JPH0513480Y2 - - Google Patents
Info
- Publication number
- JPH0513480Y2 JPH0513480Y2 JP1987165763U JP16576387U JPH0513480Y2 JP H0513480 Y2 JPH0513480 Y2 JP H0513480Y2 JP 1987165763 U JP1987165763 U JP 1987165763U JP 16576387 U JP16576387 U JP 16576387U JP H0513480 Y2 JPH0513480 Y2 JP H0513480Y2
- Authority
- JP
- Japan
- Prior art keywords
- polishing table
- grooves
- ceramic
- polishing
- polished
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000919 ceramic Substances 0.000 claims description 11
- 239000011521 glass Substances 0.000 claims description 5
- 238000005488 sandblasting Methods 0.000 claims description 5
- 238000005498 polishing Methods 0.000 description 20
- 238000000034 method Methods 0.000 description 4
- 229910010293 ceramic material Inorganic materials 0.000 description 3
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000003973 paint Substances 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 239000003082 abrasive agent Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Description
【考案の詳細な説明】
〔産業上の利用分野〕
本考案は半導体ウエハーなどの板状物体の研磨
台あるいは定盤、ブロツクゲージ等を成すセラミ
ツク盤に関するものである。[Detailed Description of the Invention] [Industrial Field of Application] The present invention relates to a ceramic disk used as a polishing table, surface plate, block gauge, etc. for plate-shaped objects such as semiconductor wafers.
従来から使用されている、例えば研磨台は金属
やセラミツク材から成る円板状体を用い、被研磨
物を載置する上面は表面粗さが6S以下の鏡面状で
平坦に仕上げたものが使用されている。
Conventionally used polishing tables, for example, use a disc-shaped body made of metal or ceramic material, and the upper surface on which the object to be polished is placed is mirror-like and flat with a surface roughness of 6 S or less. It is used.
このような研磨台は、上面が平面をしただけの
無標識のものや別個の研磨台を識別するため上面
中央にペイントや速乾性インクなどでもつて文字
や記号などを記入していた。その他、研磨台や、
定盤、ブロツクゲージ等では周側面に文字や記号
を記入したり、刻み込んだものなどがあつた。 Such polishing tables were unmarked with just a flat top surface, or letters or symbols were written in the center of the top surface with paint or quick-drying ink to identify separate polishing tables. In addition, polishing table,
Some surface plates, block gauges, etc. had letters or symbols written or engraved on their circumferential sides.
ところが、上記研磨台で標識が付されてないも
のでは被研磨物、即ち加工物がどの研磨台で研磨
加工されたものかが識別できない。そのため、研
磨台上に加工物を接着→ラツピング→接着はがし
等の工程や研磨加工時のロツト管理等をコンピユ
ータで管理することができないという不都合があ
つた。
However, if the polishing table is not labeled, it is impossible to identify which polishing table the object to be polished, that is, the workpiece was polished. Therefore, there was a problem in that it was not possible to use a computer to manage processes such as gluing the workpiece on the polishing table, wrapping, and peeling off the adhesive, as well as lot management during polishing.
そのような不都合を解消するため研磨台の中央
部にペイントや速乾性インキなどで文字、記号等
を付して使用していたが、上面を修正研磨する場
合はもちろん、持ち運び時においても消失してし
まい再度記入しなければならず、また、不鮮明な
ものとなり易いなど光学的読取装置を利用しても
完全なコンピユータ管理を行うことができないな
ど多くの不都合を有していた。そのほか、定盤、
プロツクゲージ等においても識別が付されていな
いことによる保管や取扱い管理が仕難いという問
題があつた。 In order to eliminate such inconveniences, letters, symbols, etc. were attached to the center of the polishing table using paint or quick-drying ink. There have been many inconveniences, such as having to fill in the information again and making it unclear, and even if an optical reading device is used, complete computer management cannot be performed. In addition, surface plates,
There was also a problem in storage and handling management of block gauges and the like because they were not identified.
上記に鑑みて、セラミツク体の表面部にサンド
ブラスト法により文字、記号、図柄などを形成す
る溝を刻設し、該溝中に着色ガラスを充填してセ
ラミツク盤を構成する。
In view of the above, grooves for forming characters, symbols, designs, etc. are carved on the surface of a ceramic body by sandblasting, and colored glass is filled into the grooves to form a ceramic disk.
以下、本考案実施例を図により具体的に説明す
る。
Hereinafter, embodiments of the present invention will be explained in detail with reference to the drawings.
第１図には本考案実施例に係るセラミツク盤と
しての研磨台Ｌの斜視図を示し、この研摩台Ｌは
アルミナ、ジルコニア、炭化珪素、窒化珪素など
のセラミツク材などで作られており、中央部には
溝Ｍが刻設され、これら溝Ｍの組合せにより文
字、パーコード記号、図柄などの識別標識Ｓが付
設されている。 FIG. 1 shows a perspective view of a polishing table L as a ceramic disk according to an embodiment of the present invention. This polishing table L is made of ceramic materials such as alumina, zirconia, silicon carbide, silicon nitride, etc. A groove M is engraved in the portion, and an identification mark S such as a letter, a par code symbol, or a pattern is attached by a combination of these grooves M.
この識別標識Ｓの付設方法としては所望の文字
等を刻設するためのマスク板を使用して、サンド
ブラスト手法により溝Ｍを刻設し、該溝Ｍ中に
黒、青、赤など識別するに好都合な色彩を持つた
着色ガラスＧが流し込まれた後、研削、ラツピン
グ工程などを経て研磨台Ｌの上面と同一平面とな
るように研磨加工されている。 The method for attaching this identification mark S is to use a mask board on which desired characters, etc. are engraved, and use a sandblasting method to carve a groove M in the groove M. After the colored glass G having a convenient color is poured, it is polished so that it is flush with the top surface of the polishing table L through a grinding and lapping process.
なお、溝Ｍはサンドブラスト法によつて刻設さ
れることから溝Ｍの幅は0.7mm以上で、その深さ
は0.3mm程度のものが最も適したものであつた。 Since the grooves M are carved by sandblasting, the most suitable width of the grooves M is 0.7 mm or more and the depth is about 0.3 mm.
ところで、上記実施例にはセラミツク盤として
研磨台を挙げたが、これに限らず、セラミツク材
から成る定盤、ブロツクゲージ、その他各種部材
等に対しても同様の手段により標識を付設したも
のであつてもよい。 Incidentally, in the above embodiment, a polishing table is used as a ceramic disk, but the present invention is not limited to this, and signs may be attached to surface plates, block gauges, and various other members made of ceramic material by the same means. It may be hot.
叙上のように研磨台、定盤、ブロツクゲージな
どセラミツク盤にサンドブラスト法により識別標
識を形成する溝を刻設し、該溝中に着色ガラスを
充填して構成したことから、目視による管理が容
易であり、また光学的読取り装置によつて確実な
る個別管理を行うことが可能となり、セラミツク
盤が研磨台にあつては被研磨物体の生産管理、品
質管理などがすべてコンピユータによつてコント
ロールすることができ、また研磨台上面を修正研
磨しても識別標識は消失する恐れは全くなく、ま
た透明体上面と研磨台上面が同一平面をなしてい
ることからゴミや研磨材が介在するようなことは
なく常に良好な状態で標識を読み取ることができ
るなどセラミツク盤の安定した標識表示を行うこ
とが可能である。
As mentioned above, grooves for forming identification marks are carved by sandblasting on ceramic plates such as polishing tables, surface plates, and block gauges, and the grooves are filled with colored glass, so visual control is possible. It is easy to use, and the optical reading device allows reliable individual control, and when a ceramic disk is used as the polishing table, the production control and quality control of the object to be polished are all controlled by a computer. Furthermore, even if the top surface of the polishing table is corrected and polished, there is no risk of the identification mark disappearing, and since the top surface of the transparent body and the top surface of the polishing table are on the same plane, there is no possibility of dirt or abrasive material intervening. It is possible to perform stable sign display on ceramic discs, such as being able to read signs in good condition at all times without any problems.
第１図は本考案セラミツク盤としての研磨台の
斜視図、第２図は第１図におけるＡ−Ａ線断面図
である。
Ｌ……研磨台、Ｍ……溝、Ｓ……識別標識、Ｇ
……着色ガラス。
FIG. 1 is a perspective view of a polishing table as a ceramic disk according to the present invention, and FIG. 2 is a sectional view taken along the line A--A in FIG. L...Polishing table, M...Groove, S...Identification mark, G
...Colored glass.
Claims (1)
り文字、記号、図柄などを形成する溝を刻設し、
該溝中に着色ガラスが充填されていることを特徴
とするセラミツク盤。 Grooves for forming letters, symbols, designs, etc. are engraved on the surface of the ceramic body by sandblasting,
A ceramic disc characterized in that the grooves are filled with colored glass.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987165763U JPH0513480Y2 (en) | 1987-10-29 | 1987-10-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987165763U JPH0513480Y2 (en) | 1987-10-29 | 1987-10-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0171057U JPH0171057U (en) | 1989-05-11 |
| JPH0513480Y2 true JPH0513480Y2 (en) | 1993-04-09 |
Family
ID=31452545
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987165763U Expired - Lifetime JPH0513480Y2 (en) | 1987-10-29 | 1987-10-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0513480Y2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109420980A (en) * | 2017-08-22 | 2019-03-05 | 株式会社迪思科 | Finishing board, the application method of finishing board and cutting apparatus |
| TWI749116B (en) * | 2017-01-17 | 2021-12-11 | 日商迪思科股份有限公司 | Trimming method and cutting device of trimming plate and cutter |
-
1987
- 1987-10-29 JP JP1987165763U patent/JPH0513480Y2/ja not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI749116B (en) * | 2017-01-17 | 2021-12-11 | 日商迪思科股份有限公司 | Trimming method and cutting device of trimming plate and cutter |
| CN109420980A (en) * | 2017-08-22 | 2019-03-05 | 株式会社迪思科 | Finishing board, the application method of finishing board and cutting apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0171057U (en) | 1989-05-11 |
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