JPH0511260A - Production of liquid crystal cell and liquid crystal injecting device - Google Patents
Production of liquid crystal cell and liquid crystal injecting deviceInfo
- Publication number
- JPH0511260A JPH0511260A JP18926191A JP18926191A JPH0511260A JP H0511260 A JPH0511260 A JP H0511260A JP 18926191 A JP18926191 A JP 18926191A JP 18926191 A JP18926191 A JP 18926191A JP H0511260 A JPH0511260 A JP H0511260A
- Authority
- JP
- Japan
- Prior art keywords
- liquid crystal
- cell
- injection
- crystal material
- tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Liquid Crystal (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は液晶セルの製造方法及び
液晶注入装置に関し、詳しくは、セル内への液晶の注入
を速めるとともに気泡の発生がみられない液晶セルの製
造方法及びその製法に有用な装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a liquid crystal cell and a liquid crystal injecting apparatus, and more particularly to a method of manufacturing a liquid crystal cell in which the injection of liquid crystal into the cell is accelerated and bubbles are not generated, and its manufacturing method. Regarding useful equipment.
【０００２】[0002]
【従来の技術】液晶セルに液晶材料を注入する方法とし
ては、まずセル容器の一部に設けた開口部からセル容器
内部の空気を真空排気したのち、あらかじめ真空脱気し
た液晶材料を大気にさらすことなく注入し、そのまま開
口部を封止することが最も望ましい。製造的には、この
一連の作業工程をすべて同一真空槽内で行うことが提案
されている。2. Description of the Related Art As a method for injecting a liquid crystal material into a liquid crystal cell, first, the air inside the cell container is evacuated through an opening provided in a part of the cell container, and then the liquid crystal material which has been degassed in advance is released into the atmosphere. It is most desirable to inject without exposing and then directly seal the opening. In terms of manufacturing, it has been proposed to perform all of this series of working steps in the same vacuum chamber.
【０００３】真空排気の目的は、セル容器内部のガスの
排気と、液晶材料中に溶け込んでいるガスを脱気するた
めである。一般に、液晶セル容器のギャップは数〜数１
０μｍ程度であり、開口部の開口は小さい。そして、セ
ル容器内部のガス分子の移動は拡散によるので、どうし
てもある程度長い時間排気する必要がある。そこで、真
空排気はメカニカルブースターポンプ（排気速度２５０
ｍ3／Ｈｒ）と油回転真空ポンプ（排気速度７６０ｍ3／
ｍｉｎ）を組み合わせて排気する。真空度が設定値に到
達したときに、液晶溜め皿を自動的に上昇させて、セル
容器の開口部を液晶材料中に浸漬させて真空弁を閉じる
と、液晶材料が毛細管現象によってセル容器内部に充填
される。ここで、所定の時間が経過するとタイマを稼働
させて、乾燥窒素を導入しながら真空度を大気圧まで戻
す。さらに別のタイマを稼働させて、乾燥窒素を供給し
ながら加圧して液晶材料の充填を続行する。あらかじめ
設定した時間が経過すると、窒素の供給を停止して液晶
材料の充填作業が終る。そして液晶溜め皿を下降させ
て、注入作業の終了をブザーで知らせる。なお、一般に
乾燥窒素で加圧する場合の圧力は、約１Ｐａ（約１０-3
Ｔｏｌｌ）程度である。The purpose of vacuum evacuation is to exhaust the gas inside the cell container and to degas the gas dissolved in the liquid crystal material. Generally, the liquid crystal cell container has a gap of several to several.
It is about 0 μm, and the opening of the opening is small. Since the movement of gas molecules inside the cell container is due to diffusion, it is absolutely necessary to evacuate for a long time to some extent. Therefore, the vacuum exhaust is performed by a mechanical booster pump (exhaust speed 250
m 3 / Hr) and oil rotary vacuum pump (exhaust speed 760 m 3 /
min) and exhaust. When the degree of vacuum reaches the set value, the liquid crystal reservoir is automatically raised, the opening of the cell container is immersed in the liquid crystal material, and the vacuum valve is closed. To be filled. Here, when a predetermined time has elapsed, a timer is operated to return the degree of vacuum to atmospheric pressure while introducing dry nitrogen. Still another timer is operated to pressurize while supplying dry nitrogen to continue filling the liquid crystal material. When a preset time has passed, the supply of nitrogen is stopped and the filling work of the liquid crystal material is completed. Then, the liquid crystal storage tray is lowered and a buzzer is used to notify the end of the injection work. In addition, the pressure when pressurizing with dry nitrogen is generally about 1 Pa (about 10 −3
Toll).
【０００４】ここに記載した従来の液晶セルの製造法に
ついては（「液晶デバイスハンドブック」日刊工業新聞
社（１９８９年９月２９日発行）Ｐ．Ｐ．５６６〜５６
７で明らかにされている）。Regarding the conventional method for manufacturing a liquid crystal cell described above, refer to "Liquid Crystal Device Handbook", Nikkan Kogyo Shimbun, Ltd. (Published September 29, 1989), pp. 566-56.
7).
【０００５】だが、前記従来の液晶材料の注入方法によ
ったのでは、図３に模式的に示したように、未液晶注入
パネル１′に設けられた開口部は１ｂで表わされた一つ
でそれがセル容器内の排気と液晶材料の注入との両方に
用いられるため、、液晶材料の注入完了までに可成りの
時間を必要とする。加えて、従来の方法によったので
は、相当の注意をはらっているにもかかわらず封入され
た液晶セル内には気泡の残るのが往々にして認められて
いる。However, according to the conventional liquid crystal material injection method, as shown schematically in FIG. 3, the opening provided in the unliquid crystal injection panel 1'is represented by 1b. Since it is used both for exhausting the inside of the cell container and for injecting the liquid crystal material, it takes a considerable time to complete the injection of the liquid crystal material. In addition, according to the conventional method, it is often recognized that air bubbles remain in the enclosed liquid crystal cell in spite of considerable care.
【０００６】[0006]
【発明が解決しようとする課題】本発明は液晶材料の注
入を速くし、かつ、気泡発生、不純物の混入などの不都
合のみられない液晶セルの製造方法及び液晶注入装置を
提供するのである。SUMMARY OF THE INVENTION It is an object of the present invention to provide a liquid crystal cell manufacturing method and a liquid crystal injecting device which speed up the injection of a liquid crystal material and do not cause inconveniences such as bubble generation and mixing of impurities.
【０００７】[0007]
【課題を解決するための手段】本発明の第１は液晶セル
の製造方法であって、一対の基板間にセル内に液晶材料
を注入する開口部及びセル内の空気を排気する開口部を
各々少なくとも１つ有する未液晶注入パネルを真空液晶
注入槽内に収納し、そこでセル内の排気を前記一方の開
口部より行ない、他方の開口部から脱気された液晶材料
を注入した後、これら開口部を封止することを特徴とし
ている。A first aspect of the present invention is a method of manufacturing a liquid crystal cell, wherein an opening for injecting a liquid crystal material into the cell and an opening for exhausting air in the cell are provided between a pair of substrates. An unliquid crystal injection panel having at least one of each is housed in a vacuum liquid crystal injection tank, the inside of the cell is evacuated through the one opening, and the degassed liquid crystal material is injected through the other opening. It is characterized in that the opening is sealed.
【０００８】本発明の第２は液晶注入装置であって、真
空液晶注入槽の前段に液晶注入前のパネルを予備的に排
気するための予備排気槽が設けられ、かつ、該真空液晶
注入槽に連絡して液晶材料保管兼脱気槽が設けられてな
ることを特徴としている。A second aspect of the present invention is a liquid crystal injecting apparatus, wherein a preliminary evacuation tank for preliminarily evacuating a panel before injecting liquid crystal is provided in the preceding stage of the vacuum liquid crystal injecting tank, and the vacuum liquid crystal injecting tank is provided. It is characterized in that a liquid crystal material storage and deaeration tank is provided in contact with.
【０００９】以下に本発明を添付の図面に従がいながら
さらに詳細に説明する。Hereinafter, the present invention will be described in more detail with reference to the accompanying drawings.
【００１０】図１は本発明方法を理解しやすくするため
の模式図である。図３は既述のとおり従来方法の模式図
である。これら図面において、１は未液晶注入パネル、
１ａはそのパネル１に設けられた排気口（セル内の空気
を排気する開口部）、１ｂは注入口（セル内に液晶材料
を注入する開口部）、２は液晶パネルホルダーであり、
３は液晶材料、４は液晶材料３が注入口１ｂを塞ぐ位置
まで上下移動できる液晶溜め皿である。図１と図３との
比較から明らかなように、図１には図３にない排気口１
ａが設けられている点で相違している。FIG. 1 is a schematic diagram for facilitating the understanding of the method of the present invention. FIG. 3 is a schematic diagram of the conventional method as described above. In these drawings, 1 is a non-liquid crystal injection panel,
1a is an exhaust port provided in the panel 1 (an opening for exhausting air in the cell), 1b is an inlet (an opening for injecting a liquid crystal material into the cell), 2 is a liquid crystal panel holder,
Reference numeral 3 is a liquid crystal material, and 4 is a liquid crystal reservoir that can be moved up and down to a position where the liquid crystal material 3 closes the inlet 1b. As is clear from the comparison between FIG. 1 and FIG. 3, the exhaust port 1 not shown in FIG.
The difference is that a is provided.
【００１１】本発明方法においては、未液晶注入パネル
１及び液晶溜め皿４を液晶注入槽内に入れ、槽内を真空
に排気してセル内の空気を排気し、液晶材料３を脱気
し、液晶溜め皿４を上昇させて未液晶注入パネルの注入
口１ｂを液晶材料３中に浸漬させる。この方法では、液
晶注入槽内を大気圧に戻すことなく、セル内に液晶材料
の注入が行なわれる。未液晶注入パネル１には注入口１
ｂの他に排気口１ａが設けられてセル内の排気がなされ
るのと並行して液晶材料３の注入がなされることから、
液晶材料３が無理なくセル内に注入され、注入時間の短
縮だけでなく気泡発生などの欠陥は認められない。In the method of the present invention, the liquid crystal injection panel 1 and the liquid crystal reservoir 4 are placed in the liquid crystal injection tank, the inside of the tank is evacuated to evacuate the air in the cell, and the liquid crystal material 3 is degassed. , The liquid crystal storage tray 4 is raised to immerse the injection port 1b of the non-liquid crystal injection panel in the liquid crystal material 3. In this method, the liquid crystal material is injected into the cell without returning the inside of the liquid crystal injection tank to atmospheric pressure. The liquid crystal injection panel 1 has an injection port 1
In addition to b, an exhaust port 1a is provided to evacuate the inside of the cell so that the liquid crystal material 3 is injected at the same time.
The liquid crystal material 3 is naturally injected into the cell, and not only the injection time is shortened but also defects such as bubble generation are not recognized.
【００１２】従来の液晶注入方法では、前記のとおり、
未液晶注入パネル１′と液晶材料３とを液晶注入槽内に
入れ、液晶注入槽内を真空に排気してセル内の空気を注
入口１ｂから排気し、その後、注入口１ｂを真空脱気し
た液晶材料３に浸漬させ、液晶注入槽内の圧力を大気圧
まで戻し、液晶材料を毛細管現象と圧力差で注入する手
段が採用されている。これに対して、本発明方法ではそ
うした手段がとられず真空中でセル内の空気の排気及び
液晶材料の注入が行なわれるため良好な液晶材料の注入
が行なわれる。In the conventional liquid crystal injection method, as described above,
The non-liquid crystal injection panel 1'and the liquid crystal material 3 are put in the liquid crystal injection tank, the liquid crystal injection tank is evacuated to evacuate the air in the cell from the injection port 1b, and then the injection port 1b is vacuum degassed. The liquid crystal material 3 is immersed in the liquid crystal material 3, the pressure in the liquid crystal injection tank is returned to the atmospheric pressure, and the liquid crystal material is injected by a capillary phenomenon and a pressure difference. On the other hand, in the method of the present invention, such means are not taken and the air in the cell is evacuated and the liquid crystal material is injected in a vacuum, so that a good liquid crystal material is injected.
【００１３】液晶材料を充填させた液晶セルの排気口１
ａ及び注入口１ｂは封止されねばならない。しかし、こ
れら排気口１ａ及び注入口１ｂの周辺は液晶材料で濡れ
ており、この濡れ状態は液晶材料を充満させている限り
拭き取ることが極めて困難である。だが、これらの開口
部（排気口１ａ、注入口１ｂ）が液晶材料で濡れていて
も比較的容易に封止できる手段（半田でシール方法、接
着剤でシール方法など）は例えば「液晶の最新技術」第
１６４頁（工業調査会、１９８４年９日１日発行）など
にも記載されており、それに従って行なえばよい。Exhaust port 1 of a liquid crystal cell filled with a liquid crystal material
The a and the inlet 1b must be sealed. However, the periphery of the exhaust port 1a and the injection port 1b is wet with the liquid crystal material, and this wet state is extremely difficult to wipe off as long as the liquid crystal material is filled. However, a means (sealing method with solder, sealing method with adhesive, etc.) that allows relatively easy sealing even when these openings (exhaust port 1a, inlet port 1b) are wet with liquid crystal material is, for example, "Latest liquid crystal. "Technology", page 164 (Industry Research Society, published on September 1, 1984) and the like, and the like.
【００１４】本発明の液晶セルの製造、特にセル内への
液晶材料の注入は真空中で行なわれる訳であるが、この
操作は図２に示したごとき液晶注入装置を用いてなされ
るのが有利である。図２において、５１は第１予備排気
槽、５２は液晶注入槽、５３は第２予備排気槽、５４は
液晶材料保管兼脱気槽であり、６１，６２，６３，６４
及び６５はシャッター、７は未液晶注入パネル入口、８
は液晶パネル出口を示している。The manufacture of the liquid crystal cell of the present invention, particularly the injection of the liquid crystal material into the cell, is carried out in a vacuum. This operation is carried out by using the liquid crystal injection device as shown in FIG. It is advantageous. In FIG. 2, 51 is a first preliminary evacuation tank, 52 is a liquid crystal injection tank, 53 is a second preliminary evacuation tank, 54 is a liquid crystal material storage / deaeration tank, and 61, 62, 63, 64.
And 65 are shutters, 7 is an entrance of a non-liquid crystal injection panel, 8
Indicates the exit of the liquid crystal panel.
【００１５】液晶材料保管兼脱気槽５４では液晶溜め皿
に入れられた液晶材料が脱気される。液晶注入槽５２は
真空に排気される。いま、図１にみられるような未液晶
注入パネル１を液晶パネルホルダー２に取りつけ第１予
備排気槽５１内に導入する。この排気槽５１を真空に排
気することによって、セル内部の空気を排気する。In the liquid crystal material storage / deaeration tank 54, the liquid crystal material contained in the liquid crystal reservoir is deaerated. The liquid crystal injection tank 52 is evacuated to a vacuum. Now, the non-liquid crystal injection panel 1 as shown in FIG. 1 is attached to the liquid crystal panel holder 2 and introduced into the first preliminary exhaust tank 51. By evacuating the exhaust tank 51 to a vacuum, the air inside the cell is exhausted.
【００１６】セル内部が十分排気された後シャッター６
２を開き、未液晶注入パネルを液晶注入槽５２へ移動さ
せ、シャッター６２を閉じる。液晶注入槽５２は真空排
気されている。次に、シャッター６５を開き、十分脱気
された液晶材料（液晶溜め皿に入れられている）を液晶
注入槽５２へ移動させた後、シャッター６５を閉じる。
続いて、液晶材料中に未液晶注入パネルの注入口を浸漬
させ、液晶材料のセル内への注入を行なう。液晶材料の
液晶材料保管兼脱気槽５４で十分脱気されており、これ
が真空排気された液晶注入槽５２でセル内に注入される
ためセル内に気泡の発生は完全に阻止される。液晶材料
の注入が終了したら、液晶パネルの注入口を液晶溜め皿
に入れられた液晶材料から離し、液晶溜め皿は液晶材料
保管兼脱気槽５４に戻し、シャッター６５を閉める。After the inside of the cell is sufficiently exhausted, the shutter 6
2 is opened, the non-liquid crystal injection panel is moved to the liquid crystal injection tank 52, and the shutter 62 is closed. The liquid crystal injection tank 52 is evacuated. Next, the shutter 65 is opened, the sufficiently degassed liquid crystal material (in the liquid crystal reservoir) is moved to the liquid crystal injection tank 52, and then the shutter 65 is closed.
Then, the injection port of the liquid crystal injection panel is immersed in the liquid crystal material to inject the liquid crystal material into the cell. The liquid crystal material is fully degassed in the liquid crystal material storage and degassing tank 54, and this is injected into the cell by the vacuum-exhausted liquid crystal injection tank 52, so that the generation of bubbles in the cell is completely prevented. When the injection of the liquid crystal material is completed, the injection port of the liquid crystal panel is separated from the liquid crystal material contained in the liquid crystal reservoir, the liquid crystal reservoir is returned to the liquid crystal material storage / deaeration tank 54, and the shutter 65 is closed.
【００１７】シャッター６３が開けられ、液晶パネルは
予め真空排気された第２予備排気槽５３へと移された
後、シャッター６３が閉じられる。次いで、第２予備排
気槽５３を大気圧に戻し、液晶パネルを取り出す。取り
出された液晶パネルは注入口と排気口とが封止される。
なお、この封止は第２予備排気槽５３の真空中で行なっ
た方が不純物の混入を防ぐことから望ましい。The shutter 63 is opened, the liquid crystal panel is moved to the second preliminary exhaust tank 53 which has been evacuated in advance, and then the shutter 63 is closed. Next, the second preliminary exhaust tank 53 is returned to atmospheric pressure, and the liquid crystal panel is taken out. The liquid crystal panel taken out is sealed at the inlet and the outlet.
It should be noted that it is desirable that this sealing be performed in a vacuum of the second preliminary evacuation tank 53 in order to prevent mixing of impurities.
【００１８】[0018]
（１）本発明の方法によれば、未液晶注入パネルが液晶
注入の際、液晶注入口とセル内の空気を排気する開口部
とを各々少なくとも１つ持つことから、液晶材料を注入
しつつ、一方で、液晶セル中を排気する為、液晶材料の
注入時間の短縮がはかられ、液晶セルの製造時間は大幅
に短縮される。さらに、気泡の発生による欠陥も起らず
歩留りの向上となる。
（２）本発明の装置によれば、液晶注入槽と、その液晶
注入槽へ未液晶注入パネルを導入するための予備排気室
とを有し、液晶注入槽を常に真空にし大気にさらさない
ことから、及び液晶材料も大気にさらさないことから、
液晶セル中への不純物の混入がなく、更には、液晶材料
の脱気時間の短縮となるか又は液晶材料の脱気工程が不
必要となる。従って、液晶セル製造時間の短縮となり、
不純物の混入が少ないことから液晶セルの長期安定性が
向上する。(1) According to the method of the present invention, the non-liquid crystal injection panel has at least one liquid crystal injection port and at least one opening for exhausting air in the cell at the time of liquid crystal injection. On the other hand, since the liquid crystal cell is evacuated, the injection time of the liquid crystal material can be shortened, and the manufacturing time of the liquid crystal cell can be significantly shortened. In addition, defects due to the generation of bubbles do not occur and the yield is improved. (2) According to the device of the present invention, the liquid crystal injection tank and the preliminary evacuation chamber for introducing the non-liquid crystal injection panel into the liquid crystal injection tank are provided, and the liquid crystal injection tank is always vacuumed and not exposed to the atmosphere. And because the liquid crystal material is not exposed to the atmosphere,
No impurities are mixed into the liquid crystal cell, and the degassing time of the liquid crystal material is shortened, or the degassing step of the liquid crystal material is unnecessary. Therefore, the liquid crystal cell manufacturing time is shortened,
The long-term stability of the liquid crystal cell is improved because less impurities are mixed.
【図１】本発明の液晶セル製造方法を説明するための模
式図である。FIG. 1 is a schematic diagram for explaining a liquid crystal cell manufacturing method of the present invention.
【図２】本発明の液晶セル製造装置の代表的な一例を示
した概略図である。FIG. 2 is a schematic view showing a typical example of a liquid crystal cell manufacturing apparatus of the present invention.
【図３】従来の液晶セル製造方法を説明するための模式
図である。FIG. 3 is a schematic diagram for explaining a conventional liquid crystal cell manufacturing method.
１ 未液晶注入パネル（１ａ 排気口 １ｂ注入口） ２ 液晶パネルホルダー ３ 液晶材料 ４ 液晶溜め皿 ７ 未液晶注入パネル入口 ８ 液晶パネル出口 ５１ 第１予備排気槽 ５２ 液晶注入槽 ５３ 第２予備排気槽 ５４ 液晶材料保管兼脱気槽 ６１，６２，６３，６４，６５ シャッター 1 Not liquid crystal injection panel (1a exhaust port 1b injection port) 2 LCD panel holder 3 Liquid crystal material 4 LCD storage plate 7 Non-liquid crystal injection panel entrance 8 LCD panel exit 51 First spare exhaust tank 52 Liquid crystal injection tank 53 Second preliminary exhaust tank 54 Liquid crystal material storage and degassing tank 61, 62, 63, 64, 65 shutters
───────────────────────────────────────────────────── フロントページの続き (72)発明者 高橋 正悦 東京都大田区中馬込１丁目３番６号 株式 会社リコー内 (72)発明者 山田 勝幸 東京都大田区中馬込１丁目３番６号 株式 会社リコー内 (72)発明者 亀山 健司 東京都大田区中馬込１丁目３番６号 株式 会社リコー内 (72)発明者 田辺 誠 東京都大田区中馬込１丁目３番６号 株式 会社リコー内 ─────────────────────────────────────────────────── ─── Continued front page (72) Inventor Masayoshi Takahashi 1-3-3 Nakamagome, Ota-ku, Tokyo Stocks Company Ricoh (72) Inventor Katsuyuki Yamada 1-3-3 Nakamagome, Ota-ku, Tokyo Stocks Company Ricoh (72) Inventor Kenji Kameyama 1-3-3 Nakamagome, Ota-ku, Tokyo Stocks Company Ricoh (72) Inventor Makoto Tanabe 1-3-3 Nakamagome, Ota-ku, Tokyo Stocks Company Ricoh
Claims (3)
する開口部及びセル内の空気を排気する開口部を各々少
なくとも１つ有する未液晶注入パネルを真空液晶注入槽
内に収納し、そこでセル内の排気を前記一方の開口部よ
り行ない、他方の開口部から脱気された液晶材料を注入
した後、これら開口部を封止することを特徴とする液晶
セルの製造方法。1. A non-liquid crystal injection panel having at least one opening for injecting a liquid crystal material into a cell and at least one opening for exhausting air in the cell is housed in a vacuum liquid crystal injection tank between a pair of substrates, Then, the inside of the cell is evacuated through the one opening, the degassed liquid crystal material is injected through the other opening, and then these openings are sealed.
ネルを予備的に排気するための予備排気槽が設けられ、
かつ、該真空液晶注入槽に連絡して液晶材料保管兼脱気
槽が設けられてなることを特徴とする液晶注入装置。2. A pre-evacuation tank for preliminarily evacuating the panel before liquid crystal injection is provided in the preceding stage of the vacuum liquid crystal injection tank,
A liquid crystal injecting apparatus, further comprising a liquid crystal material storage / deaeration tank provided in contact with the vacuum liquid crystal injecting tank.
られている請求項２記載の液晶注入装置。3. The liquid crystal injection device according to claim 2, further comprising a shutter mechanism provided between each of the tanks.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18926191A JPH0511260A (en) | 1991-07-03 | 1991-07-03 | Production of liquid crystal cell and liquid crystal injecting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18926191A JPH0511260A (en) | 1991-07-03 | 1991-07-03 | Production of liquid crystal cell and liquid crystal injecting device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0511260A true JPH0511260A (en) | 1993-01-19 |
Family
ID=16238346
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18926191A Pending JPH0511260A (en) | 1991-07-03 | 1991-07-03 | Production of liquid crystal cell and liquid crystal injecting device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0511260A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6791654B2 (en) * | 2002-05-28 | 2004-09-14 | Lg Philips Lcd. Co., Ltd. | Seal pattern for liquid crystal display device and method for manufacturing liquid crystal display device having the same |
| JP2006053582A (en) * | 2000-11-30 | 2006-02-23 | Fujitsu Ltd | System for manufacturing bonded substrate |
| US7621310B2 (en) | 2000-11-30 | 2009-11-24 | Fujitsu Limited | Apparatus for manufacturing bonded substrate |
| US8648995B2 (en) * | 1999-12-28 | 2014-02-11 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and manufacturing method thereof |
-
1991
- 1991-07-03 JP JP18926191A patent/JPH0511260A/en active Pending
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8648995B2 (en) * | 1999-12-28 | 2014-02-11 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device and manufacturing method thereof |
| JP2006053582A (en) * | 2000-11-30 | 2006-02-23 | Fujitsu Ltd | System for manufacturing bonded substrate |
| US7621310B2 (en) | 2000-11-30 | 2009-11-24 | Fujitsu Limited | Apparatus for manufacturing bonded substrate |
| US7681522B2 (en) | 2000-11-30 | 2010-03-23 | Fujitsu Limited | Apparatus for manufacturing bonded substrate |
| US7703494B2 (en) | 2000-11-30 | 2010-04-27 | Fujitsu Limited | Apparatus for manufacturing bonded substrate |
| US7819165B2 (en) | 2000-11-30 | 2010-10-26 | Fujitsu Limited | Apparatus for manufacturing bonded substrate |
| JP4598641B2 (en) * | 2000-11-30 | 2010-12-15 | 富士通株式会社 | Bonded substrate manufacturing system |
| US8128768B2 (en) | 2000-11-30 | 2012-03-06 | Fujitsu Limited | Apparatus for manufacturing bonded substrate |
| US6791654B2 (en) * | 2002-05-28 | 2004-09-14 | Lg Philips Lcd. Co., Ltd. | Seal pattern for liquid crystal display device and method for manufacturing liquid crystal display device having the same |
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