JPH05126267A - Fluid controller - Google Patents

Abstract

PURPOSE:To provide a fluid controller provided concurrently with both functions of a check valve and a filter. CONSTITUTION:In a fluid controller 10, the first body 12 having a passage 16 is contained. A diaphragm receiver 22 is arranged so as to close the passage 16 of the first body 12. The diaphragm receiver 22 is constituted partly as a filter part 24. In the diaphragm receiver 22, a diaphragm 30 is arranged so as to be opposed. The diaphragm 30 has a circulating hole 32 in a part not opposed to the filter part 24. The diaphragm receiver 22 and the diaphragm 30 are interposed and held by the first/second bodies 12, 34. The second body 34 has a passage 38 connected to the circulating hole 32 of the diaphragm 30. The second body 34 is fixed to the first body 12 by a union nut 42.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a fluid control device,
In particular, it relates to a fluid control device for controlling a fluid such as gas or liquid.

[0002]

2. Description of the Related Art Conventionally, when a fluid is circulated in only one direction and is filtered, a check valve having the function of circulating the fluid in only one direction and a filter having the function of filtering the fluid are connected in series. It was

[0003]

However, if two fluid control devices, a check valve and a filter, are used in this way,
Not only is it troublesome to connect them, but a large space is required.

Therefore, a main object of the present invention is to provide a fluid control device having a check valve function and a filter function.

[0005]

According to the present invention, there are provided a first body having a passage, a diaphragm receiver arranged so as to close the passage of the first body and having a filter portion in a part thereof, and a diaphragm receiver. Arranged to face each other,
A diaphragm having a through hole in a portion of the diaphragm receiver opposite to a portion other than the filter portion, and a second body which cooperates with the first body to sandwich the diaphragm receiver and the diaphragm and which has a passage communicating with the through hole of the diaphragm. And a fluid control device including.

[0006]

[Function] The fluid pressure in the passage of the first body is set to the second
If the pressure of the fluid in the passage of the body is higher than the pressure of the fluid in the passage of the first body, the fluid is filtered by the filter portion of the diaphragm receiver, presses the diaphragm toward the second body, and passes through the flow hole of the diaphragm. And then circulates in the passage of the second body. On the contrary, when the pressure of the fluid in the passage of the second body is higher than the pressure of the fluid in the passage of the first body, the diaphragm is pressed against the diaphragm receiving side, the circulation hole of the diaphragm is closed, and the fluid flows. do not do.

[0007]

According to the present invention, a fluid control device having the function of a check valve and the function of a filter can be obtained.
Therefore, if this fluid control device is used, it is not necessary to connect the check valve and the filter, and a large space is not required.

The above-mentioned objects, other objects, features and advantages of the present invention will become more apparent from the detailed description of the embodiments below with reference to the drawings.

[0009]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is an illustrative view of a main part showing an embodiment of the present invention. The fluid control device 10 includes a first body 12. The first body 12 has a flange 14 at one end thereof, and a passage 16 is formed in the axial direction thereof. Further, the flange 14 is formed with a recess 18 communicating with the passage 16,
A male screw portion 20 is formed on the outside thereof.

A disk-shaped diaphragm receiver 22, for example, is fitted into the recess 18 of the first body 12. The diaphragm receiver 22 is made of, for example, a sintered body such as metal or ceramic, one main surface of which is formed flat and the other main surface thereof is curved inward. Further, in the diaphragm receiver 22, the annular intermediate portion between the central portion and the peripheral portion is configured as the filter portion 24. Furthermore, an annular recess 26 is formed in the central portion of the diaphragm receiver 22 on the other main surface side, that is, in the portion inside the filter portion 24. A ring-shaped valve seat 28 made of rubber, for example, is fitted into the recess 26 so as to project annularly from the recess 26. Then, the diaphragm receiver 22 is fitted into the concave portion 18 of the first body 12 such that its flat one main surface faces inward.

Further, a disk-shaped diaphragm 30, for example, is fitted into the recess 18 of the first body 12 so as to face the other main surface of the diaphragm receiver 22.
The diaphragm 30 is made of, for example, a thin metal plate such as Inconel or stainless steel, and has a flow hole 32 formed in a portion inside the portion facing the valve seat 28.

Further, one end of the second body 34 is fitted into the recess 18 of the first body 12. The second body 34 has a flange 36 at one end thereof, and a passage 38 is formed in the axial direction thereof. Further, the flange 36 has one main surface facing the diaphragm 30 curved inward,
A recess 40 is formed in the peripheral portion of the other principal surface. Then, the second body 34 is fitted into the recess 18 of the first body 12 so as to cooperate with the first body 12 and sandwich the peripheral portions of the diaphragm receiver 22 and the diaphragm 30. Further, in this case, the second body 34 is fitted into the recess 18 of the first body 12 so that the passage 38 of the second body 34 communicates with the communication hole 32 of the diaphragm 30.

The second body 34 is fixed to the first body 12 by the union nut 42. That is, the union nut 42 has the female screw portion 44 formed inside one end thereof and the locking portion 46 formed at the other end thereof. Then, the female screw portion 44 of the union nut 42 is screwed into the male screw portion 20 of the first body 12, and the locking portion 46 of the union nut 42 is engaged with the recess 40 of the second body 34.
Locked in.

In this fluid control device 10, the pressure of the fluid in the passage 16 of the first body 12 is changed to the second body 34.
When the pressure of the fluid in the passage 38 is higher than the pressure of the fluid in the passage 38, the fluid passes through the passage 16 of the body 12 and is filtered by the filter portion 24 of the diaphragm receiver 22 to press the diaphragm 30 toward the second body 34 side. Three
0 through the through hole 32 and the passage 38 of the second body 34
Distribute to. On the contrary, when the pressure of the fluid in the passage 38 of the second body 34 is higher than the pressure of the fluid in the passage 16 of the first body 12, the diaphragm 30 is pressed against the diaphragm receiver 22 side and the flow hole 32 of the diaphragm 30. Is blocked and fluid does not flow. Therefore, in the fluid control device 10, the passage 16 of the first body 12 is
From one side to the passage 38 of the second body 34 while allowing the fluid to flow while being filtered. That is, the fluid control device 10 has both a check valve function and a filter function.

Further, in this fluid control device 10, when the pressure of the fluid in the passage 16 of the first body 12 with respect to the passage 38 of the second body 34 is higher, the diaphragm 30 causes the diaphragm of the second body 34 to move. It is held by the unit 36. Conversely, the second body 16 for the passage 16 of the first body 12
When the pressure of the fluid in the passage 38 of the body 34 is higher, the valve seat 28 is completely pressed by the diaphragm 30 and the diaphragm 30 is held by the diaphragm receiver 22. Therefore, the diaphragm 30 is less likely to be damaged by the fluid having high pressure. Note that the first
When the pressure of the fluid in the passage 38 of the second body 34 with respect to the passage 16 of the body 12 is high, the diaphragm 30 also closes the filter portion 24, so that the passage of the fluid is closed more reliably.

Further, in a conventional check valve using a diaphragm, the structure for holding the diaphragm is complicated because it is difficult to hold the diaphragm when the fluid is under high pressure. On the other hand, in the fluid control device 10, the diaphragm 30 receives the diaphragm 30 when the fluid has a high pressure.
Since the structure is held by the flange portion 36 of the second body 34 or the second body 34, the structure is simple.

Further, in the conventional check valve using the diaphragm, the structure of the internal passage is complicated. On the other hand, in the fluid control device 10, the structure of the internal passage is simple. Therefore, in this fluid control device 10, as compared with such a conventional check valve, unnecessary fluid is less likely to remain inside and dust and dirt are less likely to accumulate.

In the above embodiment, the diaphragm 3
Although the diaphragm seat 22 is provided with the valve seat 28 in order to close the 0 through hole 32, the valve seat 28 may not be provided. Because, even if the valve seat 28 is not provided, the first
When the pressure of the fluid in the passage 38 of the second body 34 with respect to the passage 16 of the body 12 is high, the flow hole 32 of the diaphragm 30 is closed by the diaphragm receiver 22, or the filter portion 24 is closed by the diaphragm 30. Because it is done.

[Brief description of drawings]

FIG. 1 is an illustrative view of a main part showing an embodiment of the present invention.

[Explanation of symbols]

 10 Fluid Control Equipment 12 First Body 16 Passage 22 Diaphragm Receptor 24 Filter Part 28 Valve Seat 30 Diaphragm 32 Flow Hole, 34 Second Body 38 Passage 42 Union Nut

Claims (1)

[Claims] 1. A first body having a passage, a diaphragm receiver arranged to block the passage of the first body and having a filter portion in a part thereof, arranged to face the diaphragm receiver, A diaphragm having a through hole in a portion of the diaphragm receiver opposite to the portion excluding the filter portion, and the diaphragm receiver and the diaphragm are held in cooperation with the first body, and communicate with the through hole of the diaphragm. A fluid control device comprising a second body having a passage.