JPH05123503A - Drainage dryer - Google Patents

Abstract

PURPOSE:To make a drainage dryer compact and to reduce the operation cost thereof by incorporating a solvent regenerating means in the drainage dryer. CONSTITUTION:A work W after washing is arranged in a washing tank in which a solvent F miscible with moisture such as pentafluoropropanol or isopropanol is received so as to be capable of coming into contact with the vapor of the solvent F and the moisture bonded to the work W is substituted with solvent vapor F' to dehydrate and dry the work. In this drainage dryer, a pervaporation liquid separation membrane module 5 recovering the solvent F concentrated by separating moisture from the condensate F' diluted and condensed in the drying process of the work W in the washing tank is arranged to the washing tank.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a drainer / dryer for washing lenses and liquid crystal base glass after washing with water.

[0002]

2. Description of the Related Art As a method of washing a lens or a liquid crystal base glass with water and then draining and drying, a method of using a solvent that mixes with water is well known in the past [see Semiconductor Manufacturing Equipment Handbook (published by Science Forum Co., Ltd.). ].
Freon 113 is best known as a solvent used in this method, but it is decided that the use of freon 113 is regulated as a source of ozone layer depletion.

Therefore, as an alternative solvent for Freon 113, 5
Attempts have been made to use alcohols such as fluorinated propanol (hereinafter abbreviated as 5FP) and isopropyl alcohol (hereinafter abbreviated as IPA). 5FP and the like do not destroy the ozone layer at all and have a low global warming potential, but they are expensive and easily mixed with water to form an azeotropic substance, so they cannot be separated by ordinary distillation. That is a drawback.

[0004]

By the way, it is a well known fact that, in the above-mentioned draining and drying, the product can be dried more cleanly as the water content in the solvent is lower. The water concentration in the solvent rises. Therefore, in order to improve the drying efficiency, it is necessary to replace the solvent having an increased water concentration or to dehydrate and purify it for reuse.

However, as described above, when alcohols are used as a solvent, it is difficult to separate water by distillation. Therefore, a method of separating water by a separation module using a pervaporative liquid separation membrane is effective.

When the separation module using this pervaporation liquid separation membrane is installed side by side with the draining and drying apparatus, there is a problem that the installation space of the apparatus increases. Further, when using a pump to supply the condensate of the solvent diluted with water in the draining and drying step to the separation module,
Since the temperature of the condensate to be supplied is relatively high (for example, 70 ° C), it is necessary to cool it in order to prevent cavitation in the pump, and in order to increase the separation efficiency in the separation module, the condensate supplied from the pump You have to raise the temperature again. Therefore, it becomes necessary to provide the cooling means and the heating means on the upstream side and the downstream side of the pump, respectively, which leads to complication of the apparatus and an increase in operating cost.

The present invention has been made to solve the above-mentioned problems, and it is possible to make the apparatus compact and reduce the operating cost by incorporating a solvent regenerating means in the draining and drying apparatus. It is intended.

[0008]

According to the invention of claim 1, as a means for solving the above-mentioned problems, as shown in the drawing, a cleaning tank 1 containing a solvent F such as 5FP, IPA or the like which is mixed with water. In the draining / drying apparatus, in which the work W after washing with water is disposed so as to be able to come into contact with the vapor F ′ of the solution F agent, and the water adhering to the work W is replaced with the solvent vapor F ′ for dehydration drying, In the cleaning tank 1, a pervaporative liquid separation membrane module 5 is installed which separates water from the condensed liquid F ′ diluted and condensed in the drying process of the work W to recover the concentrated solvent F into the cleaning tank 1. is doing.

According to the invention of claim 2, as a means for solving the above-mentioned problems, as shown in the drawings, in the draining and drying apparatus according to claim 1, the pervaporative liquid separation membrane module 5 is replaced with the diluting condenser. The liquid F ″ is configured to have a downflow passage 9 or 17 through which the liquid F ″ is allowed to flow down by its own weight while being concentrated.

In the invention of claim 3, as a means for solving the above-mentioned problems, as shown in the drawings, in the drainer / dryer of claim 1 or 2, the lower part of the pervaporative liquid separation membrane module 5 is It is soaked in the solvent F.

[0011]

According to the invention of claim 1, the following actions can be obtained by the above means.

That is, even when alcohols which are difficult to separate by distillation are used as the solvent F, the condensate F ″ diluted and condensed in the drying process of the work W is concentrated and regenerated by the pervaporation liquid separation membrane module 5. As a result, the solvent F in the cleaning tank 1 is recovered, and the solvent concentration during operation is always kept high.

According to the second aspect of the invention, the following actions can be obtained by the above means.

That is, even without using a special condensate supply means (eg, pump), the dilute condensate F ″ is concentrated while flowing down the downflow passage 9 or 17 in the pervaporative liquid separation membrane module 5 by its own weight. The Rukoto.

According to the third aspect of the invention, the following actions can be obtained by the above means.

That is, even if no special heating means is provided, the pervaporative liquid separation membrane module 5 is heated by the high temperature solvent F, and the water vapor permeation performance is improved.

[0017]

According to the invention of claim 1, 5FP, IP
A work W after washing with water is placed in a cleaning tank 1 containing a solvent F mixed with water such as A so that it can come into contact with the steam F ′ of the solvent F, and the water adhering to the work W is removed by solvent vapor. In the draining / drying device for dehydration / drying by substituting with F ′, the condensate F ″ diluted and condensed in the process of drying the work is concentrated and regenerated by the pervaporation liquid separation membrane module 5 to be contained in the solvent in the cleaning tank 1. Since the solvent concentration is always kept high during operation, even when alcohols which are difficult to separate by distillation by distillation are used as the solvent F, the work W can be recovered with a very compact device. It has an excellent effect that high-purity dehydration drying can be performed.

According to the second aspect of the present invention, in the draining / drying apparatus according to the first aspect, the permeation liquid separation membrane module 5 is made to flow down by its own weight while the diluted condensate F ″ is being concentrated down. Since there is no need for a condensate supply means such as a pump, there is no need for cooling to prevent cavitation, and there is an excellent effect that the operating cost can be greatly reduced.

According to the invention of claim 3, in the draining and drying device of claim 1 or 2, the lower part of the pervaporative liquid separation membrane module 5 is immersed in the solvent F,
Since the pervaporative liquid separation membrane module 5 is heated by the high-temperature solvent F, the heating means for heating the solvent can be shared, and the apparatus can be made more compact and the water vapor permeation performance is improved. effective.

[0020]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Some preferred embodiments of the present invention will be described below with reference to the accompanying drawings.

Embodiment 1 FIGS. 1 and 2 show a drainer / dryer according to Embodiment 1 of the present invention. In this embodiment, claims 1 and 2
And 3 corresponds to the inventions.

As shown in FIG. 1, the draining and drying apparatus of this embodiment has a solvent F that mixes with water (in the case of this embodiment, 5).
A cleaning tank 1 containing FP) is provided. The solvent F
Is heated by a heater 7 to a predetermined temperature (about 70 ° C. in the case of this embodiment) at which the solvent F can be evaporated. As the solvent F, other alcohols such as IPA may be used.

In the cleaning tank 1, the work W after washing with water is carried out.
The lens (in the case of this embodiment) is set through the setting means 2 so that it can come into contact with the vapor F ′ of the solvent F.

Further, immediately below the work W, there is provided a liquid receiver 3 for receiving the diluted condensate F ″ formed by mixing the water adhering to the work W with the solvent vapor F '. The liquid receiver 3 is formed with a downflow hole 4 for flowing down the received diluted condensate F ″.

Immediately below the liquid receiver 3, a pervaporative liquid separation membrane module 5 for separating water from the diluted condensate F ″ to regenerate the concentrated solvent F is immersed in the solvent F at its lower portion. That is, the pervaporative liquid separation membrane module 5 is adapted to be heated by the solvent F. Reference numeral 6 is a stay for supporting the pervaporative liquid separation membrane module 5. is there.

The pervaporative liquid separation membrane module 5 comprises:
As shown in FIG. 2, two chambers (that is, primary chambers) partitioned by a pervaporative liquid separation membrane 8 made of a material (for example, α-fluoroacrylic acid-based copolymer) that does not allow alcohols to permeate but allows water vapor to permeate. ·················· Plate and frame type separation module is configured by horizontally stacking a plurality of unit modules 5a, 5a ··· provided with chamber 9 and secondary chamber 10). Reference numeral 11 is a frame supporting the periphery of the pervaporative liquid separation membrane 8, and 12 is a partition wall.

The primary chamber 9 is connected to the downflow hole 4 of the liquid receiver 3 to form a downflow passage through which the diluted condensate F ″ flows down by its own weight, while the secondary chamber 10 is connected to the condenser. It is connected to a vacuum pump 14 via 13 and serves as a flow passage for water vapor that permeates the pervaporative liquid separation membrane 8. The solvent F concentrated in the primary chamber 9 is washed from the lower end of the primary chamber 9. It is supposed to be recovered in the solvent F in the tank 1.

After the steam is condensed in the condenser 13,
It is supposed to be discharged to the outside of the system by the pump 15.

The draining and drying device configured as described above operates as follows.

The work W set at a predetermined position in the cleaning tank 1 is exposed to the vapor F'generated from the solvent F, so that the attached moisture is replaced with the solvent vapor F'and dehydrated and dried. ..

The condensate F ″ diluted and condensed in the dehydration / drying process drops from the work W, is received by the liquid receiver 3, and is then supplied to the pervaporative liquid separation module 5, where water is separated. It is recovered as the concentrated solvent F in the existing solvent F. Therefore, during continuous operation,
The solvent F in the cleaning tank 1 is always kept at a high concentration, and high-purity dehydration / drying can be continuously performed. On the other hand, the water vapor separated in the pervaporative liquid separation module 5 is condensed in the condenser 13 and then discharged to the outside of the system.

The mode of water separation in the pervaporative liquid separation module 5 will be described in more detail. Each unit module 5a
The diluted condensate F ″ supplied to the primary chamber 9 is
In the process of flowing the water by its own weight, the water contained therein is condensed as it permeates the pervaporation liquid separation membrane 8 as water vapor. At this time, the solvent F (in this embodiment, 5
Since FP) has a higher specific gravity than water, the concentrated condensate (that is, the concentrated solvent F) naturally flows downward and does not mix with the dilute condensate F ″ containing a large amount of water. In the case of the example, a pump or the like for pumping the diluted condensate F ″ is unnecessary.

Since the lower part of the pervaporative liquid separation module 5 is heated by the solvent F in the cleaning tank 1 (which has a high temperature of about 70 ° C.), the diluted condensate F flowing in the primary chamber 9 is heated. ″ Will also be maintained at a high temperature, so that it is possible to maintain high water vapor transmission performance. Moreover, since no special heating means is required and the heater 7 for heating the solvent can be shared for heating the diluted condensate, the apparatus can be made compact. It will greatly contribute.

Embodiment 2 FIGS. 3 and 4 show a draining and drying apparatus according to Embodiment 2 of the present invention. In this embodiment, claims 1 and 2
And 3 corresponds to the inventions.

In the case of this embodiment, a hollow fiber type is adopted as the pervaporative liquid separation module 5.

As shown in FIG. 4, the hollow fiber type pervaporative liquid separation module 5 has a vertically long cylindrical body 16 as shown in FIG.
Hollow fibers made of permeation liquid separation membrane 17,17 ・
Is arranged in the vertical direction. Then, the inside of each hollow fiber 17 serves as a passage for the diluted condensate F ″.
The outer body space is used as a water vapor passage. Reference numeral 18 is an inlet header serving as a condensate inlet to the hollow fibers 17, 17 ..., 19 is an outlet header serving as an outlet of the concentrated solvent F taken out from the hollow fibers 17, 17.

In the case of this embodiment, the diluted condensate F ″ is to be separated and concentrated in the process of flowing down the hollow fibers 17, 17 ... By its own weight.
.. constitute a flow-down passage for the diluted condensate F ″.

The other structure, functions and effects are the same as those of the first embodiment, and the description thereof will be omitted.

The invention of the present application is not limited to the configuration of each of the above-described embodiments, and it goes without saying that the design can be changed as appropriate without departing from the scope of the invention.

[Brief description of drawings]

FIG. 1 is a schematic configuration diagram of a drainer / dryer according to a first embodiment of the present invention.

FIG. 2 is a vertical cross-sectional view of a pervaporative liquid separation module used in the drainer / dryer according to the first embodiment of the present invention.

FIG. 3 is a schematic configuration diagram of a drainer / dryer according to a second embodiment of the present invention.

FIG. 4 is a vertical cross-sectional view of a pervaporative liquid separation module used in a drainer / dryer according to a second embodiment of the present invention.

[Explanation of symbols]

1 is a cleaning tank, 3 is a liquid receiver, 4 is a downflow hole, 5 is a pervaporative liquid separation module, 5a is a unit module, 8 is a pervaporative liquid separation membrane, 9 is a downflow passage (primary chamber), 10 is a secondary Room,
16 is a body, 17 is a flow-down passage (hollow fiber), F is a solvent, F '
Is solvent vapor, F ″ is diluted condensate, and W is work.

Claims (3)

[Claims] 1. A washing tank (1) containing a solvent (F) that is mixed with water such as propanol pentafluoride and isopropyl alcohol, and the like. F ') is a draining and drying device which is arranged so that it can come into contact with the work (W) and is dehydrated and dried by replacing the water adhering to the work (W) with a solvent vapor (F'). Is a pervaporation liquid separation membrane for separating the concentrated solvent (F) from the condensed liquid (F ″) diluted and condensed in the drying process of the work (W) into the cleaning tank (1). A draining / drying device having a module (5) installed. 2. The pervaporative liquid separation membrane module (5)
The draining / drying device according to claim 1, wherein the diluting condensate (F ″) has a flow-down passage (9, 17) through which the dilute condensate (F ″) is made to flow down while being concentrated. 3. The pervaporative liquid separation membrane module (5)
3. The draining and drying apparatus according to claim 1 or 2, wherein the lower part of the above is immersed in the solvent (F).