JPH05133807A - Bright high-resolution spectroscopic device - Google Patents

Abstract

PURPOSE:To obtain a high-speed, high-resolution spectroscopic device which is suitable for the spectroscopy of faint light having a relatively narrow spectral wavelength region like Raman light. CONSTITUTION:This spectroscopic device is composed of a reflection plane diffraction grating 5 with an opening 6 at its center, incident slit 7 provided near the rear side of the grating 5 on the incident side of the opening 6, collimating concave mirror 8 which transforms the light to be measured passed through the slit 7 and opening 6 into a parallel luminous flux, and condensing concave mirror 9 which condenses the luminous flux of a specific order of the luminous flux reflected by the mirror 8 and diffracted through the grating 5 to a point near the rear side of the grating 5 though the opening 6 of the grating 5. Both concave mirrors 8 and 9 are constituted of a spectroscope l which is arranged so that its optical axes can cross each other near the opening 6 and a one- or two-dimensional photodetector 4 which is arranged so that its detecting surface can be widened in the spectral direction of the light condensing surface of the mirror 9 of the spectroscope 1.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a spectroscopic device with high resolution and high brightness, and more particularly to a bright high-resolution spectroscopic device suitable for spectroscopy of light such as Raman spectroscopy, which has a weak spectral wavelength range.

[0002]

2. Description of the Related Art Raman spectroscopy is light scattered by a sample by irradiating a sample with a strong laser beam having a specific wavelength and exciting the sample (Raman scattered light) having a wavelength slightly deviated from the wavelength of the irradiated light. This is a method of spectroscopically detecting the composition of the sample, etc., but because Raman scattered light is weak, a bright spectroscope with less stray light is required.Because Raman scattered light has a wavelength near the excitation laser light, A high-dispersion (high-resolution) spectrometer is required.

Conventionally, for Raman spectroscopy, for example, FIG.
As shown in FIGS. 9 (a) and 9 (b), two spectroscopes A and B are provided.
Is used in series, and the spectroscope A on the incident side is used as a spectroscopic filter to reduce stray light, and the two spectroscopes A and B are arranged in a dispersive form to achieve high dispersion. There is. Moreover, in order to increase the dispersion, the second spectroscope B uses a condenser mirror having a long focal length such as a focal length f = 1000 mm. In FIG. 19, G
₁ and G ₂ are diffraction gratings of the spectroscopes A and B, S ₁ is an entrance slit of the spectroscope A, S ₂ is an exit slit of the spectroscope A, which also serves as an entrance slit of the spectroscope B, and S ₃ is a spectroscope. It is an exit slit of the container B.

[0004]

As described above, in the conventional spectroscope using the reflecting mirror, the condensing mirror having a large focal length is used in order to improve the resolution. The aperture diameter and the diameter of the diffraction grating are smaller than the focal length of the condensing mirror, so the F number of the spectroscope is large, about 10, and only the F number of 6 was finally developed. , Nothing brighter than that is obtained.

Therefore, in Raman spectroscopy, it is possible to increase the intensity of Raman scattered light to compensate for the lack of brightness of the spectroscope, but if the intensity of the excitation laser light is increased for that reason, the sample changes due to its heat. There is a limit to this method because it may occur.

In order to obtain high dispersion, a method of increasing the incident angle and the diffraction angle with respect to the diffraction grating can be considered.
Since the condenser mirror is used off-axis, the incident slit image is bent due to off-axis aberration, and it becomes impossible to satisfy the demand for high dispersion. Therefore, in the Raman spectroscope, the incident angle and the diffraction angle are made small, and the focal length of the condenser mirror is made long to achieve high dispersion as described above. However, when such a condensing mirror having a long focal length is used, only a dark object having an F number of about 6 can be realized as described above.

That is, in the conventional spectroscope, a condenser mirror is used off-axis, and since the diameter of the condenser mirror and the diameter of the diffraction grating are small, both the requirement of brightness and the requirement of high resolution are satisfied. Was not realized.

The present invention has been made in view of the above circumstances, and an object thereof is a bright high-resolution spectroscopic device that satisfies both the requirements for brightness and the requirement for high resolution, particularly Raman spectroscopy. Another object of the present invention is to provide a bright high-resolution spectroscopic device suitable for spectroscopy of light that is weak and has a relatively narrow spectral wavelength range.

[0009]

SUMMARY OF THE INVENTION A bright high-resolution spectroscopic device of the present invention that achieves the above-mentioned object is a reflection plane diffraction grating having an opening in the center, and an entrance side of the opening near the back side of the diffraction grating. An incident slit disposed on the collimator, a collimator concave mirror that converts the measurement light incident from the incident slit and passing through the opening into a parallel light beam, and a specific order in the light beam reflected by the collimator concave mirror and diffracted by the diffraction grating. And a converging concave mirror that condenses the light flux of the above into the vicinity of the back side of the diffraction grating through the opening of the diffraction grating, and the biconcave mirrors are arranged so that their optical axes intersect in the vicinity of the opening. The one-dimensional or two-dimensional photodetector is arranged so that the detection surface is spread in the spectral direction of the condensing surface of the condensing concave mirror of the spectroscope.

In this case, by disposing an imaging lens for forming an image of the entrance slit in the opening between the entrance slit and the opening, the diameter of the opening can be made smaller and the brightness is improved.

The bright high-resolution spectroscopic device of the present invention optically connects a plurality of the above-mentioned spectroscopes in series and detects them in the spectral direction of the condensing surface of the converging concave mirror of the final-stage spectroscope on the exit side. It is also possible to arrange one-dimensional or two-dimensional photodetectors so as to expand the surface.

Also in this case, an image forming lens for forming an image of the incident slit in the opening is disposed between the incident slit of at least one spectroscope and the opening of the reflection plane diffraction grating to make the image brighter. You can

Another bright high-resolution spectroscopic device of the present invention is a reflection plane diffraction grating having an opening in the center, and an entrance slit arranged near the back side of the diffraction grating and on the entrance side of the opening. A collimating concave mirror that converts the measurement light incident from the entrance slit and passing through the opening into a parallel light beam, and a light condensing light beam of a specific order among the light beams reflected by the collimating concave mirror and diffracted by the diffraction grating. A spectroscope composed of a lens and arranged such that the optical axes of the concave mirror and the condenser lens intersect in the vicinity of the opening,
The one-dimensional or two-dimensional photodetector is arranged so that the detection surface is spread in the spectral direction of the condensing surface of the condenser lens of the spectroscope.

In this case as well, a plurality of spectroscopes are optically connected in series and one-dimensionally or so that the detection surface spreads in the spectroscopic direction of the condensing surface of the condensing lens of the final-stage spectroscope on the exit side. A two-dimensional photodetector may be arranged and configured.

In order to reduce stray light, the incident angle and the diffraction angle are set so that the 0th-order diffraction image and the 1st-order diffraction image are incident on the edge and the center of the diffraction grating and the 0th-order diffraction image is not incident on the diffraction grating. Better to choose.

In the above, the reflection plane diffraction grating is constructed by arranging a plurality of reflection plane diffraction gratings on the same plane continuously or slightly discontinuously with the grating directions aligned around the aperture. It is advantageous to get things.

[0017]

In the present invention, in any case, since the imaging optical system is arranged so as not to be off-axis, the spectral image does not bend even if the incident angle to the diffraction grating or the diffraction angle is increased. In addition to enabling high-dispersion and high-resolution arrangements, a large aperture can be used as the imaging optical system, and if a diffraction grating with a large diameter is used, the F-number of the spectroscope can be made small, making it a bright spectroscope. Become. Moreover, since the multi-channel spectroscopic device is constructed by using a highly sensitive one-dimensional or two-dimensional photodetector as the photodetector, the spectroscopic device becomes much brighter and higher in resolution than the conventional one, and Raman spectroscopy, It is suitable for spectroscopic measurement of weak light such as fluorescence spectroscopy. In addition, by disposing the spectroscopes in multiple stages, higher resolution can be achieved.

[0018]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Some embodiments of the bright high resolution spectroscopic device of the present invention will be described below with reference to the drawings. FIG. 1 shows a sectional view of a basic embodiment of a spectroscopic device according to the present invention. This spectroscopic device comprises a spectroscope 1 and a one-dimensional or two-dimensional photodetector 4 arranged on the spectroscopic surface thereof.
Is a reflection plane diffraction grating 5 having an opening 6 in the center,
An entrance slit 7 arranged near the back side of the diffraction grating 5 and on the entrance side of the opening 6, a collimating concave mirror 8 for converting the measurement light entering from the entrance slit 7 and passing through the opening 6 into a parallel light beam, and a collimating concave mirror 8 And a converging concave mirror 9 for condensing the light beam of a specific order among the light beams reflected by the diffractive grating 5 through the opening 6 of the diffractive grating 5 and near the rear side of the diffractive grating 5, as shown in the figure. The concave mirrors 8 and 9 are arranged so that their optical axes are parallel to the optical path and are not off-axis, and these optical axes are arranged so as to intersect in the vicinity of the opening 6.
The grating of the reflection plane diffraction grating 5 is provided perpendicularly to the paper surface. On the light collecting surface of the light collecting concave mirror 9 of the spectroscope 1, a one-dimensional or two-dimensional photodetector 4 having a detection surface extending in the spectral direction is arranged.

Since the spectroscopic device of the present invention has the above-described configuration, the measuring light R including Raman scattered light generated by irradiating the sample S with the excitation laser light E is incident on the entrance slit 7 by the lens L. The divergent light that has been focused on and has passed through the slit 7 enters the collimating concave mirror 8 through the opening 6 of the reflection plane diffraction grating 5, is converted by the concave mirror 8 into a thick parallel light beam that returns to the direction of the opening 6, and is formed into the diffraction grating 5. Angle of incidence α
Is incident on the condenser concave mirror 9 in parallel with the optical axis and is detected by the one-dimensional or two-dimensional photodetector 4 on the back side of the diffraction grating 5 through the opening 6. The light is dispersed and condensed according to the wavelength dispersion on the surface. As is well known, there is a relation of sinα + sinβ = mλ / d between the incident angle α and the diffraction angle β, and the incident light is split into an angle satisfying this relation and imaged on the detection surface. .. Here, m is the diffraction order, λ is the wavelength, and d is the grating spacing of the diffraction grating.

Therefore, the spectral image of the entrance slit 7 is
Since an image is formed through an optical path parallel to the optical axes of the concave mirrors 8 and 9, even if the incident angle α and the diffraction angle β are increased, the spectral image does not bend, so that high-dispersion and high-resolution arrangement is possible. In addition, if the concave mirrors 8 and 9 having a large aperture can be used, and if the diffraction grating 5 having a large diameter is used, the F-number of the spectroscope 1 can be made small and a bright spectroscope can be obtained.
Moreover, as the photodetector 4, it has a high sensitivity as described later.
By using a two-dimensional photodetector and arranging multi-channels, it is possible to provide a spectroscopic device which is significantly brighter and has higher resolution than the conventional one. Moreover, the 0th-order diffraction image and the 1st-order diffraction image are made incident on the end and center of the diffraction grating 5,
By arranging so that the 0th-order diffraction image does not enter the diffraction grating 5, stray light is further reduced.

By the way, the reflection plane diffraction grating 5 having the opening 6 at the center can be obtained by forming one large continuous diffraction grating and providing an opening having a desired diameter at the center, but it is large. Fabricating a diffraction grating is generally not easy. Therefore, for example, as shown in the plan view of FIG. 9, a plurality of (four in the case of the figure) small diffraction gratings 5 are provided.
By arranging 1 to 54 in the lattice direction around the opening 6 and arranging them continuously or slightly discontinuously on the same plane,
It can be constructed relatively easily. Various arrangement methods other than the illustrated example can be considered.

In the case of FIG. 1, if it is desired to change the spectral wavelength range, the converging concave mirror 9 may be moved in the direction of the double arrow shown. In this spectroscopic device, the wavelength range in which the light can be dispersed at one time is limited by the width of the opening 6 of the diffraction grating 5. Therefore, the smaller the diameter of the opening 6 becomes, the brighter the wavelength range becomes. Becomes narrower. Therefore, it can be said that the spectroscopic device is suitable for Raman spectroscopy, fluorescence spectroscopy and the like in which a weak spectrum appears in a wavelength range slightly different from the excitation wavelength.

As described above, the smaller the diameter of the opening 6 of the diffraction grating 5, the brighter the spectroscope becomes. Therefore, as shown in FIG. 2, the imaging lenses 10 and 13 are arranged between the entrance slit 7 and the opening 6 and between the opening 6 and the photodetector 4 in FIG. 1, respectively. By forming an image of the entrance slit 7 in the opening 6, the diameter of the opening 6 can be reduced to the limit. In this case, the spectral image also needs to be guided to the detection surface of the photodetector 4 by the imaging lens 13.

As another modification, the light beam diffracted by the diffraction grating 5 may be guided to the detection surface of the photodetector 4 by a bright telephoto lens system instead of the converging concave mirror 9. An example thereof is shown in FIG. In FIG.
Since the telephoto lens system 14 is arranged coaxially with the diffracted light, the spectral image is not bent. Moreover, since the focal length of the telephoto lens system 14 is long, higher resolution can be achieved.

By combining two spectroscopes 1 to 3 as shown in FIG. 1 to FIG. 3 and forming a double spectroscope array for removing stray light as the first spectroscope, the spectroscope having a higher resolution can be obtained. The device can also be obtained. For example, as shown in FIG. 4, by connecting the spectroscopes 11 and 12 shown in FIG. 1 in series and arranging them in a dispersion type, the resolution becomes higher. Since the F-number of the entire device is greater than or equal to the larger F-number, the first spectroscope uses a lens with a small F-number (Japanese Patent Application No. 1-208744).
No.) can also be used.

As an example of a spectroscopic device having another double spectroscope array, as shown in FIG. 5, the spectroscopes 21 and 22 shown in FIG. 2 are connected in series and arranged in a dispersion type. Further, as shown in FIG. 6, the spectroscope 1 shown in FIG. 1 and the spectroscope 2 shown in FIG. 2 may be connected in series and arranged in a dispersion type. Furthermore, as shown in FIG.
The spectroscopes 31 and 32 shown in FIG. 3 may be connected in series.

The above is an example in which two spectroscopes 1 to 3 as shown in FIGS. 1 to 3 are combined to form a double spectroscope array. Staggered light is reduced and F number is 1 by arranging in addition and dispersion type
A high-resolution spectroscopic device can be constructed to some extent.
In practice, such an arrangement can be implemented with a triple spectrometer arrangement.

As described above, the spectroscopic device based on the present invention is suitable for Raman spectroscopy because it has a small F number, is bright, and has high resolution, but is also suitable for microscopic Raman spectroscopy. As is well known, when a plurality of optical systems are connected, the brightness (F number) of the entire system becomes the maximum F number among them. Therefore,
In the case of micro Raman spectroscopy, even if the F-number of the objective lens of the microscope system is small (synonymous with a large numerical aperture NA), if the F-number of the spectroscopy system is large, the brightness will be regulated by the spectroscopy system. Therefore, conventionally, it has been difficult to carry out microscopic Raman spectroscopy by making full use of the capabilities of the microscope system. However, in the case of the spectroscopic device of the present invention, the F number is 1
Since it is of a degree, the use of this enables microscopic Raman spectroscopy which fully utilizes the brightness of the microscope system.
FIG. 8 shows a schematic optical arrangement of the example. That is, the sample S placed on the stage 41 of the microscope support base 40 is irradiated with the excitation laser light E through the beam splitter BS and the objective lens Ob. The measurement light R scattered from the sample S and including Raman scattered light passes through the objective lens Ob and the beam splitter BS, and is passed through the lens L having an F number equal to or less than that of the objective lens Ob. The Raman scattered light is condensed on the entrance slit 7 of the spectroscopic device 60, and spectroscopically measured.

By the way, in the present invention, one-dimensional or two-dimensional
Various well-known ones can be used as the dimensional photodetector 4, and the configuration thereof is roughly classified into a solid-state image sensor and a photoelectric conversion image sensor. As an example of the solid-state image sensor, a parallel independent processing photodiode array shown in FIG. 10 and a charge coupled device (C
A CD) type image sensor and a field effect transistor (MOS) type image sensor shown in FIG.

A parallel independent processing photodiode array refers to a photodiode 100 having a photovoltaic effect.
It is arranged in an array as shown in (1) and is wired so that the output of each photodiode can be directly taken out. Since a signal can be independently extracted from each photodiode, a specific photodiode can be accessed as necessary, and a signal from which background light is removed (AC component signal) and a signal from which background light is not removed (DC component) It is possible to perform parallel and independent processing of signals from the respective photodiodes such as switching to signals).

As shown in FIG. 11, a CCD type image sensor is a picture element in which a p-type layer is formed on an n-type silicon wafer by diffusion or epitaxial growth, and further three electrodes form one unit on the p-type layer. Electrodes are provided so that 110 are arranged in a matrix. By sequentially and selectively switching the voltages applied to the three electrodes forming the picture element, the signal charges (for example, holes) generated by the incident light are sequentially transferred in one direction,
It is configured to extract the video signal. Also, CCD
It is also possible to reduce dark current and fixed noise at room temperature by cooling.

As shown in FIG. 12, the MOS type image sensor has picture elements 120 in which two electrodes corresponding to X and Y coordinates are one unit and are arranged in a matrix. Constitutes a scanning circuit and a switch circuit made of MOS type field effect transistors. To take out the video signal from the sensor, refer to FIG.
A scanning pulse is applied to each picture element by the X and Y axis scanning signal generator, and the signal charge generated in the picture element by the incident light is
It is taken out as a signal current from the picture element in which the voltage of the electrodes on the X and Y axes becomes 0.

As the photoelectric conversion image sensor, an electrostatic focusing type MCP diode array as shown in FIG. 13 in which a micro channel plate (MCP) and a diode array are combined, a proximity type MCP diode array as shown in FIG. Image Orthicon shown in Figure 16
The vidicon shown in Figure 1 and a combination of MCP and vidicon
Photonic microscope system (V
IM system), and a photocounting image acquisition system (PIAS system) as shown in FIG. 18 in which an MCP and a semiconductor position detecting element are combined.

In the electrostatic focusing MCP diode array,
As shown in FIG. 13, the incident light is reflected by the photoelectron 1 on the photocathode 130.
36 is emitted, and the photoelectrons are accelerated and imaged by the electron lens system 131 and enter the MCP 132. MCP132
Then, the electrons are multiplied, enter the phosphor screen 133, and emit light. The light emitted from the phosphor screen passes through the optical fiber 134 and enters the diode array 135 to output a video signal.

In the proximity MCP diode array, as shown in FIG.
As shown in FIG. 4, the incident light causes the photocathode 140 to emit photoelectrons, and the photoelectrons directly enter the MCP 141. MCP
At 141, the electrons are multiplied, enter the phosphor screen 142, and emit light. The light from the fluorescent screen 142 is an optical fiber 143.
It is configured to be incident on the diode array 144 through the above and output a video signal.

In the image orthicon, as shown in FIG. 15, photoelectrons 151 are emitted from the photocathode 150 in response to incident light.
Are emitted, the photoelectrons are accelerated, pass through the target mesh 152, and collide with a target (a low resistance glass plate having a thickness of about several μm) 153. As a result, target 15
Secondary electrons are emitted from 3, the emitted electrons are collected on the target mesh, and a positive charge image corresponding to the incident light is formed on the target. When the target surface is scanned by the electron beam 154 in this state, a decelerating electric field is generated in the vicinity of the target surface and neutralizes the positive charges on the target surface. The neutralized and remaining electrons are density-modulated by the positive charge of the target, and further reach the vicinity of the electron gun 155 via the same orbit as the original electron orbit. A secondary electron multiplying unit 156 is arranged near the electron gun, which amplifies return electrons and outputs a video signal.

In the vidicon, as shown in FIG. 16, the target has a transparent face plate 160 on which a transparent conductive film 161 and a high-resistivity photoconductive film 162 are superposed, and after scanning with an electron beam 163. When there is incident light, a pair of electron and hole is generated, and the electron flows through the transparent conductive film 161 to the signal electrode 164, but the hole moves to the surface of the photoconductive film on the scanning unit side. Next, when the surface of the photoelectric film is again scanned with the electron beam, the electron beam flows into the target according to the magnitude of the surface potential due to the holes, and becomes a video signal through the signal electrode 164.

The VIM system is a combination of a two-dimensional photon counter 170 and a low afterimage vidicon 171 as shown in FIG. The light that has entered the two-dimensional photon counter 171 generates photoelectrons on the photocathode 172, and these photoelectrons pass through the mesh 173 and the electron lens 174, and the MCP (FIG.
Then, the light is incident on the two-stage connected MCP) 175, is amplified, and hits the phosphor screen 176 on the emission surface to form a bright spot. This bright spot is imaged by the lens 177 on the photosurface of the low afterimage vidicon, and a video signal corresponding to the incident light is obtained from the output of the vidicon.

As shown in FIG. 18, the PIAS system is a two-dimensional photon counter 180 used in the VIM system.
(However, in FIG. 18, it is a three-stage MCP.)
And a silicon semiconductor detector 181 are combined. The multiplied and accelerated photoelectrons from the MCP 182 are incident on the semiconductor position detecting element, are further multiplied by the electron impact effect at the time of incidence, pass through the resistance layer of the detecting element 181, and are surrounded by four electrodes around the element. It is output as a current from 183. By inputting these four outputs into a position calculation device (not shown), a position signal corresponding to the incident light can be obtained.

Although a typical one-dimensional or two-dimensional photodetector has been described above, the photodetector that can be used in the spectroscopic device of the present invention is not limited to the one described here, and a one-dimensional or two-dimensional photodetector. Any one can be applied as long as it can detect light dimensionally.

The bright high-resolution spectroscopic device of the present invention has been described above based on the embodiments, but the present invention is not limited to these embodiments and various modifications can be made.

[0042]

As described above, according to the bright high-resolution spectroscopic device of the present invention, since the image forming optical system is arranged off-axis in any case, the incident angle to the diffraction grating,
Since the spectral image does not bend even if the diffraction angle is increased,
In addition to enabling high-dispersion and high-resolution arrangements, a large aperture can be used as the imaging optical system, and if a diffraction grating with a large diameter is used, the F-number of the spectroscope can be made small, making it a bright spectroscope. Become. Moreover, since the multi-channel spectroscopic device is constructed by using a highly sensitive one-dimensional or two-dimensional photodetector as the photodetector, the spectroscopic device becomes much brighter and higher in resolution than the conventional one, and Raman spectroscopy, It is suitable for spectroscopic measurement of weak light such as fluorescence spectroscopy. In addition, by disposing the spectroscopes in multiple stages, higher resolution can be achieved.

[Brief description of drawings]

1 is a cross-sectional view of a basic embodiment of a spectroscopic device according to the present invention.

FIG. 2 is a cross-sectional view of another embodiment.

FIG. 3 is a cross-sectional view of another embodiment.

4 is a sectional view of an embodiment in which the spectroscope of FIG. 1 is arranged in two stages.

5 is a sectional view of an embodiment in which the spectroscope of FIG. 2 is arranged in two stages.

6 is a sectional view of an embodiment in which the spectroscope of FIG. 1 and the spectroscope of FIG. 2 are arranged in two stages.

7 is a sectional view of an embodiment in which the spectroscope of FIG. 3 is arranged in two stages.

FIG. 8 is a diagram showing a schematic optical arrangement of an example in which the spectroscopic device according to the present invention is applied to microscopic Raman spectroscopy.

FIG. 9 is a plan view of a case where a plurality of diffraction gratings are arranged as a reflection plane diffraction grating.

FIG. 10 is a diagram for explaining the configuration of a known parallel independent processing photodiode array.

FIG. 11 is a diagram for explaining the configuration of a known CCD image sensor.

FIG. 12 is a diagram for explaining the configuration of a known MOS image sensor.

FIG. 13 is a diagram for explaining the configuration of a known electrostatic focusing MCP diode array.

FIG. 14 is a diagram for explaining the configuration of a known proximity MCP diode array.

FIG. 15 is a diagram for explaining the configuration of a known image orthicon.

FIG. 16 is a diagram for explaining the configuration of a known vidicon.

FIG. 17 is a diagram for explaining the configuration of a known VIM system.

FIG. 18 is a diagram for explaining the configuration of a known PIAS system.

FIG. 19 is a diagram showing a configuration example of a conventional double spectrometer.

[Explanation of symbols]

1, 2, 3, 11, 12, 21, 2231, 32 ... Spectrometer 4 ... One-dimensional or two-dimensional photodetector 5 ... Reflective plane diffraction grating 6 ... Aperture 7 ... Incident slit 8 ... Collimating concave mirror 9 ... Focusing concave mirror 10, 13 ... Imaging lens 14 ... Telescopic lens system 40 ... Microscope support 41 ... Stages 51-54 ... Small diffraction grating 60 ... Spectroscopic device S ... Sample E ... Excitation laser light R ... Measurement light L ... Lens BS ... Beam splitter Ob ... Objective lens

Claims (7)

[Claims] 1. A reflection plane diffraction grating having an opening in the center, an entrance slit arranged on the entrance side of the opening near the back side of the diffraction grating, and an entrance slit which has entered through the entrance slit and passed through the opening. A collimating concave mirror that converts the measurement light into a parallel light beam, and a light beam of a specific order among the light beams reflected by the collimating concave mirror and diffracted by the diffraction grating is collected near the back side of the diffraction grating through the opening of the diffraction grating. A condensing concave mirror that emits light, the biconcave mirrors being arranged so that their optical axes intersect in the vicinity of the opening; and a detecting surface in the spectroscopic direction of the condensing surface of the condensing concave mirror of the spectroscope. And a one-dimensional or two-dimensional photodetector which is arranged so as to spread. 2. The bright high-resolution spectroscopic device according to claim 1, further comprising an imaging lens disposed between the entrance slit and the opening for forming an image of the entrance slit in the opening. 3. A reflection plane diffraction grating having an opening in the center, an entrance slit arranged on the entrance side of the opening near the back side of the diffraction grating, and an entrance slit which is incident from the entrance slit and passed through the opening. A collimating concave mirror that converts the measurement light into a parallel light beam, and a light beam of a specific order among the light beams reflected by the collimating concave mirror and diffracted by the diffraction grating is collected near the back side of the diffraction grating through the opening of the diffraction grating. The biconcave mirror is composed of a plurality of spectroscopes which are arranged so that their optical axes intersect in the vicinity of the opening and are optically connected in series. 1. A bright high-resolution spectroscopic device, characterized in that a one-dimensional or two-dimensional photodetector is arranged so that the detection surface extends in the spectral direction of the condensing surface of the condensing concave mirror of the vessel. 4. An image forming lens for forming an image of the incident slit in the opening is arranged between the incident slit of at least one spectroscope and the opening of the reflection plane diffraction grating. Bright high-resolution spectroscope described. 5. A reflection plane diffraction grating having an opening at the center, an entrance slit arranged on the entrance side of the opening near the back side of the diffraction grating, and an entrance slit which has entered through the entrance slit and passed through the opening. The concave mirror and the condenser lens include a collimator concave mirror that converts the measurement light into a parallel light flux, and a condenser lens that condenses a light flux of a specific order among the light rays reflected by the collimator concave mirror and diffracted by the diffraction grating. And a one-dimensional or two-dimensional arrangement in which the detection surface is spread in the spectral direction of the condensing surface of the condensing lens of the condensing lens of the spectroscope. A bright high-resolution spectroscopic device comprising a three-dimensional photodetector. 6. A reflection plane diffraction grating having an opening in the center, an entrance slit arranged on the entrance side of the opening near the back side of the diffraction grating, and an entrance slit which is incident from the entrance slit and passed through the opening. The concave mirror and the condenser lens include a collimator concave mirror that converts the measurement light into a parallel light flux, and a condenser lens that condenses a light flux of a specific order among the light rays reflected by the collimator concave mirror and diffracted by the diffraction grating. A plurality of spectroscopes arranged so that their optical axes intersect in the vicinity of the opening are optically connected in series, and the spectroscopic direction of the condensing surface of the condensing lens of the final-stage spectroscope on the exit side. A bright high-resolution spectroscopic device characterized in that a one-dimensional or two-dimensional photodetector is arranged so that the detection surface spreads over the surface. 7. The reflection plane diffraction grating is configured by arranging a plurality of reflection plane diffraction gratings on the same surface in a continuous or slightly discontinuous manner with the grating directions aligned around the opening. A bright high-resolution spectroscopic device according to any one of claims 1 to 6.