JPH05135718A - Analyzing x-ray tube - Google Patents
Analyzing x-ray tubeInfo
- Publication number
- JPH05135718A JPH05135718A JP29262591A JP29262591A JPH05135718A JP H05135718 A JPH05135718 A JP H05135718A JP 29262591 A JP29262591 A JP 29262591A JP 29262591 A JP29262591 A JP 29262591A JP H05135718 A JPH05135718 A JP H05135718A
- Authority
- JP
- Japan
- Prior art keywords
- target
- ray tube
- metal plate
- analyzing
- rays
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Description
【０００１】[0001]
【産業上の利用分野】この発明は、分析用Ｘ線管に係わ
り、とくにその陽極構体の改良に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an analytical X-ray tube, and more particularly to improvement of its anode structure.
【０００２】[0002]
【従来の技術】例えば蛍光Ｘ線分析に使用されるＸ線管
は、実開昭６０−８４０５８号公報に開示されるよう
に、フィラメント陰極から発生される電子を受けて特性
Ｘ線管を放射するロジウムのようなターゲット金属板を
有する。このターゲット金属板は、銅製のターゲット支
持体の端面に接合されている。Ｘ線管の動作中、電子の
一部がこのターゲット支持体の側面に衝突する場合があ
り、そこから不純Ｘ線が発生する。このような不純Ｘ線
の放出を防止するため、特公昭３８−１０２０１号公報
に開示されるように、ターゲット支持体の側面やその近
傍の電極の表面、あるいは真空容器の内面に、ターゲッ
ト金属板と同じ金属材料の被膜を形成することが知られ
ている。この被膜は、Ｘ線管の動作陽極電圧で加速され
て衝突する電子によっても、母材である銅からの特性Ｘ
線すなわち不純Ｘ線が発生しないように、十分な厚さ、
例えば３０マイクロメートルの厚さに被着する必要があ
る。2. Description of the Related Art For example, an X-ray tube used for X-ray fluorescence analysis emits a characteristic X-ray tube by receiving electrons generated from a filament cathode, as disclosed in Japanese Utility Model Laid-Open No. 84058/1985. It has a target metal plate such as rhodium. The target metal plate is joined to the end surface of the copper target support. During operation of the x-ray tube, some of the electrons may strike the sides of the target support, from which impure x-rays are generated. In order to prevent the emission of such impure X-rays, as disclosed in Japanese Patent Publication No. 38-10201, a target metal plate is formed on the side surface of the target support, the surface of the electrode in the vicinity thereof, or the inner surface of the vacuum container. It is known to form a coating of the same metallic material as. This film is also characterized by the characteristic X from the base material copper, even by electrons that are accelerated and collide with the operating anode voltage of the X-ray tube.
Lines, that is, impure X-rays, sufficient thickness,
For example, it should be deposited to a thickness of 30 micrometers.
【０００３】[0003]
【発明が解決しようとする課題】ターゲット支持体の側
面にターゲット金属板と同じ金属材料の被膜を比較的厚
く形成するには、一般的には、めっき法が採用される。
ところが、ターゲット支持体とターゲット金属板との接
合部は、突起のような不連続な表面状態になっている場
合が多く、この突起部分に被膜が堆積して突起が拡大
し、放電しやすくなってしまったり、あるいは逆に被膜
の薄い部分が生じて不純Ｘ線が発生が生じるおそれがあ
る。この発明は、以上のような不都合を解消し、不純Ｘ
線の発生や放電発生を確実の防止できる陽極構体を備え
る分析用Ｘ線管を提供することを目的とする。To form a relatively thick coating of the same metal material as the target metal plate on the side surface of the target support, a plating method is generally employed.
However, in many cases, the joint between the target support and the target metal plate has a discontinuous surface condition such as a protrusion, and a film is deposited on this protrusion to enlarge the protrusion, which facilitates discharge. Or, conversely, a thin portion of the coating film may be generated to generate impure X-rays. The present invention solves the above inconveniences, and impure X
It is an object of the present invention to provide an analytical X-ray tube including an anode structure capable of reliably preventing the generation of rays and the occurrence of discharge.
【０００４】[0004]
【課題を解決するための手段】この発明は、陽極構体を
構成する銅製ターゲット支持体の端面及び側周面に、中
間層を介してターゲット金属板と同じ金属の被覆層が被
着され、このターゲット支持体端面の被覆層の上にター
ゲット金属板が接合されてなる分析用Ｘ線管である。According to the present invention, a coating layer made of the same metal as a target metal plate is deposited on an end surface and a side peripheral surface of a copper target support constituting an anode assembly through an intermediate layer. It is an X-ray tube for analysis in which a target metal plate is joined on a coating layer on the end face of a target support.
【０００５】[0005]
【作用】この発明によれば、ターゲット金属板が接合さ
れるターゲット支持体の端面および側周面の全体にター
ゲット金属板と同じ金属の被覆層が被着されているの
で、この被覆層は全体にわたって均一な厚さにでき、ま
た突起も生じるおそれがない。したがって、不純Ｘ線の
発生や放電発生のおそれがほとんどない陽極構体を備え
る分析用Ｘ線管が得られる。According to the present invention, since the coating layer of the same metal as the target metal plate is deposited on the entire end surface and side peripheral surface of the target support to which the target metal plate is joined, the entire coating layer is formed. The thickness can be made uniform over the entire length, and there is no risk of protrusions. Therefore, it is possible to obtain an X-ray tube for analysis which is provided with an anode structure having almost no risk of generation of impure X-rays or discharge.
【０００６】[0006]
【実施例】以下、その実施例を図面を参照して説明す
る。なお、同一部分は同一符号であらわす。図１および
図２に示す実施例は、蛍光Ｘ線分析用のＸ線管である。
同図の符号10はＸ線管、11は真空容器、12はその一部を
構成するＸ線放射窓、13は同じく真空容器の一部を構成
するガラス容器、14はＸ線管を内部に収容するハウジン
グ、15は高電圧ケーブルを受け入れるリセプタクル、16
は通水らせん絶縁パイプ、17は通水金属パイプ、18は陽
極構体、19はターゲット金属板、20はリング状のフィラ
メント陰極、21はその支持ロッド、22は陰極端子、23は
円筒状のウェネルト電極をあらわしている。DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments will be described below with reference to the drawings. The same parts are denoted by the same reference numerals. The embodiment shown in FIGS. 1 and 2 is an X-ray tube for fluorescent X-ray analysis.
In the figure, reference numeral 10 is an X-ray tube, 11 is a vacuum container, 12 is an X-ray emission window forming a part thereof, 13 is a glass container also forming a part of the vacuum container, and 14 is an X-ray tube inside. Housing to house, 15 is a receptacle that accepts high voltage cables, 16
Is a water-passing spiral insulating pipe, 17 is a water-passing metal pipe, 18 is an anode structure, 19 is a target metal plate, 20 is a ring-shaped filament cathode, 21 is its supporting rod, 22 is a cathode terminal, and 23 is a cylindrical Wehnelt. Represents an electrode.
【０００７】そこで、陽極構体18は、有底円筒状の銅製
ターゲット支持体24の先端面および側周面の全体に、ま
ず、ニッケルの中間層25が約５マイクロメートルの厚さ
でめっきにより被覆されている。そしてこのニッケル中
間層25の全表面上に、ロジウムからなる被覆層26が約３
０マイクロメートルの厚さでめっきにより被着されてい
る。さらに、この支持体の端面に、厚さが約１ｍｍのロ
ジウム円板からなるターゲット金属板19を、真空中の熱
圧着で接合されている。中間層25は、支持体24と被覆層
26との密着性を高めるために有効なものである。また、
一部の電子が衝突する可能性のあるウェネルト電極23、
真空容器11の金属部分の内面に、同じくロジウムの被膜
27が被着されている。Therefore, the anode assembly 18 is formed by coating the entire tip surface and side peripheral surface of the copper target support 24 having a bottomed cylindrical shape with a nickel intermediate layer 25 by plating to a thickness of about 5 micrometers. Has been done. A coating layer 26 made of rhodium is formed on the entire surface of the nickel intermediate layer 25 in an amount of about 3
It is deposited by plating with a thickness of 0 micrometer. Further, a target metal plate 19 made of a rhodium disc having a thickness of about 1 mm is joined to the end face of the support by thermocompression bonding in vacuum. The intermediate layer 25 is a support 24 and a coating layer.
It is effective for increasing the adhesion with 26. Also,
Wehnelt electrode 23, where some electrons may collide,
The inner surface of the metal part of the vacuum vessel 11 is also coated with rhodium.
27 are worn.
【０００８】なお、ターゲット金属板は、ロジウム以外
の金属、例えば金、白金、鉄、コバルト、その他、必要
な特性Ｘ線を発生させる任意の材料に置き換えることが
できる。その場合、各被膜26、27は、ターゲットと同じ
材料とし、中間層はそれらの付着強度を増す材料とす
る。The target metal plate can be replaced with a metal other than rhodium, for example, gold, platinum, iron, cobalt, or any other material that produces the necessary characteristic X-rays. In that case, each coating 26, 27 is made of the same material as the target and the intermediate layer is made of a material that increases their bond strength.
【０００９】[0009]
【発明の効果】この発明によれば、ターゲット支持体の
ほぼ全表面にターゲット材料と同じ材料の被膜が被着さ
れているので、電子が衝突する可能性のある領域に支持
体の母材が露出せず、また被膜の厚さも均一にできるの
で、陽極構体から不純Ｘ線が発生するおそれがない。ま
た、ターゲット材料と同じ材料の被膜の上にターゲット
金属板が接合されているので、この接合部に突起や不連
続な部分が生じるおそれが少なく、不純Ｘ線ばかりでな
く放電の発生も少ない。こうして、信頼性の高い分析用
Ｘ線管が得られる。According to the present invention, since the coating of the same material as the target material is deposited on almost the entire surface of the target support, the base material of the support is provided in the region where electrons may collide. Since it is not exposed and the thickness of the coating can be made uniform, there is no risk of generating impure X-rays from the anode structure. Further, since the target metal plate is bonded onto the coating film made of the same material as the target material, there is little possibility that a projection or a discontinuous portion is generated at this bonding portion, and not only impure X-rays but also discharges are less likely to occur. In this way, a highly reliable X-ray tube for analysis can be obtained.
【図１】この発明の実施例をその要部を拡大して示す縦
断面図である。FIG. 1 is a longitudinal sectional view showing an enlarged main part of an embodiment of the present invention.
【図２】図１の要部拡大図である。FIG. 2 is an enlarged view of a main part of FIG.
11…真空容器、18…陽極構体、19…ターゲット金属板、
24…ターゲット支持体、25…中間層、26…被覆層。11 ... Vacuum container, 18 ... Anode structure, 19 ... Target metal plate,
24 ... Target support, 25 ... Intermediate layer, 26 ... Covering layer.
Claims (1)
支持体の端面に、特性Ｘ線を発生するターゲット金属板
が接合された陽極構体を具備する分析用Ｘ線管におい
て、 上記陽極構体は、銅製ターゲット支持体の端面及び側周
面に中間層を介して上記ターゲット金属板と同じ金属の
被覆層が被着され、上記ターゲット支持体端面の前記被
覆層の上に前記ターゲット金属板が接合されてなること
を特徴とする分析用Ｘ線管。1. An X-ray tube for analysis, comprising an anode assembly in which a target metal plate for generating characteristic X-rays is joined to an end face of a copper target support arranged in a vacuum container, wherein the anode assembly is , A coating layer of the same metal as the target metal plate is deposited on the end surface and the side peripheral surface of the copper target support through an intermediate layer, and the target metal plate is bonded onto the coating layer on the end surface of the target support. An X-ray tube for analysis, characterized in that
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29262591A JPH05135718A (en) | 1991-11-08 | 1991-11-08 | Analyzing x-ray tube |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29262591A JPH05135718A (en) | 1991-11-08 | 1991-11-08 | Analyzing x-ray tube |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH05135718A true JPH05135718A (en) | 1993-06-01 |
Family
ID=17784224
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP29262591A Pending JPH05135718A (en) | 1991-11-08 | 1991-11-08 | Analyzing x-ray tube |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH05135718A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021024510A1 (en) * | 2019-08-05 | 2021-02-11 | キヤノン電子管デバイス株式会社 | X-ray tube for analysis |
| JP2021136083A (en) * | 2020-02-25 | 2021-09-13 | キヤノン電子管デバイス株式会社 | X-ray tube |
-
1991
- 1991-11-08 JP JP29262591A patent/JPH05135718A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021024510A1 (en) * | 2019-08-05 | 2021-02-11 | キヤノン電子管デバイス株式会社 | X-ray tube for analysis |
| JP2021026882A (en) * | 2019-08-05 | 2021-02-22 | キヤノン電子管デバイス株式会社 | X-ray tube for analysis |
| CN114175205A (en) * | 2019-08-05 | 2022-03-11 | 佳能电子管器件株式会社 | X-ray tube for analysis |
| JP2021136083A (en) * | 2020-02-25 | 2021-09-13 | キヤノン電子管デバイス株式会社 | X-ray tube |
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