JPH05109722A - Wiring - Google Patents

Abstract

PURPOSE:To eliminate conductivity and make a desired part conductive to form wiring, by forming a molecular film composed of protein molecules holding function groups having electron transferring function in molecules, and denaturing the protein molecules except the desired part of the molecular film. CONSTITUTION:A molecular film composed of protein molecules 1 holding a plurality of function groups having electron transferring function in molecules is formed. In the molecular film except a desired part, the protein molecules are denatured la. Thereby conductivity is eliminated, and the desired part is made conductive to form wiring 5. Hence wiring of molecular scale whose line width is smaller than or equal to 0.1mum is obtained, so that construction of a very high density element circuit is enabled.

Description

Detailed Description of the Invention

[0001]

INDUSTRIAL APPLICABILITY The present invention makes it possible to construct an ultra-high density integrated circuit by utilizing the fact that a protein having an electron transfer function carries out electron transfer at a molecular size (tens to hundreds of angstroms). It is about wiring.

[0002]

2. Description of the Related Art Conventionally, as wiring, for example, Hisayoshi Yanai,
Minoru Nagata, “Integrated Circuit Engineering (1) Process / Device Technology”, published by Corona Publishing Co. p. There was a method using a metal vapor deposition film shown in 135-137.

Wiring formed by metal vapor deposition will be described below. FIG. 3 is a schematic perspective view showing a wiring structure on an integrated circuit, where 7 is an aluminum wiring and 8 is a silicon element. That is, aluminum is vapor-deposited on the element 8 using a mask matching the shape of the silicon element 8 to form the aluminum wiring 7.

[0004]

Since the conventional wiring is basically made of metal and is crystalline, the electron transfer control range is said to be 0.1 micron, and the line width is limited.

The present invention has been made in order to solve the above problems, and by controlling the electron transfer on a molecular scale using a protein that causes electron transfer by a functional group in the molecule, It is an object of the present invention to provide a wiring that enables the construction of an ultra high density device circuit having a line width of 1 micron or less.

[0006]

Means for Solving the Problems The wiring of the present invention forms a molecular film composed of a protein molecule having a functional group having an electron transfer function in the molecule, and the above-mentioned protein molecule is removed except for a desired portion of the molecular film. By denatured, the electroconductivity is lost, and the desired portion is made electroconductive.

[0007]

In the present invention, since a protein molecule having a plurality of electron transfer functional groups, for example, carries out electron transfer in a very small space at the molecular level, the molecular scale required for the production of an ultra-high density integrated circuit can be obtained. A wiring having a line width can be obtained.

[0008]

EXAMPLES Example 1. An embodiment of the present invention will be specifically described below. 1 (a) to 1 (c) are schematic views showing a method of manufacturing a wiring according to an embodiment of the present invention in the order of steps. (A) is a protein having an electron transfer functional group in the molecule, (B) shows that a part of the monolayer of cytochrome c3 having four hemes as a group is denatured by a scanning tunneling microscope (hereinafter referred to as STM) to lose the conductivity. The state is shown in (c). In the figure, 1 is cytochrome c3, which is a protein having an electron transfer functional group in the molecule, 2 is phosphatidylcholine, 3 is mica, 4 is an STM chip, 1a is denatured, that is, cytochrome c3, 5 with no conductivity.
Is a wiring consisting of non-denatured cytochrome c3,1

First, a solution of lipid phosphatidylcholine 2 in chloroform (concentration 1 mg / mL) is spread on the water surface. This water is gradually replaced by a pump with a 0.1 mM aqueous solution of cytochrome c3 of sulfate-reducing bacteria, which is an electron transfer protein having a size of about 30 angstrom and having four hemes as electron transfer functional groups in the molecule. 3 more
After 0 minutes, the membrane was replaced with water again to form a monomolecular film of cytochrome c3,1. The two-dimensional crystal was transferred onto mica 3 by the Langmuir-Blodgett method. Thus, a monomolecular film of cytochrome c3,1 on mica shown in FIG. 1 (a) was prepared.

Next, as shown in FIG. 1B, a part of the molecules of the monomolecular film excluding a desired portion to be a wiring is denatured by STM to lose the conductivity. That is, a monolayer film of a protein is observed, and a voltage pulse larger than the observed voltage is applied in a state where a specific protein molecule is accessed. For example, in this case, by applying a voltage pulse of 5 V with the STM chip 5, any molecule is denatured,
The wiring shown in FIG. 1 (c) was obtained. Non-denatured cytochrome c3
The part 1 is a wiring. The wiring thus obtained has a molecular scale and a line width of 0.1 micron or less, which enables the construction of an ultra high density device circuit.

As a method for two-dimensionally crystallizing a protein, there is a method of adsorbing it on a monolayer on the surface of water. In the above-mentioned example, when phosphatidylcholine is used as a lipid and adsorbed on a lipid monolayer. About,
Any material that forms an LB film can be used. For example, fatty acids such as arachidic acid and stearic acid can be used.

Example 2. It is also possible to produce a monomolecular film by directly adsorbing a protein on mica. First, mica may be washed with nitric acid and water, then immersed in a 0.1 mM aqueous solution of cytochrome c3 for 5 minutes, and then washed with water. It was confirmed that the wiring functions as in the first embodiment.

Embodiment 3. FIG. 2 is a schematic view showing the wiring of another embodiment of the present invention. 1b is a cytochrome c3, 6 with a reduced degree of modification, and 6 is a resistance element. In the case of this embodiment, the degree of denaturation of a part of the protein molecule is reduced, that is, the conductivity is reduced rather than lost, and this part can be used as the molecular-scale resistance element 6.

As a method for denaturing a specific single molecule of protein, a scanning tunneling microscope (STM) was used in the above-described embodiment to apply a voltage pulse with a specific protein molecule being accessed.
A specific protein molecule may be irradiated with a high-energy beam such as X-rays or electron beams using a mask.

Further, as the protein having an electron transfer function group, in the above-mentioned example, a natural sulfate-reducing bacterium cytochrome c3 having four heme electron transfer function groups was used.
Other cytochrome c3 may be used. Further, other natural electron transfer protein may be used, or an artificial protein in which an electron transfer functional group such as flavin or heme is artificially added to the protein may be used. In addition, there are multiple electron transfer function groups,
It is desirable to have a large number.

[0016]

INDUSTRIAL APPLICABILITY As described above, the present invention forms a molecular film composed of a protein molecule having a functional group having an electron transfer function in the molecule, and removes the above-mentioned protein molecule except a desired portion of the molecular film. Conductivity was lost by denaturation, and wiring was formed by making the above-mentioned desired portion conductive so that a molecular scale wiring having a line width of 0.1 micron or less can be obtained, and an ultra-high-density device circuit can be constructed. There is an effect.

[Brief description of drawings]

FIG. 1 is a schematic view showing a method of manufacturing a wiring according to an embodiment of the present invention in the order of steps.

FIG. 2 is a schematic view showing a wiring formed with a resistance element according to another embodiment of the present invention.

FIG. 3 is a diagram showing a wiring formed of a conventional metal vapor deposition film.

[Explanation of symbols]

1 Cytochrome c3 1a of protein having electron transfer functional group Denatured cytochrome c3 5 of denatured protein Wiring

Claims (1)

[Claims] 1. A conductive film is formed by forming a molecular film composed of a protein molecule having a functional group having an electron transfer function in the molecule and denaturing the protein molecule except for a desired portion of the molecular film. , A wiring formed by making the desired portion conductive.