシャフト13を受圧
室形成体Pの中央突部12の貫通孔12Aにて摺動自在
に支持したことによると、可動鉄心体Tは受圧室形成体
Pに対して下方にある弁体14とそれより上方位置にあ
るシャフト13とによって複数個所においてセンタリン
グ支持されるので、可動鉄心体Tのセンタリング支持は
一層確実に行ない得るもので、弁部16の弁座1に対す
る閉塞性及び可動鉄心15の固定鉄心9に対する相対位
置を一層正確に配置できるもので可動鉄心15の動特性
を向上できたものである。
Further, as shown in FIG. 3, the outer periphery of the valve body 14 is labyrinth-sealed with respect to the sliding surface 11B of the valve body storage chamber 11 for centering support, and the shaft 13 is provided with a central projection of the pressure-receiving chamber forming body P. Since the movable iron core body T is slidably supported by the through holes 12A of the valve 12, the movable iron core body T is provided at a plurality of positions by the valve body 14 below the pressure receiving chamber forming body P and the shaft 13 above the pressure receiving chamber forming body P. Since the centering support is provided, the centering support of the movable iron core body T can be performed more reliably, and the obstruction of the valve portion 16 with respect to the valve seat 1 and the relative position of the movable iron core 15 with respect to the fixed iron core 9 can be more accurately arranged. Thus, the dynamic characteristics of the movable iron core 15 can be improved.

【0019】又、図4に示される如く、シャフト13の
貫通孔12A内におけるセンタリング支持を、シャフト
13より外側方に向かう薄肉で環状の鍔部13Aを上下
方向に一対設け、この鍔部13Aによって貫通孔12A
の上部近傍及び下部近傍においてシャフト13をセンタ
リング支持させたことによると、シャフト13(可動鉄
心体T)のセンタリング支持の確実性を高めることがで
きるとともにセンタリング支持による上下方向の可動鉄
心体Tの摺動抵抗(シャフト13の摺動抵抗)の軽減を
達成できた。これはソレノイド7を大型化して可動鉄心
体Tに対する磁気吸引力を増加しなければならないこと
を解消できる。
Further, as shown in FIG. 4, for centering support in the through hole 12A of the shaft 13, a pair of thin and annular flange portions 13A extending outward from the shaft 13 are provided in the vertical direction, and by this flange portion 13A. Through hole 12A
The centering support of the shaft 13 in the vicinity of the upper part and the lower part of the shaft makes it possible to enhance the reliability of the centering support of the shaft 13 (movable iron core body T) and to vertically slide the movable iron core body T by the centering support. Reduction of the dynamic resistance (sliding resistance of the shaft 13) could be achieved. This can eliminate the need to increase the size of the solenoid 7 and increase the magnetic attraction force for the movable iron core body T.

【0020】[0020]

【発明の効果】本発明になる流体制御弁によると、弁座
にて一次側流路と二次側流路とに区分され、二次側流路
より係止段部を介して位置決め収納孔が端部に向かって
開口した弁本体と;磁性材料にて形成された筒状体をな
し、その内部に、周囲にソレノイドを巻回された固定鉄
心を磁気的に結合して配置するとともに弁本体の位置決
め収納孔に挿入される挿入筒部を下部に設けたハウジン
グ体と;非磁性材料にて形成された筒状体をなし、弁本
体の係止段部上に配置されるとともに位置決め収納孔内
に挿入される挿入筒部と、弁座に向けて下端が開口した
有底カップ状の弁体収納室と、その中心部にあって弁体
収納室の底部に向けて開口する貫通孔と、を備えた受圧
室形成体と;受圧室形成体の貫通孔を上下方向に貫通し
て配置されたシャフトの下端に、弁体収納室の摺動面に
対してラビリンスシールされて弁体収納室内を移動しう
るとともに弁座を開閉制御する弁部と、弁体の前面と後
面とを貫通する圧力導入路を備えた弁体を配置し、一方
シャフトの上端に固定鉄心に対向する可動鉄心を配置し
た可動鉄心体と;により構成したので、圧力キャンセル
機構としてベローズを用いる必要がないので、ベローズ
が持つ問題点を全て解消できた。すなわち、高価な合成
樹脂材料を使用しないこと及び加工時間が短くて済む、
組みつけが容易であること、より部品コストの低減と流
体制御弁の製造コストの大幅な低減を達成できた。又、
受圧室形成体及び弁体を含む可動鉄心体は金属材料を旋
盤加工することによって得られ、特にベローズの如く合
成樹脂材料でなければならない部分を要しないことよ
り、弁本体を流れる流体及び仕様(温度,圧力)が変更
となってもいちいち耐久テストを行なう必要がないので
汎用性が高くしかも開発効率の良好な流体制御弁を提供
できる。又、可動鉄心体のセンタリング支持を弁体収納
室の摺動面と弁体とをラビリンスシールすることによっ
て行なったので板バネ等格別なるセンタリング部材を必
要としないのでセンタリング支持に要するセンタリング
部材の削減及び組みつけが不要となったもので、このこ
とも製造コストの低減に寄与する。
According to the fluid control valve of the present invention, it is divided into the primary side flow passage and the secondary side flow passage by the valve seat, and the positioning storage hole is formed from the secondary side flow passage through the locking step portion. A valve body having an opening toward the end; a cylindrical body made of a magnetic material, in which a fixed iron core around which a solenoid is wound is magnetically coupled and disposed. A housing body provided with a lower portion of an insertion cylinder portion to be inserted into a positioning storage hole of the main body; and a cylindrical body formed of a non-magnetic material, which is arranged on the locking step portion of the valve body and is positioned and stored. An insertion cylinder part to be inserted into the hole, a bottomed cup-shaped valve body accommodating chamber whose lower end opens toward the valve seat, and a through hole at the center of the valve body accommodating chamber that opens toward the bottom of the valve body accommodating chamber A pressure-receiving chamber forming body having; and a chassis arranged vertically through a through hole of the pressure-receiving chamber forming body. At the lower end of the valve, there is a labyrinth seal against the sliding surface of the valve body storage chamber, which can move in the valve body storage chamber and which controls the opening and closing of the valve seat, and the pressure that penetrates the front and rear surfaces of the valve body. Since the valve body having the introduction path is arranged and the movable core having the movable core facing the fixed core is arranged at the upper end of the shaft, the bellows need not be used as the pressure canceling mechanism. I was able to solve all the problems I have. That is, no expensive synthetic resin material is used and the processing time is short.
It was easy to assemble, and it was possible to reduce the cost of parts and the manufacturing cost of the fluid control valve. or,
The movable iron core body including the pressure receiving chamber forming body and the valve body is obtained by lathe processing of a metal material, and in particular does not require a portion such as a bellows which must be a synthetic resin material. Since there is no need to perform a durability test each time the temperature and pressure change, a fluid control valve with high versatility and good development efficiency can be provided. Further, since the centering support of the movable iron core is carried out by performing the labyrinth seal between the sliding surface of the valve body accommodating chamber and the valve body, a special centering member such as a leaf spring is not required, so the centering member required for the centering support is reduced. In addition, the assembly is unnecessary, which also contributes to the reduction of manufacturing cost.

【0021】又、弁体収納室に開口する弁体の後面の有
効受圧面積と弁座に対向し、一次側流路に開口する弁体
の前面の有効受圧面積とを略同一としたことによると、
弁体に対する一次側流路内の圧力キャンセルを完全に行
なうことができ、弁体を含む可動鉄心の動特性を良好に
保持することができたものである。これは、筒状の弁体
としたことで一層容易に可能となった。
Further, the effective pressure receiving area of the rear surface of the valve body opening to the valve body accommodating chamber and the effective pressure receiving area of the front surface of the valve body facing the valve seat and opening to the primary side passage are made substantially the same. When,
It is possible to completely cancel the pressure in the primary side flow path with respect to the valve element, and to maintain the dynamic characteristics of the movable iron core including the valve element in a good condition. This is made easier by using a tubular valve body.

【0022】又、可動鉄心体を構成するシャフトを中央
筒部を貫通する貫通孔によってセンタリング支持させた
ことによると、可動鉄心体は、弁体と弁体収納孔の摺動
面におけるセンタリングに加え、シャフトが貫通孔によ
ってセンタリング支持されたので可動鉄心体のセンタリ
ング支持が一層確実に行なわれるもので、且つ新たなセ
ンタリング支持部材を設ける必要がない。
Further, since the shaft constituting the movable iron core is centered and supported by the through hole penetrating the central cylindrical portion, the movable iron core is added to the centering on the sliding surface between the valve body and the valve body accommodating hole. Since the shaft is centering-supported by the through hole, the centering support of the movable core body is performed more reliably, and it is not necessary to provide a new centering support member.

【0023】又、シャフトと貫通孔とのセンタリング支
持を、貫通孔の上部近傍、下部近傍において部分的にセ
ンタリング支持させたことによると、弁体によるセンタ
リング支持に加え、貫通孔によるセンタリング支持が成
され、しかも貫通孔によるセンタリング支持が部分的に
行なわれたのでシャフトを含む可動鉄心体の摺動抵抗を
軽減できたもので、ソレノイドの大型化を抑止できる。
Further, since the centering support of the shaft and the through hole is partially centered near the upper part and the lower part of the through hole, the centering support by the through hole is performed in addition to the centering support by the valve body. Moreover, since the centering support is partially performed by the through hole, the sliding resistance of the movable iron core body including the shaft can be reduced, and the enlargement of the solenoid can be suppressed.

【0024】又、受圧室形成体の挿入筒部及びハウジン
グ体の挿入筒部と、を弁本体の位置決め収納孔に挿入し
て位置決めしたことによると、単一の位置決め孔である
位置決め収納孔を基準として受圧室形成体、ハウジング
体が配置できたもので、固定鉄心、受圧室形成体の貫通
孔及び弁体収納室、可動鉄心及び弁体を含む可動鉄心体
を完全に同一軸心線上に配置できたもので、可動鉄心体
の動特性の向上を図ることができた。
Further, since the insertion cylindrical portion of the pressure receiving chamber forming body and the insertion cylindrical portion of the housing body are inserted into the positioning accommodating hole of the valve body and positioned, a positioning accommodating hole which is a single positioning hole is formed. As a reference, the pressure receiving chamber forming body and the housing body can be arranged.The fixed iron core, the through hole of the pressure receiving chamber forming body and the valve body storage chamber, the movable iron core and the movable iron core body including the valve body are completely on the same axis. With this arrangement, it was possible to improve the dynamic characteristics of the movable core body.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明になる流体制御弁の一実施例を示す縦断
面図である。
FIG. 1 is a vertical sectional view showing an embodiment of a fluid control valve according to the present invention.

【図2】図1における受圧室形成体と可動鉄心体とのア
ッセンブリー状態を示す縦断面図である。
FIG. 2 is a vertical cross-sectional view showing an assembled state of the pressure receiving chamber forming body and the movable core body in FIG.

【図3】受圧室形成体と可動鉄心体とのアッセンブリー
状態の他の実施例を示す縦断面図である。
FIG. 3 is a vertical cross-sectional view showing another example of the assembled state of the pressure receiving chamber forming body and the movable iron core body.

【図4】受圧室形成体と可動鉄心体とのアッセンブリー
状態の更に他の実施例を示す縦断面図である。
FIG. 4 is a vertical cross-sectional view showing still another embodiment of the assembled state of the pressure receiving chamber forming body and the movable iron core body.

【符号の説明】[Explanation of symbols]

1 弁座 2 一次側流路 3 二次側流路 4 係止段部 5 位置決め収納孔 6B 挿入筒部 7 ソレノイド 9 固定鉄心 10 挿入筒部 11 弁体収納室 11A 底部 12A 貫通孔 13 シャフト 14 弁体 15 可動鉄心 16 弁部 17 圧力導入路 H ハウジング体 V 弁本体 P 受圧室形成体 R 受圧室 T 可動鉄心体 1 Valve Seat 2 Primary Side Flow Path 3 Secondary Side Flow Path 4 Locking Step 5 Positioning Storage Hole 6B Inserting Tube 7 Solenoid 9 Fixed Iron Core 10 Inserting Tube 11 Valve Body Storage Room 11A Bottom 12A Through Hole 13 Shaft 14 Valve Body 15 Movable iron core 16 Valve part 17 Pressure introduction path H Housing body V Valve body P Pressure receiving chamber forming body R Pressure receiving chamber T Movable iron core body

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】 弁座1にて一次側流路2と二次側流路3
とに区分され、二次側流路3より係止段部4を介して位
置決め収納孔5が端部Aに向かって開口した弁本体V
と;磁性材料にて形成された筒状体をなし、その内部
に、周囲にソレノイド7を巻回された固定鉄心9を磁気
的に結合して配置するとともに弁本体Vの位置決め収納
孔5に挿入される挿入筒部6Bを下部に設けたハウジン
グ体Hと;非磁性材料にて形成された筒状体をなし、弁
本体Vの係止段部4上に配置されるとともに位置決め収
納孔5内に挿入される挿入筒部10と、弁座1に向けて
下端が開口した有底カップ状の弁体収納室11と、その
中心部にあって弁体収納室11の底部11Aに向けて開
口する貫通孔12Aと、を備えた受圧室形成体Pと;受
圧室形成体Pの貫通孔12Aを上下方向に貫通して配置
されたシャフト13の下端に、弁体収納室11の摺動面
11Bに対してラビリンスシールされて弁体収納室11
内を移動しうるとともに弁座1を開閉制御する弁部16
と、弁体14の前面14Bと後面14Aとを貫通する圧
力導入路17を備えた弁体14を配置し、一方シャフト
13の上端に固定鉄心9に対向する可動鉄心15を配置
した可動鉄心体Tと;よりなり、ソレノイドに生起する
磁力に応じて可動鉄心体Tを固定鉄心9側へと動作させ
てなる流体制御弁。
1. A primary side flow passage 2 and a secondary side flow passage 3 at a valve seat 1.
And a valve body V in which the positioning storage hole 5 is opened toward the end A from the secondary side flow path 3 via the locking step portion 4.
A cylindrical body formed of a magnetic material is formed, and a fixed iron core 9 around which a solenoid 7 is wound is magnetically coupled and arranged in the positioning housing hole 5 of the valve body V. A housing body H provided with an insertion cylinder portion 6B to be inserted therein; a cylinder body made of a non-magnetic material, which is arranged on the locking step portion 4 of the valve body V and has a positioning storage hole 5 Toward the insertion cylinder portion 10 to be inserted therein, the valve body storage chamber 11 having a cup shape with a bottom whose lower end opens toward the valve seat 1, and the bottom portion 11A of the valve body storage chamber 11 at the center thereof. A pressure receiving chamber forming body P having a through hole 12A which is opened; and a sliding movement of the valve body accommodating chamber 11 at a lower end of a shaft 13 which is vertically penetrated through the through hole 12A of the pressure receiving chamber forming body P. Labyrinth seal is applied to the surface 11B, and the valve body storage chamber 11
A valve unit 16 that can move inside and controls opening and closing of the valve seat 1.
And a valve element 14 having a pressure introducing passage 17 penetrating the front surface 14B and the rear surface 14A of the valve element 14, and a movable iron core 15 having a movable iron core 15 facing the fixed iron core 9 at the upper end of the shaft 13 A fluid control valve consisting of T and; and moving the movable iron core body T toward the fixed iron core 9 side in accordance with the magnetic force generated in the solenoid.
【請求項2】 前記、弁体収納室11に開口する弁体1
4の後面14Aの有効受圧面積と弁座1に対向し、一次
側流路2に開口する弁体14の前面14Bの有効受圧面
積とを略同一としてなる請求項1記載の流体制御弁。
2. The valve body 1 opening to the valve body storage chamber 11.
4. The fluid control valve according to claim 1, wherein the effective pressure receiving area of the rear surface 14 </ b> A of 4 and the effective pressure receiving area of the front surface 14 </ b> B of the valve body 14 that faces the valve seat 1 and opens to the primary side flow passage 2 are substantially the same.
【請求項3】 前記、シャフト13を貫通孔12Aにて
センタリング支持してなる請求項1記載の流体制御弁。
3. The fluid control valve according to claim 1, wherein the shaft 13 is centeringly supported by a through hole 12A.
【請求項4】 前記、シャフト13と貫通孔12Aとの
センタリング支持を、貫通孔12Aの上部近傍、下部近
傍において部分的にセンタリング支持させてなる請求項
3記載の流体制御弁。
4. The fluid control valve according to claim 3, wherein the centering support of the shaft 13 and the through hole 12A is partially centered and supported near the upper portion and the lower portion of the through hole 12A.
【請求項5】 前記、受圧室形成体Pの挿入筒部10及
びハウジング体Hの挿入筒部6Bと、を弁本体Vの位置
決め収納孔5に挿入してなる請求項1記載の流体制御
弁。
5. The fluid control valve according to claim 1, wherein the insertion cylinder portion 10 of the pressure receiving chamber forming body P and the insertion cylinder portion 6B of the housing body H are inserted into the positioning storage hole 5 of the valve body V. ..
JP32806691A 1991-11-15 1991-11-15 Fluid control valve Pending JPH05141560A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP32806691A JPH05141560A (en) 1991-11-15 1991-11-15 Fluid control valve

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP32806691A JPH05141560A (en) 1991-11-15 1991-11-15 Fluid control valve

Publications (1)

Publication Number Publication Date
JPH05141560A true JPH05141560A (en) 1993-06-08

Family

ID=18206138

Family Applications (1)

Application Number Title Priority Date Filing Date
JP32806691A Pending JPH05141560A (en) 1991-11-15 1991-11-15 Fluid control valve

Country Status (1)

Country Link
JP (1) JPH05141560A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019168091A (en) * 2018-03-26 2019-10-03 日本電産トーソク株式会社 Solenoid valve and flow passage device
JP2021017947A (en) * 2019-07-22 2021-02-15 日本電産トーソク株式会社 Solenoid valve and flow path device
JP2021017948A (en) * 2019-07-22 2021-02-15 日本電産トーソク株式会社 Solenoid valve and flow path device
JP2021017946A (en) * 2019-07-22 2021-02-15 日本電産トーソク株式会社 Solenoid valve and flow path device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019168091A (en) * 2018-03-26 2019-10-03 日本電産トーソク株式会社 Solenoid valve and flow passage device
JP2021017947A (en) * 2019-07-22 2021-02-15 日本電産トーソク株式会社 Solenoid valve and flow path device
JP2021017948A (en) * 2019-07-22 2021-02-15 日本電産トーソク株式会社 Solenoid valve and flow path device
JP2021017946A (en) * 2019-07-22 2021-02-15 日本電産トーソク株式会社 Solenoid valve and flow path device

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