JPH05141500A - Driving device - Google Patents

Abstract

PURPOSE:To provide a driving device provided with excellent durability and capable of carrying out complex action at high speed and high accuracy in a small size and simple structure. CONSTITUTION:This driving device is provided with an input shaft 2 and speed change shaft 3, wherein the rotation of the input shaft 2 is decelerated to 1/3 through gears 4, 5 and transmitted to a speed change shaft 3. First and second cams 6 and 7 are fixed onto the shafts 2, 3. Driven arms 12, 13 are swung by the actions of the cams 6, 7 and an output arm 14 and a sliding block 16 are reciprocatingly driven in the direction to be vertical to each other through a slide bearing 19. When the input shaft 2 turns three times, the slide block 16 reciprocates six times vertically and the output arm 14 reciprocates rightward/reftward three times.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a driving device for transporting a work such as a semiconductor-related equipment part to a predetermined position.

[0002]

2. Description of the Related Art A conventional device of this type is disclosed in Japanese Patent Laid-Open No. 55-497.
No. 8 publication. In this conventional apparatus, an input shaft, a first follower shaft, and a second follower shaft are rotatably supported by the housing, and first and second globoidal cams are fixed to the input shaft so as to be adjacent to each other. ing. First
And the second follower shaft are parallel to each other and at right angles to the input shaft. A first follower turret is fixed to the first follower shaft, and a second follower turret that is interlocked with a second globoidal cam is fixed to the second follower shaft. A pair of cam followers is provided on the circumference of each follower turret, and tapered ribs formed on the circumferential surface of each globoidal cam are sandwiched by the cam followers from both sides.
A guide shaft is fixed to the housing in parallel with the input shaft, and a slide block is slidably supported on the guide shaft. The sliding block is provided with an output member that is slidably guided in the direction perpendicular to the input shaft. The sliding block and the first follower shaft are connected by a first driven arm, and the output member and the second follower shaft are connected by a second driven arm.

When the input shaft is continuously rotated, each cam follower follows the curved pattern of the taper rib, and both driven arms independently perform the rotational movement. Each taper rib is constituted by one corrugation or a plurality of continuous corrugations, and the cam action for reciprocating both driven arms once is provided by one corrugation. Along with the rotation of each driven arm, the sliding block reciprocates up and down along the guide shaft, and the output member is guided by the sliding block and reciprocates in the left and right direction orthogonal to the input shaft.

In this conventional device, one revolution of the input shaft causes one revolution.
The carrying operation of the cycle is completed, and the carrying operation of one cycle consists of a combined motion of two vertical reciprocating motions and one lateral reciprocating motion. A gripping means such as a chuck is attached to the output member, and the operation of transporting the workpiece gripped at the origin position P ₀ to a predetermined transport position P as shown in the moving path M in FIG. 8 is performed at high speed and with high accuracy. To be done.

[0005]

The above-described transport operation is more complicated than the above-mentioned transport operation.
In order to achieve the rough transport operation with the conventional configuration,
A large number of wavy curved lines are provided on the peripheral surface of the void cam to
It is necessary to increase the number of cam actions during one revolution of the void cam.
There is a point. For example, as shown in FIGS. 7 (a) to 7 (c)
Origin position P₀Workpieces gripped by
Setting P₁, P₂, P ₃To perform the action of being released at
In order to make 6 reciprocating movements in one cycle,
The corrugated curved line is attached to the first globoidal cam and left three times
The second globoidal corrugation is used to make the right reciprocating motion.
Must be installed in Lucam.

However, it is not easy to form a large number of corrugations on the circumferential surface of the globoidal cam, and even if a large number of corrugations are formed, the taper rib cannot be complicated in shape. .. If the taper rib is complicated, the followability of the cam follower with respect to the taper rib is likely to be deteriorated, and high speed is inevitably sacrificed in order to ensure high accuracy of the reciprocating conveyance operation. When trying to form a complicated tapered rib on the globoidal cam without expanding the diameter, it is inevitable that the width of the tapered rib and the diameter of the cam follower are reduced, and as a result, the rigidity of the tapered rib and the cam follower portion is reduced, The durability of the entire device deteriorates. Also, a method of avoiding complication of the tapered ribs by using a globoidal cam having a large diameter can be considered, but in that case, an increase in size of the entire device cannot be avoided.

The present invention has been made in view of the above circumstances. An object of the present invention is to provide excellent durability and complex complex motion at high speed, despite its small size and simple structure. Another object of the present invention is to provide a drive device that can perform high precision.

[0008]

In order to solve the above-mentioned problems, according to the present invention, an input shaft, a speed change shaft, a speed change mechanism for changing the rotation of the input shaft and transmitting the rotation to the speed change shaft, and an input shaft. A fixed first cam body, a second cam body fixed on the speed change shaft, a first driven body reciprocally driven by the cam action of the first cam body, and a second cam The second driven body is reciprocally driven by a cam action of the body in a direction different from the driving direction of the first driven body, and the second driven body is relative to the first driven body only in the driving direction. A mechanism for permitting movement, wherein the speed ratio of the speed change mechanism is an integer value, and the number of reciprocations of the second driven body when the input shaft rotates the integer number of times is the first
2 times the number of reciprocating motions of the follower.

[0009]

In the present invention, the input shaft and the speed change shaft are respectively provided with cam bodies, and the driven bodies are reciprocally driven in different directions independently of each other based on the cam action of each cam body. According to the above configuration, since the rotation of the speed change shaft can be changed to an integral multiple by the speed change mechanism interposed between the input shaft and the speed change shaft,
It is possible to set the number of times of cam action in one cycle of the transport operation to be smaller than in the conventional case.

[0010]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below at a plurality of different transfer positions P ₁ , P ₂ , P ₃ for a work W gripped at an origin position P ₀ as shown in FIGS. An embodiment embodied in a conveying device for performing the releasing operation will be described in detail with reference to FIGS.

As shown in FIGS. 1 and 2, reference numeral 1 is a housing, and a support bracket 1 is provided on a back wall 1a of the housing 1.
b is projected. An input shaft 2 is rotatably supported between the support bracket 1b and one side wall 1c of the housing 1. A transmission shaft 3 is rotatably supported between the side walls 1c and 1d of the housing 1 in parallel with the input shaft 2. Gears 4 and 5 are fixed to the input shaft 2 and the speed change shaft 3, and the gears 4 and 5 mesh with each other. Both gears 4 and 5 form a speed change mechanism that changes the speed of rotation of the input shaft 2 and transmits it to the speed change shaft 3.

A first globoidal cam 6 is fixed to the input shaft 2, and a second globoidal cam 7 is fixed to the transmission shaft 3. On the peripheral surface of each globoidal cam 6, 7, there is a tapered rib 6 having a trapezoidal cross section having a predetermined shape.
a and 7a are formed in a ring shape.

A first driven shaft 8 and a second driven shaft 9 are rotatably supported in parallel on the housing 1 on the back wall 1a of the housing 1. A first driven turret 10 is fixed to the first driven shaft 8 and a second driven turret 11 is fixed to the second driven shaft 9. Each driven turret 1
A pair of cam followers 1 on the circumference of 0 and 11 respectively.
0a and 11a are provided so as to protrude in the radial direction, and the tapered ribs 6a and 7a are sandwiched by the cam followers 10a and 11a from both side surfaces.

As shown in FIGS. 1 and 2, the first driven shaft 8
Has a first driven arm 12 fixed thereto, and a second driven shaft 9 has a second driven arm 13 fixed thereto. A trochanter 12a is provided at the tip of the first driven arm 12, and a trochanter 13a is provided at the tip of the second driven arm 13.

A pair of guide rails 18 are vertically arranged on the back wall 1a of the housing 1, and a slide block 16 is slidably guided on each guide rail 18. A slide bearing 19 is fixed to the front surface of the sliding block 16, and the output arm 14 is fitted in the slide bearing 19 so as to be slidable in the left-right direction. A chuck (not shown) is attached to the projecting end of the output arm 14, and the chuck can hold and release the work.

A first cam groove 15 is vertically formed in the inner end portion of the output arm 14, and a trochanter 12a is rotatably fitted in the first cam groove 15. A second cam groove 17 is formed in the sliding block 16 in the left-right direction, and a rotor 13a is rotatably fitted in the second cam groove 17. The swing of the first driven arm 12 depends on the trochanter 12a.
Also, the sliding block 16 is converted into vertical movement through the cam groove 15 and the swing of the second driven arm 13 is converted into left and right movement of the output arm 14 through the rotor 13a and the cam groove 17. Both cam grooves 15 and 17 are orthogonal to each other, and the output arm 14 and the sliding block 16 are relatively slidable in the left-right direction. Therefore, if the sliding block 16 moves up and down, the output arm 14 is guided up and down, and the output arm 14 is moved vertically within this range.
With 1, the output arm 14 can be moved left and right. That is, the output arm 14, the sliding block 16, and the slide bearing 1
9 is the second driven arm 1 with respect to the first driven arm 12
A mechanism for allowing relative movement of 3 is constructed.

In the apparatus of this embodiment, the number of teeth of the gear 5 on the speed change shaft 3 side is set to 3 times the number of teeth of the gear 4 on the input shaft 2 side. The gear ratio n is an integer value (reduction ratio = 3). Therefore, while the second globoidal cam 7 makes one rotation, the first globoidal cam 6
Rotates 3 times.

As shown in FIG. 4, the tapered rib 6a is composed of two corrugated curved lines C _1a and C _1b , and each corrugated curved line C _1a and C _1b is 1/2 of the outer peripheral surface of the globoidal cam 6. Are continuously formed in the area of. When the cam follower 10a located in the valley portion T of the taper rib 6a moves to the mountain portion Y by the rotation of the globoidal cam 6, the driven arm 12 rotates and the sliding block 1 moves to the position indicated by the solid line in FIG.
6 moves up, and in the case of the reverse movement, the sliding block 16 moves down to the position indicated by the solid line in FIG.

As shown in FIG. 5, the tapered rib 7a is a mountain portion.
Three wavy curved lines with different Y heights C _2a, C_2b, C_2cBy
It is configured. Wavy music C_2aIs a globoidal cam
The rotation angle of 7 is formed in the region of 0 ° to 120 °,
The height of the mountain portion Y is P in FIG. 7 (a).₀, P₁In the distance between
It is set to correspond. Wavy music C_2bIs Globo
The rotation angle of the idal cam 7 is in the range of 120 ° to 240 °.
Is made. Wavy music C_2bFigure 7 shows the height of the mountain Y
P in (b)₀, P₂Is set according to the distance between
R, wavy music_2cThe height of the mountain portion Y is P in FIG. 7 (c).₀，
P₃It is set according to the distance between them. Similarly Globo
The rotation angle of the idal cam 7 is 120 ° to 240 °, 240 °
Each of the corrugations C in the ~ 360 ° range_2b, C_2cShape
Made up of P₀, P₂Distance between and P₀，
P₃The height of the mountain portion Y is set according to the distance between
It

[0020] When the cam follower 10a located in the valley portion T of the tapered rib 7a is moved to the crest Y corrugated Kyokujo C _2a by the rotation of the globoidal 7, the output driven arm 13 to the position shown in FIG. 3 by rotating When the arm 14 moves to the right and vice versa, the output arm 14 moves to the position shown in FIG.
Moves to the left. Similarly, the cam follower 10a has a corrugated music C
_Between valley T and mountain Y of _2b or valley T and mountain Y of C _2c
When the output arm 14 is moved between and, the output arm 14 moves right and left according to the set movement distance.

FIG. 6 shows a timing chart when the composite operation pattern shown in FIGS. 7A to 7C is performed. In this device, one cycle of the combined transport operation is completed by three rotations of the input shaft 2 and one rotation of the transmission shaft 3. When the input shaft 2 is rotated once in the direction of the arrow from the state of FIG. 1, the output arm 14 of FIG. 7A is moved by the cam action of the corrugated curved lines C _1a , C _1b , and C _2a on the respective globoidal cams 6 and 7. Travel route M
After passing through ₁ , it reciprocates between the origin position P ₀ and the first transport position P ₁ . When the input shaft 2 is rotated once from this state, the output arm 14 is caused by the cam action of the corrugated curved lines C _1a , C _1b and C _2b.
Origin position P ₀ and the second but through the movement path M ₂ shown in FIG. 7 (b)
It reciprocates to and from the transport position P ₂ . When the input shaft 2 is further rotated once from this state, the output arm 14 is moved to the origin position P ₀ via the movement path M ₃ in FIG. 7C by the cam action of the corrugated curved lines C _1a , C _1b and C _2c . It reciprocates between the transport position P ₃ and the transport position P ₃ . By appropriately setting the opening / closing timing of the chuck in accordance with this carrying operation and continuously rotating the input shaft 2, the origin position P ₀ to the carrying positions P ₁ , P
_2, the continuous transport of the workpieces to P ₃ is performed.

In the present invention, the gears 4 and 5 between the input shaft 2 and the speed-changing shaft 3 cause the speed-changing shaft 3 to decelerate to 1/3, so unlike the conventional apparatus, the speed-changing shaft 3 is rotated 6 times during one cycle of the conveying operation. It is not necessary to provide six corrugated curved lines on the globoidal cam 6 in order to bring about the cam action described above, and the number of corrugated curved lines to be formed can be two. Therefore, the shape of the tapered rib 6a is simpler than that of the conventional one, and the difficulty of forming the tapered rib 6a is eliminated. Taper rib 6a
Since the high-speed followability suitable for the cam follower 10a is ensured by the simplification of the shape, it is possible to secure both high speed and high accuracy in the reciprocating conveyance operation.

Further, as a result of simplifying the shape of the taper rib 6a, the width of the taper rib 6a and the cam follower 10a.
It is possible to secure a large diameter. Therefore,
Unlike the conventional case, the taper rib 6a and the cam follower 1
The rigidity of the portion 0a does not decrease, and the durability of the entire device also improves. Further, according to the above configuration, even if the number of times of the cam action required during one cycle of the transport operation is increased, the diameter of the globoidal cam 6 is not particularly limited, so that the size of the entire device is inevitably increased unlike the conventional device. There is no problem of being done.

The present invention is not limited to the configuration of the above-mentioned embodiment, and, for example, the gears 4 used as the speed changing means.
It is of course possible to interpose a timing belt between the input shaft 2 and the transmission shaft 3 instead of 5. Further, in the above-described embodiment, the configuration in which the input shaft 2 is rotationally driven has been described, but the same transport operation can be achieved by rotationally driving the speed change shaft 3 and accelerating and transmitting the rotation to the input shaft 2 side. ..

[0025]

As described above in detail, according to the drive device of the present invention, it has excellent durability and is capable of performing complex complex motions at high speed and high speed despite its small size and simple structure. It has an excellent effect that it can be performed accurately.

[Brief description of drawings]

FIG. 1 is a front sectional view showing a drive device in a state where an output arm is at an origin position.

FIG. 2 is a side sectional view of the driving device of FIG.

FIG. 3 is a front cross-sectional view showing the drive device in a state where the output arm is in the moving position.

FIG. 4 is a development view showing the shape of a tapered rib provided on the outer peripheral surface of the first globoidal cam.

FIG. 5 is a development view showing the shape of a tapered rib provided on the outer peripheral surface of the second globoidal cam.

FIG. 6 is a timing chart in the case of performing the complex exercise of FIG. 7 (a).

7 (a) to 7 (c) are schematic views showing a combined movement pattern of the present apparatus.

FIG. 8 is a schematic view showing a composite motion pattern of a conventional device.

[Explanation of symbols]

2 input shaft, 3 speed change shaft, 4, 5 gears as a speed change mechanism, 6 (first) cam body, 7 (second) cam body,
8, 10, 12, 16 (first) driven body, 9, 11,
13, 14 (Second) driven body, 19 Mechanism allowing relative movement, n Gear ratio.

Claims (1)

[Claims] 1. An input shaft (2), a speed change shaft (3), a speed change mechanism (4, 5) for speed-changing the rotation of the input shaft (2) and transmitting the rotation to the speed change shaft (3), and an input shaft (2). ) By the cam action of the first cam body (6) fixed to the above, the second cam body (7) fixed to the speed change shaft (3), and the cam action of the first cam body (6). The first driven body (8, 10, 12, 16) that is reciprocally driven and the driving direction of the first driven body (8, 10, 12, 16) by the cam action of the second cam body (7). Is a second driven body (9, 11, 13, 14) that is reciprocally driven in different directions
And a mechanism (19) for permitting relative movement of the second driven body (9, 11, 13, 14) with respect to the first driven body (8, 10, 12, 16) only in the drive direction thereof. The gear ratio (n) of the speed change mechanism (4, 5) is an integer value, and the first driven body (8, 10, 12,) when the input shaft (2) rotates the integer number of times (n). 16) The drive device characterized in that the number of reciprocations of 16) is twice the number of reciprocations of the second driven bodies (9, 11, 13, 14).