JPH05118334A - Magnetic bearing device - Google Patents

Magnetic bearing device

Info

Publication number
JPH05118334A
JPH05118334A JP27960491A JP27960491A JPH05118334A JP H05118334 A JPH05118334 A JP H05118334A JP 27960491 A JP27960491 A JP 27960491A JP 27960491 A JP27960491 A JP 27960491A JP H05118334 A JPH05118334 A JP H05118334A
Authority
JP
Japan
Prior art keywords
force
magnetic
passive
axis
converged
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP27960491A
Other languages
Japanese (ja)
Inventor
Hiroyuki Shinozaki
弘行 篠崎
Satoshi Mori
敏 森
Yuji Shirao
祐司 白尾
Masato Eguchi
真人 江口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Priority to JP27960491A priority Critical patent/JPH05118334A/en
Publication of JPH05118334A publication Critical patent/JPH05118334A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To converge and stabilize a passive stability axis of low characteristic frequency by converging freedom of a magnetic force generation means in the direction of the passive stability axis by a spring force and a damping force. CONSTITUTION:Teflon sheets 10a, 10b are adhered on facing surfaces of a yoke 5 and a stator 3 and Teflon sheets 10c, 10d are adhered on facing surfaces of a presser washer 9 of the stator 3 and a bolt 8. Additionally, a rubber piece 11 is tightly adhered on both sides of the yoke 5 in the (y) axial direction, and both sides of the rubber piece 11 are adhered on the stator 3. Freedom in the axial direction on which a magnetic centripetal force FY works on an electromagnet 4 is converged by a passive spring force and a damping force of the rubber piece 11 and a passive damping force due to small friction of the Teflon sheets 10a-10d, and when a rotation axis (1) moves in the (y) direction, its movement is converged and stabilized. Freedom around a (z) axis is converged in the same way, and when a supported body 1 moves around the (z) axis, its movement is converged and stabilized.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、磁気力による被支持体
を非接触で支持する磁気軸受装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic bearing device for supporting a supported body by a magnetic force in a non-contact manner.

【0002】[0002]

【従来の技術】従来の磁気軸受装置においては、非接触
支持の受動安定軸は、磁気求心力によるばね力すなわち
復元力と渦電流ダンパとにより軸方向の運動が制御され
ていた。
2. Description of the Related Art In a conventional magnetic bearing device, a non-contact-supported passive stable shaft has its axial movement controlled by a spring force, that is, a restoring force by a magnetic centripetal force and an eddy current damper.

【0003】[0003]

【発明が解決しようとする課題】しかし、従来の渦電流
ダンパは、高周波数の運動か、高周波数での磁束変化を
与えるかの場合に有効であり、比較的低周波数の運動に
対しては不向きである。受動安定軸は、磁気求心力が磁
気吸引力に比較して小さいために剛性が小さく、固有振
動数も低い。
However, the conventional eddy current damper is effective in the case of giving a high-frequency motion or changing the magnetic flux at a high frequency, and it is effective for a relatively low-frequency motion. Not suitable. The passive stable shaft has a small magnetic centripetal force as compared with the magnetic attractive force, and therefore has low rigidity and a low natural frequency.

【0004】本発明は、低い固有振動数の受動安定軸を
収束安定させる磁気軸受装置を提供することを目的とし
ている。
An object of the present invention is to provide a magnetic bearing device which converges and stabilizes a passive stable shaft having a low natural frequency.

【0005】[0005]

【課題を解決するための手段】本発明によれば、磁気力
により被支持体を非接触で支持する吸引型磁気軸受装置
において、磁気力発生手段の受動安定軸方向の自由度を
ばね力と減衰力とで拘束する拘束手段を設けている。
According to the present invention, in a suction type magnetic bearing device for supporting a supported body by a magnetic force in a non-contact manner, the degree of freedom in the passive stable axial direction of the magnetic force generating means is defined as a spring force. Restraint means for restraining the damping force is provided.

【0006】上記磁気力発生手段は、電磁石又は永久磁
石で構成されている。
The magnetic force generating means is composed of an electromagnet or a permanent magnet.

【0007】また、電磁石又は永久磁力は、軸方向に直
交するボルトにより支持体に取付け、電磁石又は永久磁
石と支持体との間及びボルトと支持体との間にテフロン
シートを介装すると共に、電磁石又は永久磁石の軸方向
側部を支持体に固設したピースで拘束し、該ピースでば
ね力と減衰力を発生させ、また、テフロンシートの微小
な摩擦により減衰力を発生させるのが好ましい。
The electromagnet or permanent magnetic force is attached to the support by bolts orthogonal to the axial direction, and a Teflon sheet is interposed between the electromagnet or permanent magnet and the support and between the bolt and the support. It is preferable that the axial side portion of the electromagnet or the permanent magnet is constrained by a piece fixed to the support, the spring force and the damping force are generated by the piece, and the damping force is generated by minute friction of the Teflon sheet. .

【0008】[0008]

【作用】上記のように構成された磁気軸受装置において
は、電磁石又は永久磁石の磁気求心力が作用する軸方向
の自由度は、ピースの受動的なばね力と減衰力と、テフ
ロンシートの微小な摩擦による受動的な減衰力とにより
拘束される。したがって、被支持体が軸方向に移動した
場合に、その運動が収束安定される。
In the magnetic bearing device configured as described above, the degree of freedom in the axial direction on which the magnetic centripetal force of the electromagnet or the permanent magnet acts is determined by the passive spring force and damping force of the piece and the small amount of the Teflon sheet. It is restrained by passive damping force due to friction. Therefore, when the supported body moves in the axial direction, its movement is converged and stabilized.

【0009】[0009]

【実施例】以下図面を参照して本発明の実施例を説明す
る。
Embodiments of the present invention will be described below with reference to the drawings.

【0010】図1において、被支持体1には、磁性体2
が設けられ、固定側すなわちステータ3には、磁性体2
に対向して磁気力発生手段であるヨーク5とコイル6、
6とからなる電磁石4がボルト8により垂直方向を拘束
されている。そのヨーク5とステータ3との対向する面
には、相互に密接するテフロンシート10a、10bが
それぞれ接着されている。また、ステータ3とボルト8
の抑え座金9との対向する面には、相互に密接するテフ
ロンシート10c、10dがそれぞれ接着されている。
また、ヨーク5のy軸方向の両側には、ステータ3に固
設されたピース11、11がヨーク5の両側に密接され
ており、またピース11の両側は図示の如くステータ3
に接着されている。このピース11はゴム又はスポンジ
状のゴムで構成されている。
In FIG. 1, a magnetic material 2 is attached to a supported body 1.
On the fixed side, that is, on the stator 3, the magnetic body 2 is provided.
Facing each other, the yoke 5 and the coil 6, which are magnetic force generating means,
An electromagnet 4 composed of 6 and 6 is vertically restrained by a bolt 8. Teflon sheets 10a and 10b which are in close contact with each other are adhered to the surfaces of the yoke 5 and the stator 3 which face each other. Also, the stator 3 and the bolt 8
Teflon sheets 10c and 10d, which are in close contact with each other, are adhered to the surfaces facing the holding washers 9.
On both sides of the yoke 5 in the y-axis direction, pieces 11, 11 fixed to the stator 3 are in close contact with both sides of the yoke 5, and both sides of the piece 11 are fixed to the stator 3 as shown.
Is glued to. The piece 11 is made of rubber or sponge-like rubber.

【0011】このように構成され、コイル6、6に通電
し、発生する磁気力により被支持体1を非接触で支持す
る。
With this structure, the coils 6, 6 are energized to generate a magnetic force to support the supported body 1 in a non-contact manner.

【0012】また、電磁石4において、磁気求心力Fy
の作用する軸方向の自由度は、ゴムピース11、11の
受動的なばね力と減衰力と、テフロンシート10a〜1
0dの微小な摩擦による受動的な減衰力とにより拘束さ
れる。したがって、回転軸1がy方向に運動した場合
に、その運動が拘束安定される。
Further, in the electromagnet 4, a magnetic centripetal force Fy
The degree of freedom in the axial direction in which the force acts on the Teflon sheets 10a to 1 is the passive spring force and damping force of the rubber pieces 11, 11.
It is restrained by a passive damping force due to a minute friction of 0d. Therefore, when the rotary shaft 1 moves in the y direction, the motion is restrained and stabilized.

【0013】また、図2に示すように、z軸回りの自由
度は、上記と同様なピース11、11の受動的なばね力
と減衰力と、テフロンシート10a〜10dの微小な摩
擦による受動的な減衰力とにより拘束される。したがっ
て、被支持体1がz軸回りの運動をした場合に、その運
動が拘束安定される。
Further, as shown in FIG. 2, the degree of freedom around the z-axis is the same as the above-mentioned, that is, the passive spring force and damping force of the pieces 11 and the passive force due to the slight friction of the Teflon sheets 10a to 10d. It is restrained by the dynamic damping force. Therefore, when the supported body 1 makes a motion around the z axis, the motion is restrained and stabilized.

【0014】図3は本発明の別の実施例を示し、磁気力
発生手段を永久磁石7で構成し、他を図1と同様に構成
した例である。なお、永久磁石7には、軸方向に隣接す
る磁石間に微小な隙間Cが形成されており、隣接する磁
石の面同士の磁性は、同一となるように配置されてい
る。この実施例でも、前記実施例と同様な作用効果があ
る。
FIG. 3 shows another embodiment of the present invention, which is an example in which the magnetic force generating means is constituted by the permanent magnet 7 and the others are constituted similarly to FIG. The permanent magnet 7 has a minute gap C formed between magnets adjacent to each other in the axial direction, and the magnets of the surfaces of the adjacent magnets are arranged to have the same magnetism. This embodiment also has the same effects as the above-mentioned embodiment.

【0015】[0015]

【発明の効果】本発明は、以上説明したように構成され
ているので、低い固有振動数の受動安定軸を収束安定な
軸とした良好な磁気軸受装置を提供することができる。
Since the present invention is configured as described above, it is possible to provide a good magnetic bearing device in which a passive stable shaft having a low natural frequency is used as a convergent stable shaft.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例を示す側断面図。FIG. 1 is a side sectional view showing an embodiment of the present invention.

【図2】図1の電磁石の背面図。FIG. 2 is a rear view of the electromagnet shown in FIG.

【図3】本発明の別の実施例を示す側断面図。FIG. 3 is a side sectional view showing another embodiment of the present invention.

【符号の説明】[Explanation of symbols]

Fy・・・磁気求心力 Fz・・・磁気吸引力 1・・・被支持体 2・・・磁性体 3・・・ステータ 4・・・電磁石 5・・・ヨーク 6・・・コイル 7・・・永久磁石 8・・・ボルト 9・・・抑え座金 10a〜10d・・・テフロンシート 11・・・ピース Fy ... Magnetic centripetal force Fz ... Magnetic attraction force 1 ... Supported body 2 ... Magnetic body 3 ... Stator 4 ... Electromagnet 5 ... Yoke 6 ... Coil 7 ... Permanent magnet 8 ・ ・ ・ Bolt 9 ・ ・ ・ Holder washer 10a-10d ・ ・ ・ Teflon sheet 11 ・ ・ ・ Piece

フロントページの続き (72)発明者 江口 真人 神奈川県藤沢市本藤沢4丁目2番1号 株 式会社荏原総合研究所内Front page continued (72) Inventor Masato Eguchi 4-2-1 Honfujisawa, Fujisawa City, Kanagawa Prefecture EBARA Research Institute

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 磁気力により被支持体を非接触で支持す
る吸引型磁気軸受装置において、磁気力発生手段の受動
安定軸方向の自由度をばね力と減衰力とで拘束する拘束
手段を設けたことを特徴とする磁気軸受装置。
1. A suction type magnetic bearing device for supporting a supported body by a magnetic force in a non-contact manner, wherein restraining means for restraining a degree of freedom of a magnetic force generating means in a passive stable axial direction by a spring force and a damping force is provided. A magnetic bearing device characterized in that
【請求項2】 磁気力発生手段を電磁石で構成したこと
を特徴とする請求項1記載の磁気軸受装置。
2. The magnetic bearing device according to claim 1, wherein the magnetic force generating means is constituted by an electromagnet.
【請求項3】 磁気力発生手段を永久磁石で構成したこ
とを特徴とする磁気軸受装置。
3. A magnetic bearing device characterized in that the magnetic force generating means comprises a permanent magnet.
JP27960491A 1991-10-25 1991-10-25 Magnetic bearing device Pending JPH05118334A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27960491A JPH05118334A (en) 1991-10-25 1991-10-25 Magnetic bearing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27960491A JPH05118334A (en) 1991-10-25 1991-10-25 Magnetic bearing device

Publications (1)

Publication Number Publication Date
JPH05118334A true JPH05118334A (en) 1993-05-14

Family

ID=17613304

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27960491A Pending JPH05118334A (en) 1991-10-25 1991-10-25 Magnetic bearing device

Country Status (1)

Country Link
JP (1) JPH05118334A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19543745A1 (en) * 1995-11-24 1997-05-28 Forschungszentrum Juelich Gmbh Magnetic bearing

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19543745A1 (en) * 1995-11-24 1997-05-28 Forschungszentrum Juelich Gmbh Magnetic bearing
DE19543745C2 (en) * 1995-11-24 1998-05-28 Forschungszentrum Juelich Gmbh Magnetic bearing

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