JPH05122002A - Leaky saw resonator - Google Patents

Leaky saw resonator

Info

Publication number
JPH05122002A
JPH05122002A JP30543691A JP30543691A JPH05122002A JP H05122002 A JPH05122002 A JP H05122002A JP 30543691 A JP30543691 A JP 30543691A JP 30543691 A JP30543691 A JP 30543691A JP H05122002 A JPH05122002 A JP H05122002A
Authority
JP
Japan
Prior art keywords
resonator
leaky saw
leaky
saw resonator
propagation direction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP30543691A
Other languages
Japanese (ja)
Other versions
JP3127018B2 (en
Inventor
Takao Morita
孝夫 森田
Yoshitaka Watanabe
吉隆 渡辺
Yuji Ogawa
祐史 小川
Yoshitaka Ido
祥隆 井戸
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyo Communication Equipment Co Ltd
Original Assignee
Toyo Communication Equipment Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyo Communication Equipment Co Ltd filed Critical Toyo Communication Equipment Co Ltd
Priority to JP03305436A priority Critical patent/JP3127018B2/en
Publication of JPH05122002A publication Critical patent/JPH05122002A/en
Application granted granted Critical
Publication of JP3127018B2 publication Critical patent/JP3127018B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

PURPOSE:To obtain a leaky SAW resonator for voltage control oscillator which does not generate ripple in a frequency variable area by arranging an inter- digital transducer electrode, inclining it by only a specific angle for the X-axis of a 64-degree cut LiNbO3 substrate. CONSTITUTION:An inter-digital transducer electrode 2 for exciting a leaky SAW is arranged on a 64-degree Y cut LiNbO3 substrate 1 whose coupling factor is large by inclining the electrode 2 by 3 deg. to 8 deg. for a X-axis which is a leaky SAW propagation direction. By this, a spurious on a lower band side than a resonance point almost extinguishes. This reason is considered that a resonator Q lowers to some degrees by slightly being shifted by the propagation direction of the leaky SAW and the propagation direction of the energy. But as the lowering of the Q is no more than about 10%, the value is endurable one practically when this resonator is used for a voltage control oscillator. In future, the resonator is applicable to ones which are used in wide- band multi-channel communication equipments of which the necessity is increased.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明はSAW共振子殊に広帯域
の周波数可変幅を持つ電圧制御発振器(VCO)などに
用いる容量比の小さいリーキーSAW共振子に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a SAW resonator, and more particularly to a leaky SAW resonator having a small capacitance ratio used in a voltage controlled oscillator (VCO) having a wide frequency variable width.

【0002】[0002]

【従来の技術】従来からVHFの高周波領域に於けるV
CO用振動子として広い周波数可変幅をもつ結合係数の
大きい圧電材料を用いたSAW共振子が要求されてい
る。本願発明者らは特願平2−275905に於いてそ
れ以前に柴山らによって発見された結合係数が11%に
も及び実用上十分小さな容量比が得られる64度Yカッ
トX伝搬LiNbO3 基板を用いたSAW共振子に着目
し、VCO用SAW共振子に必要な電極の諸パラメータ
を実験的に見出した。
2. Description of the Related Art Conventionally, V in the high frequency range of VHF
A SAW resonator using a piezoelectric material having a wide frequency variable width and a large coupling coefficient is required as a CO oscillator. The inventors of the present application have proposed a 64-degree Y-cut X-propagation LiNbO 3 substrate which has a coupling coefficient of 11% and was discovered by Shibayama et al. Focusing on the SAW resonator used, various parameters of the electrode necessary for the SAW resonator for VCO were found experimentally.

【0003】しかしながら、上述した本願発明者らの試
作した共振子は、その電極パラメータの値を微細に変化
させ実験を行ったにも拘らず、例えば86MHzの共振
子に於いては周波数可変領域にほぼ1MHzごとに発生
するスプリアスを除去することができず、VCOのバリ
キャップに印加する電圧を変化させた場合前記スプリア
スの位置で周波数がジャンプするという欠陥があった。
However, the above-described prototype made by the inventors of the present application, for example, is in the frequency variable region in the case of the 86 MHz resonator, despite the fact that the value of the electrode parameter is changed minutely. There is a defect that the spurious generated at every 1 MHz cannot be removed, and when the voltage applied to the VCO varicap is changed, the frequency jumps at the position of the spurious.

【0004】[0004]

【発明の目的】本発明は上述した如き従来のVCO用S
AW共振子の欠陥を除去すべくなされたものであって、
周波数可変領域にリップルの出ないVCO用リーキーS
AW共振子を提供することを目的とする。
SUMMARY OF THE INVENTION The present invention is a conventional SCO for VCO as described above.
It was designed to eliminate defects in the AW resonator,
Leaky S for VCO with no ripple in the variable frequency range
It is intended to provide an AW resonator.

【0005】[0005]

【発明の概要】上述の目的を達成するため本発明に於い
てはIDTを64度YカットLiNbO3 基板のX軸に
対して所要の角度だけ傾けて配置する構成をとる。
SUMMARY OF THE INVENTION In order to achieve the above object, the present invention adopts a configuration in which an IDT is arranged at a predetermined angle with respect to the X axis of a 64 ° Y-cut LiNbO 3 substrate.

【0006】[0006]

【実施例】以下本発明を図面に示した実施例に基づいて
詳細に説明する。実施例の説明に先立って本発明の理解
を助ける為従来から本願発明者らが研究を続けてきたリ
ーキーSAW共振子について少しく解説する。図2
(a)はリーキーSAW共振子の構成を示す平面図であ
って、64度YカットX伝搬LiNbO3 基板1の表面
X軸に沿って適当な対数のIDT電極2を設けたもので
ある。リーキーSAW共振子は基板の結合係数が極めて
大きいので一般に反射器を必要とせずしかも対数は数1
0対と比較的少数であってもVCOに用いる共振子とし
ては十分なQが得られるのが特徴である。
DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described in detail below based on the embodiments shown in the drawings. Prior to the description of the embodiments, a leaky SAW resonator, which has been studied by the inventors of the present invention in order to facilitate understanding of the present invention, will be briefly described. Figure 2
(A) is a plan view showing a configuration of a leaky SAW resonator, in which an IDT electrode 2 having an appropriate logarithm is provided along a surface X axis of a 64 ° Y-cut X-propagation LiNbO 3 substrate 1. Since the leaky SAW resonator has an extremely large coupling coefficient of the substrate, it generally does not require a reflector and has a logarithm of the number 1
A characteristic is that a sufficient Q can be obtained as a resonator used for a VCO even if the number of pairs is relatively small as 0 pairs.

【0007】しかしながら、同図(a)に示したような
電極配置の共振子の共振特性は同図(b)に示すように
VCOとしての周波数可変範囲である共振点fs より低
域側に於いて基板1端面からのリーキーSAWの反射に
基づくスプリアスが多数発生し、このスプリアスは基板
1端面を斜めにカットしたりIDT電極2に重み付けを
付けたりしても十分に抑圧し得なかったこと前述の通り
である。この問題を解決する為本発明に係るリーキーS
AW共振子は図1(a)に示すようにIDT電極2を基
板1のX軸に対し所定角αだけ傾けるものである。上記
所定の傾け角αを5.2°とした場合に於ける共振特性
は同図(b)に示すようになり共振点fa より低域側に
於けるスプリアスはほとんど完全に消滅した。この理由
はリーキーSAWの伝搬方向とそのエネルギーの伝板方
向が僅かにずれることによって共振子のQが幾分低下し
たことによるものと考えられるがそのQの低下は10%
内外に過ぎないのでこの共振子をVCOに用いるには十
分な値である。
However, the resonance characteristics of the resonator having the electrode arrangement as shown in FIG. 7A are lower than the resonance point f s which is the frequency variable range of the VCO as shown in FIG. At this time, many spurious products due to the reflection of leaky SAW from the end face of the substrate 1 were generated, and these spurious products could not be sufficiently suppressed even if the end face of the substrate 1 was obliquely cut or the IDT electrode 2 was weighted. As described above. In order to solve this problem, the leaky S according to the present invention
As shown in FIG. 1A, the AW resonator has the IDT electrode 2 inclined by a predetermined angle α with respect to the X axis of the substrate 1. In the resonance characteristics is referred to as 5.2 ° to the predetermined inclination angle α is in spurious low frequency side of the resonance point f a is as shown in FIG. (B) it disappeared almost completely. It is considered that the reason for this is that the Q of the resonator was somewhat lowered due to a slight deviation between the propagation direction of the leaky SAW and the direction of the energy transfer plate, but the Q reduction was 10%.
Since it is only inside and outside, it is a sufficient value for using this resonator in a VCO.

【0008】ところで一般に発振回路に於いてはC/N
は概ね75dB以上必要であるがそうする為には群遅延
時間偏差を10nsec以下にする必要がありこのよう
な状態に於いては周波数ジャンプは発生しないと考えら
れるのでこれを本発明のリーキーSAW共振子のスペッ
クとし前記IDTの基板X軸に対する傾け角αを種々変
化させた場合の良品率を実験によって調べたところ図3
に示すような結果を得た。これよりαの値が3°乃至8
°であれば十分実用に耐えることが判明した。
Generally, in an oscillator circuit, C / N
Needs approximately 75 dB or more, but in order to do so, the group delay time deviation needs to be 10 nsec or less, and it is considered that frequency jump does not occur in such a state. Therefore, this is the leaky SAW resonance of the present invention. As a result of examining the non-defective product rate by experiments, the tilt ratio α of the IDT with respect to the substrate X-axis was variously changed as the specifications of the child.
The results shown in are obtained. From this, the value of α is 3 ° to 8
It turned out that it can withstand practical use if it is °.

【0009】[0009]

【発明の効果】本発明は、以上説明した如く構成するも
のであるから、格別変わった製造工程を必要とすること
なく周波数範囲が極めて広いリーキーSAW共振子の周
波数可変領域のスプリアスを小さくすることができるの
で、今後特に必要性の増大する広帯域他チャンネルの通
信機器に使用するVCOに適用する上で著しい効果があ
る。
Since the present invention is configured as described above, it is possible to reduce the spurious in the frequency variable region of a leaky SAW resonator having an extremely wide frequency range without requiring a special manufacturing process. Therefore, it has a remarkable effect when applied to a VCO used for a communication device of a wideband other channel, which is particularly needed in the future.

【0010】[0010]

【図面の簡単な説明】[Brief description of drawings]

【図1】(a)及び(b)は夫々本発明に係るリーキー
SAW共振子の一実施例の構成及びその共振特性を示す
図。
FIG. 1A and FIG. 1B are diagrams showing a configuration of an embodiment of a leaky SAW resonator according to the present invention and a resonance characteristic thereof, respectively.

【図2】(a)及び(b)は夫々従来の係るリーキーS
AW共振子の一実施例の構成及びその共振特性を示す
図。
2 (a) and 2 (b) are related leaky S of the related art, respectively.
The figure which shows the structure of one Example of an AW resonator, and its resonance characteristic.

【図3】本発明に係るリーキーSAW共振子に於けるI
DTの基板X軸に対する傾け角αと良品率との関係を示
す図。
FIG. 3 shows the I in the leaky SAW resonator according to the present invention.
The figure which shows the relationship between the inclination angle (alpha) with respect to the board | substrate X-axis, and a non-defective rate.

【符号の説明】 1・・・64度YカットLiNbO3 基板 2・・・IDT電極[Explanation of symbols] 1 ... 64 degree Y-cut LiNbO 3 substrate 2 ... IDT electrode

───────────────────────────────────────────────────── フロントページの続き (72)発明者 井戸 祥隆 神奈川県高座郡寒川町小谷二丁目1番1号 東洋通信機株式会社内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Yoshitaka Izu 2-1-1 Otani, Samukawa-cho, Takaza-gun, Kanagawa Toyo Communication Equipment Co., Ltd.

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】結合係数の大きい64度YカットLiNb
3 基板上にリーキーSAWを励振する為のインターデ
ジタルトランスジューサ(IDT)電極をリーキーSA
W伝搬方向たるX軸に対し所定の角度αだけ傾けて配置
したことを特徴とするリーキーSAW共振子。
1. A 64-degree Y-cut LiNb having a large coupling coefficient.
An interdigital transducer (IDT) electrode for exciting a leaky SAW on the O 3 substrate is leaky SA.
A leaky SAW resonator, wherein the leaky SAW resonator is arranged so as to be inclined by a predetermined angle α with respect to an X axis which is a W propagation direction.
【請求項2】前記IDT電極のX軸に対する傾け角αを
3°乃至8°としたことを特徴とする請求項1記載のリ
ーキーSAW共振子。
2. The leaky SAW resonator according to claim 1, wherein the tilt angle α of the IDT electrode with respect to the X axis is 3 ° to 8 °.
【請求項3】前記IDT電極に所要の重み付けを付した
ことを特徴とする請求項1又は請求項2記載のリーキー
SAW共振子。
3. The leaky SAW resonator according to claim 1, wherein the IDT electrode is given a required weighting.
JP03305436A 1991-10-24 1991-10-24 Leaky SAW resonator Expired - Fee Related JP3127018B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP03305436A JP3127018B2 (en) 1991-10-24 1991-10-24 Leaky SAW resonator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP03305436A JP3127018B2 (en) 1991-10-24 1991-10-24 Leaky SAW resonator

Publications (2)

Publication Number Publication Date
JPH05122002A true JPH05122002A (en) 1993-05-18
JP3127018B2 JP3127018B2 (en) 2001-01-22

Family

ID=17945119

Family Applications (1)

Application Number Title Priority Date Filing Date
JP03305436A Expired - Fee Related JP3127018B2 (en) 1991-10-24 1991-10-24 Leaky SAW resonator

Country Status (1)

Country Link
JP (1) JP3127018B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5576589A (en) * 1994-10-13 1996-11-19 Kobe Steel Usa, Inc. Diamond surface acoustic wave devices
JP2016140110A (en) * 2013-10-31 2016-08-04 京セラ株式会社 Acoustic wave element, filter element and communication device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5576589A (en) * 1994-10-13 1996-11-19 Kobe Steel Usa, Inc. Diamond surface acoustic wave devices
JP2016140110A (en) * 2013-10-31 2016-08-04 京セラ株式会社 Acoustic wave element, filter element and communication device
JP6050486B2 (en) * 2013-10-31 2016-12-21 京セラ株式会社 Filter element and communication device
US10153748B2 (en) 2013-10-31 2018-12-11 Kyocera Corporation Acoustic wave element, filter element, and communication device

Also Published As

Publication number Publication date
JP3127018B2 (en) 2001-01-22

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