JPH05117857A - Coating member - Google Patents

Coating member

Info

Publication number
JPH05117857A
JPH05117857A JP30534091A JP30534091A JPH05117857A JP H05117857 A JPH05117857 A JP H05117857A JP 30534091 A JP30534091 A JP 30534091A JP 30534091 A JP30534091 A JP 30534091A JP H05117857 A JPH05117857 A JP H05117857A
Authority
JP
Japan
Prior art keywords
layer
coating
base material
porous
porous layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP30534091A
Other languages
Japanese (ja)
Inventor
Jiyunji Madono
遵次 真殿
Fukuji Matsumoto
福二 松本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to JP30534091A priority Critical patent/JPH05117857A/en
Publication of JPH05117857A publication Critical patent/JPH05117857A/en
Pending legal-status Critical Current

Links

Landscapes

  • Laminated Bodies (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

PURPOSE:To prevent from peeling and destruction of a coating material by making a surface part of a substrate porous and by forming a dense layer made by impregnating the coating material into the pore of the surface of the porous layer to make a coating layer. CONSTITUTION:The porous layer 2 is formed on the substrate 1. The porous layer 2 is easily formed by machining or chemical dissolution. The coating material is impregnated into the pore of the porous layer 2 to form the dense layer 3 and furthermore the coating layer 4 is formed from the coating material. Adhesive strength of the substrate 1 with the coating material is excellent and stripping, destruction or the like are prevented and excellent durability and dimensional accuracy is attained.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、基材とその少なくとも
一面に積層された被覆物質の層とを有し、特に機械的な
外力が加わる部分に用いるのに適した被覆部材に関し、
更に詳しくは、基材と被覆物質との密着性を高めること
により、被覆物質の剥離、破壊等を低減させ、かつ耐久
性、寸法精度を向上させた被覆部材に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a covering member having a base material and a layer of a covering material laminated on at least one surface thereof, and particularly suitable for use in a portion to which a mechanical external force is applied,
More specifically, the present invention relates to a covering member in which peeling, breakage and the like of the coating substance is reduced by improving the adhesion between the base material and the coating substance, and durability and dimensional accuracy are improved.

【0002】[0002]

【従来の技術及び発明が解決しようとする課題】外部か
らの物理的、化学的作用に対して基材を保護するために
これらの作用に耐え得る物質で基材を被覆した被覆部材
は、従来から広範囲に用いられている。しかし、このよ
うな被覆部材において、基材と被覆層との密着性が悪い
と、被覆層の基材からの剥離、被覆層の破壊が発生し、
このため基材を十分に保護することができなくなってし
まう場合がある。
2. Description of the Related Art In order to protect a base material from external physical and chemical effects, a cover member having a base material coated with a substance capable of withstanding these functions is conventionally known. Widely used from. However, in such a covering member, if the adhesion between the base material and the coating layer is poor, peeling of the coating layer from the base material and destruction of the coating layer occur,
Therefore, the base material may not be sufficiently protected.

【0003】そこで、基材と被覆層との密着性を改善す
る方法として、例えば、特開平2−129366号公報
では、航空機や宇宙往還機の機体外壁部の構造材料とし
て用いるカーボン系基材の耐酸性を向上させるため、S
iC又はSi34からなる被覆層を形成する際、被覆層
と基材との間にTiC又はTi(C・N)からなる中間
層を形成する方法が提案されている。しかし、このよう
な改善方法は、中間層を形成するため工程が複雑にな
り、また、被覆層全体(被覆層と中間層)の厚さも増加
し、コスト、手間がかかってしまう。
Therefore, as a method for improving the adhesion between the base material and the coating layer, for example, in Japanese Unexamined Patent Publication No. 2-129366, a carbon-based base material used as a structural material for the outer wall portion of the body of an aircraft or space shuttle is used. S to improve acid resistance
When forming a coating layer made of iC or Si 3 N 4, there has been proposed a method of forming an intermediate layer made of TiC or Ti (C · N) between the coating layer and the substrate. However, in such an improvement method, the process is complicated because the intermediate layer is formed, and the thickness of the entire coating layer (the coating layer and the intermediate layer) is increased, resulting in cost and labor.

【0004】特開昭48−26597号公報では、黒鉛
基材の表面をSiと反応させた後、化学蒸着によりピン
ホールのないSiC層を形成することにより被覆層の歪
みを緩和した被覆部材が提案されている。しかし、この
場合、被覆層は基材と他の物質との化合物であるので、
被覆物質が限定され、また、基材が容易に反応しない場
合は被覆層の形成が非常に困難となる。
In JP-A-48-26597, there is disclosed a covering member in which the distortion of the covering layer is relaxed by reacting the surface of a graphite substrate with Si and then forming a SiC layer having no pinhole by chemical vapor deposition. Proposed. However, in this case, since the coating layer is a compound of the base material and another substance,
The coating material is limited, and the formation of the coating layer becomes very difficult when the substrate does not react easily.

【0005】また、特開平2−164783号公報で
は、黒鉛基材の表面を加工して凹凸を設けることによ
り、基材と被覆層との密着性を向上させる方法が提案さ
れているが、この方法を高硬度の基材に適用した場合、
その表面加工にコスト、手間がかかってしまう。
Further, Japanese Patent Application Laid-Open No. 2-164873 proposes a method for improving the adhesion between the base material and the coating layer by processing the surface of the graphite base material to provide irregularities. When the method is applied to high hardness substrates,
The surface processing requires cost and labor.

【0006】本発明は上記事情に鑑みなされたもので、
密着性に優れ、かつ、寸法精度に優れた被覆部材を提供
することを目的とする。
The present invention has been made in view of the above circumstances.
An object of the present invention is to provide a covering member having excellent adhesion and excellent dimensional accuracy.

【0007】[0007]

【課題を解決するための手段及び作用】本発明者は上記
目的を達成するため鋭意検討を行った結果、基材と、該
基材の少なくとも一面に積層された被覆物質の層とを有
する被覆部材において、前記基材が該基材の少なくとも
被覆対象面の表面部を多孔質化した多孔質層を有し、前
記多孔質層表面の気孔又は多孔質層全体に前記被覆物質
を侵入させた緻密化層を形成し、該緻密化層の表面に前
記被覆物質のみからなる被覆層を形成することにより、
得られた被覆部材は、基材と多孔質層骨格、緻密化層と
被覆層とが連続体であり、かつ基材を被覆物質で被覆す
る際、多孔質層の気孔内部に被覆物質を侵入させること
によって、形成された緻密化層により被覆層と基材との
密着性が優れ、また熱膨張差を考慮すれば基材と被覆物
質の組み合わせは自由に選択できる。また、基材の表面
を多孔質化することにより、規定寸法に仕上げた基材の
外形がそのまま保たれるので寸法精度が低下することが
なく、また、容易に製造することができることを知見
し、本発明をなすに至った。
Means for Solving the Problems and Actions The inventors of the present invention have conducted extensive studies to achieve the above object, and as a result, have a coating having a base material and a layer of a coating material laminated on at least one surface of the base material. In the member, the base material has a porous layer in which at least the surface portion of the surface to be coated of the base material is made porous, and the coating substance is infiltrated into the pores of the surface of the porous layer or the entire porous layer. By forming a densified layer and forming a coating layer consisting only of the coating substance on the surface of the densified layer,
The obtained covering member has a base material and a porous layer skeleton, a densified layer and a coating layer which are continuous bodies, and when the base material is coated with the coating material, the coating material penetrates into the pores of the porous layer. By doing so, the formed densified layer provides excellent adhesion between the coating layer and the base material, and the combination of the base material and the coating material can be freely selected in consideration of the difference in thermal expansion. It was also found that by making the surface of the base material porous, the outer shape of the base material finished to the specified dimensions is maintained as it is, so that the dimensional accuracy does not decrease, and the base material can be easily manufactured. The present invention has been completed.

【0008】以下、本発明を更に詳しく説明すると、本
発明の被覆部材は、基材と、該基材の少なくとも一面に
積層された被覆物質の層とを有する被覆部材において、
前記基材の少なくとも被覆対象面の表面部を多孔質化し
て多孔質層を形成し、前記多孔質層表面の気孔又は多孔
質層全体に前記被覆物質を侵入させて緻密化層を形成
し、該緻密化層の表面に前記被覆物質のみからなる被覆
層を形成してなるものである。
The present invention will be described in more detail below. The coated member of the present invention is a coated member having a base material and a layer of the coating material laminated on at least one surface of the base material.
A porous layer is formed by making at least the surface portion of the target surface of the base material porous, and forming a densified layer by infiltrating the coating substance into the pores or the entire porous layer of the porous layer surface, The densified layer has a coating layer formed on the surface of the densified layer.

【0009】図1はこのような本発明の被覆部材の一実
施例を説明するもので、多孔質層の表面部に被覆物質を
侵入させて緻密化層を形成した被覆部材の断面を示し、
図中1は基材、2は多孔質層、3は緻密化層、4は被覆
層である。
FIG. 1 illustrates an embodiment of such a covering member of the present invention, showing a cross section of the covering member in which a densified layer is formed by infiltrating a covering substance into the surface of a porous layer,
In the figure, 1 is a substrate, 2 is a porous layer, 3 is a densified layer, and 4 is a coating layer.

【0010】ここで、基材としては表面を多孔質化する
ことができるものであれば特に限定されるものではな
い。
Here, the base material is not particularly limited as long as the surface can be made porous.

【0011】基材表面を多孔質化して多孔質を形成する
方法は機械加工、また、例えば複合材においてその構成
物質の一方を除去する方法、酸、アルカリによる溶解や
分解等による方法などのいずれをも用いることができ
る。例えば、反応焼結炭化珪素品やシリコン含浸再結晶
炭化珪素品を基材として用いた場合、酸処理することに
より表層の金属シリコン部分を除去することで、容易に
多孔質層を形成することができる。
The method for making the surface of the base material porous to form the porosity is either machining, for example, a method of removing one of the constituents of the composite material, a method of dissolving or decomposing with an acid or alkali, etc. Can also be used. For example, when a reaction-bonded silicon carbide product or a silicon-impregnated recrystallized silicon carbide product is used as a base material, a porous silicon layer can be easily formed by removing the metallic silicon portion of the surface layer by acid treatment. it can.

【0012】多孔質層の厚さは基材及び被覆物質によっ
て選定され、例えば基材がSiC−Si、被覆物質がS
iCであれば500μm以下、特に100〜10μmで
あることが好ましい。また、多孔質層のうち気孔の占め
る割合は多孔質層全体の5〜50容量%であることが好
ましい。気孔の占める割合が50容量%を超えると、気
孔の熱伝導に対する多孔質層気孔の抵抗によって熱応力
が発生して多孔質層の破壊が起こりやすくなり、また、
機械的な衝撃などに対しても破壊が起こりやすくなる場
合がある。
The thickness of the porous layer is selected depending on the base material and the coating material. For example, the base material is SiC-Si and the coating material is S.
If it is iC, it is preferably 500 μm or less, and particularly preferably 100 to 10 μm. The proportion of pores in the porous layer is preferably 5 to 50% by volume of the entire porous layer. When the proportion of pores exceeds 50% by volume, thermal stress is generated due to the resistance of the porous layer pores to the heat conduction of the pores, and the porous layer is easily broken, and
Destruction may occur easily due to mechanical shock.

【0013】被覆物質としては基材との熱膨脹係数差が
小さい物質が好ましく、例えば基材として遊離珪素を有
する炭化珪素質材料を用いた場合、炭化珪素を用いるこ
とができる。
As the coating substance, a substance having a small difference in coefficient of thermal expansion from the base material is preferable. For example, when a silicon carbide material having free silicon is used as the base material, silicon carbide can be used.

【0014】被覆物質を多孔質層の気孔に侵入させるこ
とにより形成する緻密化層の厚さは10μm以上とする
ことが好ましい。緻密化層の厚さが10μm未満では基
材と被覆層との密着性向上が認められない場合がある。
The thickness of the densified layer formed by infiltrating the coating substance into the pores of the porous layer is preferably 10 μm or more. When the thickness of the densified layer is less than 10 μm, improvement in adhesion between the base material and the coating layer may not be recognized in some cases.

【0015】被覆方法としては特に限定されるものでは
ないが、化学気相析出法(CVD法)、被覆物質融液に
浸漬する方法、被覆物質に容易に化学変化する液状の前
駆体に浸漬し、反応させる方法などが採用でき、例えば
炭化珪素の場合は、十分に減圧された反応炉内に置かれ
た基材にCVD法によりガス種を拡散、析出しSiC被
覆処理する方法、またSiO2被覆ではテトラエチルオ
ルソシリケート(TEOS)に浸漬し、ゾルゲル反応に
よりSiO2被覆処理する方法などを採用することがで
きる。
The coating method is not particularly limited, but it may be a chemical vapor deposition method (CVD method), a method of immersing in a coating material melt, or a method of immersing in a liquid precursor that easily chemically changes to the coating material. In the case of silicon carbide, for example, in the case of silicon carbide, a method of diffusing and precipitating a gas species by a CVD method on a substrate placed in a sufficiently depressurized reaction furnace to perform a SiC coating treatment, and SiO 2 For the coating, a method of immersing in tetraethyl orthosilicate (TEOS) and performing a SiO 2 coating treatment by a sol-gel reaction can be adopted.

【0016】[0016]

【実施例】以下、実施例と比較例を示し、本発明を具体
的に説明するが、本発明は下記の実施例に制限されるも
のではない。
EXAMPLES The present invention will be specifically described below by showing Examples and Comparative Examples, but the present invention is not limited to the following Examples.

【0017】[実施例、比較例1,2]表面が研削され
た直径30mm、厚さ10mmの反応焼結炭化珪素基材
を3個用意し、このうち2個をHF・HNO3溶液に浸
し、反応時間、温度、溶液濃度を調整し、厚さ50μ
m、650μmの多孔質層をそれぞれ形成した(試料
1:実施例、試料2:比較例1)。
[Examples, Comparative Examples 1 and 2] Three reaction-bonded silicon carbide substrates having a diameter of 30 mm and a thickness of 10 mm whose surfaces were ground were prepared, and two of them were dipped in an HF / HNO 3 solution. Adjust the reaction time, temperature and solution concentration to obtain a thickness of 50μ
m and 650 μm, respectively, were formed (Sample 1: Example, Sample 2: Comparative Example 1).

【0018】これら3個の基材それぞれに一般的な条件
でのCVD法により炭化珪素被覆を行った。被覆層の厚
さはいずれも100μmとした。
Each of these three substrates was coated with silicon carbide by the CVD method under general conditions. The thickness of each coating layer was 100 μm.

【0019】以上のようにして、多孔質層50μm(被
覆物質が侵入していない部分は40μm),緻密化層1
0μm,被覆層100μmの構造を有する試料(試料
1)、多孔質層650μm(被覆物質が侵入していない
部分は640μm),緻密化層10μm,被覆層100
μmの構造を有する試料(試料2)、表面研削した基材
に直接に被覆処理した試料(試料3,比較例2)が得ら
れた。
As described above, the porous layer 50 μm (the portion where the coating substance has not entered is 40 μm), the densified layer 1
Sample having a structure of 0 μm, coating layer 100 μm (Sample 1), porous layer 650 μm (640 μm in a portion where the coating substance has not entered), densification layer 10 μm, coating layer 100
A sample having a structure of μm (Sample 2) and a sample in which the surface-ground substrate was directly coated (Sample 3, Comparative Example 2) were obtained.

【0020】これら3個の試料の熱衝撃試験を行った。
試験は、270℃に保持された電気炉内に試料1〜3を
30分保持した後、20℃の水中へ投入し、膜中のクラ
ック、剥離等を目視で観察した。異常のないものは水分
を十分取り去り、再び電気炉へ入れることにより繰り返
し熱衝撃を加えた。試料それぞれにΔT=250℃の熱
衝撃を加えたところ、試料2の被覆層が破損した。次い
で、試料1,3それぞれに同様の熱衝撃を繰り返し加え
たところ、試料3は20回の衝撃で被覆層が破壊した
が、試料1には被覆層の破損は認められず、密着性は良
好であった。
A thermal shock test was performed on these three samples.
In the test, after holding Samples 1 to 30 in an electric furnace kept at 270 ° C. for 30 minutes, the samples were put into water at 20 ° C., and cracks, peeling, etc. in the film were visually observed. If there was no abnormality, the water content was sufficiently removed, and the sample was again placed in an electric furnace to repeatedly undergo thermal shock. When a thermal shock of ΔT = 250 ° C. was applied to each sample, the coating layer of sample 2 was broken. Then, when the same thermal shock was repeatedly applied to each of Samples 1 and 3, the coating layer of Sample 3 was destroyed by 20 impacts, but the coating layer was not damaged in Sample 1, and the adhesion was good. Met.

【0021】[0021]

【発明の効果】本発明の被覆部材は、基材と被覆物質と
の密着性が良好で被覆物質の剥離、破壊等がなく、かつ
耐久性、寸法精度に優れたものである。
EFFECT OF THE INVENTION The coated member of the present invention has good adhesion between the base material and the coating substance, is free from peeling and destruction of the coating substance, and is excellent in durability and dimensional accuracy.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明に係る被覆部材の一例を示す断面図であ
る。
FIG. 1 is a sectional view showing an example of a covering member according to the present invention.

【符号の説明】[Explanation of symbols]

1 基材 2 多孔質層 3 緻密化層 4 被覆層 1 base material 2 porous layer 3 densification layer 4 coating layer

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 基材と、該基材の少なくとも一面に積層
された被覆物質の層とを有する被覆部材において、前記
基材が該基材の少なくとも被覆対象面の表面部を多孔質
化した多孔質層を有し、前記多孔質層表面の気孔又は多
孔質層全体に前記被覆物質を侵入させた緻密化層を形成
し、該緻密化層の表面に前記被覆物質のみからなる被覆
層を形成してなることを特徴とする被覆部材。
1. A covering member comprising a base material and a layer of a coating substance laminated on at least one surface of the base material, wherein the base material makes at least a surface portion of a surface to be coated of the base material porous. A porous layer is provided, and a densified layer in which the coating substance is infiltrated into the pores or the entire porous layer on the surface of the porous layer is formed, and a coating layer consisting of the coating substance alone is formed on the surface of the densified layer. A covering member characterized by being formed.
JP30534091A 1991-10-24 1991-10-24 Coating member Pending JPH05117857A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP30534091A JPH05117857A (en) 1991-10-24 1991-10-24 Coating member

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP30534091A JPH05117857A (en) 1991-10-24 1991-10-24 Coating member

Publications (1)

Publication Number Publication Date
JPH05117857A true JPH05117857A (en) 1993-05-14

Family

ID=17943936

Family Applications (1)

Application Number Title Priority Date Filing Date
JP30534091A Pending JPH05117857A (en) 1991-10-24 1991-10-24 Coating member

Country Status (1)

Country Link
JP (1) JPH05117857A (en)

Similar Documents

Publication Publication Date Title
US7595114B2 (en) Environmental barrier coating for a component and method for fabricating the same
KR100383178B1 (en) method for applying a barrier layer to a silicon based substrate
US20090324930A1 (en) Protective coatings for silicon based substrates with improved adhesion
JPH02217381A (en) Method for protecting product of carbon-containing composite material from oxidation,and product protected thereby
JP2007197307A5 (en)
EP2264208A1 (en) Coating structure and surface treating method
JPH0240033B2 (en)
US5419927A (en) Process for coating fiber reinforced ceramic composites
JPH01315339A (en) Method for bonding catalyst layer to carrier made of ceramic substance
JP4286142B2 (en) How to make a continuous coating on the surface of a part
JPH0873288A (en) Ceramic coating member and its production
US5268199A (en) Alkali corrosion resistant coatings and ceramic foams having superfine open cell structure and method of processing
JPH05117857A (en) Coating member
US5260096A (en) Structral articles
JPH0679444B2 (en) Electric film
JPH08319582A (en) Insulating ceramics film on surface of metal and its formation
JP4556352B2 (en) Platinum coated refractory
JP2003041383A (en) Member for semiconductor manufacturing apparatus and manufacturing method therefor
JPS6385076A (en) Tool for heating silicon wafer
JP2585548B2 (en) Hermetic ceramic coating and method for producing the same
JPH01141884A (en) Foam
JP3967797B2 (en) COATING METHOD AND COATING MATERIAL FOR OXIDATION-RESISTANT MULTILAYER COATING OF CARBON FIBER REINFORCED CARBON COMPOSITE
JP2007106644A (en) Ceramic member and its manufacturing method
JPH03265585A (en) Reinforced ceramics and its production
JPH0312377A (en) Coated structural material